C76

Same side Different sides Different Same side sides 15 + 45 (n = 2, 4...) ( n 2) 2 D-C7 D-C80 10 50 15 50 + 45(n 2) D-C73C D-C80C D-H7C D-H7 D-H7W D-H7BAL D-H7NF 15 + 45 (n = 2, 4...) ( n 2) 2 10 65 15 65 + 50(n 2) 15 + 45 (n = 2, 4...) ( n 2) 2 10 60 15 60 + 45(n 2) Construction C76RA B32 to 40 2B 2D !6 i y !4 u q r e !1 t !5 !3 !0 !2 o !

HRX-OM-W058

When the temperature of the circulating fluid is set to lower than 10oC, use a 15% aqueous solution of ethylene glycol. Tap water may freeze in the thermo-chiller, leading to malfunction. 15% aqueous solution of ethylene glycol When a 15% aqueous solution of ethylene glycol is used, prepare the ethylene glycol aqueous solution separately.

ISO Cylinder ISO Standard (15552) CP96 Series ø32, ø40, ø50, ø63, ø80, ø100 C85 15% Weight reduced C85W Up Lightweight C85-S/T to C85K * Compared with the previous CP96 series (ø40, 100 mm stroke) C85K-S/T By adopting a new cushion method (Air cushion

EN EU CH H6 ER (Max.) 32 ES5032 11 10 6.6 38 51 8.5 21 18 31 14 10.5 32 10 15 40 ES5040 11 12 6.6 41 54 8.5 24 22 35 16 12 36 10 18 50 ES5050 15 16 9 50 65 10.5 33 30 45 21 15 45 12 20 63 ES5063 15 16 9 52 67 10.5 37 35 50 21 15 50 12 23 80 ES5080 18 20 11 66 86 11.5 47 40 60 25 18 63 14 27 100 ES5100 18 20 11 76 96 12.5 55 50 70 25 18 71 15 30 139 Accessories CP96 Series Dimensions: Piston

VQC

The total number of solenoids (points) must not exceed 24. 19 20 19 20 17 18 17 18 15 16 15 16 13 14 13 14 11 12 11 12 9 10 9 10 7 8 7 8 5 6 5 6 3 4 3 4 1 2 1 2 (For 26P) (For 20P) 15 VQC1000/2000 Base-Mounted Type Plug-in Unit VV5QC11 (L3) (L4) L2 65 51 L1 28 P = 10.5 1.5 (12) 13 Indicator light 1.5 Manual override (5.5) 93.5 Approx. 2 (35) 66 75 37.5 Mounting hole for 4-M4 Manual release

90

Pressure sensor assembly With 2 screws and 1 gasket 15 Vacuum Unit Series ZK2 Replacement Parts/How to Order yValve assembly !

2 Phase Stepper Motor/Without Motor Brake Series LXS

Stroke + 155 2-M6 x 1 thread depth 13 Stroke + 127 15 10 0.5 46.5 (5) 3.5 27 52 (39) 58 15 [18] Stroke + 127 The dimension inside [ ] shows the location at which the home position switch operates.

CV/MVGQ

15-10 RS Q G RS H A RZQ Series CVM5/CVM5K 20 25 32 40 Standard MI W S 10-15-16 10-15-26 Double acting Nonrotating rod CEP1 CE1 Series CVM3/CVM3K Single acting (Spring return) (Spring extend) CE2 20 25 32 40 Standard 10-15-31 10-15-44 ML2B Nonrotating rod C J G5-S CV Series CV3/CV3K 40, 50 63, 80 100 Standard 10-15-50 MVGQ Double acting Nonrotating rod 40, 50 63 CC 10-15-63 RB Series CVS1/

ZP3

Form w 1 Material e Buffer spec. r Buffer stroke t Vacuum inlet Flat Type with Groove A 3 30.5 11 1.2 11 04 6 37 14 14.5 10 47 18 20.5 J K Width across flats E 3 30.5 11 1.8 11 6 37 14 14.5 10 47 18 20.5 06 08 N S U F GN GS HS 7 15 55 36.5 1.2 10 20 62.5 44 06 08 15 55 36.5 1.8 20 62.5 44 04 JB K ZP3 T UM B5 C2 3 31.5 12 11 J K 10 6 38 15 14.5 10 48 19 20.5 JB K 15 56 37.5 10 20 63.5 45 10

CQM

10 10 2 pcs. 10 15 20 2 pcs. 5 10 15 15 20 20 15 32, 40, 50 32, 40, 50 5 15 10 5 1 pc. 10 10 20 1 pc. 5 5 10 15 15 20 15 Other than the applicable auto switches listed in How to Order, the following auto switches can be mounted.

MU

depth 7.5 M5 x 0.8 depth 11 M6 x 1 depth 12 M6 x 1 depth 11 M8 x 1.25 depth 13 M8 x 1.25 depth 11 M10 x 1.5 depth 14.5 M10 x 1.5 depth 15 M12 x 1.75 depth 18 M12 x 1.75 depth 15 Rod End Female Thread (mm) (mm) MM M6 x 1 depth 12 M8 x 1.25 depth 13 M8 x 1.25 depth 13 M10 x 1.5 depth 15 M10 x 1.5 depth 15 H 14 14 15 18 21 ZZ 96 103 115 137 141 S 60 63 70 84 85 NY 26 28 36 42 46 NX 6 6.5 8

MRQ

(mm) (mm) Stroke 15 20 30 40 50 75 10 25 5 100 20 30 20 15 15 17.5 25 Y 12.5 15 17.5 20 Q 20 20 30 20 68 70.5 68 68 68 70.5 80.5 83 75.5 E 70.5 MRQFS40SMRQ40, #3 (Flange only) 1.5-15 Series MRQ Made to Order Specifications -X1 to X5 Consult SMC for the detailed specifications, dimensions and delivery.

VQ4000

KG 72309-0114-70-15, etc.

Magnetically Coupled

10, 15, 20, 25, 30, 40 5, 10, 15, 20, 25, 30, 40 5, 10, 15, 20, 25, 30, 40 5, 10, 15, 20, 25, 30, 40 1/4" 6 12 3/8" 10 20 5/8" 15 40 3/4" 20 60 1" 25 80 32 1-1/4" 80 1-1/2" 40 80 2" 50 80 2-1/2" 63 80 Note) The longer the stroke, the larger the amount of deflection in a cylinder tube.

MU

Added weight: 0.16/50 stroke Stroke: 100mm stroke 0.42 + 100 / 50 X 0.16 = 0.74 kg D-A7l D-A80 D-A73C D-A80C CQ2 D-F7lV D-J79C Number of auto switches D-F7lWV MU 2 5 10 15 15 1 5 5 10 15 Construction Component Parts No.

Non-standard Motor/Horizontal Mount Specification Series LJ1H10

0 5 10 15 Transfer load m (kg) Refer to page 145 for deflection data. 74 Non-standard Motor/Vertical Mount Specification Series LJ1H20 Dimensions/LJ1H202PF(X10) Scale: 10% 12.5 9.5 Work piece mounting reference plane 110 67 20 4-M6 x 1 thread depth 15 4-M8 x 1.25 thread depth 20 8H8 depth 10 Cable entry side 8H8 depth 8 Body mounting reference plane 130 200 Z section detail Stroke + 150

CP95

10 24 22 28 35 36 11 6.6 9 10 50 15 12 50 65 12 33 30 32 45 45 12 9 11 12 63 15 16 52 67 14 37 35 40 50 50 15 9 11 12 80 18 16 66 86 18 47 40 50 60 63 15 11 12.5 14 100 18 20 11 76 96 20 55 13.5 50 60 70 71 15 19 Mounting style (CR): Head side clevis with ball joint A B C D EN ER F E L M N P H Bore size (mm) 0.2 max 0.2 H7 0.1 max H11 H13 H13 0.5 0.5 32 22 10 14 15 30 5 32.5 10.5 6.6 45

CP95

10 24 22 28 35 36 11 6.6 9 10 50 15 12 50 65 12 33 30 32 45 45 12 9 11 12 63 15 16 52 67 14 37 35 40 50 50 15 9 11 12 80 18 16 66 86 18 47 40 50 60 63 15 11 12.5 14 100 18 20 11 76 96 20 55 13.5 50 60 70 71 15 19 Mounting style (CR): Head side clevis with ball joint A B C D EN ER F E L M N P H Bore size (mm) 0.2 max 0.2 H7 0.1 max H11 H13 H13 0.5 0.5 32 22 10 14 15 30 5 32.5 10.5 6.6 45

MU

depth 7.5 M5 x 0.8 depth 11 M6 x 1 depth 12 M6 x 1 depth 11 M8 x 1.25 depth 13 M8 x 1.25 depth 11 M10 x 1.5 depth 14.5 M10 x 1.5 depth 15 M12 x 1.75 depth 18 M12 x 1.75 depth 15 Rod End Female Thread (mm) (mm) MM M6 x 1 depth 12 M8 x 1.25 depth 13 M8 x 1.25 depth 13 M10 x 1.5 depth 15 M10 x 1.5 depth 15 H 14 14 15 18 21 ZZ 96 103 115 137 141 S 60 63 70 84 85 NY 26 28 36 42 46 NX 6 6.5 8

CRQ2

CAT.ES20-147 A Compact Rotary Actuator Rack-and-Pinion Type/Sizes: 10, 15, 20, 30, 40 Series CRQ2 Compact Rotary Actuator Rack-and-Pinion Type/Sizes: 10, 15, 20, 30, 40 Series CRQ2 Piping can be installed from one end Body can be used as a flange Compact design saves mounting space Uses internal cushioning 10, 15 : Rubber bumper 20, 30, 40: Air cushion 10: 17mm 15: 20mm 20: 29mm 30: 33mm

IDU/IDF

(C) 55 50 60 70 80 IDU3D to 6D 45 50 55 65 75 IDU8D to 15C 45 50 55 65 70 IDU22C1, 37C1 40 45 50 55 60 IDU55C, 75C Ambient temperature (C) Outlet air pressure dew point (C) 15 10 5 15 10 5 15 10 5 15 5 10 5 15 10 1.35 1.35 0.60 1.35 1.35 0.60 1.35 1.35 0.60 1.35 0.60 1.35 0.60 1.35 1.35 25 1.35 1.05 0.50 1.35 1.05 0.50 1.35 1.10 0.50 1.35 0.60 1.20 0.55 1.35 1.25 30 1.25 0.95 0.45 1.25 0.95