Stroke Reading Cylinder and Counter

Auto Switch Mounting Height (mm) D-A7H D-A80H D-F7 D-J79 D-F7W D-J79W D-F7BA D-F79F D-F7NT Auto switch model D-F7V D-F7WV D-F7BAV D-J79C D-A79W D-A9V D-M9V D-M9WV D-M9AV D-A7 D-A80 D-A73C D-A80C Bore size (mm) U 20.5 25.5 27 30.5 36.5 40 U 20.5 25.5 29 32.5 38.5 42 U 20.5 25.5 32.5 36 42 48.5 U 26.5 31.5 38.5 42 48 54.5 U 23 28 35 38.5 44.5 51 U 26 31 38 41.5 47.5 54 U 22 27 34 37.5 43.5

R

E F R O N T C O V E R F O R FOR FURTHER TECHNICAL DETAILS ON THIS PRODUCT, REQUEST CATALOG REFERENCE N353 DETAILS OF YOUR LOCAL SALES OFFICE 1.208 ROTARY ACTUATORS RACK & PINION TYPE SERIES NCRA1 D I M E N S I O N S W I T H O U T A U T O S W I T C H D O U B L E R O D E N D NCRA1BW30 D I M E N S I O N S W I T H O U T A U T O S W I T C H D O U B L E R O D E N D NCRA1BW50~100 L G H J K L M N

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

ZS-33-F D NPN Analog 4 to 20 mA E PNP Analog 1 to 5 V Analog 0 to 10 V*3 + ZS-33-D F PNP Analog 4 to 20 mA *3 1 to 5 V or 0 to 10 V can be selected by pressing the button.

CNA

B G(PF)1/2 (Suitable cable O.D. 6.8 to 11.5) MGQ @ HS 31.5 MGG 56 MGC A 36 B 36 MGF Auto switch CY1 Auto Switch Mounting Position Auto Switch Mounting Height (mm) (mm) D-B5/B6 D-B59W D-G5l D-K59 D-G5NTL D-G5lW D-K59W D-G5BAL D-G59F Auto switch model Auto switch model D-A3 D-G39 D-K39 D-A44 D-A5 D-A6 D-A59W D-A44C D-F5l D-J59 D-F5lW D-J59W D-F5BAL D-F5lF D-F5NTL MY1 D-A5/A6 D-A3, A3lC D-A44

80

A B C D E F G H J 1.6 M5 2.3 3.2 For other special options, refer to page 462.

MB1

D e D e Effective thread Effective thread 13 13 ZZ + 2 strokes S + Stroke 9 A K f N N f h + Stroke K A l + Stroke 9 l h Without air cushion S ZZ Stroke range Bore size (mm) Effective thread length Width across flats MB J K MM N P V W S ZZ A C B D Ee11 F G H 32 40 50 63 80 100 32.5 38 46.5 56.5 72 89 84 84 94 94 114 114 13 14 15.5 16.5 19 19 4 4 5 5 5 5 M6 x 1.0 M6 x 1.0 M8 x 1.25 M8 x 1.25

Sine Rodless Cylinder Series REBR Direct Mount Type

C D 15 (mm) Auto switch model A D-F9 B C D D-A9 D-F9 D-A9 D-F9 D-A9 D-F9 Bore size (mm) 17.5 15 D-A9 21.5 76.5 72.5 56.5 60.5 Note) Auto switches cannot be installed in Area C in the case of 15. 25, 32 (mm) A D-Y5 D-Y7 D-Y7W B C D Auto switch model D-Y5 D-Y7 D-Y7W D-Y5 D-Y7 D-Y7W D-Y5 D-Y7 D-Y7W D-Z7 D-Z8 D-Z7 D-Z8 D-Z7 D-Z8 D-Z7 D-Z8 Bore size (mm) 25 22 101 103 47 47 78 78 22 32 30.5

AWG

B K P C C C U K P O A A S H L to C U S O H L to B D !

Direct Solenoid

D ENSIONS A B c D E F 2.66 (67.5) 2.42 (61.5) (14) 0.28 17', 0.16 (4) 1.42 (36) ,ltrF-l rD C Solsnoid DIN "Electricrl Connector" 'AC" Vottage only ml--l l "*---l-l I .f;T.

Electric Actuator

(E) Retun to origin IN2 D D D ) ) ) ) D D D D ) ) ) ) IN1 D ) ) D D ) ) D D ) ) D D ) ) IN0 ) D ) D ) D ) D ) D ) D ) D ) Position number 1 2 3 4 5 6 7 8 9 10 (A) 11 (B) 12 (C) 13 (D) 14 (E) Retun to origin OUT2 D D D ) ) ) ) D D D D ) ) ) ) OUT1 D ) ) D D ) ) D D ) ) D D ) ) OUT0 ) D ) D ) D ) D ) D ) D ) D ) IN3 D D D D D D D ) ) ) ) ) ) ) ) OUT3 D D D D D D D ) ) ) ) ) ) ) ) 54 Programless

XL

Valve side exhaust 29 Series XLS High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm XLS/Without control power supply Grommet (G) D Conduit (C) J K 27010 E D G B C G(PF)1/2 Terminal (T) J K2 J H 29010 L 25 33 B C G(PF)1/2 DIN terminal (D) J K L C B F A 29.5 39 B C G(PF)1/2 6 to 9 22 A (mm) A B 104 L 48 62 C D F G H J E K 41 60 95 43 Model XLS-16G XLS-16C XLS-16D XLS-16T XLS-25G XLS-

Valve for Water and Chemical Base Fluids (2/3 Port Air Operated Valve)

G D Approx. C 6 13.5 4.5 0.5 Width across flats F 10 Tightening torque: Tighten within 10 1 Nm. G1/4 (mm) Part no.

Prevents Micro-Bubbles

Dimensions LLHAStations 4-Mounting hole for W Y K A D L2 L1 N Non-locking type Locking type L3 G 60 (H1) (H2) C SMC SMC SMC SMC V 1/4 1/4 1/4 E 3/8 U 2-P port Pitch = B n-A port (mm) Dimensions (mm) B C D E G H1 H2 K N U V W Y A Station Model LLH2A LLH3A LLH4A 2 3 4 5 Model 46.5 31 65 67 19 10 85.5 87 18 27 19 34 M4 5.5 Symbol L1 L2 L3 L1 L2 L3 L1 L2 L3 47 36.5 94.5 76 27.5 19 125.5 127.5

VZ5000

assembly DIN rail VZ5000-51A-1U e VFN For D side, set with w VZ5000-52A-2D r VZ5000-52A-1U For U side End block assembly t VZ5000-52A-1D For D side End block assembly y VZ5000-52A-2U End block assembly For U side, set with e u VZ5000-51A-1M Without D-sub connector, For indicated location P/R port with One-touch fitting for 10 SUP/EXH block assembly i To add a manifold block assembly, add

Stopper Cylinder

D-M9A Auto switch Auto switch B A (22) 22 B A Hs Hs 24.5 ( ): For D-A96 type 16 16 A B A B Hs Hs D-C7 D-C8 D-C73C D-C80C D-H7 D-H7W D-H7NF D-H7BA D-H7C B A Hs B Hs A Auto Switch Proper Mounting Position Auto Switch Mounting Height Auto switch model (mm) (mm) RSQ D-H7BA D-H7W D-H7 D-H7C D-H7NF D-H7 D-H7W D-H7NF D-H7BA D-C7/C8 Auto switch model D-C7 D-C80 D-C73C D-C80C D-M9V D-M9WV D-M9AV

Clamp Cylinder with Lock

2 $3 u $1 #9 y #3 @9 #0 !4 @4 @3 @5 @1 !7 e !1 $4 o i w q t 40 Extension locking (F) #3 @9 #0 !4 @2 #7 !8 #4 #1 !9 #8 @0 @8 #2 r $0 #5 #6 $2 @6 @7 !3 $5 !5 !0 !6 !2 $3 u $1 #9 y !7 e $6 $4 !

3

Auto Switch Mounting Height (mm) D-F7/J79 D-F7W D-J79W D-F7BA D-F79F D-F7NT D-A7H D-A80H Auto switch model D-F7V D-F7WV D-J79C D-A7 D-A80 D-A73C D-A80C D-A79W D-M9V D-A9V D-P3DWA Bore size U 25.5 28 36 38 43.5 48.5 U 25 28 28.5 32 37.5 42.5 U 23 26 26.5 30 35 40.5 U 27.5 30.5 26.5 40 45 50.5 U 30 32.5 39.5 42.5 48 53.5 U 24.5 27.5 34 37.5 43 48 U 31 34 40.5 43.5 49 54.5 U 28 31 37.5 40.5

MNB

D E lC GL W MLGC GL1 T MA 4-J 4-J CNG MB V VA H1 16 Q Effective thread length K Effective thread length GF N F GE MNB K F A BN A H S + Stroke ZZ + 2 strokes H + Stroke CNA CNS CLS CLQ e e MLGP 13 13 RLQ 9 f f l + Stroke 9 l h h + Stroke MLU ZZ + 2 strokes ML1C With rod boot D-X Bore size (mm) Stroke range (mm) Effective thread length (mm) Width across flats GL1 A B B1 H1 B2 BN BP C D Ee11

MNB

switch Auto switch Ht Ht A A 32 B B L 9-6-20 21 Series MNB Cylinder with Lock Double Acting, Single Rod Proper Auto Switch Mounting Position D-F5W D-J59W D-F5 D-J5 D-F5BAL D-F59F D-Z7/Z80 D-Y59/Y69 D-Y7P/Y7PV D-Y7W, D-Y7WV D-Y7BAL D-A3 D-A44 D-G39 D-K39 D-A5 D-A6 D-A59W D-F5NTL D-P5DWL Bore size (mm) A B A B A B A B A B A B A B 32 1 3.5 1.5 4 0 0.5 9.5 12 4.5 7 2 4.5 0 0.5 CL 40 1 3.5 1.5

High Vacuum Angle Valve, XL Series

Valve side exhaust 29 Series XLS High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm XLS/Without control power supply Grommet (G) D Conduit (C) J K 27010 E D G B C G(PF)1/2 Terminal (T) J K2 J H 29010 L 25 33 B C G(PF)1/2 DIN terminal (D) J K L C B F A 29.5 39 B C G(PF)1/2 6 to 9 22 A (mm) A B 104 L 48 62 C D F G H J E K 41 60 95 43 Model XLS-16G XLS-16C XLS-16D XLS-16T XLS-25G XLS-