Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

3 !4 !5 !6 !7 No. q w e r t y u i o !

0.4

: SQ1230D r e e q w r e e q w SQ1230D SQ1231D 2 (B) (A) 4 2 (B) (A) 4 (R1) 5 1 (P) 3 (R2) (R1) 5 1 (P) 3 (R2) 3 position: SQ1 30 3 4 5 3 position: SQ1 31 3 4 5 r e e q w r e e q w SQ1331 SQ1431 SQ1531 SQ1330 SQ1430 SQ1530 2 (B) (A) 4 2 (B) (A) 4 2 (B) (A) 4 2 (B) (A) 4 2 (B) (A) 4 2 (B) (A) 4 (R1) 5 1 (P) 3 (R2) (R1) 5 1 (P) 3 (R2) (R1) 5 1 (P) 3 (R2) (R1) 5 1 (P) 3 (R2) (R1) 5 1 (P) 3 (R2

SY

SS5Y33, #3 (#3 + #7 + #8 + #9) SS5Y3-45-AD .

ZP

3 3 3 3 3 M10 x 1 M10 x 1 M10 x 1 Q Q Q D D (F) (F) (F) P P P Width across flat 10 (Hexagon) Width across flat 10 (Hexagon) Width across flat 10 (Hexagon) S S S 31 8 31 8 31 14.9 14.9 14.9 R R R 6 6 6 M5 x 0.8 M5 x 0.8 M5 x 0.8 8 Y Y Y A A A C a a a C C b B 20 30 21 31 Dimensions Model Dimensions Model Dimensions a 3.5 4 5 6 A 4.5 5 6 7 b 7 B 8 C Y a 4 5 6 8 A 5 6 7 9 C 2 x 1.8 2 x 2 2.5

Vacuum System Peripherals:

m Lead wire length 0.6 m Lead wire length 3 m Connector type Nil Grommet type 10 Max. vacuum pressure C CL CN Connector type S 84 kPa 53 kPa L (7 stations maximum) r e w q Silencer Nil None With silencer Number of ejector/valve stations t r e w q 1 Alignment (for special specifications) Vacuum switch Nil None With vacuum switch E COM 1 2 3 4 6 7 8 5 COM 8 7 6 5 4 3 2 1 U side D side Connector

Hydraulic

Nil S 3 n 2 pcs. 1 pc. 3 pcs. "n" pcs.

New

3/8", 12 Electrical entry Conduit Faston One-touch fitting P Model Q R Q R 10, 3/8", 12 50 57.5 (64) 25.5 63.5 (70) VXZ2 3 A ( ) are the dimensions of Normally Open (N.O.). 25 Series VXZ For Air, Water, Oil Dimensions/Body Material: Aluminum, C37, Stainless Steel Grommet (with surge voltage suppressor) Grommet Q F D D 300 Q F 300 Bracket a h e R C E d g R C E j f J J J IN OUT IN OUT 2 x M

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

Body material: Bronze Flow Rate Characteristics JSX Series e q q r w w t e y Table of UL-compliant Products JSXD Series JSXZ Series JSXM Series Option Replacement Parts r u !2 t i !3 y o !1 !4 u !0 !2 i !3 o !4 !0 !1 !5 !6 Component Parts Component Parts No.

V100

VQZ (A) 2 (A) 2 VZ 3 (R) 1 (P) 3 (R) 1 (P) VS VFN r e w q r e w q N.O. N.O. (A) 2 (A) 2 3 (R) 1 (P) 3 (R) 1 (P) Component Parts No.

0.4

w e q w VQ1100 VQ1101 (B) 2 (A) 4 (B) 2 (A) 4 r r 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) e q w e w q VQ1200 VQ1201 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) r r e q w e q w VQ1301 VQ1401 VQ1300 VQ1400 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) VQ1500 VQ1501 r r (B) 2 (A) 4 (B) 2 (A)

Air Cylinder Series CM2

(Refer to Best Pneumatics No. 3.)

7

3 VXS r !3 IN(P1) r OUT(P2) VXB B A OUT(P2) A B VXE IN(P1) C C IN(P1) e e q w VXP q w VXD2A VXD2B VXR !4 i VXH !4 u u !0 VXF A B !1 i VX3 !2 !0 !2 VXA o !1 t !3 o OUT (P2) w IN(P1) !3 B r OUT(P2) A r IN (P1) e C e IN(P1) C q w q VXD2E, 2F, 2G VXD2C, 2D Component Parts Operation When coil !

Electric Actuator/Slider Type

9 q r !5 y i !8 o !6 e u @0 @1 @2 w !4 !2 !0!1 !3 !

Table of Contents

Description SGP-E, SS400 Filter case w Cover q AFF SS400 Replacement Parts AM Model AMD800 AMD801 AMD900 AMD901 AMD1000 No. Description Material Misc. Element NBR 63174 63174 63174 3 pcs. 63174 3 pcs. 63174 5 pcs. Element r Packing e 63148 63148 63148 3 pcs. 63148 3 pcs. 63148 5 pcs. x T3 O.D.112 x I.D.90 O.D.112 x I.D.90 NBR O.D112 x I.D90 x T3 3 pcs.

Aluminum High Vacuum Angle Valve

100 88 196 96 83 110 114 11 3 117 90 235 131 102 130 134 11 3 154 108 300 112 153 180 190 11 3 200 138 315 Note 1) Dimension E applies when heater option is included.

Rotary Actuator

3 !3 !3 !3 !3 !3 !3 !3 y r r y A port B port A port B port A port B port A port B port e (Output shaft) (Output shaft) !8 Parallel key for size 40 i e u !2 i u w !4 w q !2 !6 !0 !4 !7 !1 o q !5 !1 Component Parts Description Material Note Description Material Note No. No.

ZP

3 3 3 3 3 M10 x 1 M10 x 1 M10 x 1 Q Q Q D D (F) (F) (F) P P P Width across flat 10 (Hexagon) Width across flat 10 (Hexagon) Width across flat 10 (Hexagon) S S S 31 8 31 8 31 14.9 14.9 14.9 R R R 6 6 6 M5 x 0.8 M5 x 0.8 M5 x 0.8 8 Y Y Y A A A C a a a C C b B 20 30 21 31 Dimensions Model Dimensions Model Dimensions a 3.5 4 5 6 A 4.5 5 6 7 b 7 B 8 C Y a 4 5 6 8 A 5 6 7 9 C 2 x 1.8 2 x 2 2.5

Air Slide Table

ZZ MXQ 8A-mm2 With end lock (8) Pilot port 2 x M5 x 0.8 Dimensions Q 5 J [mm] Model J Q MXQ8A-10Zm2 61.5 5.5 30 MXQ8A-20Zm2 71.5 MXQ8A-30Zm2 81.5 MXQ8A-40Zm2 97.5 MXQ8A-50Zm2 124.5 MXQ8A-75Zm2 139.5 43 7.5 0.5 5 8.5 38 3 3 26.4 3 MXQ8A-75Z2 5.5 5 J * Dimensions other than those listed above are the same as those for the standard type.

NCQ8

3 !1 y q e u o w i Male thread Parts List Remarks Remarks Description Material No.

Stability of suction position,

Arrival time to stable Pv 95% after adsorption [sec] QL : Leakage volume during workpiece adsorption [L/min (ANR)] Note 1) Q = + QL T1 T2 = 3 x T1 Max. suction flow rate Qmax = (2 to 3) x Q [L/min (ANR)] Ejector Select the ejector with the greater maximum suction flow rate from the Qmax indicated above.