Clean Room Regulator/Fluoro Resin Type Series SRF30

Construction Tubing Integral fittings e y t e t i r y !6 r u i u q o q !0 o !1 !0 w !1 !2 w !2 Parts list !3 No.

AME

Accessory (Option) Applicable model Bracket assembly With cap bolt and spring washer AME150 AME250 AME350 AME450 AME550 AME650 AME850 BM51 BM52 BM53 BM54 BM55 BM56 BM57 AME 250 03 R B HA Option specifications AT R IN-OUT reversal direction Body size Accessory (Option) 150 Standard 1 8 250 Standard 1 4 350 Standard 3 8 450 Standard 1 2 550 Standard 3 4 650 850 ID Nil Bracket B Nil AMG Port

High Power Cylinder:

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MTS

8 @1 r @4 w MX MTS MY 12 to 40 CY @7 !1 !7 q !6 !0 @2 @3 o @4 @6 y e r !8 @1 @5 u w MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CX Rod cross section for 12, 16, 20, and 25 D-X 20Rod cross section for 32 and 40 Data With end lock 12 to 40 y !7 !6 q !

DOC1003626

Broken communication wire monitoring time. o r coming 60 sec. off AL34 Communication alarm is generated.

Clean Rodless Cylinder Series CYP

Solid state switch S h Nil L R S Operating direction Left Right a b h g d c f e Note) Lead wire length symbols 0.5m .

3 Way Direct Acting NVKF 300 Series

(M5) 01T r/ NPTF {A port onl ' Special order Notel) Indicale in parentheses al end of parl # Ex.

AC Servo Motor Electric Actuator/Slider Type Ball Screw Drive LEFS Series LEFS25, 32, 40

How to Order w e q r t y u i o !0 !

PF2A/PF2W

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 50 20 40 Pressure loss (kPa) Pressure loss (kPa) 15 30 10 20 5 10 Flow rate (l/min) 0 200 0 50 100 150200250 300 400 350 450 500 20 50 100 150 Flow rate (l/min) Sensor Unit Construction PF2A710/750 PF2A510/550 Component Parts No. q w e r t Description

NVKF

(M5) 01T r/ NPTF {A port onl ' Special order Notel) Indicale in parentheses al end of parl # Ex.

Mounting: B (Basic Style), Bore Size: 25mm, Port Thread: 20 & 25 Bore: M5 x0.8, 32-50 Bore: Rc Thread, Stroke: 100mm, Option: R (Rear Plate)

Mounting: B (Basic Style), Bore Size: 25mm, Port Thread: 20 & 25 Bore: M5 x0.8, 32-50 Bore: Rc Thread, Stroke: 125mm, Option: R (Rear Plate)

Mounting: B (Basic Style), Bore Size: 25mm, Port Thread: 20 & 25 Bore: M5 x0.8, 32-50 Bore: Rc Thread, Stroke: 150mm, Option: R (Rear Plate)

Mounting: B (Basic Style), Bore Size: 25mm, Port Thread: 20 & 25 Bore: M5 x0.8, 32-50 Bore: Rc Thread, Stroke: 200mm, Option: R (Rear Plate)

Mounting: B (Basic Style), Bore Size: 25mm, Port Thread: 20 & 25 Bore: M5 x0.8, 32-50 Bore: Rc Thread, Stroke: 250mm, Option: R (Rear Plate)

Mounting: B (Basic Style), Bore Size: 25mm, Port Thread: 20 & 25 Bore: M5 x0.8, 32-50 Bore: Rc Thread, Stroke: 300mm, Option: R (Rear Plate)

Mounting: B (Basic Style), Bore Size: 25mm, Port Thread: 20 & 25 Bore: M5 x0.8, 32-50 Bore: Rc Thread, Stroke: 500mm, Option: R (Rear Plate)

Mounting: B (Basic Style), Bore Size: 25mm, Port Thread: 20 & 25 Bore: M5 x0.8, 32-50 Bore: Rc Thread, Stroke: 75mm, Option: R (Rear Plate)

Mounting: B (Basic Style), Bore Size: 25mm, Port Thread: 20 & 25 Bore: M5 x0.8, 32-50 Bore: Rc Thread, Stroke: 450mm, Option: R (Rear Plate)

Mounting: B (Basic Style), Bore Size: 25mm, Port Thread: 20 & 25 Bore: M5 x0.8, 32-50 Bore: Rc Thread, Stroke: 400mm, Option: R (Rear Plate)