JA/JAH/JB/JS

A R Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com JS20, 32, 40, 63 Center of sphere M M U U D J F H B E G P R A Max. thread depth P Model Center of sphere R Allowable eccentricity U Max. operating tension and compression force (N) (mm) M A B C D E F G H J JS10-4

Electric Actuators

3 e u !

80

/Single Unit Body material Brass 2 x 3.4 Mounting hole W Y Grommet X U 300 Q F D Full wave rectifier (AC type) C R [mm] 1 E G Mounting method Model Port size P B B1 C D E F J K M 2 x P Port size B B1 VDW1 M5 20 10 42.4 15 6 11 M2.5 4 11 VDW2 M5, 1/8 22 11 51.7 20 8 13.5 M3 5 15 Mounting bracket dimensions (XD) Electrical entry M Model Port size P G U W X Y Grommet Q R VDW1 M5 4 28 11 34 17

CKZ2N

A B C D E F G H I J L M Part no.

Rotary Actuator

8 Parallel key for size 40 i e u !2 i u w !4 w q !2 !6 !0 !4 !7 !1 o q !5 !1 Component Parts Description Material Note Description Material Note No. No.

CNA

S + Stroke Z + Stroke H T 8 f l CLQ CX Z + l + Stroke h + l N U C L RR MLGP ZZ + l + Stroke B ZZ + Stroke RLQ MLU ML1C DBore size (mm) Stroke range (mm) 40 50 63 80 100 A AL B B1 BN BP BQ C CD CX D E F GA GB GC GD GL GL1 GR H1 -X 0.1 0.3 30 27 60 22 96 1/8 1/8 44 10 15 16 32 10 85 15 52 16 12 12 10 8 Up to 500 0.1 0.3 35 32 70 27 108 1/4 1/8 52 12 18 20 40 10 95 17 56.5 20 13 15 12 11 Up

CNA

S + Stroke Z + Stroke H T 8 f l CLQ CX Z + l + Stroke h + l N U C L RR MLGP ZZ + l + Stroke B ZZ + Stroke RLQ MLU ML1C DBore size (mm) Stroke range (mm) 40 50 63 80 100 A AL B B1 BN BP BQ C CD CX D E F GA GB GC GD GL GL1 GR H1 -X 0.1 0.3 15 30 27 60 22 96 1/8 1/8 44 10 16 32 10 85 15 52 16 12 12 10 8 Up to 500 0.1 0.3 18 35 32 70 27 108 1/4 1/8 52 12 20 40 10 95 17 56.5 20 13 15 12 11 Up

A_HEC-OM-I009

U p p e r / L o w e r T e m p . A l a r m S e q u e n c e M O D E < O f f On : Output Off : Not output (Alarm for high and low temperature limit is not detected until the temperature reaches the target temperature after the power is supplied.)

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Single Rod Series CHA ø 40, ø 50, ø 63, ø 80, ø 100, ø 125, ø 160

clevis type: CHAD 2-Rc P Cushion adjustment screw V T GA 4-J GB Air release Width across flats G CDH9 MM R (max.) d W D E W a MA CX 0.3 F NA NB U A K C L 0 -0.3 S + Stroke H B Z + Stroke RR ZZ + Stroke With rod boot e 10 l f h + l Z + l + Stroke ZZ + l + Stroke (mm) Bore size (mm) A a B C CDH9 CX D d F G GA GB J K L MA MM NA NB P R RR S E +0.043 0 +0.043 0 +0.043 0 +0.043 0 +0.052 0 +0.052

HRX-OM-W002

U [ ] 1 RD 18AWG BK 5 5 1 U (CN3) PM PUMP 7 7 Option T1 6 6 4 4 3 3 2 2 1 1 PM PUMP 2/2 PM PUMP (CN1) 16AWG G/Y G4 [ ] V G PM 16AWG G/Y G4 [ ] G U DC Power Supply Standard BL DCPS [ ] 18AWG G/Y G2 5 5 Condenser 18AWG BK 1 1 3 3 3 3 18AWG BK 3 3 1 1 1 1 C3 (CN51) (CN1) (CN6) Compressor CM CM AC Power Board 3 1 PCB1 3 3 [ ] TH 14AWG BK 14AWG BK C CM 2 Current Transformer S 14AWG G/Y G3 [ ]

Plug-in Unit

VQC4000 Thread type Note) VVQC4000-3A-1 Series Nil F T Rc G NPT/NPTF Kit type 1 2 4 Thread type VQC1000 VQC2000 VQC4000 Nil F T 1 2 3 Rc G NPT/NPTF S (EX240) kit F, P, T, S (EX250) kit L, M, S (EX500) kit Note) VQC 4000 thread port only Note) Tie-rods (2 pcs.) for additional stations included. U-side end plate assembly !8 U-side end plate assembly part no.

AWG

U U U O O O O S S S S H H H H L L L L to to to to Possible to change to the optional mounting angles.

High Vacuum Angle Valve

Bellows seal C Double acting Bellows seal F Single acting (N.C.)

100

6 @2 r y w t e t @2 u i !0 @0 !5 y !9 ZL6 Without valve or pressure switch, Silencer exhaust ZL6 With valve and pressure switch, Port exhaust @1 !2 !3 !1 !6 !8 !7 q !4 r y w t e t u i @0 !5 y !9 Component Parts No. Description Material Note No.

ITV-E

Thi s product i s adj ust ed f or each speci f i cat i on at t he t i m e of shi pm ent f rom t he f act ory.

21

Male thread Female thread Long male rod end Nil F G T E BZ FZ UZ 20 25 32 40 B L F G C D U Head trunnion Integral clevis Boss-cut/Basic Boss-cut/Rod flange Boss-cut/Rod trunnion Basic Foot Rod flange Head flange Single clevis Double clevis Rod trunnion 20 mm 25 mm 32 mm 40 mm G: Same rod end dimensions (A, AL, H) as CM2 series.

energy saving effect

G1, Symbol N: NPT1) Tank drain port Rc3/4 (Symbol F: G3/4, Symbol N: NPT3/4) Automatic fluid fill system (Standard) Circulating fluid system Pump capacity Supply side pressure range MPa 0.2 to 0.5 Supply side fluid temperature C 5 to 35 Automatic fluid fill port Rc1/2 (Symbol F: G1/2, Symbol N: NPT1/2) Overflow port Rc1 (Symbol F: G1, Symbol N: NPT1) Fluid contact material Metal Stainless

Free Mount Cylinder

Material NBR Silicon rubber Urethane rubber Fluoro rubber Conductive NBR (2 to 16 only) Conductive silicon rubber (2 to 16 only) N S U F GN GS Material N S U F GN NBR Silicon rubber Urethane rubber Fluoro rubber Conductive NBR (2 to 16 only) Conductive silicon rubber (2 to 16 only) Pad type Flat Flat with ribs Deep Bellows (Except -X11) U C D B Table (1) Pad Dia./Pad Type Dia.

High Purity Chemical Valve

This can cause damage to the valve body. 482 Series LVH Manually Operated Integral Fitting Type/Threaded Type Construction Integral fitting type Threaded type u u q q e w e w LVC A B A B r LVA Description Material Parts list No.

Modular Type Air Filter Series AF

1 Drain q r e w t i u y o !0 !