M-E05-1-LQ1

Tubing extensions size Nut Insert bushing Model Size Insert pin/Name plate symbol LQ1E2A-T-R8 2 2-07 LQ1-2N07 LQ1-2B07 8 x 6 LQ1E2A-T-R9 2 2-07 LQ1-2N07 LQ1-2B07 10 x 8 LQ1E3A-T-R1 3 3-11 LQ1-3N11 LQ1-3B11 12 x 10 LQ1E3A-T-R8 3 3-11 LQ1-3N11 LQ1-3B11 6 x 4 LQ1E3A-T-R9 3 3-11 LQ1-3N11 LQ1-3B11 8 x 6 LQ1E4A-T-R1 4 4-13 LQ1-4N13 LQ1-4B13 10 x 8 LQ1E4A-T-R8 4 4-13 LQ1-4N13 LQ1-4B13 12 x 10 LQ1E4A-T-R9

CM2

TT TD Q P WB N1 G WA Bore size (mm) In the case of with rod boot, refer to basic style on page 6-4-31 and f dimension on page 6-4-13. 20 20 20 144 36 52 32 32 10 8 6 8.5 8 13 17.5 21.5 25 25 25 152 40 60 40 40 10 9 6 8 13 17.5 10.5 24.5 32 32 32 154 40 60 40 40 10 9 6 8 13 17.5 11.5 27 40 40 40 188 44.5 77 53 53 11 10 8 11 16 21.5 15 32.5 6-4-34 35 Series CDM2W Air Cylinder: Standard Type

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

11 13.5 A 21 16 14 16.5 A 9 7 9.5 B 10 10.5 13 13 13.5 19 21.5 20.5 B 16.5 22 24.5 23.5 B 15 17.5 16.5 A 10 13 16 16 18.5 13.5 11.5 14 A 20 15 13 15.5 B 10.5 11 13.5 13.5 14 19.5 22 21 B 15.5 21 23.5 22.5 A 7 10 13 13 15.5 10.5 8.5 11 B 7.5 8 10.5 10.5 11 16.5 19 18 A 17 12 10 12.5 B 12.5 18 20.5 19.5 12 16 20 25 32 40 50 63 Auto Switch Mounting Height D-A7H D-A80H D-F7 D-J79 D-F7W D-F79W

CV/MVGQ

TZ N 20 25 32 40 8 10 32 41 32 8 18 13 5 52 15.5 13 26 5 57.5 28 M8 x 1.25 15 24 M20 x 1.5 36 20 0 0.033 26 0 0.033 26 0 0.033 32 0 0.039 9 10 40 45 40 10 22 13 5.5 60 19.5 17 32 6 63.5 33.5 M10 x 1.25 15 30 M26 x 1.5 40 9 10 40 45 40 12 22 13 5.5 60 19.5 17 32 6 68 37.5 M10 x 1.25 15 34.5 M26 x 1.5 40 10 11 53 50 53 14 24 16 7 77 21 22 41 8 76 46.5 21.5 42.5 M32 x 2 44.5 M14 x 1.5 Dimensions

CV/MVGQ

-Outside Local Area: (800) 258-9200-www.stevenengineering.com H1 NA Eh8 H N F MM D L B1 CZ K AL CX I A CD HX Bore size (mm) 20 25 32 40 Stroke range 24 41 15 13 M8 x 1.25 8 30 19 5 15.5 10 28 18 9 65.3 Up to 300 13 5 20 0 0.033 30 45 15 13 M10 x 1.25 10 30 19 5.5 19.5 10 33.5 22 9 70.5 Up to 300 17 6 26 0 0.033 34.5 45 15 13 M10 x 1.25 12 30 19 5.5 19.5 10 37.5 22 9 76.5 Up to 300 17 6 26

ZP

/Thin flat with ribs Flat with ribs Deep Bellows 6, 8, 10, 13, 16, 20, 25, 32, 40, 50 2, 4, 6, 8, 2 x 4, 3.5 x 7, 4 x 10, 10, 13, 16, 20, 25, 32, 40, 50 Pad dia.

Table of Contents

AXT500-13 VQ7060-13-2 VQ7060-13-1 VQ7060-13-3 37 x 1.6 Gasket Gasket A Gasket B Gasket C O-ring Mini Y seal Pilot valve assembly Double check spacer DIN terminal q w e r t y u i o MYN-11 MYN-16 VQZ110QVV71-FPG UKL-S1 3-10-10 11 Series VQ7-6 Manifold Specifications How to Order Manifold VV71 6 02D 02R VK Air release valve coil rating Stations 1 1 station VZ Silencer box Nil 1 2 3 4 9 None

Table of Contents

535 1 5 10 20 50 1 5 10 20 50 16-11-13 10 For details about certified products conforming to international standards, visit us at www.smcworld.com.

SMC

94 119 144 J 40 40 40 50 60 85 118 155 I 10 10 10 10 15 40 55 68 NN 2 2 2 2 3 4 5 7 NA 2 2 2 2 2 4 4 4 H 40 40 40 50 30 35 35 35 KA 125 173 223 G 16 16 16 16 21 26 39 19 HA 40 40 40 50 30 70 70 70 N 4 4 4 4 6 6 6 8 GA 16 16 16 16 51 61 109 159 13-/22-MXS16-10 13-/22-MXS16-20 13-/22-MXS16-30 13-/22-MXS16-40 13-/22-MXS16-50 13-/22-MXS16-75 13-/22-MXS16-100 13-/22-MXS16-125 143 MXS Air slide

NCG/CG1

40 50 63 20 25 32 40 50 63 12 6 6 6 8 10 10 77 77 79 87 102 102 24.2 114 12 12 12 12 13 13 13 13 13 16 20 20 0.25 stroke (13) (22.5) 10(12) 26.7 119 (13) (25) 10(12) 30.2 121 (13) (25) 10(12) 34.6 139 13 40.6 162 13 47.1 162 The minimum stroke with rod boot is 20 mm.

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

12 14 16 18 16 17 17 17 17 18 10 7 4 5 5.5 6 7.5 0.5 1 1 1.25 2 3 5.5 6.5 7.5 8.5 10 14.5 Bore size (mm) Bore size (mm) S GA ZZ GB HD HH PD (17.5) (11.5) (19.5) (11.5) 20 25 32 40 50 63 20 25 32 40 50 63 12 6 6 6 8 10 10 77 77 79 87 102 102 12 12 12 12 13 13 24.2 114 13 13 13 16 20 20 0.25 stroke (22.5) (13) 10(12) 26.7 119 M10 x 1.25 (25) (13) 10(12) 30.2 121 M12 x 1.25 (25) (13) 10(12)

Combination Cylinder

17 17 22 BC 38 45 45 52 BN 80 90 90 BP 1/8 1/8 1/8 1/8 BQ BZ 57.5 69 69 76 CD 9 9 9 10 CX 10 10 10 15 D 8 10 12 14 F 13 13 13 16 GA 73.5 83.5 83.5 90.5 GC 8 9 9 8 GD 55 64.5 64.5 70 GK 3.5 4 4 4 GL 6 9 9 11 GQ 4 7 7 8 Stroke range to 300 to 300 to 300 to 300 GB 0.033 0 E CB 1/8 1/8 1/8 1/8 20 25 32 40 20 26 26 32 0.039 0 0.033 0 0.033 0 8 8 CV/MVG 8 100.5 11 CXW P Bore 20 25 32 40 GR 4 7

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

Compact size (Width: 18 mm) Low power consumption: 1.8 W DC Fluid Air 0.15 to 0.7 0.1 to 0.7 0.15 to 0.7 10 to 50C (No freezing. Refer to page 3-13-4.) 20 or less 50 or less 10 3 Refer to the table below.

CL

43.4 11 13 15 18 28 28 28 30 14 16 20 22 16 20 22 30 10 10 10 10 5.5 5.5 6.6 6.6 3.2 3.2 4.5 4.5 25 30 35 40 52.5 39.8 48 57.5 49.4 59.4 66 58.4 71.4 (Hole dia.)

Free Mount Cylinder

(mm) 02 04 06 08 10 13 16 20 25 32 40 50 2 4 6 8 10 13 16 20 25 32 40 50 Pad type 02 04 06 08 10 13 16 20 25 32 40 50 2 4 6 8 10 13 16 20 25 32 40 50 Pressure gauge position Thread dia.

SMC Pneumatic Clean Series

22 22 18 21.5 15 15 15 21 19.5 19.5 15.5 42.5 34.5 30 24 88 64 62 62 22 17 17 13 41 32 32 26 46.5 37.5 33.5 28 3.2 3.2 3.2 6 6 5 7 5.5 5.5 5 104 102 102 8 8 8 7 6.8 6.8 6.8 50 45 45 41 10 8 8 8 20 20 20 M10 x 1.25 M8 x 1.25 M20 x 1.5 1/4 1/8 1/8 14 12 10 16 13 13 M26 x 1.5 M10 x 1.25 M26 x 1.5 10 8 3.2 134 23 M32 x 2 M14 x 1.5 24 Air cylinder CM2W 2122CM2W/ 101110112122Flange style (F) /

Electric Actuators

E-M5 thread depth 10 6 LJ1 LG1 LC1 LX LC6D/LC6C Switches 38 76 46 Motor wire (300mm) Photo micro sensor wire (300mm) 2-M2.5 thread depth 4 3 10 8 J 25 25 27 J x K Stroke + 220 10 Stroke + 127 13 15 (5) 0.5 46.5 3.5 2-M6 thread depth 13 58 52 27 19 [18] 15 Stroke + 127 (39) The dimension inside [ ] shows the location at which the home position switch operates. 58 (52) 28 36: T-slot pitch

4/5 Port Solenoid Valve

B port) 10 5 10 2-3.2 (For mounting) 22 2.5 Manual override 11 34.4 G: Approx. 300 H: Approx. 600 (Lead wire length) 78.8[83.2] (Light/surge voltage suppressor) 41.5[48.5] 35.6 26.1 13 5 M5 x 0.8 (P, R1, R2 port) 10 10 10 17.5 14 28 L plug connector (L): 10-SYJ3243-L-M5 M8 connector (WO): 10-SYJ3243-WO-M5 M plug connector (M): 10-SYJ3243-M-M5 Approx. 300 (Lead wire length) 41.5[48.5] 26.1

CM2

X 1.5 NA 24 30 34.5 42.5 F 13 13 13 16 A 18 22 22 24 NN M20 X 1.5 M26 X 1.5 M26 X 1.5 M32 X 2 G 8 8 8 11 AL 15.5 19.5 19.5 21 H 41 45 45 50 B1 13 17 17 22 H1 5 6 6 8 0 0.033 0 0.033 0 0.033 0 0.039 With rod boot h Symbol Bore 20 25 32 40 S 62 62 64 88 TD 8 9 9 10 TT 10 10 10 11 TX 32 40 40 53 TY 32 40 40 53 TZ 52 60 60 77 Z 36 40 40 44.5 ZZ 116 120 122 154 f e Stroke 1 to 50 68 72 72 77

ZX

-2-2 2 Vacuum Module: Ejector System/Vacuum Pump System Series ZX Modular Components Introduction Vacuum Pump System System Ejector System 13-2-4 to 13-2-39 13-2-40 to 13-2-65 Component equipment Characteristics Ejector unit Series ZX1 Nozzle diameter (mm) 0.5 0.7 1.0 Max. suction flow (/min(ANR)) 5 10 22 ZX Air consumption (/min(ANR)) 13 23 46 ZR 84 kPa Maximum vacuum pressure ZM Built-in