Aluminum High Vacuum Angle Valve

Maintenance Parts XM XY w Bonnet Assembly Part No. i Bypass Valve Part No.

10

500 500 500 6 VX240 1 8 145 (1.0) 8 VX250 2 10 10 VX260 3 12 Note) Weight of grommet type.

HRX-OM-S004

Max. 2s 2s 1s 1s Min. 0.5s 0.5s 0.2s 0.2s 0.1s 0.1s 0.05s 0.05s 0.02s 0.02s 0.01s 0.01s 6000 100 125 200 300 400 500 700 1000 1500 2000 30004000 10 100 125 200 300 400 500 600700 1000 1500 2000 3000 4000 600 5000 7000 Current (% for breaker capacity) Current (% for breaker capacity) For HRS100-A/W-20-B For HRS150-A/W-20-B HRS100-A/W-40, HRS150-A/W-40 4h 2h 1h 30min 20min 14min 10min 6min

PFxx-OMX0007

Security code 1 R/W 2410 0x096A PinCode (Security code setting) Setting range 0x0 to 0x03E7 (0 to 999) 2 R/W U16 0 Y Line name 1st letter U8 0 Y 11 seg 1 R/W 2 R/W Line name 2nd letter U8 0 Y 7seg 3 R/W Line name 3rd letter U8 0 Y 7seg Lower level screen 4 R/W Line name 4th letter U8 0 Y 7seg Refer to "Line name: communication data".

SMC Wireless System PROFINET compatible

R/W detection / R/W no-detection button When the NFC reader/writer (R/W) is inserted into the USB port of the PC and the PC detects the NFC reader and writer, "R/W detected" is displayed. When the PC cannot detect it, "R/W undetected" is displayed.

Digital Flow Switch (Integrated display type) ( compatible)

U8 0 Y 1820 0x071C 0 R/W 1821 0x071D 0 R/W Line name 2nd letter U8 0 Y Refer to "Line name: communication data".

SMC Wireless System EtherNet/IP ® compatible

R/W detection/ R/W no-detection button When the NFC reader/writer (R/W) is inserted into the USB port of the PC and the PC detects the NFC reader and writer, "R/W detected" is displayed. When the PC cannot detect it, "R/W undetected" is displayed.

Multi-channel Digital Sensor Monitor ( compatible)

7 seg). (0) 1 R/W Line name 1st letter dot Y U8 0x00 0: OFF (dot OFF) 1: ON (dot ON) (0) 2 R/W Line name 2nd letter dot Y U8 0x00 0: OFF (dot OFF) 1: ON (dot ON) (0) 3 R/W Line name 3rd letter dot Y U8 0x00 0: OFF (dot OFF) 1: ON (dot ON) (0) 4 R/W Line name 4th letter dot Y U8 0x00 0: OFF (dot OFF) 1: ON (dot ON) (0) 0x097E (2430) 0x097F (2431) 0x0980 (2432) 0x0981 (2433) 5 R/W Line name

Digital Flow Switch (Integrated display type) ( compatible)

0 Y 1820 0x071C 0 R/W 1821 0x071D 0 R/W Line name 2nd letter U8 0 Y Refer to "Line name: communication data".

HRX-OM-X037

9.4.15 HRL200-W-40-T2 CH1 .9-19 9.4.16 HRL100/200-W-40-T2 CH2 .9-19 9.5 Pump Capacity . 9-20 9.5.1 HRL100-A/W-40 CH1 .9-20 9.5.2 HRL200-A/W-40 CH1 .9-20 9.5.3 HRL300-A-40 CH1 .9-21 9.5.4 HRL-A/W-40 CH2 .9-21 9.5.5 HRL100/200/300-A/W-40-T2 CH1 .9-22 9.5.6 HRL300-A-40-T3 CH2 .9-22 9.6 Types of Hazard Labels . 9-23 9.6.1 Positions of danger warning label .9-24 9.7 Standards . 9-25 9.8 Daily

Air-hydro Unit

For details on how the models are indicated, refer to How to Order. 315 or more 50 200 or more 63 CCT63 120 or more 80 75 or more 100 1164 Air-hydro Unit CC Series Data (A) Volume of Cylinder/Capacity of Converter 160 140 125 100 800 700 600 300 250 200 180 10,000 8,000 500 400 80 6,000 5,000 4,000 300 600 500 63 3,000 200 400 50 2,000 300 40 Effective oil level stroke (mm) 500 200 1,000

Table of Contents

No. q w e r t y u i o !

Air Slide Table Series MXP

(kg) Fig. (2) Overhang: Ln (mm), Correction Values for Moment Center Distance: An (mm) Pitch moment Yaw moment Roll moment W L2 A2 L1 A1 L3 A3 Mp Mr My Static moment Dynamic moment W W W L2 A2 L3 A3 L1 A1 MXH W Mp Mr My MXU W W MXS W W Mey Mep MXQ We We Note) No need to consider this load factor in the case of using perpendicularly in a vertical position.

Vacuum Unit Ejector / Vacuum Pump System

Note 9) Select L, L#, or W for (6) Wiring Combinations for the single unit model.

Series PF2W Digital Flow Switch For Water

DC+ 1 Brown q N.C. 2 Not used w DC 3 Blue e IN: 1 to 5 V 4 White r Power supply/Output connector (8P) Power supply/Output connector (accessory) i u y t r e w q Pin No. Pin no. Terminal 7 Green CH4_OUT1 8 Yellow N.C.

Wireless System

(For details a p. 22) Country Standard Japan (Japanese radio law) Wireless slave unit Wireless master unit EU (CE marking/RE Directive) CAT.E02-28A EX600-W Series USA (FCC) Wireless System EX600-W Series Provide safe and reliable communication Uses the 2.4 GHz ISM frequency band kHz MHz GHz 10 10 10 1 1 100 100 Wireless System Wireless LAN Wireless devices RFID Bluetooth AC/DC welding machine

Auto Switch Guide

L D-A73 (Example) RS H A Lead wire length RZQ 5 m None Nil L 0.5 m 3 m Z N MI W S Applicable for the connector type (D-C) only.

Heavy Duty Stopper Cylinder

Work W Work W Work W Work W Bracket Cylinder goes up Cylinder goes down Lever basic position Lever locked Lock released With cancel cap With lever detection switch RSQ When the lever stands erect (when the energy is absorbed), the switch turns on a signal that determines the pallet has reached the stop position. (For details of lever detection switch, refer to page 595.)

VZ5000

Pressure 0.5 MPa Load factor 50% Stroke 500 mm VZS Average speed (mm/s) Series VFS VS4 40 50 63 80 100 800 700 600 500 400 300 200 100 Perpendicular, upward actuation Horizontal actuation VQ7 VZ514--02 (Piping: 6 x 1 m) EVS VFN AS3301F-02-06/AN200-2 Speed controller/Silencer 800 700 600 500 400 300 200 100 Perpendicular, upward actuation Horizontal actuation VZ514--02 (Piping: 8 x 1 m) AS3301F

MXW

Load Weight W 20 Maximum Load Weight MXW25 17 (kg) W 15 Maximum load weight (kg) 12 MXW20 W Model 10 MXW16 MXW8 1.8 7 6 MXW12 4 5 4 MXW12 MXW16 7 3 2.5 MXW20 11 2 MXW8 1.7 MXW25 17 1.5 W W 1.2 Note) No need to consider this load factor in the case of using perpendicularly in a vertical position. 1 50 100 200 300 500 Piston speed (mm/s) Graph (1) Mp/Mep (Pitch moment) My/Mey (Yaw moment) Mr