Compact Cylinder with Solenoid Valve/

V Relay, PLC Yes Grommet 24 V 3-wire (NPN) Diagnostic indication 2-color indication IC circuit 5 V, 12V 3-wire (PNP) 2-wire 12 V A96 A93 A90 A96V A93V A90V IC circuit 5 V 3-wire (NPN equivalent) Yes 100 V 12 V Grommet Relay, PLC 24 V 2-wire 100 V or less 5 V, 12 V IC circuit Solid state auto switches marked with are produced upon receipt of order.

M8/M12 Connector PCA/EX9/EX500 Series EX260 Type 1 EX123/124/126 EX500 Type 2 EX600 EX245 Type 3 EX250 EX120/121/122 ¡Communication Cable/Connector EX140 Type 1 EX180 EX510 Type 2 M8/M12 ATEX

(Including insulating material) 2.35 mm 2.35 mm Rated current 10 A 8 A Rated voltage 600 V 600 V Contact resistance 5 mW or less Insulation resistance 100 MW or more Withstand voltage 1.4 kV Rating/Performance Ambient temperature Connector 25 to 80C Cable 30 to +105C 10 to +105C Min. bending radius (Fixed) 94 mm 110 mm Protection class IP67 (Only with screw tightened) Allowable repeated insertion

ZX

PV port and V port can be connected.

High-Precision Digital Pressure Switch

Functions Copy function Auto-shift function Secret code setting function Power-saving function Resolution switch function MPa/kPa switch function 20 V V V V Convenient Functions 20A V V V V V V p. 13, 21 20B V V V V V V 20C V V V V V V Secret code setting function The key-lock function keeps unauthorized persons from tampering with the settings.

Digital Flow Switch (Integrated display type)

1 V 1.04 V 1.05 V 5 V Current output (4 to 20 mA) 4 mA 4.16 mA 4.19 mA 20 mA F E G PF2M701/702/705/710/750/711/721 PF2M725 Voltage output (0 to 10 V) 1 0 V 0.10 V 0.12 V 10 V 1: The analogue output current from the connected equipment should be 20 A or less when selecting 0 to 10 V.

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

VQZ3000 VFS VS 0.7 0.9 VS7 Bore size (mm) Cylinder speed (mm/s) Base mounted (With sub-plate) Cv Series CJ2 Series CM2 Series CA1 6 10 16 20 25 32 40 40 50 63 80 100 150 300 VQZ1000 Body width 10 450 0.3 V V V 600 750 150 300 VQZ2000 Body width 15 0.6 450 V 600 V V 750 150 300 VQZ3000 Body width 18 0.9 450 V V V V V 600 750 Cylinder speed marked with can be controlled by speed controller

Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Electric Actuator/Slider Type Ball Screw Drive Clean Room Specification 11-LEFS Series LEFS16, 25, 32, 40

1000 Manufacturable stroke range [mm] 11-LEFS16 V V V V V V V V V V 50 to 500 11-LEFS25 V V V V V V V V V V V V 50 to 600 11-LEFS32 V V V V V V V V V V V V V V V V 50 to 800 11-LEFS40 V V V V V V V V V V V V V V V V V V 150 to 1000 *Please consult with SMC for non-standard strokes as they are produced as special orders.

Flow Sensor Series PFMV

Item Input voltage 0 0.7 V 5.10 V 5.20 V Voltage input range Displayable range LLL HHH Settable range PFM PFMV PF2A PF2W PF2D IF 969

Compressed Air Cleaning Filter Series

(Element life check) Max. contact capacity: 10 VA AC, 10 W DC Rated contact voltage (max. operating current): 125 V AC (0.08 A), 30 V DC (0.33 A) Max. contact capacity: 10 W DC Rated contact voltage (max. operating current): 30 V DC (0.33 A) Pressure drop 0.1 MPa Symbol V: Degreasing wash, white vaseline Reed switch Reed switch Body/housing is degreasing washed.

Compact Cylinder

Weights Unit: g D-M9NW(V) D-M9PW(V) D-M9BW(V) Auto switch part no.

VQZ1000/2000/3000

When requiring valve with 600 mm length lead wire specify the model number of valve without plug connector and plug connector assembly. AXT661-31ASingle For 100 V, 110 VAC AXT661-32ALatching AXT661-34ASingle For 200 V, 220 VAC AXT661-35ALatching Only connector and sockets (3 pcs.)

Power Valve: Economy Valve Series VEX5

900 1000 700 600 500 400 300 200 100 0 E 800 900 1000 700 600 500 400 300 200 100 0 F 800 900 1000 700 600 500 400 300 200 100 0 G When the cylinder is extended, the speed controller is metered-out, is connected with the cylinder directly, and its needle is fully open.

Compact Pressure Switch Series ZSE2 (For Vacuum)/ISE2 (For Positive Pressure)

ISA PV 6.5 PSE 8 V 10 IS 10 17.6 5.5 2 x 3.3 Mounting hole Vacuum supply port M5 x 0.8 Vacuum pad connection port M5 x 0.8 ISG ZSM Connector type: ZSE2-0X-15C Indicator light (Red) 20 L H SET Vacuum supply port Vacuum pad connection port 7 35.6 Pressure setting trimmer Pneumatic circuit 600 (3000) + O 32 59 58 10.2 PV 6.5 18 V 8 10 17.6 10 5.5 2 x 3.3 Mounting hole Vacuum supply port M5 x

Remote Type Pressure Sensors/Pressure Sensor Controllers Series PSE

open collector output (2 outputs), Max. 30 V or 80 mA, residual voltage 1 V or less Analog output: 4 to 20 mA Maximum load impedance: 300 (12 VDC), 600 (24 VDC) Minimum load impedance: 50 PSE34 PNP open collector output (2 outputs), Max. 80 mA, residual voltage 1 V or less Analog output: 4 to 20 mA Maximum load impedance: 300 (12 VDC), 600 (24 VDC) Minimum load impedance: 50 ZSE ISE

Digital Flow Switch ( compatible)

impedance: 600 Minimum load impedance: 50 PFMC7###-##-L2#-### NPN + External input type Maximum applied voltage: 28 V Maximum load current: 80 mA Internal voltage drop: 1.5 V or less External input: Input voltage 0.4 V or less (reed or solid state input) for 30 msec. or longer -22No.PF-OMY0002 PFMC7###-##-L#-### PNP type Maximum load current: 80 mA Internal voltage drop: 1.5 V or less

HRL

ion (SO42) [mg/L] 50 or less v Acid consumption amount (at pH4.8) [mg/L] 50 or less v Total hardness [mg/L] 70 or less v Calcium hardness (CaCO3) [mg/L] 50 or less v Ionic state silica (SiO2) [mg/L] 30 or less v Standard item dV dt = Voltage increase ratio dV Iron (Fe) [mg/L] 0.3 or less v v Copper (Cu) [mg/L] 0.1 or less v Sulfide ion (S2) [mg/L] Should not be detected. v Ammonium ion (

MXS

Combination of Options v: Possible X: Not possible Functional option F R P FR FP Adjuster option v v v v v v v (3) v (3) v (3) AS v v v X X X X AT v v v (3) X X X X A v X X X BS v v v X X X X BT v v X X X X X B v Note 3) For combination of buffer mechanism style and stroke adjuster at extension end style, the buffer stroke is shortened by the adjusted length with the stroke adjuster at extension

PF-OMN0009_C

1.5 V 5 V 4 mA 6 mA 20 mA (PF3W511) A B C 1 V 1.4 V 5 V 4 mA 5.6 mA 20 mA (PF3W521-12/14) A B C 1 V 1.8 V 5 V 4 mA 7.2 mA 20 mA (PF3W521-U30) A B C 1 V 1.48 V 5 V 4 mA 5.92 mA 20 mA [L/min] PF3W504 0.5 4 PF3W520 2 16 PF3W540 5 40 PF3W511 10 100 PF3W521-12/14 50 250 PF3W521-U30 30 250 () A B C D 0.6 V 1 V 5 V 5.4 V -40No.PF-OMN0009CN-F PF3W504/520/540/511 2X A AA B DD E F G H J K L

PSxx-OMM0006CN

Max.28 V80 mA 1 V OUT1 OUT2 DC(-) DC(+) -X () NPN 2 Max.28 V80 mA 1 V OUT1 OUT2 DC(-) -20No.PS-OMM0006CN-E DC(+) -V/-T () PNP 2 Max.80 mA 1 V T15 V 1 k V420 mA 12 V 300 24 V 600 50 OUT1 OUT2 DC(-) DC(+) -V/-T () PNP 2 Max.80 mA 1 V OUT1 OUT2 DC(-) DC(+) -Y () PNP 2 Max.28 V80 mA 1 V OUT1 OUT2 DC(-) -21No.PS-OMM0006CN-E M8(3 ) 1 DC(+) 3 DC(-) 4 OUT Z/ISE40A---L -N NPN

0.4

Bore size Series MB, CA2 Pressure 0.5 MPa Load factor 50% Stroke 500 mm Series CM2 Pressure 0.5 MPa Load factor 50% Stroke 300 mm Series CJ2 Pressure 0.5 MPa Load factor 50% Stroke 60 mm Average speed (mm/s) Series 6 10 16 20 25 32 40 40 50 63 80 100 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation Horizontal actuation VQ1101 Port size: 6 one-touch fitting 800 700 600 500