Electric Actuator / Slider Type 《 AC Servo Motor 》 Positioning repeatability [mm] Basic type:0.02/High precision type: 0.01 Lost motion [mm] Basic type:0.1 or less/High precision type: 0.05 or less Lead [mm] 20 12 6 24 16 8 30 20 10 Impact resistance/vibration Resistance [m/s2] Note 4) 50/20 Drive method Ball screw(LEFS)Ball screw + Belt(LEFSL R) Guide type Liner guide Operating temperature range [] 5 to 40 Operating humidity range [%RH]
Positioning repeatability [mm] 0.04 Lost motion [mm] Note3) 0.1 or less Lead [mm] 27 42 Impact / Vibration resistance [m/s2] Note4) 50 / 20 Drive method Belt Guide type Liner guide Acceptable external resistance [N] 20 Operating temperature range [] 5 to 40 Operating humidity range [%RH] 90 or less (No condensation) Regenerative option It may be required by speed and work load.
0.49 to 4.90 m/s2 0.98 to 9.80 m/s2 1.96 to 19.6 m/s2 Nominal size:16 5kg 1.25kg 10kg 2.5kg Maximum load weight NOTE2) Nominal size:25 20kg 5kg 10kg 2.5kg Acceleration and deceleration method Trapezoidal drive Moving direction Horizontal direction Positioning points Both ends (mechanical stoppers), 1 intermediate position Both ends 0.01mm Repeated Positioning stopping precision Intermediate
Acceleration Deceleration Can be set in units of 1mm/s2.
Unrestricted 300/50 m/s2 VZ Fluid Ambient and fluid temperature Response time (at the pressure of 0.5 MPa)(1) VF Manual override Lubrication Mounting orientation Impact/Vibration resistance(2) VFR VP4 Enclosure Note 1) Based on dynamic performance test, JIS B 8375-1981.
Kit/Electrical entry/Cable length F P Kit (Dsub connector) Kit (Flat cable connector) Connector location Top (vertical) Side (horizontal) Connector location Top (vertical) Side (horizontal) P .1.10-40 P .1.10-36 Without cable Without cable S0 S1 S2 S3 S0 S1 S2 S3 U0 U1 U2 U3 U0 U1 U2 U3 stations Max.16 (2) Max.16 (2) F kit P kit P kit F kit With cable (1.5m) With cable (3m) With cable (5m
Connector location Connector location P.1.10-124 P.1.10-128 P.1.10-132 Top (vertical) Side (honzontal) Top (vertical) Side (honzontal) Without cable With cable (1.5m) With cable (3m) With cable (5m) Without cable Without cable F F S0 S1 S2 S3 P P S0 S1 S2 S3 S0 S1 S2 S3 U0 U1 U2 U3 U0 U1 U2 U3 U0 U1 U2 U3 0 1 2 3 (2) (2) (2) G 2 to 16 stations With cable (1.5m) With cable (3m) With cable
Component Parts 06 10 No. 1 Description Material Note Plug-in VFS6000-PSub-plate Body Aluminum die-casted Aluminum die-casted Platinum silver Platinum silver 06 10 Non plug-in VFS6000-S2 3 Aluminum die-casted Stainless steel Mounting bolt and gasket are not included.
Lubrication Not required Mounting orientation Unrestricted 300/50 Note 2) Impact/Vibration resistance (m/s2) Note 1) In case of single type, be certain that pressure within operating pressure range be supplied to supply port, because return pressure is introduced from supply port {1(P)} for activation.
MY316 300 400 500 500 400 300 950 N Collision deceleration (m/s2) Collision deceleration (m/s2) 200 200 240 N 100 100 30 40 50 50 40 30 20 20 10 10 1 2 3 4 5 10 20 30 10 5 4 3 2 1 0.2 0.4 0.3 m1max m3max m1max m2max m3max m2max Weight (kg) Weight (kg) MY320 MY340 500 400 300 300 400 500 370 N Collision deceleration (m/s2) Collision deceleration (m/s2) 200 200 1500 N 100 100 50 40 30 30 40
0.49 to 4.90 m/s2 0.98 to 9.80 m/s2 1.96 to 19.6 m/s2 Nominal size:16 4(5)kg 1.25(1.25)kg 6(10)kg 2.5(2.5)kg Maximum load weight NOTE 1) Nominal size:25 11(20)kg 4(5)kg 8(10)kg 2.5(2.5)kg Acceleration and deceleration method Trapezoidal drive Moving direction Horizontal direction Positioning points Both ends (mechanical stoppers), 1 intermediate position 0.01mm Both ends Repeated Positioning
Insulation resistance 10 to 500 Hz with a 1.5 mm amplitude or 98 m/s2 acceleration, whichever is smaller. Vibration resistance 490 m/s2 in X, Y, Z directions 3 times each Impact resistance 1000 Vp-p, Pulse width 1 s, Rise time 1 ns Noise resistance 200 g 240 g Weight Note 3) Port size (Rc, NPT, G) 1/8, 1/4 3/8 1/2 Note 1) The system accuracy when combined with PF2A2/3.
Type of impact 16 12 s 20 15 m 25 15 32 19 40 1 2 24 m2 Kinetic energy E1 50 30 63 37 Thrust energy E2 Fs Fs + mgs Fs mgs 80 40 100 40 Absorbed energy E E1 + E2 Rubber Bumper (10 only) Positive Stroke from One End Due to Pressure Symbol : Speed of impact object (m/s) F: Cylinder thrust (N) s: Shock absorber stroke (m) m:Weight of impact object (kg) g: Gravitational acceleration (9.8 m/s2
reach to the Speed (Unit: mm/s2) The setting to define the pushing operation or the positioning operation.
reach to the Speed (Unit: mm/s2) The setting to define the pushing operation or the positioning operation.
Acceleration Deceleration Can be set in units of 1mm/s2.
S3 S0 S1 S2 S3 U0 U1 U2 U3 S0 S1 S2 S3 Without cable Without cable Without cable (2) Max. 16 stations (2) Max. 16 stations (2) With cable (1.5 m) With cable (3 m) With cable (5 m) With cable (1.5 m) With cable (3 m) With cable (5 m) With cable (1.5 m) With cable (3 m) With cable (5 m) Max. 16 stations Kit P Kit P Kit J Kit J Kit F Kit F L S The valve is equipped with an indicator light/surge
P1 LED lever meter Sensor S1 S3 Red is on: Output OFF Green is on: Output ON S4 S2 + P2 Red 1 Gap too big S1, S2: Fixed orifice S3: Variable orifice (Set via adjustment knob) S4: Detection nozzle Red 2 Green 1 BEST POSITION The bridge circuit is constructed as shown in the diagram. Position the work piece in front of the nozzle (S4).
Dimensions 4-3.2 circuit board mounting hole Circuit board type DC24V MADE IN JAPAN + PCW-EC16Z00 4 4 YMX-F4 42 0 1 2 3 4 5 6 7 8 9 A B C D E F 1 + *S2 S1 2 3 4 4 4 (28.5) 3 130 With cover (DIN rail mount compatible) With cover (DIN rail mount compatible) 16.7 DC24V MADE IN JAPAN + PCW-EC16Z01 28.3 YMX-F4 45 0 1 2 3 4 5 6 7 8 9 A B C D E F 1 + *S2 S1 4.1 2 3 4 (48.5) 5.1 (50) 133 10.5 10.5
SEMI S8 SEMI S8 is a guideline on ergonomics which is more detailed than the ergonomic requirements in Section 14 of SEMI S2. SEMI F47 SEMI F47 is a SEMI standard which stipulates guidelines regarding voltage sag immunity. Semiconductor manufacturers require this standard for temperature control equipment, just like SEMI S2.