Digital Gap Checker ( compatible) U8 0 Y 2420 0X0974 6 R/W 6 th letter (11seg) U8 0 Y 7 R/W 7 th letter (11seg) U8 0 Y 8 R/W 8 th letter U8 0 Y LINE name 9 R/W 9 th letter U8 0 Y 1 R/W 1st dot (left side) U8 0 Y 2 R/W 2nd dot U8 0 Y 3 R/W 3rd dot U8 0 Y 4 R/W 4th dot U8 0 Y 0: OFF (dot OFF) 1: ON (dot ON) 2430 0X097E 5 R/W 5th dot U8 0 Y 6 R/W 6th dot U8 0 Y 7 R/W 7th dot U8 0 Y 8 R/W 8th dot U8 0 Y -100No.PS-OMW0009-C 4
to 50mm/s) i2 to 100 Heal resislant aulo swilch 16 to 63 Hea\./ duty sctaper 20 to 100 Stalnless steelpiston rod and rod nut 12 10 100 AdjuslaLle stroke exlend 12 to 100 Adjustable slroke retract 1 2 l o 1 0 0 DualsLroke, dual rod 1 2 b 1 m DLralstroke s ngle rod 12 to 100 NPI Porr (1) 32 10 160 32 lo 100 Wilh lrcnr gulde boss (1) 12 to lO0 20 to 10O lnch-sizewrcnch flab 12 to 100 (1) Not
K I KA l w LH LS 43 15 M14 x 1.5 15 17 15 27 I 19 85 188 15 I' 27 I Hi 100 188 17 I 34 I 19 106 206 43 15 M14 x 1.S ., 15' 1?
0 t t r i w e r i u w y e q Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com q VQ7-8-FG-DVQ7-8-FG-D-R !0 !0 t t r i w y e q r i w e q VQ7-8-D-R FHG FJG FIG VQ7-8-DFHG FJG FIG !0 !0 t t r i w y e q r i w e q VQ7-8-FPG-D!
0 t t r i u w y e q r i w e q VQ7-8-FG-DVQ7-8-FG-D-R !0 !0 t t r i w y e q r i w e q VQ7-8-D-R FHG FJG FIG VQ7-8-DFHG FJG FIG !0 !0 t t r i w y e q r i w e q VQ7-8-FPG-D!0 t r i w y e q o Replacement Parts (For valve) Description VQ7-8-FG-SVQ7-8-FG-DVQ7-8-FPG-DVQ7-8-FG-S-R VQ7-8-FG-D-R VQ7-8--D-R VQ7-8--DNumber q w e r t y u i o !
Thus, it can be used in a Class 100 clean room.
Hs B A W 16, 20, 25 Approx. Hs W A A B CUJ CU 32 to 100 Approx.
= 29n + 21 W = 51n + 35 W = 63n + 64 W = 97n + 80 W = 139n + 550 Weight: W [g] Stations: n Note) Supply pressure to 1(P) ports and exhaust pressure from R ports on both sides for 10 stations or more (5 stations or more for the VF5000).
F.S. = 100[kPa] 0[kPa] = 100[kPa] 3[%F.S.] = 100[kPa] X 0.03 = 3[kPa] Example: Time Failure predict output 1 ON OFF Time The display error induced by the temperature change can be as much as 3[kPa].
9i @2 q r y#0 $0 $2 w $3 #8 @9 A C B Section A !2 !2 #4 @6 #9 @8 $4 #2 #1 #6 #7 $6 !0 u @5 !6 @1 !1 $7 o $8 e $1 !2 Section B Section C 100 80 63 50 40 32 80, 100 80, 100 Description Material Note Parts list Description Material Note Parts list No. No.
B L1 W M2 B side Inch Size 6 4 Model A side B side B C1 C2 E1 E2 H1 H2 L1 L2 M1 M2 Min. port size W Applicable tubing O.D.
Component Parts No. q w e r t y u i No. o !0 !1 !2 !3 !4 !
r w e e VXF26C<w w r r e q e q VXF26D<w r w e q e q Component Parts Component Parts No.
, 110, 200, 220 VAC (50/60 Hz) 3-position closed center 10% of rated voltage Allowable voltage fluctuation Coil insulation type Equivalent to Class B 0.4 W DC (17 mA), 0.95 W DC (40 mA) Note 3) 24 VDC 3-position exhaust center 0.4 W DC (34 mA), 0.95 W DC (80 mA) Note 3) 12 VDC Inrush 0.96 VA (10 mA), Holding 0.96 VA (10 mA) 100 VAC Power consumption (Current) Inrush 1.0 VA (9 mA), Holding
, 110, 200, 220 VAC (50/60 Hz) 3-position closed center 10% of rated voltage Allowable voltage fluctuation Coil insulation type Equivalent to Class B 0.4 W DC (17 mA), 0.95 W DC (40 mA) Note 3) 24 VDC 3-position exhaust center 0.4 W DC (34 mA), 0.95 W DC (80 mA) Note 3) 12 VDC Inrush 0.96 VA (10 mA), Holding 0.96 VA (10 mA) 100 VAC Power consumption (Current) Inrush 1.0 VA (9 mA), Holding
Rod size series B C B series rod size C series rod size Type: Double acting/Double Rod CH2 F W B LA 50 100 CHD2 F B LA 50 100 M9BW W With Auto Switch With auto switch (built-in magnet) Bore size Made to Order specifications For details, refer to page 385. 32 40 50 63 80 100 32 mm 40 mm 50 mm 63 mm 80 mm 100 mm Series type Mounting type Symbol E F Tube material Nominal pressure 3.5 MPa 7 MPa
No anchor bolt is included. 76 A Thermo-chiller Water-cooled 200 V/400 V Type Standard Type (Only 400 VAC type) RoHS HRS090 Series HRS How to Order HRS 090 HRS 090 W 090 HRS 20 HRS 100/150 Cooling capacity Option HRSH 090 090 9 kW Nil None B Note) With earth leakage breaker J With automatic fluid fill function M Applicable to deionized water piping Cooling method W Water-cooled refrigeration
As a guide, adjust P2, so that it could be W + P2A = P0a.
1 o w !0 !1 e r w e u r u t t y q y q Component Parts Description Material No.
1 i w !8 #4 !6 A @0 @1 !9 #2 !0 #1 A' For ball bushing #5 @5 #0 @8 !7 @6 !3 #8 !2 @1 !0 @9 For slide bearing y For long stroke For 100 @7 For 80, 100 View A-A' Parts list Parts list No. Description No.