Electric Actuator/Slider Type

9 q r !5 y i !8 o !6 e u @0 @1 @2 w !4 !2 !0!1 !3 !

Modular F.R.L. Units

1 q r e w t i u y o !0 !

Air Slide Table

MXQA-A2087 47 4.4 17 6 10 36 11.2 16.2 M12 x 1 M6 x 12 MXQ25(A) MXQA-CS25 MXQA-CT25 MXQA-A2587 54 5.5 19 6 11 44 13.5 19.3 M14 x 1.5 M8 x 16 MXQ8B MXQB-CS8 MXQB-CT8 MXQB-A887 35 2 10 4 6.5 24 7.1 10.4 M8 x 1 M4 x 8 6.8 MXQ12B MXQB-CS12 MXQB-CT12 MXQB-A1287 40 2.8 12 5 8 29.4 9.2 12.6 M10 x 1 M5 x 10 8.8 MXQ16B MXQB-CS16 MXQB-CT16 MXQB-A1687 47 3.6 17 6 10 36 11.2 16.2 M12 x 1 M6 x

Stability of suction position,

1 !1 !2 !2 i i o o u u y y w w t t r r q q e e With buffer (Vacuum inlet: Vertical) With buffer (Vacuum inlet: Lateral) Component Parts No.

EX510

Mounting example 2 60 35.1 2 x M4 2 x M4 30.8 1707 Series EX510 Parts Description EX510-DX2 EX510-DX1 w r w u r i 0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 CN0 CN1 CN2 CN3 CN4 CN5 CN6 CN7 i 0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 CN0 CN2 CN4 CN6 CN8 CN10 CN12 CN14 0 1 2 3 0 1 2 3 CN1 CN3 CN5 CN7 CN9 CN11 CN13 CN15 1 q 4 5 6 7 4 5 6 7 3 q 5 8 9 10 11 8 9 10 11 7 12 13 14 15 9 12 13 14 15 11 PWR

Vacuum System Peripherals:

8, R 10, R 10, R 10, R 6 8 10 4 6 KM11 6, 10 One-touch fitting One-touch fitting 1 4 3 8 KM12 6, 10 One-touch fitting Rc KM13 3 One-touch fitting One-touch fitting KM11 1 8 1 4 3 8 1 8 1 4 3 8 1 4 3 8 1 4 One-touch fitting R male thread KM12 KM14 3 One-touch fitting KM15 KM15 3 One-touch fitting One-touch fitting rod KM16 KM14 KM16 One-touch fitting 3 One-touch fitting KM13 Miniature fittings

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

Rubber VQZ200 Rubber Metal VQZ300 Rubber Metal Note: The base mounted and body ported manifolds for the VQZ 100/200/300 are stocked in inch porting as part of the P.O.P. 7 Q Q Q Base Mounted Q Q Series VQZ100200300 Q Q Q Q Q Q Q Specifications Q Valve . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .page 10 Manifold . . . . . .

New

Torr (mmHg) 10-12 10-11 10-10 10-9 10-8 10-7 10-6 10-5 10-4 10-3 10-2 10-1 1 10 102 3. Mount a valve with its coil position upward, not downward. 10-12 10-11 10-10 10-9 10-8 10-7 10-6 10-5 10-4 10-3 10-2 10-1 1 101 102 103 104 105 106 107 108 109 Pa Vacuum piping direction: if the system uses a vacuum pump, we ask that you install the vacuum pump on the secondary side.

Rotary Actuator

4 w q !2 !6 !0 !4 !7 !1 o q !5 !1 Component Parts Description Material Note Description Material Note No. No.

0.4

w e q w VQ1100 VQ1101 (B) 2 (A) 4 (B) 2 (A) 4 r r 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) e q w e w q VQ1200 VQ1201 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) r r e q w e q w VQ1301 VQ1401 VQ1300 VQ1400 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) VQ1500 VQ1501 r r (B) 2 (A) 4 (B) 2 (A)

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

Critical pressure 0.6 0.5 Sonic 0.5 0.4 0.4 0.3 0.3 0.2 0.2 0.1 0.1 JSXD30 Port size 1/4 JSXD30 Port sizes 3/8, 1/2 JSXD40 Port size 3/8 JSXD40 Port size 1/2 JSXD50 Port size 3/4 JSXD60 Port size 1 10 1000 2000 3000 10 1000 2000 3000 4000 15 2000 4000 6000 8000 15 2500 5000 7500 10 20 5000 10 15000 25 5000 10 15000 20 Flow rate Q [L/min (ANR)] For Air (Orifice diameter: 35 mm, 40 mm, 50 mm

Electric Actuator

1 6N S q w e r t y u i o !

LVQ

B A B 2 2 3 3 3 4 4 5 5 6 6 1 2 1 2 3 1 2 1 2 1 2 6 x 4 4 x 3 10 x 8 8 x 6 6 x 4 12 x 10 10 x 8 19 x 16 12 x 10 25 x 22 19 x 16 1/4" x 5/32" 3/16" x 1/8" 1/8" x 0.086" 3/8" x 1/4" 1/4" x 5/32" 1/2" x 3/8" 3/8" x 1/4" 3/4" x 5/8" 1/2" x 3/8" 1" x 7/8" 3/4" x 5/8" With reducer Basic size Note 1) Select a fitting the same size as the valve fitting.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

VQ 0 1 5 1 0 1 10 CE compliant Series D-sub connector kit with cable (3 m) VQ1000 VQ2000 1 2 CE compliant Nil Q 10-VV5Q11-09C6FU2 10-VQ1100-51 10-VQ1200-51 10-VQ1300-51 VVQ1000-10A-1 1 setManifold base part no. 2 setsValve part no. (Stations 1 to 2) 4 setsValve part no. (Stations 3 to 6) 2 setsValve part no. (Stations 7 to 8) 1 setBlanking plate part no.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

VQ 0 1 5 1 0 1 10 CE compliant Series D-sub connector kit with cable (3 m) VQ1000 VQ2000 1 2 CE compliant Nil Q 10-VV5Q11-09C6FU2 10-VQ1100-51 10-VQ1200-51 10-VQ1300-51 VVQ1000-10A-1 1 setManifold base part no. 2 setsValve part no. (Stations 1 to 2) 4 setsValve part no. (Stations 3 to 6) 2 setsValve part no. (Stations 7 to 8) 1 setBlanking plate part no.

Step Motor Controller

LE CP 1 (14.2) (13.5) Connector C Actuator side (Terminal no.) 1 2 Cable length (L) 1 3 5 8 A B C (14) (18) A1 B1 8 1.5 m 3 m 5 m 8 m (17.7) (17.7) 5 6 1 2 Connector A A6 B6 Connector D 10 m L (11) (30.7) (14.7) 5 6 15 m (10) 20 m Controller side Produced upon receipt of order 8 10 15 20 LE-CP/Cable length: 8 m, 10 m, 15 m, 20 m ( Produced upon receipt of order) (Terminal no.) (14.2) (13.5

Series AP500

q w q AP1510S e q FV4 FV4 FV4 FV4 w FV4 FV4 FV4 FV4 r 2PW 3PW 3PW 4PW 0 1 1 MPA MPA 2PW 3PW 4PW 40 qIN wOUT eGauge port (Inlet) rGauge port (Outlet) 1) Refer to gauge guide (P.94) for gauge specifications.

Vacuum Unit

1 p. 31 Applicable nozzle size ZK2 BG5 A 4 For nozzle size 07, 10 6 For nozzle size 12, 15 1 Applicable type Release lever (10 pcs. per set) Construction !

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Basic Style A Without auto switch B P A B P Q Q With auto switch Bore size (mm) 5 st 10 st 20 st 5 st 10 st 5 st 10 st 5 st 10 st 20 st 5 st 10 st 20 st 20 st 20 st 20 st 5 st 10 st 32 40 50 Rc 1/8 40 46.5 M5 x 0.8 11.5 11 50 56.5 28 34.5 38 44.5 Rc 1/8 Rc 1/8 Rc 1/4 10.5 11 10.5 50 56.5 68.5 10.5 11 10.5 60 66.5 68.5 43 49.5 50.5 33 39.5 40.5 78.5 10.5 88.5 60.5 50.5 Rc 1/8

7

1 t !1 t o y o y u IN(P1) u r IN(P1) r OUT(P2) B A OUT(P2) A B C IN(P1) IN(P1) e C e q w q w VXD23 VXD24 !2 i i !0 !2 A B !0 !1 !1 o t o u B u OUT (P2) w C IN(P1) A r r OUT(P2) IN (P1) e e C w IN(P1) q q VXD27, 28, 29 VXD25, 26 Component Parts Operation When coil !2 is energized, armature assembly !1 is attracted by core i and pilot valve A is open.