One-touch Fittings

11.5 4.6 14.2 1/4 KQ2F07-35l 17.46 10.9 29.2 13.3 13.3 13 11.5 4.6 25.1 3/8 KQ2F07-36l 22.23 10.9 30.5 13.2 13.3 13 11.5 4.6 38.7 D 1/4 M L1 L2 5/16 1/8 KQ2F09-34l 14.29 13 24.8 9.2 14.2 26.1 18 6 15.2 1/4 KQ2F09-35l 17.46 13 29.7 11.8 14.2 26.1 18 6 26.2 3/8 KQ2F09-36l 22.23 13 31 12.4 14.2 26.1 18 6 39.8 3/8 1/4 KQ2F11-35l 17.46 15.1 30.5 11.8 15.6 35.3 29.1 8 27.2 3/8 KQ2F11-36l 22.23

High Vacuum Angle Valve, XL Series

Valve Body (for Swagelok) Body (for VCR) Spacer (optional) P 33 Series XSA High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm Electrical entry Grommet (G) Electrical entry Conduit (C) F G 27010 F G D 29010 H C G(PF)1/2 DIN terminal (D) F G J C H 29.5 39 H C OUT IN A P G(PF)1/2 6 to 9 22 E B (body dimension) P (fitting size) 2-M5 Thread depth M A Terminal (T) F G2 (Bs) J (XSA S) 25 33 H K

Speed Controller with One-touch Fitting Stainless Steel Type Elbow Type/Universal Type AS-FG Series Push-lock type

Body size Port size M5 M5 x 0.8 U10/32 10-32UNF 1 M5 x 0.8 10-32UNF AS 2 0 F A 1 1 M5 06 G Body size 1 AS 2 0 S F A 1 2 01 06 G Body size 2/3/4 Body size Made to Order Refer to page 678 for details. 2 1/8, 1/4 3 3/8 4 1/2 Push-lock type Type 2 Elbow 3 Universal Seal method Nil Without sealant S With sealant Note) Face seal method is used for the G thread type.

VFS

01 02 2 position double: VFS2200-F-01 02 3 position closed center: VFS2300-F-01 02 3 position exhaust center: VFS2400-F-01 02 3 position pressure center: VFS2500-F-01 02 2-5 mounting hole Manual override 150.5 (3 position: 158) (Non-locking) 2-5 mounting hole Manual override (Non-locking) With light/surge voltage suppressor 163.5 (3 position: 171) With light/surge voltage suppressor 1 8 (

MHK2

Applicable Auto Switch/Refer to page 12-13-1 for further information on auto switches.

MHK2

Applicable Auto Switch/Refer to page 12-13-1 for further information on auto switches.

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

S41 Type/Side Ported [ ] for AC VS SS3YJ3-S41Station -M3 L plug connector (L) M plug connector (M) 48.6(GZ, GS: 49.3) [50.3] 41.5 [48] P R P R 11 22 28 29.1 2-3.5 (Lead wire length) (Mounting holes) 300 52.6 [59.1] 300 (Lead wire length) 41.5 [48] L2 4-M5 X 0.8 L1 48.9 [50.2] (P, R port) 58.5 44.9 41.5 [48] 13 4.5 13 4.5 29.1 22.5 A A 13 10 5 5 4-M5 X 0.8 P=10.5 13.5 (P, R port) n-M3 X 0.5

HRX-OM-W032

G1, Symbol N: NPT1) Tank port size Rc3/4 (Symbol F: G3/4, Symbol N: NPT3/4) Supply side pressure range MPa 0.2 to 0.5 Automatic water fill function (Standard) Supply side water temp. range oC 5 to 35 Automatic water fill port size Rc1/2 (Symbol F: G1/2, Symbol N: NPT1/2) Over flow port size Rc1 (Symbol F: G1, Symbol N: NPT1) Fluid contact part material Metal Stainless steel, Copper (Brazing

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

When the zero cut-off function is set to 0, the flow rate display value starts from 0 L/min., but in conditions other than horizontal installation and supply pressure of 0.35 MPa, the output may not be 0 L/min. 13 E F G PF2M701/02/05 /10/50/11/21(-L) PF2M725(-L) Voltage output (0 to 10 V)*1 0 V 0.10 V 0.12 V 10 V Output Output C G D H B F A E 0 0 Min. value of Flow Zero cut-off Max. value

JXCx-OMT0061CN

F 0 1 F0 1 Sub Function 71 () F8 2 F0 2 F0 Address 3 F0 3 F0 Address(0) 4 F0 4 F0 DATA(H) 5 F0 5 F0 DATA(L) 6 F0 6 F0 7 70 1 7 F0 F8 2 8 70 3 8 F0 F8 4 9 F0 Sub Function 9 F0 10 F0 Address 10 F0 11 F0 Address(0) 11 F0 1 12 F0 DATA(H) 12 F0 13 F0 DATA(L) 13 F0 2 14 F0 14 F0 15 F0 15 F0 96 - 23. 1 1 2 1 1 RWrn+7 12 (4) 12 10 (0255)RWrn+7 PLC 10 1 1 100mm/s RWwn+2

MXW

Amount of displacement on A when the load is applied at F. Amount of displacement on A when the load is applied at F.

Guide Cylinder Series MGG

88 125mm or more 175 80 37 46 57 100 13 31 12 350 to 500 21 14 Rc 1/8 M6 x 1 depth 13 90 150mm or more 201 82 37 52 65 114 16 38 12 350 to 600 21 14 Rc 1/8 M8 x 1.25 depth 16 101 200mm or more 238 92 44 62 84 138 20 47 12 350 to 800 15 25 Rc 1/4 M10 x 1.5 depth 21 116 250mm or more 285 104 55 75 94 164 25 58 14 26 350 to 1000 16 17 Guide Cylinder Series MGG Basic type/MGGB 63 to 100 4-F

HRS100/150

G3/4, Symbol N: NPT3/4) Tank drain port Rc1/4 (Symbol F: G1/4, Symbol N: NPT1/4) Automatic fluid fill system (Standard) Pump capacity HEA IDH Supply side pressure range MPa 0.2 to 0.5 Supply side fluid temperature C 5 to 35 Automatic fluid fill port Rc1/2 (Symbol F: G1/2, Symbol N: NPT1/2) Overflow port Rc1 (Symbol F: G1, Symbol N: NPT1) Fluid contact material Stainless steel, Copper (Heat

CV/MVGQ

750 751 to 1000 Bore size (mm) Without rod boot With rod boot l 1/4 stroke 1/4 stroke 1/4 stroke 1/4 stroke 1/4 stroke N S W X Y MM H 51 58 58 71 72 ZZ 221 231 239 271 283 e 43 52 52 65 65 ZZ 229 239 247 280 292 h 59 66 66 80 81 f 11.2 11.2 11.2 12.5 14.0 40 50 63 80 100 27 30 31 37 40 13 13 16 16 17 84 90 98 116 126 8 0 0 0 0 27 27 34 44 43 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22 x 1.5 M26 x

CJP

Mounting nut (Refer to page 6-2-13.)

CJP

Mounting nut (Refer to page 6-2-13.)

1.1

IDF-TR4000-5 IDF-TR4000-6 IDF-TR4000-7 Mass (kg) 275 259 355 299 320 35 355 299 320 42 IDF-TR-8 E C G B D A 4 x F (mm) A 540 B 400 C 260 D 300 E 11 F 30 G 94 Transformer part no.

Fieldbus System

E: Push-turn locking manual type F: Slide locking type i Rated voltage Only rubber seal type is available for the 4-position dual 3-port valve. 5 24 VDC !

CV/MVGQ

-X 20Data Bore size (mm) Without rod boot With rod boot l N S W X Y H 51 58 58 71 72 ZZ 221.6 231.6 248.6 283.6 291.6 e 43 52 52 65 65 f 11.2 11.2 11.2 12.5 14 h 59 66 66 80 81 ZZ 229.6 239.6 256.6 292.6 300.6 40 50 63 80 100 13 13 16 16 17 27 30 31 37 40 130.6 133.6 140.6 152.6 159.6 8 8 8 0 0 27 27 34 44 43 1/4 stroke 1/4 stroke 1/4 stroke 1/4 stroke 1/4 stroke 10-15-71 Series CVS1 Rod

IZx-OMT0049

A IZT4-16 2 160 4 13 IZT4-22 3 220 6 13 Metric IZT4-34 5 340 8 15 IZT4-40 6 400 10 22 IZT4-46 7 460 3/16" 15 1/4" 14 IZT4-58 9 580 Inch 5/16" 15 IZT4-64 10 640 3/8" 23 IZT4-82 13 820 Elbow (mm) IZT4-112 18 1120 Applicable tube O.D.