Air Cylinder

D-A9 5 15 30 Note 1) 15 + 35(n 2) 2 (n = 2, 4, 6) Note 3) 50 + 35 (n 2) (n = 2, 3, 4, 5) CM2 CM3 D-M9V 5 20 35 20 + 35(n 2) 2 (n = 2, 4, 6) Note 3) 35 + 35 (n 2) (n = 2, 3, 4, 5) CG1 CG1 D-A9V 5 15 25 15 + 35(n 2) 2 (n = 2, 4, 6) Note 3) 25 + 35 (n 2) (n = 2, 3, 4, 5) CG3 D-M9WV D-M9AV 10 20 35 20 + 35(n 2) 2 (n = 2, 4, 6) Note 3) 35 + 35 (n 2) (n = 2, 3, 4, 5) JMB D-C7 D-C80 5 15

Valve Single Unit

8 stations 4 stations 02 2 stations 02 2 stations 02 2 stations (2) (2) (2) Applicable up to 20 solenoids.

Valve Single Unit

8 stations 4 stations 02 2 stations 02 2 stations 02 2 stations (2) (2) (2) Applicable up to 20 solenoids.

AS

Connection thread size NPT, R1/8 5.2 to 6.6 (7 to 9) NPT, R1/4 8.9 to 10.3 (12 to 14) NPT, R3/8 16.2 to 17.7 (22 to 24) 2. Chamfer dimension for female thread of the NPT, R1/2 20.7 to 22.1 (28 to 30) connection thread M5, 10-32 UNF 2.

SZ3000

Stations Stations Scale: 37% [With external pilot] 2n2-One-touch fitting (A, B ports) Applicable tube O.D.: 4 6 13.3 (Pitch) P= 10.5 13.3 24 24 16.2 17.8 16.2 17 36.7 34 B 2 B 2 B 2 B 2 B 2 R 3 B 2 B 2 B 2 B 2 R 3 B 2 PE X A 4 A 4 A 4 A 4 A 4 P 1 A 4 A 4 A 4 A 4 P 1 A 4 2-One-touch fitting 2-One-touch fitting (P, R ports) Applicable tube O.D.: 8 (X, PE ports) Applicable tube O.D.: 6 2n1-M5

Table of Contents

For details, refer to page 2-4-68. Note 2) See page 2-4-69 for details.

Thermo-chiller

Note q Nipple Stainless steel HRLE090 R1 2 For CH1 HRLE050 R1/2 [CH2 side] w Ball valve Stainless steel HRLE090 Rc1 1 For CH1 HRLE050 Rc1/2 t w e Different diameter tee Stainless steel HRLE090 Rc1 x Rc3/8 1 For CH1 HRLE050 Rc1/2 x Rc3/8 r Hexagon bushing Stainless steel HRLE090/050 Rc3/8 x Rc1/4 2 For CH1/CH2 t Pressure gauge HRLE090/050 R1/4 2 For CH1/CH2 y Nipple Stainless steel HRLE090

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8 stations 4 stations 02 2 stations 02 2 stations 02 2 stations (2) (2) (2) Applicable up to 20 solenoids.

Vacuum System Peripherals:

Port size P, A port R port Model Effective area (mm2) (Cv) Flow characteristics C (dm 3/(sbar)) to VEX3 20 1 3 1 8 1 2 160 to 670 160 to 670 160 to 670 2.4 to 9.8 Air operated 1 2 24 VEX3 00 5 7 9 3 4 to 2 VEX3 21 1 3 to 1 8 1 2 2.4 to 9.8 Body ported External pilot solenoid valve 24 1 2 to 2 3 4 VEX3 01 5 7 9 VEX3 22 1 3 to 1 8 1 2 2.4 to 9.8 Internal pilot solenoid valve 24 1 2 to 2 3

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8 stations 4 stations 02 2 stations 02 2 stations 02 2 stations (2) (2) (2) Applicable up to 20 solenoids.

VCC

TQ Blanking plug (with O-ring) 1 VVCC12-10A-1 For 2 port valve Hexagon socket head plug (R1/4) 1 Blanking plug (with O-ring) 1 VVCC13-10A-1 For 3 port valve Hexagon socket head plug (R1/4) 2 647 VCC Series Specifications VCC12 VCC13 VCC12D Model Passage number 2 port 3 port Note 3) 2 port (Diaphragm type) Construction (Fluid contact material) Poppet seal (PEEK resin + Stainless steel) + Special

IDX-OM-W031

2 2 Installation . 2 2 2 2 1 Location . 2 2 2 2 2 Anchorage . 2 2 2 2 3 Air piping. 2 2 2 2 4 Drain Tube . 2 3 2 2 5 Electric Wiring . 2 4 2 3 Cautions for Reinstallation . 2 5 Chapter 3 Operation / Shutdown 3 1 Check points before operation . 3 1 3 2 Operation . 3 1 3 3 Shutdown . 3 2 3 4 Cautions about restart . 3 2 3 5 Check points before restart . 3 2 3 6 Precautions for long-term non-operation

IDX-OM-W032

/www.smcworld.com/ i i-1 . i-1 i-1-1 . i-1 i-2 . i-2 i-2-1 . i-2 i-2-2 . i-3 i-2-3 . i-3 i-2-4 . i-3 i-2-5 . i-3 i-2-6 . i-4 i-2-7 . i-4 i-2-8 . i-5 i-2-9 . i-5 i-3 . i-6 i-4 / . i-7 1 1-1 . 1-1 2-1 . 2-1 2-2 . 2-1 2-2-1 . 2-1 2-2-2 . 2-2 2-2-3 . 2-2 2-2-4 . 2-2 2-2-5 . 2-3 2-3 . 2-4 3 / 3-1 . 3-1 3-2 . 3-1 3-3 . 3-2 3-4 . 3-2 3-5 . 3-2 3-6 . 3-2 4 4-

VZ3000

2 to 20 stations D side: 2 to 10 stations U side: 2 to 10 stations M Mixed Nil Standard length (Specify a longer rail than the standard length.)

K35-OMW0030

. 18 4-2.

Valve for Water and Chemical Base Fluids (2/3 Port Air Operated Valve)

Blanking plug (with O-ring) 1 VVCC12-10A-1 For 2 port valve Hexagon socket head plug (R1/4) 1 Blanking plug (with O-ring) 1 VVCC13-10A-1 For 3 port valve Hexagon socket head plug (R1/4) 2 9 VCC Series Specifications VCC12 VCC13 VCC12D Model Passage number 2 port 3 port Note 3) 2 port (Diaphragm type) Construction (Fluid contact material) Poppet seal (PEEK resin + Stainless steel) + Special

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D-A9 30 Note 1) 15 5 (n = 2, 3, 4, 5) (n = 2, 4, 6) Note 3) (n 2) 2 35 + 35 (n 2) 20 + 35 D-M9V 35 20 5 (n = 2, 3, 4, 5) (n = 2, 4, 6) Note 3) (n 2) 2 25 + 35 (n 2) 15 + 35 D-A9V 25 15 5 (n = 2, 3, 4, 5) (n = 2, 4, 6) Note 3) (n 2) 2 D-M9WV D-M9AV 35 + 35 (n 2) 20 + 35 35 20 10 (n = 2, 3, 4, 5) (n = 2, 4, 6) Note 3) (n 2) 2 D-C7 D-C80 60 + 45 (n 2) 20 + 45 60 20 5 (n = 2, 3, 4, 5

CG5-S

(Rod cover side) 2 pcs. (Different sides) 2 pcs.

CG5-S

(Rod cover side) 2 pcs. (Different sides) 2 pcs.

VFA3000

port) 2 x 18 (R1, R2 port) 1764 Series VFA3000 5 Port Air Operated Valve Dimensions: Body Ported 2 position double: VFA3230-01 02 2 x 18 (Pilot port) 2 x 4.3 (Mounting hole for manifold) Max. 3 Max. 3 2 x 4.2 (Mounting hole) 3 x , 14 18 (P , A, B port) 2-3 (Breathing port) 2 x 3 2 x 18 (R1, R2 port) SYA 3 position closed center/exhaust center/pressure center: VFA3 30-X1 3 4 5 01 02 SYJA