Slide Unit Series CX2/CXWM/CXWL

thread depth 9 (6H7 hole pitch) 4 positions for set screws for 6H7 depth 4 +0.012 0 6H7 thread depth 8 +0.012 0 2 x RB1006-X552 Shock absorber fixing shock absorbers (mm) F 35.5 48 56.5 54 66.5 79 91.5 104 L 39 64 89 114 139 164 189 214 P 52 52 60 90 90 90 90 90 Q 164 214 264 314 364 414 464 514 S 27 52 77 102 127 152 177 202 SS 123 148 173 198 223 248 273 298 Z 150 200 250 300 350 400 450

5 Port Solenoid Valve

Dimensions Formula: L1 = 41n + 77, L2 = 41n + 122 n: Stations (Maximum 12 stations) n L 1 2 3 4 5 6 7 8 9 10 11 12 L1 118 159 200 241 282 323 364 405 446 487 528 569 L2 163 204 245 286 327 368 409 450 491 532 573 614 659 A VQC5000 Series S VQC5000 IP40 compliant Kit (Serial transmission kit): For EX260 Integrated-type (Output) Serial Transmission System IP67 compliant VV5QC51 S kit (Serial

100

: 600 L Reduced by the pressure switch for vacuum with energy saving function and efficient ejectors ZL6 10% reduction Suction: 100 L ZL1 Silencer Weight Max. 44% reduction*2 Suction: 300 L ZL3 Suction: 600 L *2 ZL212 (Existing model): 700 g \ ZL3: 390 g ZL6 Max. 60% reduction*3 Suction: 100 L ZL1 Silencer Pressure switch for vacuum with energy saving function *3 ZL112 (Existing model): 450

Stability of suction position,

D D 51.1 12.5 8.5 38 10 Width across flats 10 68 63 45.8 10 54 50 37 6 Width across flats 6 Dimensions Dimensions Model A B Weight [g]/Pad material N/U/CL S F ZP3E-Y50BMJB10 78.6 122.6 212 211 223 ZP3E-Y50BMJB30 103.6 147.6 228 227 239 ZP3E-Y50BMJB50 123.6 167.6 241 240 252 Model A B Weight [g]/Pad material N/U/CL S F ZP3E-Y63BMJB10 101.6 161.6 422 419 442 ZP3E-Y63BMJB30 126.6 186.6 453 450

CC

CRA1H50-180 60 50 40 50 CRA1H50-90 30 Selected model of rotary actuator 20 100 200 300 400 500 600 700 800 160 Nominal size of converter (mm) Cylinder stroke (mm) 100 63 40 Step (4) Select the size of valve unit How to read the graph (ex: when using a 100 to 450 st cylinder): Draw a line perpendicularly from the cylinder stroke of 450 to the point at which it intersects the (curve) cylinder

CXWM/CXWL

94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 2 x 2-M5 x 0.8 (Hexagon socket head cap plug) 2-M5 x 0.8 Cylinder port 2-M4 x 0.7 thread depth 5 2 x 2-6H7 depth 8 +0.012 0 2 x 2-M6 x 1.0 thread depth 12 4-5.5 through 4-9.5 counterbore depth 5.5 2-RB1006-X552 Shock absorber (mm) ZZ 178 228 278 328 378 428 478 528 Z 150 200 250 300 350 400 450

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

Standard stroke -X Bore size (mm) Standard stroke (mm) Piping port location 15, 32 100, 150, 200, 250, 300, 350 400, 450, 500, 600, 700 Operating direction: Right Operating direction: Left Operating direction: Right Operating direction: Left Operating direction: Right Operating direction: Left Operating direction: Right Operating direction: Left a b c d e f g h 20Nil Note 1) Please consult

Rodless Cylinder for Vacuum Series CYV ø15, ø32 1

excluding gas permeation) Leakage Maximum baking temperature 150C Ambient and fluid temperature 10 to 60C Piston speed 50 to 300 mm/s Stroke adjustment 2 to 0 mm on each side (4 to 0 mm total) Cushion Sine cushion (Air cushion) Port size 5/16-24 UNF 7/16-20 UNF Vacuum grease for linear guide unit and inside the cylinder tube Lubrication Weight (kg) Standard stroke (mm) Model 700 600 500 450

Cylinder, MWB, Tie Rod, TIE ROD CYLINDER W/LOCK, O08, 23.02000 lb

XLC-25,40 ∗ -F7NJ ∗ - ∗ Series

pressure Fluid Vacuum of inert gas Operating temperature oC 5 to 150 Operating pressure Pa(abs) Atmospheric pressure to 1 x 10-6 Conductance l/s Note 1 14 45 Leakage Internal 1.3 x 10-10 for the standard material (FKM) at ambient temperature, excluding gas permeation Pam3/s External 1.3 x 10-11 for the standard material (FKM) at ambient temperature, excluding gas permeation Flange type KF(NW

XL-OMY0002

25 50 123 48 1 12 40 26 41 16 7.5 XLD-40 65 170 66 2 11 55 41 63 20 15 XLD-50 70 183 79 2 11 75 52 68 20 17.5 XLD-63 88 217 100 3 11 87 95 70 72 20 20 XLD-80 90 256 117 3 11 114 110 83 98 20 26.5 XLD-100 108 321 154 3 11 134 130 102 133 20 38 XLD-160 138 335 200 3 11 190 180 153 114 30 40 13 XL-OMY0002 8 X L D 25 M9N A A ( X A N1 A ) 25 40 B A 50 63 80 C P11 160 100 FKM() P8 KF (NW

High Vacuum L Type Valve

Fluid Vacuum of inert gas Operating temperature oC 5 to 150 Operating pressure Pa Atmospheric pressure to 1 x 10-6 Conductance l/s Note 1) 5 14 45 80 Internal 1.3 x 10-10 for the standard material (FKM) Leakage at ambient temperatures , excluding gas permeation Pam3/s External 1.3 x 10-11 for the standard material (FKM) at ambient temperatures , excluding gas permeation Flange type KF (NW

XLJ- -*G1 Series 25 40

Direction of exhaust Fixed Note 1 Operating pressure Pa (abs) Atmospheric pressure to 110-2 Conductance l/s Note 2 12 45 Operating power voltage 100VAC, 200VAC,110VAC,220VAC,230VAC,240VAC,24VDC,12VDC Electrical entry Grommet Pam3/s Internal 1.3 x 10-8 Leakage at ambient temperature, excluding gas penetration External 1.3 x 10-6 at ambient temperature, excluding gas penetration Type of flange KF(NW

VQ4000

for 12 Rc 1/4 Rc 3/8 Bottom ported Rc 1/4 Mixed U D U D Input unit COM PNP (+) or with no SI unit (for SDOW) Nil Kit Serial transmission kit N NPN () Input unit Mounting SI unit Nil 0 1 2 3 4 With no SI unit, or input unit (In the case of SDOW) Without input unit With 1 input unit With 2 input units With 2 input units With 4 input units D U D side mounting U side mounting SI unit OW QW NW

Flange Size: 50, Flange Type: KF(NW), Port Direction: Flange Side, Temperature: 5 to 60°C, Version: 2 (Refresh), Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: A (2pcs, Valve Open/Closed)

Flange Size: 50, Flange Type: KF(NW), Port Direction: Flange Side, Temperature: 5 to 60°C, Version: 2 (Refresh), Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, Lead Wire: Z (5m), Number: A (2pcs, Valve Open/Closed)

Flange Size: 80, Flange Type: KF(NW), Port Direction: Flange Side, Temperature: 5 to 60°C, Version: 2 (Refresh), Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, Lead Wire: Z (5m), Number: A (2pcs, Valve Open/Closed)

Flange Size: 40, Flange Type: KF(NW), Port Direction: w/o Indicator, Flange Side, Temperature: 5 to 60°C, Version: 2 (Refresh), Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: B (1pc, Valve Open)

Valve Type: XLFV (Normally Closed, O-ring Seal), Flange Size: 50, Flange Type: KF (NW), Valve Direction: F (w/Indicator, Left Flange Surface), Version: 2 (Refresh), Auto Switch: M9// (w/o Auto Switch w/Built-in Magnet), Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: None, Voltage: 5 (24 VDC), Electrical Entry: G [Grommet (Lead Wire Length 300mm)], Surge Suppressor: S (w/

Flange Size: 40, Flange Type: KF(NW), Port Direction: Flange Side, Temperature: 5 to 60°C, Version: 2 (Refresh), Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire: L (3m), Number: A (2pcs, Valve Open/Closed)