LX

F (LC6D-2 only) +24V GND CW+ CW CCW+ CCW PD+ PD A B C D E 7 6 3 10 CW CW 10 10 2 R 330 CCW input 330 CCW input 2 2 9 1 CCW CCW 8 9 9 5 4 14 13 12 R 330 PD input 1 PD 8 11 F Functions Function change-over switch Input signal terminal CW pulse input terminal By applying the pulse input, the actuator moves from the motor side to the end side.

Air Cylinder

3 r i !0 !6 o !1 !2 Component Parts Replacement Parts/Seal Kit No. Description Material Qty. Note Kit no.

PF2A/PF2W

Maximum measured Maximum measured Minimum measured Minimum measured Part no. flow rate value [l/min] flow rate value [l/min] flow rate value [l/min] flow rate value [l/min] PF2A510--1 PF2A550--1 PF2A511--1 PF2A521--1 PF2A551--1 PF2A510--2 PF2A550--2 PF2A511--2 PF2A521--2 PF2A551--2 10 50 100 200 500 10 50 100 200 500 1.1 5.4 11 21 54 10.7 53.5 107 214 535 1.1 5.4 11 21 54 10.7 53.5 107 214

VQC

Individual EXH spacer VVQ1000-R-1-C6 EXH shutoff position: Specify 2 positions.

Clean Air Module

AME Digital flow switch AMF Measured flow range 5 to 100 L/min 50 to 500 L/min Nominal filtration rating: 0.01 m (Filtration efficiency 99.99%) Measured flow range 5 to 100 L/min 50 to 500 L/min Nominal filtration rating: 0.01 m (Filtration efficiency 99.99%) Filter Restrictor Regulator ZFC SF SFD LLB LLB AD GD Nominal filtration rating: 0.01 m Nominal filtration rating: 0.01 m (Filtration

LEC-OM071xx

This product supports level 03H. 00H: 31.25, 62.5, 125, 250, 500 (sec), 2 to 64 (msec) (2 msec increment) 01H: 31.25, 62.5, 125, 250, 500 (sec), 1 to 64 (msec) (1 msec increment) 02H: 31.25, 62.5, 125, 250, 500 (sec), 1 to 64 (msec) (0.5 msec increment) 03H: 31.25, 62.5, 125, 250, 500, 750 (sec), 1 to 64 (msec) (0.5 msec increment) 18H Binary Data Minimum Value of Communication Cycle 4 bytes

CE

3 @3 r t @5 e !1 @1 @1 @4 @6 !4 @6 !4 u @8 !5 @0 !8 !9 i Parts list Parts list Description Material Note Description Material Note No. No.

Air Cylinder Series CS1 ø125, ø140, ø160, ø180, ø200, ø250, ø300 1

DSM-60S DSM-60S DSM-75S DSM-75S (H) Cast iron r t y u i o !

5 Port Solenoid Valve, Series VQC

Note 4) For external pilot option, "-R", indicate the external pilot specification "R" for the applicable valves as well. Note 5) The built-in silencer type does not satisfy the IP67 standard.

AC Servo Motor Driver (Pulse input type)

Symbol Name Initial value Unit PC01 STA Acceleration time constant 0 ms PC02 STB Deceleration time constant 0 ms PC05 SC1 Internal speed command 1 100 r/min PC06 SC2 Internal speed command 2 500 r/min PC07 SC3 Internal speed command 3 1000 r/min PC08 SC4 Internal speed command 4 200 r/min PC09 SC5 Internal speed command 5 300 r/min PC10 SC6 Internal speed command 6 500 r/min PC11 SC7 Internal

Solid State Auto Switches

Refer to page 500 for CDA2-Z, page 557 for CDA2 and CDBA2. Dimensions (mm) D-G5NB 11.2 33 4 SMC 14 12 9.5 Indicator light 6.5 4.5 mounting hole DD14.3 Most sensitive position (16) 1619 Made to Order Specifications: Solid State Auto Switch Refer to SMC website for the details of the products conforming to the international standards.

EXxx-OMZ0016

Connection status of the NFC reader/writer When the PC detects the NFC reader/writer connected to its USB port, "R/W detected" is displayed. Otherwise, "R/W not-detected" is displayed.

Speed Controller with One-touch Fitting

0 q r !2 ASD q t AS y !3 r t AS-FE u w i KE i o AS-FG y !0 u AS-FP w e AS-FM Meter-in type Meter-out type !4 !1 Meter-in type Meter-out type AS-D Seal method: Sealant For R, NPT thread Seal method: Sealant For R, NPT thread AS-T e !1 ASP !0 o q r ASN !2 t AQ q w ASV r y AK u t VCHC i i ASR ASQ !

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

600 1000 2000 3000 6000 12000 PF2M7(-L) 0.001 L/min 0.01 1 0.02 2 0.01 L/min 0.05 5 Dry air N2 Ar CO2 0.1 10 Thermal type (MEMS) 0.3 25 0.1 L/min 0.5 50 1 100 1 L/min 2 200 PFMB 2 200 Thermal type (MEMS) 5 500 Dry air N2 1 L/min PFG300 10 1000 Bypass flow type 20 2000 PFMC(-L) Thermal type (MEMS) 5 500 Dry air N2 1 L/min PFG300 10 1000 Bypass flow type 20 2000 PF2A 1 10 0.1 L/min 0.5 L/

LEC-OM069xx

Example 2: When using the conditions Pn20E = 4, Pn210 = 1, maximum motor speed = 6000 [min-1], external encoder pitch count (Pn20A) = 500, signal resolution: 1/256: 1/4 6000/60 (500 256) 0.00025 = 800.0 [reference units] The upper limit for the backlash compensation is 800.0 [reference units]. Do not exceed the upper limit of the backlash compensation value.

Space Saving Vacuum Ejector/Vacuum Pump System Series ZQ

Install the ejector body gasket for manifold t into the gasket groove of each vacuum pump system assembly r. 2. Install the ejector body gasket for manifold t into the gasket groove of the end block R w. 3. Align the ejector assemblies r, end block (L) w, and end block (R) e using positioning pins (at the two a positions) and fasten with clamp rods q (2 pcs.)

Power Clamp Cylinder

30 to 90 CKZT80-A015B 30 to 90 80 CKZ80-42 3680N-R A B C 30 to 105 CKZ80-42 3680N-R D E F 30 to 105 For mounting bolt, a hexagon socket head cap screw and a spring washer No. 2 are recommended.

ISO Cylinder

20 20 8 36 22 6 M8 x 1.25 71 84 96 109 134 159 25 22 10 36 22 8 M10 x 1.25 74 87 99 112 137 162 187 Auto Switch Made to Order Bore size Stroke Item Reference (Wh) 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 20 12.5 25 37.5 50 75 100 23.5 10.5 51 64 76 89 114 139 25 12.5 25 37.5 50 75

Bag Filter

Foundation bolt L1 (mm) Nominal thread size d M16 L1 R Applicable model d1 S L Part No. (Approx.) (Approx.) FGF-OP05 Hexagon nut d FGF1-20 16 40 71 31.5 400 R d1 FGF3-40 AI-3S M20 20 50 90 40 500 FGF5-60 S Note) 3 foundation bolts are required per filter unit. If ordering only foundation bolts, order 3 bolts using the above part number.

T

TS0425G-500-X3 20 m roll Inch size: Suffix -X4 to the end of part number. Ex.) TISA01BU-20-X4 Made to Order Availability Length Model Part no.