VZ100/300/500

Weight (g) Port size Body ported VZ110 VZ120 70 M5 x 0.8 0 to 0.5 Note ) Weight stands for grommet type Flow Characteristics Flow characteristics Type of actuation Port size N.C.: 1 2 (P A) N.O.: 3 2 (R A) N.C.: 2 3 (A R) N.O.: 2 1(A P) Supply side Exhaust side Model C [dm3/(sbar)] C [dm3/(sbar)] b Cv b Cv Body ported VZ110 VZ120 N.C. 0.11 0.19 0.026 0.071 0.023 0.042 0.19 0.13 0.071

IDX-OM-W011

. 7-1 7-5 . 7-2 8 C 8-1 . 8-1 8-2 . 8-1 9 K 9-1 . 9-1 9-2 . 9-1 10 L 10-1 . 10-1 10-2 . 10-1 10-3 . 10-2 10-4 . 10-2 11 M 11-1 . 11-1 11-2 . 11-1 11-3 . 11-2 11-4 . 11-2 12 R 12-1 . 12-1 12-2 . 12-1 12-3 . 12-1 12-4 . 12-2 12-5 . 12-2 2 13 S 13-1 . 13-1 13-2 . 13-2 13-3 . 13-2 14 T 14-1 . 14-1 14-2 . 14-1 14-3 . 14-1 14-4 . 14-2 14-5 . 14-3 15

Compact Cylinder with Air Cushion Series RQ

Basic style (Through-hole/Both ends tapped common): RQB/RDQB H thread effective depth C 2 x M5 x 0.8 (port size) 2 x cushion needle F Q E1 E2 2 x 4 x 9 depth of counter bore 7 4 x 5.4 through D M E 1 Flat washer 4 pcs.

Compact Cylinder with Air Cushion

Standard type (through hole, double end tapped common)/RQB, RDQB 2-M5 x 0.8 (port size) 2-cushion needle 2 x 4-9 depth of counter bore 7 H thread effective depth C E1 E2 Q F 4-5.4 through D M E 1 Flat washer 4 pcs.

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

A A B C D E F A B C D A B C D A B C D A B C D Tubing O.D. PA 1 2 1 2 3 4 1 2 3 4 5 6 1 2 3 4 1 2 3 4 1 2 3 4 1/8" 1/8" PAX 1/8" 1/8" PB 1/4" 1/4" 1/4" 1/4" 3/8" 3/8" 3/8" 3/8" 1/2" 1/2" 1/2" 1/2" 3/4" 3/4" 3/4" 3/4" 1" 1" Note) For each body class, the second and later numbers or symbols indicate reducing.

Booster Regulator/Air Tank

Description Piston seal 1 2 large 1 small 2 1 each large and small 2 1 2 Governor assembly 4 3 Check valve 2 4 Gasket 2 Rod seal 5 1 8 8 12 6 Mounting screw 12 7 Cover C assembly 1 Grease pack 1 1 2 1 2 The grease pack has 10 g of grease.

1.1

45 B A 220 4 x 11 (mm) A B 240 C 14 Transformer part no.

Thermo-chiller/Rack Mount Type

Density r: 1 [kg/dm3] (or, using conventional units, weight volume ratio c = 1 [kgf/L]) Specific heat C: 4.19 x 103 [J/(kgK)] (or, using conventional units, 1 x 103 [cal/(kgfC)]) 2. Values for density and specific heat change slightly according to temperature shown below. Use this as a reference.

SZ3000

11 11 23 11 23 SOL.A SOL.B SOL.B Light/Surge voltage suppressor Station 10 Station 10 SY SOL.A SOL.A 10 10 Light/Surge voltage suppressor Light/Surge voltage suppressor SYJ 15 15 15 SOL.B SOL.B SOL.B Station 2 Station 2 Station 2 2 2 SOL.A SOL.A SOL.A Light/Surge voltage suppressor SX Light/Surge voltage suppressor Light/Surge voltage suppressor Courtesy of Steven Engineering, Inc.-230 Ryan

SZ3000

11 11 23 11 23 SOL.A SOL.B SOL.B Light/Surge voltage suppressor Station 10 Station 10 SY SOL.A SOL.A 10 10 Light/Surge voltage suppressor Light/Surge voltage suppressor SYJ 15 15 15 SOL.B SOL.B SOL.B Station 2 Station 2 Station 2 2 2 SOL.A SOL.A SOL.A Light/Surge voltage suppressor SX Light/Surge voltage suppressor Light/Surge voltage suppressor 2 SOL.B SOL.B SOL.B 14 Station 1 Station 1

ZP3

across flats 10 2 2 C Model A B C Vacuum inlet direction q Pad dia.

17

Mounting Series MGP Minimum Stroke for Auto Switch Mounting (mm) 12 16 20 25 32 40 50 63 80 100 Auto switch model No. of auto switches mounted 1 pc. 2 pcs. 1 pc. 2 pcs. 1 pc. 2 pcs. 1 pc. 2 pcs. 1 pc. 2 pcs. 1 pc. 2 pcs. 1 pc. 2 pcs. 5 Note 1) 10 Note 1) 5 10 5 10 D-A9 D-A9V D-M9V 5 Note 1) 5 D-M9 10 Note 1) 10 5 Note 2) D-M9W 10 Note 2) 10 5 Note 2) D-M9WV D-M9AV 10 5 Note 2) D-M9A 10 Note

ZPT/ZPX

0.8 11 H G F E Y 4 40 C A B D Dimensions (mm) A B C D E G H I Y F Model ZPX100HB-B01-B10 M10 x 1.5 100 103.1 68.6 106.7 47.5 75.5 97.5 35.5 60.5 -B12 M12 x 1.75 ZPX125HB-B01-B10 M10 x 1.5 125 128.5 88.6 135 56 84 106 44 69 -B12 M12 x 1.75 13-11-92 11 Vacuum Pad: Large Size Bellows Type Lateral Vacuum Entry With Buffer Series ZPX Specifications ZX Lateral Vacuum entry direction Buffer type

EX510

Sumitomo 3M Limited Manufacturer's part no. 1-1473562-4 1-1473562-4 1473562-4 1-1473562-4 1473562-4 1473562-4 1473562-4 1473562-4 1473562-4 1473562-4 1473562-4 1473562-4 2-1473562-4 2-1473562-4 2-1473562-4 D-A9 D-M9 D-Y D-Z73 D-Z76 D-Z80 Z/ISE1 Note 1) ZS-28-C ZS-28-C ZS-28-C ZS-28-C ZS-28-C-1 ZS-28-C-1 ZS-28-C-1 ZS-28-C-1 ZS-28-C-1 ZS-28-C-1 ZS-28-C-1 ZS-28-C-1 ZS-28-C-1 ZS-28-C-1 ZS-28-

LEY-OM007

-10 (INC) c 10[mm] 0 10 20 30 40 50 [mm] -27- 4 a b c d e f g h i j k No. 1 2 mm/s mm mm/s^2 mm/s^2 % % mm/s % mm mm mm 0 ABS 100 20.00 3000 3000 80 40 30 100 10.00 20.00 20.00 No.00[mm] 20[mm]20[mm] 1 10 W [mm] c [mm] k 20 0 10 20 30 40 50 [mm] INP 2 k INPON g 30 W [mm] c [mm] k 20 0 10 20 30 40 50 [mm] INP INPOFF () k g BUSYONOFF -28- 5 a b c d e f g h i j k No. 1 2 mm/

CATALOG VC10

Series 70 8 Series 80 1 2WNO 2 2WNC 3 3WNC 4 3WNO 5 3WDC 6 3WMP 18 Direct Lift 2WNO 27 Direct Lift 2WNC 28 Pilot Lift 2WNC G 1/32 H 3/64 J 1/16 K 3/32 L 7/64 N 1/8 O 5/32 P 3/16 U 7/32 R 1/4 A 9/32 S 5/16 T 3/8 V 5/64 B 1/2 C 5/8 D 1 E 1 1/2 Y 3/4 F 2 W 3 SS BR AL 1/8 NPT 7 4 2 1/8 NPT 8 5 2 1/4 NPT 9 6 3 3/8 NPT 1 10 1/2 NPT 33 12 11 1 NPT 23 13 1 1/2 NPT 24 14 3/4 NPT 29 19 2 NPT 26 16

Valve Single Unit

Description Note M2: 0.17 Nm M3: 0.8 Nm M4: 1.4 Nm 1 4 3 8 SY5000-27-1 Rc: SY7000-27-1 Rc: SY7000-27-2 SY3000-27-1 Sub-plate Aluminum die-casted i Gasket o HNBR SY5000-11-15 SY7000-11-11 SY3000-11-25 Round head combination screw For valve mounting (Matt nickel plated) M3 x 30 M4 x 35 SX3000-22-2 (M2 x 24) 1-6-31 Base Mounted Series SX3000/5000/7000 Dimensions: Series SX7000 2 position single

0.55

(IN OUT) 2 3 (OUT EXH) Flow characteristics Port size Valve model Grommet C [dm3/(sbar)] b Cv C [dm3/(sbar)] b Cv 1(IN), 2(OUT) 3(EXH) 3 8 1 2 3 4 19 0.43 5.5 18 0.47 5.4 23 0.32 6.2 21 0.39 5.8 28 0.36 7.6 26 0.35 7.0 VP3145 3 4 1.5 Mass (kg) Port size Effective area (mm2) Valve model Grommet 1 (IN), 2 (OUT) 3(EXH) 1 2 (IN OUT) 230 280 310 570 650 650 2 3 (OUT EXH) 280 310 330 650

Fieldbus System

83 A 4 A 4 A 4 (114.8) 80.2 31.8 15 11 60.5 40.9 1P 1.7 30.2 B 2 B 2 B 2 B 2 B 2 B 2 4.6 22.2 4 x M4 mounting hole 4.6 L2 34.7 1.5 M5 x 0.8 [4(A), 2(B) port] SI unit L4 (DIN rail mounting hole pitch: 12.5) 5.3 One-touch fitting [4(A), 2(B) port] L3 Applicable tube O.D.: 2 : 3.2, 1/8" : 4, 5/32" : 6, 1/4" [External pilot] (Station n) (Station 1) One-touch fitting [PE: Pilot EXH port] [X:

0.

x 4.5 (For mounting) [1(P), 3(R) port] 5 L4 L3 L5 (4.9) 11 25.5 (Station n) (Station 1) One-touch fitting [2(A) port] Applicable tubing O.D.: 4, 5/32" 6, 1/4" 8, 5/16" A A 2 2 30 21.5 (7.5) (11) (Pitch) P = 16 15.5 1/8 1/8 [2(A) port] A 30 2 21.5 (Pitch) P = 16 15.5 The dashed lines indicate the DIN rail mounting [-D].