Thermo-con/Rack Mount Type

1 850 W*1 900 W*2 1500 W*2 Alarm Refer to Alarm.

Digital Flow Switch (Remote type monitor unit)

thickness of the panel is 0.5 to 8 mm (with a waterproof seal: 0.5 to 6 mm) Dimensions of power supply/output lead wire (ZS-40-W) -72No.PF-OMN0012-H Revision history A: Add the product model.

Series CQ2

(Mounting position: Horizontal) W 1000 500 400 Allowable lateral load W (N) 300 Allowable kinetic energy 200 Piston speed 200 180 200 100 180 Piston speed Allowable kinetic energy 20 to 400mm/s 12.4J 50 40 30 (m1 + m2) V Kinetic energy E (J) = 2 m1: Weight of moving cylinder parts kg m2: Load weight kg V: Piston speed m/s 20 10 0 20 40 60 80 100 120 140 160 180 200 220 260 240 280 300 Kinetic

OMR0032

[ms] Deceleration time: 20 80 = 250 [ms] Flow chart (Reference) Controller (1) Turn "TL" signal OFF.

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

12VDC Others 12 Series VQZ How To Order How To Order: VQZ200/300 Base Mounted Valve With Sub-plate Preferred Option Program VQZ 2 1 5 5 L 01T Series 2 3 VQZ200 Body width 15mm VQZ300 Body width18mm Port size (sub-plate) Symbol Port size VQZ200 VQZ300 Without sub-plate 1/8 NPTF 1/4 NPTF 3/8 NPTF 01T 02T 03T Symbol (A) 2 N.C. 1 IP65 Option (Y, YZ only) 1 (P) 3 (R) Metal seal Rubber seal W

Aluminum High Vacuum Angle Valve

Maintenance Parts XM XY w Bonnet Assembly Part No. i Bypass Valve Part No.

10

Body material: AIuminum, C37, Stainless steel Body material: Resin q q w w e e r r t t y y IN OUT IN OUT u u Component Parts Component Parts No. Description No.

Digital Flow Switch (Remote type sensor unit)

Bracket cannot be mounted onto the 250 L/min type. Replacement part Element Part number Remarks Vinyl chloride piping tube (25 A) ZS-40-U25 25 A Vinyl chloride piping tube 1 pc.

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

, 100, 125, 160, 200, 250, 320, 400, 500 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 2000 2000 2000 2000 2000 2000 2000 32 40 50 63 80 100 125 Minimum Stroke for Auto Switch Mounting 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600, 700, 800 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600, 700, 800 Refer to

ISO Cylinder: Standard Double Acting, Single/Double Rod Series C96 ø32, ø40, ø50, ø63, ø80, ø100, ø125

, 320, 400, 500 40 1900 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500 50 1900 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 63 1900 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 80 1900 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600, 700, 800 100 1900 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600, 700, 800 2000 125 Intermediate strokes are available

ISO/VDMA Cylinder: Standard Type Double Acting, Single/Double Rod Series C95 ø32, ø40, ø50, ø63, ø80, ø100

Standard Stroke Standard stroke (mm) Bore size (mm) Max. stroke 32 700 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500 40 800 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500 50 1200 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 Made to Order Specifications (For details, refer to page 6-17-19.) 63 1200 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 80 1400 25, 50,

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

For type "W", DC voltage is only available.

HRX-OM-X037

Table 3.1-1 Weight of the product Model Weight kg Option increase HRL100-A-40 Approx.240 Option-D1:+1kg HRL200-A-40 Approx.260 Option-T2:+1kg HRL300-A-40 Approx.330 Option-T3:+18kg* HRL100-W-40 Approx.250 HRL200-W-40 Approx.250 *Applicable only to HRL300-A*-40. 3.1 Transport HRL Series 3-2 HRX-OM-X037 Chapter 3 Transport and Setting Up 3.1.2 Transportation using casters This is a heavy product

Pin Clamp Cylinder Series C(L)KQG/C(L)KQP

G P G P t = 1 mm x 2 t = 0.5 mm x 2 (21) (6) 3 3 MK t = 1 mm x 2 t = 0.5 mm x 2 CKQ CLKQ (66) 330.05 330.05 CK1 38 With shims (Clamping height: HIGH type) With shims (Clamping height: LOW type) CLK2 33 33 (66) 72 120 38 C W W K 120 SR SR 65 (Guide tube O.D.)

Sine Rodless Cylinder Series REBR Direct Mount Type

First tentative bore size determination W D 1.6 x P W W > WV P > PV Determination of allowable load weight & pressure Inclined operation (Refer to page 75 for vertical operation.)

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

3 MGC Lube with double end lock CBA1-63A-PS-W CBA1-50A-PS-W CBA1-40A-PS-W CBA1-80A-PS-W CBA1-100A-PS-W 1 Lock bushing Zinc bronze die cast !4 Non-lube with double end lock 1 Lock spring Steel wire Zinc chromated !5 CBA1N63A-PS-W CBA1N50A-PS-W CBA1N40A-PS-W CBA1N80A-PS-W CBA1N100A-PS-W MGF 1 Bumper Urethane !6 @8, @9, #0, #1, #3, #4 are packed together as one set of packings.

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL Locking of door Prevention of dropping at the rising end MLG With front lock With rear lock CNA CNG MNB CNS Maintains the cylinder’s CLS original position even if t

3 Lube with double end lock CBA1-63A-PS-W CBA1-50A-PS-W CBA1-40A-PS-W CBA1-80A-PS-W CBA1-100A-PS-W Lock bushing 1 Zinc bronze die cast !4 MG Non-lube with double end lock Lock spring 1 Steel wire Zinc chromated !5 CBA1N63A-PS-W CBA1N50A-PS-W CBA1N40A-PS-W CBA1N80A-PS-W CBA1N100A-PS-W Bumper 1 Urethane !6 MGP @8, @9, #0, #1, #3, #4 are packed together as one set of packings.

Compressed Air Cleaning Filter Series

4 Valve assembly q Body w O-ring q Body e Gauze Valve o u Lever w O-ring Chamber y i Piston assembly Float t !1 Spring Bowl !0 i Piston Long hole !2 of chamber r O-ring Drain guide !3 Drain Drain Component Parts No. 1 Description Body Material Aluminum die-casted Working Principle (AD402) When no pressure is applied inside the bowl !

DOC1023126

4.68 4.97 5.25 5.54 EQY25 (Motor mounting position: In-line) Series Additional mass Stroke[mm] 30 50 100 150 200 250 300 350 400 w ith lock 0.31 Product weight[kg] 1.60 1.67 1.84 2.10 2.28 2.45 2.63 2.80 2.98 EQY32 (Motor mounting position: In-line) Series Additional mass Stroke[mm] 30 50 100 150 200 250 300 350 400 450 500 w ith lock 0.58 Product weight[kg] 2.55 2.66 2.95 3.23 3.63 3.92

Smooth Cylinder

Guideline When W + P0a > P0A: Adjust P1 so that W + P1a = P0A. (2) Installation of a regulator with check valve at the (B) position is effective to reduce sudden movement in downward operation or delay in upward operation. Guideline Adjust P2 so that W + P2a = P0a.