Rotary Actuator/Vane Type

CRA1 Flat surface Piping port CRQ2 Shaft-end shape With angle adjuster unit MSQ + With auto switch unit With angle adjuster unit With auto switch unit MSZ Possible to adjust the angle as desired CRQ2X MSQX Rotating angle Rotating angle adjustment range 270 0 to 240 (Size 30) MRQ 180 0 to 175 90 0 to 85 Auto switch unit Angle adjuster unit Free mount type/CRBU2 Series 12% weight reduction

Stability of suction position,

60.2 55.2 95.3 ZP3E-80BMl-P 91.3 86.3 126 406 Pad Unit ZP3E Series Pad diameter 100, 125 Pad form Bellows type with groove Dimensions: Pad Unit ZP3E-100BMlZP3E-125BMl71 80 88 58 65 73 (Plate) 16.3 (Plate) 16.3 25 8 3 22 3 8 60 50.5 106 100 71.5 24 133 125 90.3 24 Weights [g] Weights [g] Pad material Model N/U/CL S F Pad material Model N/U/CL S F ZP3E-100BMl 125 114 197 ZP3E-100BMl-P 186 175

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

CDRA1BS63 CDRA1BS80 CDRA1BS100 5 5 5 5 36 41 50 60 2.5 2.5 3 4 25 30 35 40 8.5 10 12 12.5 25 30 40 45 15 17 20 25 8.5 10 12 12.5 34 34 34 34 46 57 70 85 17 20 23.5 25 33 33 33 33 14 21 29 39 62 76 92 112 48 60 72 85 M8 x 1.25 depth 8 M10 x 1.5 depth 12 M12 x 1.75 depth 13 M12 x 1.75 depth 14 98 117 142 172 17 19.5 22.5 28 13 14 18 18 13.5 14.5 15.5 16 12 12 12 12 1 8 5 0 0.030 156 (189) 175

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

: Seal Kit 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 50, 63 Bore size (mm) Contents Kit no. 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700 80, 100 40 50 63 80 100 CA2Y40-PS Rod seal 1 pc.

CM2

46 41 77 25 37.5 50 75 100 125 90 102 115 140 165 12.5 54 67 79 92 117 142 167 190 With Rod Boot With Air Cushion Built-in One-touch Fittings Symbol Q P N1 WB G ZZ Bore size (mm) WA Bore size (mm) Stroke Bore size (mm) 20 20 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 21.5 6 8.5 8 13 17.5 20 25 25 158 171 183 196 221 246 271 24.5 6 10.5 8 13 17.5 25 32 32 162 175

CE

A /B 90 0.1mm/ 2-1. 2-2 F.G CE1-R** CE1 CEU5 OUT1OUT5 RS-232C OUT1OUT20(bank ) (31 ) 221 () B L F G D 0.5 L 3 Z 12 12mm 20 20mm 32 32mm 40 40mm 50 50mm 63 63mm 4063 N R H (mm) (mm) (mm) 25 50 75 100 125 150 175 200 250 300 400 500 12 20 32 40 50 63 222 A90 D-A90 M9N D-M9N M9NW D-M9NW A93 D-A93 M9P D-M9P M9PW D-M9PW A96 D-A96 M9B D-M9B M9BW D-M9BW A90V D-A90V M9NV D-M9NV

HRX-OM-I051

PSIG]) Required flow of facility water*9 (50Hz/60Hz) L/min 5/5 6/6 15/22 18/23 (1.3/1.3[gal/min]) (1.6/1.6[gal/min]) (4.0/5.8[gal/min]) (4.8/6.0[gal/min]) Facility water port Rc 1/2 Power supply 3-phase 50/60Hz AC200/200 to 208V10% Main breaker size A 30 60 W415D1080 Dimensions*7 mm W380D870H950 H1075 (W14.96xD34.25xH37.40[inch]) (W16.34xD42.52x H42.32 [inch]) Weight*8 kg 165 (364 [lbs]) 175

MONOSASHI-KUN

The cylinder section does not have a water resistant enclosure. 3-3 Allowable Kinetic Energy 3-3-1 Allowable Kinetic Energy (J) Bore size(mm) 12 20 32 40 50 63 Allowable Kinetic EnergyE 0.022 0.055 0.15 0.26 0.46 0.77 3-3-2 Mass of Cylinder Movable Parts (g) Cylinder stroke (mm) Bore size(mm) 25 50 75 100 125 150 175 200 250 300 400 500 12 28 33 38 43 48 53 20 70 84 98 112 126 140 154 168

Parallel Style Air Gripper/2 Finger, 3 Finger, 4 Finger Series MHS

.: Open Closed 10 (4) 10 (4) 12 (6) 16 (8) 20 (8) 28 (12) 32 (16) 40 (20) 48 (24) 64 (32) Open Height (mm) Mass (g) Bore size (mm) 16 20 25 32 40 50 63 80 100 125 80 43.5 135 46 180 49 370 58 550 64 Closed 930 77.5 Gripping of different diameter workpieces 1,550 89 2,850 116 5,500 135 11,300 175 Standard inside ( )/MHS3 stroke MHS3 Variations MHZ Bore size (mm) With dust cover/MHSJ3 16 20

3

Therefore, it is important to secure as a danger zone a cylindrical area with the length of the clamp arm as its radius, and the stroke plus 20 mm as its height. 123 135 155 203 363 518 65 56 Head flange (including mounting bolt) 130 150 175 209 371 578 69 58 Calculation: (Example) MKG20-10RNZ Standard calculation: MKB20-10RZ Extra weight calculation: Head flange With arm ...222 g .130

CJ2Q

Low Friction: Double Acting Single Rod Series CJ2Q 10, 16 How to Order Bore size 10 16 10mm 16mm Mounting Basic Axial foot Front flange Double clevis Standard stroke (mm) B L F D 10 16 15, 30, 45, 60, 75, 100, 125, 150 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 CJ2Q L 16 60 Standard L 16 60 C73 CDJ2Q With auto switch Number of switches With auto switch (Built-in magnet) 2 1 n S n Auto switch

CG5-S

with One-touch Fittings/Stainless Steel Series AS-FG P. 20 One-touch Fittings/Stainless Steel Series KG P. 21 Miniature Fittings MS P. 25 Tubing T, TU P. 26 Floating Joint/Stainless Steel Type JS P. 27 Features 2 Stainless Steel Cylinder Series CJ5-S 10, 16 How to Order Bore size Standard stroke (mm) 10 16 10 16 10mm 16mm 15, 30, 45, 60, 75, 100, 125, 150 15, 30, 45, 60, 75, 100, 125, 150, 175

P-E00-1A Models to accommodate a wide variety of applications Electric Actuators CAT. E101 A

Without motor brake Without motor brake With motor brake With motor brake Without motor brake 50 Direct acting guide Series LXF 0.03 Ball screw 3 100 50 Series LXP 6 Ball bushing guide 100 Ball screw 0.03 50 5 100 Series LXS 50 10 High rigidity direct acting guide 100 Ball screw 0.03 50 5 100 5 Simplified Selection Flow Chart Series LX Standard stroke (mm) and 25 50 75 100 125 150 175

Hydraulic

CHKGB Bore size Rod end thread type Auto switch Quantity XC63 Stroke Intermediate stroke Applicable tube For 75mm stroke For 100mm stroke Strokes 55, 60, 65, 70 80, 85, 90, 95 Dimensions CHKGB--XC63 B A 55, 60, 65, 70 80, 85, 90, 95 Stroke Bore size (mm) A B A B 32 141 131 40 150 140 175 165 50 156 145 181 170 63 165 152 190 177 80 180 163 205 188 100 207 181 232 206 Note) Dimensions other

Tamper Proof and Flat Head Screw

Flow direction symbols on body Flow Rate and Effective Area Meter-out type Meter-in type ASD230F ASD330F ASD430F ASD530F ASD630F Model 6 8 10, 12 10 12 4, 6 8, 10 1/8 5/32 3/16 1/4 6, 8 6 Metric sizes Symbol JIS symbol 1/4 5/16 3/8 Tubing O.D. 3/16 1/4 Inch sizes 1/4 5/16 3/8 3/8 19.8 flow Flow rate l/min (ANR) {Nl/min} 1200 1300 175 295 350 600 9.1 700 75 500 Controlled (Free) Effective

A

128 3/4, 1 46 06 10 107 06 10 94 M6 x 1 Depth 7.5 39 50 0 77 74 59 175 128 3/4, 1 46 06 10 111 5 Soft Start-up Valve AV2000/3000/4000/5000 Modular F.R.L.

VFS

Rc , 1 4 3 8 2 position double: VFS3210-E, VFS3210-D 3 position closed center: VFS3310-E, VFS3310-D 3 position exhaust center: VFS3410-E, VFS3410-D 3 position pressure center: VFS3510-E, VFS3510-D 3 position double check: VFS3610-E, VFS3610-D 2-5.6 mounting hole 2-5.6 mounting hole Applicable heavy-duty cord O.D. 8 to 10Pilot valve manual override Light window at DZ, EZ 165 (3 position: 175

Table of Contents

Rc , 1 4 3 8 2 position double: VFS3210-E, VFS3210-D 3 position closed center: VFS3310-E, VFS3310-D 3 position exhaust center: VFS3410-E, VFS3410-D 3 position pressure center: VFS3510-E, VFS3510-D 3 position double check: VFS3610-E, VFS3610-D 2-5.6 mounting hole 2-5.6 mounting hole Applicable heavy-duty cord O.D. 8 to 10Pilot valve manual override Light window at DZ, EZ 165 (3 position: 175

Thomas Oil-less Articulating Piston Compressor Flow Rate: 1.4 CFM / 40 LPM , 1.4 CFM / 40 LPM, Max Pressure: 175 PSIG / 12.1 bar , 175 PSIG / 12.1 bar, Horsepower (60 Hz): .33, Kilowatts (60 Hz): .25, Voltage (60 Hz): 115 / 230, Frequency (Hz): 60, Phase: 1-phase, Item Dimensions: Length: 14.3 in / 363 mm Width: 11.2 in / 284 mm Height: 6.95 in / 177 mm

mm Height: 6.42 in / 163 mm , Length: 8.15 in / 207 mm, Width: 6.89 in / 175 mm, Height: 6.42 in / 163 mm, Net Weight: 13.67 lbs. / 6.2 Kg Series Configured Datasheet.