Metal Seal/Rubber Seal Series VQ Body Ported

, C6, M5 C3: One-touch fitting for 3.2 C4: One-touch fitting for 4 C6: One-touch fitting for 6 M5: M5 thread D side U side Stations 1 2 3 Dimensions Formula L1 = 11n + 20 n: Station (Maximum 24) 2n-C3, C4, C6, M5 C3: One-touch fitting for 3.2 C4: One-touch fitting for 4 C6: One-touch fitting for 6 M5: M5 thread 1 2 3 4 5 6 7 8 9 10 11 12 42 62.5 73 n L L1 L2 L3 31 50 60.5 75 100 110.5 53

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2 x 1/4 to 1/2 Port size 2 x 1/2 Port size 66 With digital pressure switch: IR32l1 2-0llEl-A 76 48 72.5 53 16 M12 x 1 Mounting hole 2.3 M28 x 1.5 30 141 91.7 76.1 65.3 22 48.1 2 x 1/8 Pressure gauge port EXH OUT IN 66 2 x 1/2 Port size 2 x 1/4 to 1/2 Port size 786 IR1200-A/2200-A/3200-A Series Specific Product Precautions 1 Be sure to read this before handling the products.

Fieldbus System

L6 5.5 L2 DIN rail holding screw (For DIN rail mounting) 8 47 1.5 DIN rail holding screw (For DIN rail mounting) Communication connector 2 x M4 Mounting hole Light/surge voltage suppressor Marker groove 1 0 (5.5) 1.7 A 14 A B A 14 A B A B 14 A B A 14 A B 3 2 (35) 92.6 A 14 A 83 106 90 60.5 0 1 (40.9) 5 4 PWR 2 3 4.6 (8) B 12 B 12 B 12 B 12 B 12 PCI BUS IN BUS OUT 53 7 8 8 63.1 4.6 ( ) C6:

Vacuum Regulator

thickness: Max. 4 43 10.5 x 4.5 R R 50 46 40 8 x 6.5 51.7 51.3 51.7 51.3 Rc 1/8 Pressure gauge port Pressure gauge 103 5.2 66.4 Fitting Part Dimensions (mm) Fitting size VAC/SET 22 Straight R Elbow S Elbow T Elbow U 20 6 1/4" 8, 5/16" 10, 3/8" 21 21.5 24 27 27.5 27.5 28.5 30.5 21 21 21 21 10.5 10.5 10.5 11 65 26.6 40.5 One-touch fitting N P A B IRV20-lllZ : With digital pressure switch 53

Lubricator Series AL10 to 60

70 70 90 95 G 27 40 54 54 66 66 E 47 47 C 26 36 38 40 38 41 45 H 22 23 26 25 35 35 J 5.4 6.5 8.5 8.5 11 11 K 8.4 8 10.5 10.5 13 13 L 40 53 70 70 90 90 M 2.3 2.3 2.3 2.3 3.2 3.2 AL10 AL20 AL30 AL40 AL40-06 AL50 AL60 M5 x 0.8 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1 25 40 53 70 75 90 95 Optional specifications Metal bowl B 82 121 142 176 176 250 268 Model Metal bowl with level gauge

Soft Start-up Valve

74 108 53 Width across flats 36 80 [mm] Optional specifications With bracket With built-in silencer Model K L M N P Q R S T U V W X Y AV2000-m02-1 to 6D/Y(Z)m-A 30 50 51.5 44 5.5 10 66 2.3 33.5 54 M4 x 0.7 Depth 6 3 Width across flats 14 AV3000-m03-1 to 6D/Y(Z)m-A 41 50 53.5 46 5.5 15 70 2.3 33.5 54 M4 x 0.7 Depth 6 3 Width across flats 19 AV4000-m04-1 to 6D/Y(Z)m-A 50 60 64 54 8.5 18

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1/2 (15A) 10 2.20 53 Note) Weight of grommet type.

Membrane Air Dryer

.: J (NPT threads: K inch) Purge air for Purge air for dehumidification dehumidification (Maintenance space 100 mm or more) Option: P Port size L A B C D E Model F G J H K IDG10, 10H IDG20, 20H Values inside [ ] are for NPT threads. 83 187 53 165 62 97 224 119 [126] 8 5/16 1/4, 3/8 113 212 54 190 82 114 249 147 [154] 10 3/8 12 Series IDG

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External Pilot Solenoid Type (Conduit terminal) A B C D E F G H I J K L M N O Model SGH130-10 SGH230-3015 SGH230-7015 SGH330-3020 SGH330-7020 SGH430-3025 SGH430-7025 Main port Pilot port 3 x 3/8 1/8 60 28 46 133 34 60 24 29 142 37.5 75 62 6.5 33 3 x 1/2 1/8 60 28 48 135 34 65 24 29 144 37.5 75 62 8.5 35 3 x 1/2 1/8 77 33 49 150 20 44.5 80 36 25 159 50 100 70 5 33 3 x 3/4 1/8 77 33 53 154

LEC-OM02904

3-20 3.6 3-23 3.7 3-24 3.7.1 3-24 3.7.2 3-25 3.7.3 3-27 3.8 3-28 3.9 SSCNET 3-29 3.10 3-31 3.10.1 3-31 3.10.2 3-32 3.11 3-33 3.11.1 3-33 3.11.2 3-34 3.11.3 (LE--) 3-37 3.12 3-38 3.13 3-39 1 - 4 41 4-12 4.1 42 4.1.1 42 4.1.2 43 4.1.3 44 4.2 45 4.3 46 4.4 48 4.5 48 TM 49 4.5.1 MR Configurator2 4.5.2 4-11 5 515-35 5.1 (No.PA) 52 5.1.1 53

AC Servo Motor Driver (SSCNET Type)

Parameter setting (PLC side) . 53 7.1 SSCNET Setting .53 7.2 Movement amount per pulse .54 7.3 Stroke limit .55 7.4 Operating conditions .56 8. Home position return (PLC) . 57 8.1 Returning to home position .57 9. Positioning operation (PLC) . 58 9.1 Setting of Operation data .58 9.2 Movement MOD .62 10.

AC Servo Motor Driver (SSCNET /H Type)

Save the displayed waveform screen (print screen). -53- 6.10 Display All Monitor List The method how to obtain the electric actuator condition is described with the display all function of the setup software. Click Monitor Display All of the setup software to display Display All window. The condition of each item is displayed.

OMU0023

S 115 73 s 20 14 DC4 52 34 4 84 54 T 116 74 t 21 15 NAK 53 35 5 85 55 U 117 75 u 22 16 SYN 54 36 6 86 56 V 118 76 v 23 17 ETB 55 37 7 87 57 W 119 77 w 24 18 CAN 56 38 8 88 58 X 120 78 x 25 19 EM 57 39 9 89 59 Y 121 79 y 26 1A SUB 58 3A : 90 5A Z 122 7A z 27 1B ESC 59 3B ; 91 5B [ 123 7B { 28 1C FS 60 3C < 92 5C \ 124 7C | 29 1D GS 61 3D = 93 5D ] 125 7D } 30 1E RS 62 3E > 94 5E ^ 126 7E

Antibacterial Filter (5μm) Antibacterial Filter (0.1μm) Odor Removal Filter Bacteria Removal Filter

Dimensions HF2-BFA, HF2-BFB, HF2-BFD HF2-BFC Model P A B C D E G J HF2-BFA30 1/4, 3/8 53 151.1 21.5 26.5 30 35 26.5 HF2-BFB30 1/4, 3/8 53 151.1 21.5 26.5 30 35 26.5 HF2-BFC30 1/4, 3/8 53 126.4 21.5 26.5 30 35 26.5 HF2-BFD30 1/4, 3/8 53 151.1 21.5 26.5 30 35 26.5 HF2-BFA40 1/4, 3/8, 1/2 70 180.9 25.5 35.5 38.4 40 35.5 HF2-BFB40 1/4, 3/8, 1/2 70 180.9 25.5 35.5 38.4 40 35.5 HF2-BFC40 1/4, 3

Mist Separator Regulator

: Max5 (Pressure gauge port size) (Port size) maintenance Clearance for Dimensions Model Optional specifications Round ty pe pressure gauge (Semi-standard: Z) Round ty pe pressure gauge (With color zone) Standard specifications Round type pressure gauge P1 P2 A B C D E F G J K J J J AWM20-D 1/8, 1/4 1/8 40 100.6 71.8 21 M281 45 21 5 37.5 57.5 37.5 58.5 37.5 58.5 AWM30-D 1/4, 3/8 1/8 53

Ｍ icro Mist Separator Regulator

: Max5 (Pressure gauge port size) (Port size) maintenance Clearance for Dimensions Model Optional specifications Round ty pe pressure gauge (Semi-standard: Z) Round ty pe pressure gauge (With color zone) Standard specifications Round type pressure gauge P1 P2 A B C D E F G J K J J J AWD20-D 1/8, 1/4 1/8 40 100.6 71.8 21 M281 45 21 5 37.5 57.5 37.5 58.5 37.5 58.5 AWD30-D 1/4, 3/8 1/8 53

Digital Flow Switches

SET SET button Use this button to set the value or the set mode. y DOWN button ( button) Use to change the mode or decrease the set value. 53 Digital Flow Switch Series PF2D For Deionized Water and Chemicals Functions/PF2D Refer to the Instruction Manual for information on setting and operating.

Single Axis Electric Actuator Series LJ1H

m (kg) Refer to page 145 for deflection data. 32 Standard Motor/Vertical Mount Specification Series LJ1H20 Dimensions/LJ1H202PF Scale: 10% 12.5 9.5 Work piece mounting reference plane 110 67 20 4-M6 x 1 thread depth 15 4-M8 x 1.25 thread depth 20 8H8 depth 10 Cable entry side Body mounting reference plane Z section detail 8H8 depth 8 130 200 52 52.5 Stroke + 150 (table movement range) 53

Square Tube Type Air Cylinder Series MB1

53 73 73 MB-B03 MB-B05 MB-B08 Rotation Bore size (mm) A Method for longitudinal mounting of clevis bracket When there is no air cushion, the unit is equipped with rubber bumpers.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

38 48 66 79 100 117 C 1 1 2 2 3 3 D 30 40 55 75 87 114 Fn 95 110 Fd 34 70 114 Fc 17 26 41 52 70 83 G 40 39 63 68 69 96 H P.C.D L1 6-4.4 6-6.6 8-8.4 L2 XMA-16 XMA-25 XMA-40 XMA-50 XMA-63 XMA-80 40 50 65 70 88 90 P.C.D 27 P.C.D 58.7 P.C.D 92.1 XYA/In-line type C D G Fd C (K flange) B H 45 A E Fn (KF flange) (mm) Model A 79.5 106 119 149 178 B 48 66 79 100 117 C 1 2 2 3 3 D 23.5 38 53