SMC Corporation of America
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AME Digital flow switch AMF Measured flow range 5 to 100 L/min 50 to 500 L/min Nominal filtration rating: 0.01 m (Filtration efficiency 99.99%) Measured flow range 5 to 100 L/min 50 to 500 L/min Nominal filtration rating: 0.01 m (Filtration efficiency 99.99%) Filter Restrictor Regulator ZFC SF SFD LLB LLB AD GD Nominal filtration rating: 0.01 m Nominal filtration rating: 0.01 m (Filtration

This product supports level 03H. 00H: 31.25, 62.5, 125, 250, 500 (sec), 2 to 64 (msec) (2 msec increment) 01H: 31.25, 62.5, 125, 250, 500 (sec), 1 to 64 (msec) (1 msec increment) 02H: 31.25, 62.5, 125, 250, 500 (sec), 1 to 64 (msec) (0.5 msec increment) 03H: 31.25, 62.5, 125, 250, 500, 750 (sec), 1 to 64 (msec) (0.5 msec increment) 18H Binary Data Minimum Value of Communication Cycle 4 bytes

3 @3 r t @5 e !1 @1 @1 @4 @6 !4 @6 !4 u @8 !5 @0 !8 !9 i Parts list Parts list Description Material Note Description Material Note No. No.

Note 4) For external pilot option, "-R", indicate the external pilot specification "R" for the applicable valves as well. Note 5) The built-in silencer type does not satisfy the IP67 standard.

Symbol Name Initial value Unit PC01 STA Acceleration time constant 0 ms PC02 STB Deceleration time constant 0 ms PC05 SC1 Internal speed command 1 100 r/min PC06 SC2 Internal speed command 2 500 r/min PC07 SC3 Internal speed command 3 1000 r/min PC08 SC4 Internal speed command 4 200 r/min PC09 SC5 Internal speed command 5 300 r/min PC10 SC6 Internal speed command 6 500 r/min PC11 SC7 Internal

Refer to page 500 for CDA2-Z, page 557 for CDA2 and CDBA2. Dimensions (mm) D-G5NB 11.2 33 4 SMC 14 12 9.5 Indicator light 6.5 4.5 mounting hole DD14.3 Most sensitive position (16) 1619 Made to Order Specifications: Solid State Auto Switch Refer to SMC website for the details of the products conforming to the international standards.

Connection status of the NFC reader/writer When the PC detects the NFC reader/writer connected to its USB port, "R/W detected" is displayed. Otherwise, "R/W not-detected" is displayed.

0 q r !2 ASD q t AS y !3 r t AS-FE u w i KE i o AS-FG y !0 u AS-FP w e AS-FM Meter-in type Meter-out type !4 !1 Meter-in type Meter-out type AS-D Seal method: Sealant For R, NPT thread Seal method: Sealant For R, NPT thread AS-T e !1 ASP !0 o q r ASN !2 t AQ q w ASV r y AK u t VCHC i i ASR ASQ !

600 1000 2000 3000 6000 12000 PF2M7(-L) 0.001 L/min 0.01 1 0.02 2 0.01 L/min 0.05 5 Dry air N2 Ar CO2 0.1 10 Thermal type (MEMS) 0.3 25 0.1 L/min 0.5 50 1 100 1 L/min 2 200 PFMB 2 200 Thermal type (MEMS) 5 500 Dry air N2 1 L/min PFG300 10 1000 Bypass flow type 20 2000 PFMC(-L) Thermal type (MEMS) 5 500 Dry air N2 1 L/min PFG300 10 1000 Bypass flow type 20 2000 PF2A 1 10 0.1 L/min 0.5 L/

Example 2: When using the conditions Pn20E = 4, Pn210 = 1, maximum motor speed = 6000 [min-1], external encoder pitch count (Pn20A) = 500, signal resolution: 1/256: 1/4 6000/60 (500 256) 0.00025 = 800.0 [reference units] The upper limit for the backlash compensation is 800.0 [reference units]. Do not exceed the upper limit of the backlash compensation value.

Install the ejector body gasket for manifold t into the gasket groove of each vacuum pump system assembly r. 2. Install the ejector body gasket for manifold t into the gasket groove of the end block R w. 3. Align the ejector assemblies r, end block (L) w, and end block (R) e using positioning pins (at the two a positions) and fasten with clamp rods q (2 pcs.)

30 to 90 CKZT80-A015B 30 to 90 80 CKZ80-42 3680N-R A B C 30 to 105 CKZ80-42 3680N-R D E F 30 to 105 For mounting bolt, a hexagon socket head cap screw and a spring washer No. 2 are recommended.

20 20 8 36 22 6 M8 x 1.25 71 84 96 109 134 159 25 22 10 36 22 8 M10 x 1.25 74 87 99 112 137 162 187 Auto Switch Made to Order Bore size Stroke Item Reference (Wh) 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 20 12.5 25 37.5 50 75 100 23.5 10.5 51 64 76 89 114 139 25 12.5 25 37.5 50 75

Foundation bolt L1 (mm) Nominal thread size d M16 L1 R Applicable model d1 S L Part No. (Approx.) (Approx.) FGF-OP05 Hexagon nut d FGF1-20 16 40 71 31.5 400 R d1 FGF3-40 AI-3S M20 20 50 90 40 500 FGF5-60 S Note) 3 foundation bolts are required per filter unit. If ordering only foundation bolts, order 3 bolts using the above part number.

TS0425G-500-X3 20 m roll Inch size: Suffix -X4 to the end of part number. Ex.) TISA01BU-20-X4 Made to Order Availability Length Model Part no.

Model number Serial number Type and quantity of refrigerant How to read the serial number y R 001 April 2020 W R 001 Year Symbol Remarks Month Symbol Remarks Serial no. 4 R Repeated from O to Z in alphabetical order, with O for January and Z for December 2020 y 2021 Z 5 S Repeat ed from A to Zin alphab etical order 2022 A 6 T Fig 1-1 Position of product label HRR Series 1.4 Product Label

Rc2 DRAIN 250 P.C.D238 3 x 20 For M16 basic bolt 10 Series FN1/FN4 Construction/Dimensions: Reservoir Tank, Dust Recovery Filter (Options, sold separately) Reservoir tank (when using the FN1) Dust recovery filter 108 32 0 45 315 70 70 P.C.D.220 270 90 (80) 50 135 180 225 4 x 11 (60) (266) AIR VENT G1/4 q q A (43) OUT IN e e 150 r t B 120 327 188 (519) w w 84 OUT 2 x R1 r IN 53 DRAIN G1/4

Turbine oil #1 (ISO VG32) Bowl Polycarbonate Pipe Size 114, 112 2 Min Flow for Oil Drip 650 1800 Oil Capacity (cm3) 500 500 Model A B C Pipe Size Flow Rate ln/min 12500 16500 NAL800 100 283 59 112 Flow rate quoted at: 0.5MPa supply 0.03MPa pressure drop NAL900 100 288 63 2 H O W T O O R D E R L U B R I C AT O R S E R I E S AL AL800-12 (1 14 PT) AL800-14 (1 12 PT) AL900-20 (2 PT) Courtesy

2 r e y @4 @8 @0 !0 i @3 o @4 @8@7 u @2 r y MK/MK2 RSQ/RSG !9 #0 w #1 #0 t q e @9 #1 @1 !9 t @5@6 @1 #0 q !1 w #1 #0 @2 @9 #1 @1 RSH CE1 40 to 63 CE2 @0 @4 @8 i u o @3 !1 #1 #2 @8@4 !2 @7 !3#3 r !4 e !6 @6 ML2B ML1C #7 #6 !5 REA REC RHC !9 @5 t @6 y #0 w @1 #0 #5 !7 #4 q @9@2 !8 #1 #2 !7 #5 #4 @1 MTS CC Component Parts Component Parts Description Material Note Description Material No.