Clean Room Rodless Cylinder Series CYP ø15, ø32 1

Universal type (throttle valve) 10-AS2301F-01-06-X214 10-AS1301F-M5-06-X214 10-AS2301F-01-06-X214 1.

IZx-OMP0064

IZS40 IZS41 IZS42 0 1 Remote Remote controller *1 controller *1 1 3 1 0.1 2 5 3 0.5 3 8 5 1 4 10 10 3 5 15 15 5 6 20 20 10 7 30 30 15 8 DC + DC + 20 9 DC DC 30 *1: Set when remote controller is used. 5-3-2.

Clean Room Rodless Cylinder Series CYP ø15, ø32

Universal type (throttle valve) 10-AS2301F-01-06-X214 10-AS1301F-M5-06-X214 10-AS2301F-01-06-X214 1.

Speed Controller with Uni One-touch Fitting Series AS Elbow Type/Universal Type 1

Metric size Inch size Type Elbow Universal 2 3 1 8" 5 32" 23 01 3.2 4 6 8 10 12 04 06 08 10 12 03 05 07 09 11 13 3 16" 1 4" 5 16" Control type Meter-out Meter-in 0 1 3 8" 1 2" Use 1/8" tube.

VZS

.10 146.5 (3 position: 156.5) 72.5 300 (Lead wire length) 151 (3 position: 161) With light/surge voltage suppressor With light/surge voltage suppressor Pg7 79 71.5 Other dimensions are the same as the grommet type.

Table of Contents

For details, refer to page 2-4-29. 3 position type uses two stations. The A side solenoid of a 3 position valve is connected to SOL. A at the station with the smaller number in the above figure and the B side solenoid to SOL. A at the next station. 1 2 3 4 5 6 7 8 9 10 Terminal no.

5-Port Solenoid Valve

4-position dual 3-port valve Operating pressure + 0.1 or more (Min. 0.25) to 0.7 Ambient and fluid temperatures [C] 10 to 50 (No freezing) 2-position single/double 5 20*1 4-position dual 3-port valve 3-position 3 10*1 SY3000 SY5000 Max. operating frequency [Hz] 2-position single/double 5 10*1 SY7000 4-position dual 3-port valve 3 3-position 3 10*1 Non-locking push type Push-turn locking

Fluoropolymer Piping Equipment

LVN 3 6 x 4 1/2" x 3/8" LQHB 4 3/8" x 1/4" 1/4" x 5/32" 1/2" x 3/8" 3/8" x 1/4" 1/4" x 5/32" 1/2" x 3/8" 3/8" x 1/4" 3/4" x 5/8" 3/4" x 5/8" 1/2" x 3/8" 3/8" x 1/4" 12 x 10 TL TIL 10 x 8 TLM TILM 6 x 4 4 10 x 8 6 x 4 12 x 10 6 x 4 3 x 2 TD TID TH TIH 3/4" x 5/8" 19 x 16 3/8" x 1/4" 1/4" x 5/32" 1/4" x 5/32" 1/8" x 0.086" 5 12 x 10 10 x 8 12 x 10 10 x 8 10 x 8 8 x 6 6 x 4 10 x 8 12 x 10

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for maniicld mountinq CE marked 0.1s high speed response 3 CE marked DeviceNet compatible 4.5. 6. 8. 14 CE marked lA"o.amLt@g 3. 5. 7. 10 CE marked digital iiffifre 3 . 5 . 6 . 1

CYP_EN

10-AS2301F-01-04-X214 Resin-body Universal type 10-AS1301F-M5-06-X214 10-AS2301F-01-06-X214 One-touch (Restrictor) fitting 10-AS2301F-01-06-X214 mounted type 10-AS1001F-04-X214 10-AS2001F-04-X214 In-line type (Restrictor) 10-AS1001F-06-X214 10-AS2001F-06-X214 10-ASD230F-M5-04 10-ASD330F-01-06 Dual type (Speed controller) 10-ASD230F-M5-06 10-ASD330F-01-08 Note 1) See SMC Pneumatic Clean Series

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

VQ 0 5 1 0 2 W 1 10 VQ2000 2 Series CE compliant Circular connector kit with cable (3 m) CE compliant Nil Q Function 10-VV5Q21-09C6M2-W 10-VQ2100-51 10-VQ2200-51 10-VQ2300-51 VVQ2000-10A-1 1 setManifold base part no. 3 setsValve part no. (Stations 1 to 3) 3 setsValve part no. (Stations 4 to 6) 2 setsValve part no. (Stations 7 to 8) 1 setBlanking plate part no.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

VQ 0 5 1 0 2 W 1 10 VQ2000 2 Series CE compliant Circular connector kit with cable (3 m) CE compliant Nil Q Function 10-VV5Q21-09C6M2-W 10-VQ2100-51 10-VQ2200-51 10-VQ2300-51 VVQ2000-10A-1 1 setManifold base part no. 3 setsValve part no. (Stations 1 to 3) 3 setsValve part no. (Stations 4 to 6) 2 setsValve part no. (Stations 7 to 8) 1 setBlanking plate part no.

CA2

socket 17 BA-04 BA-05 BA-06 BA-08 BA-10 80, 100 20JIS B 1181 Class 3 Intermediate M12 x 1.75 19 JIS B4636 + Two-angle socket 19 2.

0.55

Piping port Port size Series Model 3.2 4 6 8 10 12 16 4(A), 2(B) 1/4 VF5;2;-;;1-02 1(P), 5(EA), 3(EB) 1/4 4(A), 2(B) 3/8 VF5;2;-;;1-03 1(P), 5(EA), 3(EB) 3/8 4(A), 2(B) 1/4 VF5;44-;;1-02 1(P), 5(EA), 3(EB) 1/4 4(A), 2(B) 3/8 VF5;44-;;1-03 VF5000 1(P), 5(EA), 3(EB) 3/8 4(A), 2(B) 1/2 VF5;44-;;1-04 1(P), 5(EA), 3(EB) 1/2 1(P), 5(R), 3(R) 3/8 Type 20 manifold base 1(P), 5(R), 3(R) 1/2 Type 21

Pressure Relief 3 Port Valve with Locking Holes

N)02~(F,N)04(-B,S)(-K,M,R,Z)-D VHS40W-(F,N)06(-B,S)(-K,M,R,Z)-D VHS50W-(F,N)06~(F,N)10(-B,S)(-K,M,R,Z)-D Contents Page 1.

AS-FS Series Speed Controller with Indicator/ Elbow Type: Uni Thread Type

Note 1) Body size AS-F AS-F With indicator Metric size Inch size 2 1/8, 1/4 3 3/8 4 1/2 Type Tubing O.D. 23 3.2 Note 2) Tubing O.D. 01 1/8" 03 5/32" 07 1/4" 09 5/16" 11 3/8" 13 1/2" TMH 2 Elbow 04 4 06 6 08 8 10 10 12 12 16 16 ASD Control type Note) AS 0 Meter-out 1 Meter-in Indicator window direction AS-FE Note) Meter-out and meter-in types can be visually identified by color of the knob

Conforming to OSHA Standard Pressure Relief 3 Port Valve With Locking Holes Series VHS20/30/40/50

Body size Port size Thread type Nil N F Symbol Port size Rc NPT G 01 02 03 04 06 10 1/8 1/4 3/8 1/2 3/4 1 A spacer or spacer with bracket is required if the valve is combined with modular FRL. SUP SUP Applicable air preparation equipment Spacer with bracket part no. Pressure relief 3 port valve VHS20 VHS30 VHS40 VHS40-06 VHS50 IN OUT Spacer part no.

5 Port Air Operated Valve Series SYA3000/5000/7000 1

11) (0.5) 10 5 5 2-1 (Bleed port) 10 10 7 7 2-1 (Bleed port) M3 x 0.5 (Piping port) 28 M5 x 0.8 (Piping port) 3 position closed center/exhaust center/pressure center SYJA3 20-M3(-F) 3 position closed center/exhaust center/pressure center SYJA3 40-M5 3 4 5 3 4 5 7.1 9 10 2-M3 x 0.5 (Pilot port) 1.8 10 4 A B 1.5 7 8.2 19 2-M3 x 0.5 (Pilot port) (For mounting) 2-3.2 22 3 49 2.5 (For mounting

Tamper Proof Speed Controller with One-touch Fitting Series AS


1F-T Elbow Type/Universal Type 1

Metric size Inch size Universal 3 04 06 08 10 12 01 4 6 8 10 12 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 03 05 07 09 11 With One-touch fitting M5 Port size M5 x 0.8 R 1/8 R 1/4 R 3/8 R 1/2 10-32 UNF NPT 1/8 NPT 1/4 NPT 3/8 NPT 1/2 AS 01 02 03 04 ASP ASN U10/32 N01 N02 N03 N04 AQ ASV AK ASS Needle Valve/Flow Characteristics ASR ASD230F ASD330F ASD430F 100 200 400 1.5 3 6 ASF Effective area (mm2) Effective

Series 10-, 21- AW-B Filter Regulator

Note 9) : For thread type: NPT only Standard Specifications 10-/21-AW20(K)-B 10-/21-AW30(K)-B 10-/21-AW40(K)-B 10-/21-AW40(K)-06-B 10-/21-AW60(K)-B 1/8, 1/4 1/4, 3/8 Model Port size 1/4, 3/8, 1/2 3/4 3/4, 1 Pressure gauge port size 1/8 Fluid Air 5 to 60C (with no freezing) Ambient and fluid temperature Proof pressure 1.5 MPa Maximum operating pressure 1.0 MPa Set pressure range 0.05 to 0.85