Compact

,.);:-| I Driver unit lt lllnm --i -"r I ' I r_coo-r l]jj ,Tt-r f#posi,ioninsi I | *.!{l ). I direction \ j '--r:_ _ _ System diagram Supply by Lrser comFcrnecFic rouilo|'s $.0nie$ ll( Proilrd tooumr 30 :t0.03. 08; 2mm lead o5 stepping a a a a 80 08; 5mm lead 100 08; 6mm lead t0.05 200 @8; 12mm lead :a]8:?lrrin:Faq l: ':l ' :S? sleptrr.lS 19!1{11n]!

XL

Example) D-F9NL Main switch circuit Main switch circuit Output Black [White] () Blue [Black] D-F9P (+) Brown [Red] Auto Switch Dimensions (mm) 1in=25.4mm Output Black [White] D-F9N, D-F9P, D-F9B () Blue [Black] D-F9B (+) Brown [Red] L dimension (mm) Part No.

High Vacuum Angle Valve, XL Series

Example) D-F9NL Main switch circuit Main switch circuit Output Black [White] () Blue [Black] D-F9P (+) Brown [Red] Auto Switch Dimensions (mm) 1in=25.4mm Output Black [White] D-F9N, D-F9P, D-F9B () Blue [Black] D-F9B (+) Brown [Red] L dimension (mm) Part No.

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

(Except 50) MY1MW16/20/50/63 MY1CW16/20/50/63 L L L L L L R R R R R R R L L R R R L L L R Slide table operating direction MY1MW25/32/40 MY1CW25/32/40 L L This port is not available for use. (Except 32, 40) L L L L L L L L R R R R R R R R L L R R L L L R Slide table operating direction 8-12-3 4 Series MY1W Specific Product Precautions 2 Be sure to read before handling.

MXQ

Solid State Switch: D-M9B, D-M9N, D-M9P, D-F9BW, D-F9NW, D-F9PW Stroke B Stroke E Model A 10 20 30 40 75 100 125 150 10 20 30 125 40 50 150 75 100 50 B MXQ6 0.5 0.5 0.5 7.5 7.5 9.5 9.5 9.5 17.5 17.5 10 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com MXQ8 26 2 2 6

Air Cylinder Series CA2

Range (mm) (mm) Bore size Auto switch model Bore size Auto switch model 40 50 63 80 100 40 50 63 80 100 D-A9/A9V 7 9 9 9 D-F5/J5/F5W D-J59W D-F5NTL/F59F D-M9/M9V D-M9W/M9WV 4 4 4.5 4.5 4.5 6 4.5 5 5.5 5 D-Z7/Z80 D-G5/K59/G5W D-K59W D-G5NTL/G59F 8.5 7.5 9.5 9.5 10.5 5 6 6.5 6.5 7 D-A3/A44 D-A3C/A44C 9 10 11 11 11 D-A5/A6 D-B5/B64 D-A59W D-B59W D-G39/K39 D-G39C/K39C 9 9 10 10 11 D-P4DWL 4

Possible to transfer a workpiece at low-speed.

4 q w r y !5 !6 i w i !5 y q r 312 CRQ2X Series Low-Speed Compact Rotary Actuator Rack & Pinion Type Dimensions Size 10/15 3H9 effective depth 2 CRB2 TA 0.6 CRB1 30 MSU BU CRJ CRA1 2 x M5 x 0.8 through (Opposite side 7.6 counterbore depth 4.2) B CRQ2 MSQ With double shaft DD W D MSZ CRQ2X MSQX CRQ2X MSQX H 2 10 2 x M5 x 0.8 (Port) MRQ (US) M (UW) BD Q BC ab BA BB BA D (AU) Max.

LVQ

D (Max.

MY2

(V), D-F9P(V), D-F9B(V) Auto Switch Specifications Grommet D-F9, D-F9V (with indicator light) D-F9N D-F9NV D-F9P D-F9PV D-F9B Perpendicular D-F9BV Auto switch part no.

HEC_001W-E

After the error is reset, the indication of [WRN] disappears. 8-1 Alarm 8.2 Alarm indication Blink E R R 1 4 T h e r m o s t a t A l a r m M O D E < S h u t o f f Fig.8-1 Alarm indication in the event ERR14 arises Blink E R R 1 4 P B R a n g e M O D E < 2 . 0 C Fig.8-2 Alarm indication in the event ERR14 arises during PB range setting input Light W R N P V < 2 6 . 6 C # 1 S V 2 5 . 0 C

CL

MLU 40 50 63 80 100 125 140 160 Bore size (mm) Bore size (mm) Auto switch model CA-L06 CA-L05 CA-L10 CA-L04 CA-L08 Foot style Rod side 40 50 63 80 100 125 140 160 ML1C CS1-L12 CS1-L14 CS1-L16 D-A5/A6/A59W D-F5/J5/F5NTL D-F5W/J59W D-F5BAL/F59F D-A3/A44 D-G39/K39 D-B5/B6/B59W D-G5/K59/G5BAL D-G5W/K59W D-G59F/G5NTL D-A3C/A44C D-G39C/K39C D-Z7/Z80 D-Y59/Y69 D-Y7P/Y7PV D-Y7W D-Y7WV D-Y7BAL CA1

Electric Actuators

400 100 to 600 100 to 800 200 to 1000 Size 16 25 32 40 Size Stroke 100 to 600 100 to 800 200 to 1000 25 32 40 CAT.NAS100-87 Slide Table Guide Rod Slider Step Motor (Servo/24 VDC) Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Belt drive Basic type (R type) Series LESHmR Symmetrical type (L type) Series LESHmL In-line motor type (D type) Series LESHmD Series LEL Size 25 Stroke 100 to 1000

CXS

D-A9 (Reed switch) D-F9W D-M9 (Solid state switch) D-M9V, D-F9WV D-A9V (Reed switch) D-M9V D-F9WV (Solid state switch) C3 CXSJ15 to 32 Bore size (mm) C2 Symbol Auto switch model A1 32 0.3 7.1 6.2 3.1 25 0.3 7.1 6.2 0.4 20 0.3 7.1 6.2 1.2 15 0.3 7.1 6.2 2.2 C1 A1 C1 C2 C3 D-F9W, D-M9 D-A9V, D-F9WV D-M9V D-A9 (Reed switch) D-F9W (Solid state switch) D-M9 D-A9V (Reed switch) D-F9WV (Solid state

CXS

D-A9 (Reed switch) D-F9W D-M9 (Solid state switch) D-M9V, D-F9WV D-A9V (Reed switch) D-M9V D-F9WV (Solid state switch) C3 CXSJ15 to 32 Bore size (mm) C2 Symbol Auto switch model A1 32 0.3 7.1 6.2 3.1 25 0.3 7.1 6.2 0.4 20 0.3 7.1 6.2 1.2 15 0.3 7.1 6.2 2.2 C1 A1 C1 C2 C3 D-F9W, D-M9 D-A9V, D-F9WV D-M9V D-A9 (Reed switch) D-F9W (Solid state switch) D-M9 D-A9V (Reed switch) D-F9WV (Solid state

Cylinder with Lock Series CNS

Different side 110 35 The stainless steel mounting screw kit (including set screws) shown below has been prepared for use Same side 110 100 D-A3 D-G39 D-K39 depending on the operating environment.

Vacuum Module Series ZX

Solenoid valve rated voltage L C CL CN B (5) Digital vacuum switch unit Light/Surge voltage suppressor None With light/surge voltage suppressor 1 C 0X ZSE3 D 21 3 100 VAC 50/60 Hz 110 VAC 50/60 Hz 5 24 VDC 6 12 VDC V 6 VDC S 5 VDC R 3 VDC Applicable to plug connector only. (Connector assembly with rectifier is attached.)

MHZ

D-Y7P D-Y69 D-Y7PV D-Y7W D-M9V D-F9WV D-Y7WV D-M9 D-F9BAL D-F9W Model MHS 4 8 1 6.5 3 1.5 Open Closed Open Closed Open Closed Open Closed MHZJ2-10 With dust cover No setting No setting MHC MHZJ2-16 No setting No setting MHT MHZJ2-20 MHY MHZJ2-25 MHW Note) There is no auto switch protrusion from the body's end surface.

MHZ

Standard Body Lead wire type In-line electrical entry type Perpendicular electrial entry type Explanatory drawing Auto switch L L L Finger position D-Y59 D-Y7P D-Y69 D-Y7PV D-Y7W D-M9V D-F9WV D-Y7WV D-M9 D-F9BAL D-F9W Model 11 13 9 11 Open Closed Open Closed Open Closed Open Closed Open Closed Open Closed Open Closed Open Closed Open Closed Open Closed Open Closed Open Closed Open Closed

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

kPa 100 kPa 100 kPa IO-Link compatible/ L type 0 0 0 0 100 kPa 101 kPa 100 kPa 100 kPa 100 kPa 101 kPa 100 kPa 100 kPa 100 kPa 500 kPa 500 kPa 1.5 MPa 500 kPa 500 kPa 2 MPa 4 MPa 2 outputs (NPN/PNP)/IO-Link4 2 outputs (NPN/PNP) Analog (Voltage/Current)5 Analog (Voltage/Current) IP65 IP65 M5 female thread, R1/8, NPT1/8 R1/41, NPT1/41, G1/41, Rc1/8, URJ1/42, TSJ1/43 Copy function5, Auto-shift

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

R.