XLF Series

H 5 Initial power/ Power consumption (W) 100 VAC 800/180 1200/300 1600/400 200 VAC 3200/180 4800/300 6400/400 Note 1) Initial power and power consumption are nominal values. Note 2) Heaters are not available for the size 16 models. 200V The heaters are PTC thermistor type design.

High Vacuum L Type Valve

H 5 Initial power/ Power 100 VAC 800/180 1200/300 1600/400 200 VAC 3200/180 4800/300 6400/400 consumption (W) Note 1) Initial power and power consumption are nominal values. Note 2) Heaters are not available for the size 16 models.

XLG Series

H 5 Initial power/ Power consumption (W) 100 VAC 800/180 1200/300 1600/400 200 VAC 3200/180 4800/300 6400/400 Note 1) Initial power and power consumption are nominal values. Note 2) Heaters are not available for the size 16 models. The heaters are PTC thermistor type design.

smcmaintenancepartslist

Main applications Nominal filtration accuracy (m) Material Core material Stainless steel 304 0.5, 1, 5, 10, 20, 50, 75, 100 Cotton 0 to 60 0.5, 1, 5, 10, 20, 50, 75, 100 0.2 MPa 0.1 MPa Polypropylene Polypropylene 0 to 400 Glass fiber Stainless steel 316 1, 5, 10, 20 Note) Size for all is 65 x L250.

CE

DATA OUT 1 2 3 SET 1 2 SET MONOSASHI-KUN AC100V OUT1 COM OUT2 COM COM OUT3 Series Guide Series CE1 Bore size (mm) Available stroke range Standard stroke (mm) Series CEP1 Standard stroke (mm) Bore size (mm) 12 equiv. 250 400 500 300 175 200 150 125 100 75 50 100 25 75 50 25 12 25 to 150 20 equiv. 20 25 to 300 32 25 to 400 40 25 to 600 50 25 to 600 63 25 to 600 CEU1 CEU5 Output transistor system

RSH/RS1H

load F [N] 500 500 50 400 400 RZQ RS1H50, 63, 80 300 300 1.0 RS1H80 MI W S RS1H50 200 200 RS1H63 0.9 Operating pressure P [MPa] 0.8 100 100 CEP1 0.7 10 20 30 40 10 20 30 40 0 0 0.6 CE1 Transfer speed [m/min] = 0 Transfer speed [m/min] = 0.1 0.5 0.4 CE2 Graph (3) Graph (4) Bore size 20, 32/ = 0 Bore size 20, 32/ = 0.1 0.3 ML2B 0.2 0.1 C J G5-S 80 80 1000 2000 3000 4000 0 5000 Lateral

Aluminum High Vacuum Angle Valve

Heater assembly quantity 200/40 400/70 400/80 600/130 800/180 1200/300 1600/400 100V H5 120C 800/40 1600/80 1600/80 2400/130 3200/180 4800/300 6400/400 200V The inrush current of the heater flows for several ten seconds when using 100V while it flows for several seconds when using 200V. However, this inrush current decreases momentarily.

RSH/RS1H

RS H A 63 Lateral load F [N] 500 500 50 400 400 RZQ RS1H50, 63, 80 300 300 1.0 RS1H80 MI W S RS1H50 200 200 RS1H63 0.9 Operating pressure P [MPa] 0.8 100 100 CEP1 0.7 10 20 30 40 10 20 30 40 0 0 0.6 CE1 Transfer speed [m/min] = 0 Transfer speed [m/min] = 0.1 0.5 0.4 CE2 Graph (3) Graph (4) Bore size 20, 32/ = 0 Bore size 20, 32/ = 0.1 0.3 ML2B 0.2 0.1 C J G5-S 80 80 1000 2000 3000 4000

Table of Contents

Do not drop, bump or apply excessive impact (1,000 m/s2) when handling. Even if the switch body is not damaged, the switch may suffer internal damage that will lead to malfunction. 2. Hold the product from the body side when handling. The tensile strength of the power cord is 49 N, and pulling it with a greater force can cause failure. 3.

Rotary Table/

Do not drop, bump or apply excessive impacts (300m/s2 or more for reed switches and 1000m/s2 or more for solid state switches) while handling. Although the body of the switch may not be damaged, the inside of the switch could be damaged and cause a malfunction. 2. Do not carry a cylinder by the auto switch lead wires. Never carry a cylinder by its lead wires.

Compact Rotary Actuator Series CRQ2

Do not drop, bump or apply excessive impacts (300 m/s2 or more for reed auto switches and 1000 m/s2 or more for solid state auto switches) while handling. Although the body of the auto switch may not be damaged, the inside of the auto switch could be damaged and cause malfunction. 2. Observe the proper tightening torque for mounting an auto switch.

Stability of suction position,

ZP3EA-S2 [Weight: 7.6 g] 24 47 15 29 4 20 36 Applicable pad part no. ZP3E-63UM ZP3E-80UM ZP3E-100UM ZP3E-125UM ZP3E-63BM ZP3E-80BM ZP3E-100BM ZP3E-125BM Applicable pad part no.

High Vacuum L Type Valve

H5 Initial power / 100 VAC 200/40 400/70 400/80 600/130 800/180 Power 200 VAC 800/40 1600/80 1600/80 2400/130 3200/180 consumption (W) Note 1) Initial power and power consumption are nominal values. Note 2) Heaters are not available for size 16.

VZA200/400

1 3 Port Air Operated Valve Series VZA200/400 Specifications SA Fluid Air 1 2 1 2 VZA4 2, 4 4 1 2 1 2 VZA2 2, 2 4 1 2 1 2 VZA4 2, 4 4 1 2 1 2 VA Operating pressure range (MPa) 0.1 to 1.0 0.15 to 1.0 VZA2 2, 2 4 0.1 to 1.0 0.15 to 1.0 SA Pilot pressure range (MPa) Impact/Vibration resistance (m/s2) Note) 150/50 VA Operating pressure Pilot pressure Note) Impact resistance: No malfunction from

10

4/RJ08 4 4 12 10 Impact mass m [kg] Impact mass m [kg] Impact mass m [kg] RJ1007L 3 3 8 RJ0806L RJ0604 2 6 2 4 RJ0806H RJ1007H 1 1 RJ0805 RJ1006 2 0 0 0 0 500 1000 1500 2000 0 500 1000 1500 2000 0 200 400 600 800 1000 Collision speed [mm/s] Collision speed [mm/s] Collision speed [mm/s] Graph !6/RJ14 Graph !8/RJ27 Graph !

High Vacuum L Type Valve

H5 Initial power / 100 VAC 200/40 400/70 400/80 600/130 800/180 Power 200 VAC 800/40 1600/80 1600/80 2400/130 3200/180 consumption (W) Note 1) Initial power and power consumption are nominal values. Note 2) Heaters are not available for size 16.

Peltier-type Chiller Thermo-con/ Compact Type

For details, refer to the optional accessory (page 11). 6 HEF Series Cooling Capacity Circulating fluid: Water, Flow rate: 1 L/min Circulating fluid: Water, Flow rate: 1 L/min, When constant fan speed mode is selected 600 600 500 500 Cooling capacity [W] Cooling capacity [W] Ambient temperature 25C 400 400 Ambient temperature 25C 300 300 200 200 Ambient temperature 35C Ambient temperature

INFORMATION For material handling and clamping of small workpieces 34 mm Power Clamp Cylinder Compact Type New New ø25, ø32 Lightweight Compact 53 mm High clamping force Lock function Lightweight Weight : 580 g (ø25) 192.4 mm Width : 34 mm Compact Heigh

73 psi [0.5 MPa] Peak clamping force position 112 [500] 90 [400] 0.3 MPa 44 psi [0.3 MPa] 67 [300] 45 [200] 22.5 [100] 0 0 0.5 1 1.5 2 2.5 3 3.5 4 4.5 5 Shim thickness [mm] 9 CKZT -X2797 -X2798 Be sure to read this before handling the products.

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

Maximum manufacturable stroke (mm) Bore size (mm) Standard stroke (mm) 10 50, 100, 150, 200, 250, 300 500 15 50, 100, 150, 200, 250, 300, 350, 400, 450, 500 750 25 100, 150, 200, 250, 300, 350, 400, 450, 500, 550, 600 1200 The stroke is available in 1 mm increments with the maximum stroke as the upper limit. For a stroke in the standard stroke range, suffix the part number with -XB10.

Low Profile Guide Type

Standard Stroke Maximum manufacturable stroke (mm) Bore size (mm) Standard stroke (mm) 10 50, 100, 150, 200, 250, 300 500 15 50, 100, 150, 200, 250, 300, 350, 400, 450, 500 750 25 100, 150, 200, 250, 300, 350, 400, 450, 500, 550, 600 1200 The stroke is available in 1 mm increments with the maximum stroke as the upper limit.