Compact Cylinder with Lock Series CLQ

M6 x 80 L M10 x 100 L M5 x 55 L 65 80 100 55 CL1 -15D -15D x 70 L x 85 L x 105 L x 60 L 70 85 105 60 -20D -20D x 75 L x 90 L x 110 L x 65 L 75 90 110 65 MLGC -25D -25D x 80 L x 95 L x 115 L x 70 L 80 95 115 70 -30D -30D x 85 L x 100 L x 120 L x 75 L 85 100 120 75 10.5 CNG -35D -35D 7 12.5 17 x 90 L x 105 L x 125 L x 80 L 90 105 125 80 -40D -40D x 95 L x 110 L x 130 L x 85 L 95 110 130 85

CLS

+ 1/2 stroke BV BZ BG BE e 4-MA Effective thread depth MB (To attach eyebolt) f l 15 h + l ZZ1 + l + Stroke Bore size (mm) Stroke range (mm) J M AL B C E F FA GA K KA N A BA BB BC BD BG BE BZ BV BW BP D EA GB GC H MM P BY MB MA 125 140 160 180 200 250 14 14 14 17 17 20 15 15 17 20 20 25 31 31 36 41 46 56 19 19 22 26 26 30 47 47 53 60 60 67 43 43 43 48 48 60 35 35 39 39 39 49 50 50 56 63 63

SMC Electronic Switch Series Variations

3.5 Mounting hole 2201: R(PT) 1/8 T1: NPTF1/8 01: R(PT) 1/8 T1: NPTF1/8 M5 X 0.8 Depth 5 M5 X 0.8 Depth 5 13 13 Dimensions/Base Mounted Style: ZSE2-0R Grommet style/ZSE2-0R-15 Connector style/ZSE2-0R-15C Pressure setting Pressure setting Indicator light Indicator light trimmer trimmer 15 15 9 9 L H L H 2-M2.5 Mounting thread 2-M2.5 Mounting thread 25 30 25 30 (3000) (3000) 3 40 9.5 3 40

Membrane Air Dryer

H L L S L S L S Nil Nil Symbol Contents Thread type Symbol Type M, V Nil Rc 3 $ $ $ $ Modular connection N F NPT G 15 RoHS Membrane Air Dryer/Unit Type Series IDG Single Unit Type Model Selection Made to Order Specific Product Precautions Unit Type How to Order M 3 IDG 02 10 Made to Order Refer to page 33 to 44 for details.

21

Number of auto switches Same surface Different surfaces Same surface (n 2) 2 D-M9m/M9mW D-A9m 15 + 45 10 15 Note 1) Note 1) 45 45 + 45 (n 2) (n = 2, 4, 6) (n 2) 2 15 + 45 D-H7BAL/H7NF 10 15 60 60 + 45 (n 2) (n = 2, 4, 6) (n 2) 2 D-C73C/C80C D-H7C 15 + 50 10 15 65 65 + 50 (n 2) (n = 2, 4, 6) (n 2) 2 D-B54/B64 D-G5NTL 15 + 50 10 15 75 75 + 55 (n 2) (n = 2, 4, 6) (n 2) 2 20 + 50 D-B59W

LEC-OM07605CN

(3) (a) LE-CSS-L [mm] (37.65) (13.4) (15) (6.7) (20.9) 8+0 +50 0 150 (2.3) (1.7) (b) LE-CSS-K, LE-CSS-J, LE-CSS-1, LE-CSS-3 (L)(1) [mm] () () (100) (100) L . LEC-CSS-L 11.2 11.2.1 [W] LECLECMR-RB-032 MR-RB-12 [40] [40] LECSS2-T5 30 LECSS2-T7 10 30 100 LECSS2-T8 10 30 100 LECSS2-T9 20 30 100 11 8 11. 11.2.2 [Pr. PA02] [Pr.

Modular Design with Uniform Body Style

ANR) Port size 3/8: 40 L/min (ANR) Port size 1/2: 50 L/min (ANR) Port size 1/4: 30 L/min (ANR) Port size 3/8: 40 L/min (ANR) Min. dripping flow rate*1 15 L/min (ANR) 50 L/min (ANR) 190 L/min (ANR) 220 L/min (ANR) Oil capacity 25 cm3 55 cm3 135 cm3 Recommended lubricant Class 1 turbine oil (ISO VG32) Bowl material Polycarbonate Bowl guard Semi-standard (Steel) Standard (Polycarbonate) Weight

Cylinder with Lock

D-M9 D-M9W n 15 + 40 (n 2) 2 (n = 2, 4, 6, 8)*1 2 (Different surfaces, same surface) 1 10 D-M9V D-M9WV n 10 + 30 (n 2) 2 (n = 2, 4, 6, 8)*1 2 (Different surfaces, same surface) 1 15 D-M9A n 15 + 40 (n 2) 2 (n = 2, 4, 6, 8)*1 2 (Different surfaces, same surface) 1 15 D-M9AV n 15 + 30 (n 2) 2 (n = 2, 4, 6, 8)*1 2 (Different surfaces, same surface) 1 15 D-A9 n 15 + 40 (n 2) 2 (n = 2, 4

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

-L) 50 L/min 40 30 25 20 15 10 5 00 5 10 15 20 25 30 kPa Pressure loss [kPa] Pressure loss [kPa] 750 kPa 50 kPa 30 0 kPa 0 kPa 20 30 kPa 50 kPa 70 kPa 750 kPa 350 kPa 10 70 kPa 350 kPa 00 10 20 30 40 50 Flow [L/min] Flow [L/min] PF2M711(-L) 100 L/min PF2M721(-L) 200 L/min 40 90 80 70 60 50 40 30 20 10 00 50 100 150 200 Pressure loss [kPa] Pressure loss [kPa] 750 kPa 30 30 kPa 0 kPa 0 kPa

KP/KPQ/KPG

50.6 25 Note 1) D indicates the maximum diameter. 15-5-15 Series KP/KPG Elbow: KPQL, KPGL 2-Applicable tubing D Effective area mm2 D Model L Note 1) Applicable tubing O.D. mm Weight g M Q TPH TPS 4 L Q M KPQL04-00 KPGL04-00 20.7 4.5 18 3.5 3.5 3 10.4 6 KPQL06-00 KPGL06-00 22.8 5.3 19.5 9 9 7 12.8 8 KPQL08-00 KPGL08-00 26.3 6 21.5 22 15 11 15.2 4.2 10 KPQL10-00 KPGL10-00 29.4 6.8 24 35 25

Air Cylinder

Operating Pressure 15 psi (1.05 kgf/cm2) Min.

JXCx-OMT0062

Please refer to "9.5 Data edit function" for details. 5 F to 0 DATA (L) 6 F to 0 Occupation area 7 F to 0 15 F to 0 Occupation area 8 to H=Most Significant Byte or upper word L=Least Significant Byte or lower word 58 - 11.

CNG

Material: Carbon steel Material: Carbon steel Material: Rolled steel d Dd9 Dd9 d d D C l m l m m m L L t t t t B1 H1 Dd9 Applicable bore size (mm) L L Dd9 d l l d m t Applicable bore size (mm) Part no.

Modular F.R.L. Units

*15 *15 *15 *15 *15 *15 *15 ZA*14 Digital pressure switch: With unit selection function *16 *16 *16 *16 *16 *16 *16 *16 *8 The only difference from the standard specifications is the adjusting spring for the regulator.

CNS

+ 1/2 stroke 75 15 40 l h + l ZZ1 + l + Stroke Bore size (mm) Stroke range (mm) C EA A AL B BN BP BQ CL D E F FA G GA GB GL GR J K KA 125 140 160 16 50 47 145 205 1/2 3/8 115 120 36 90 63 35 14 155 23 25 30 M14 x 1.5 15 31 25 to 1000 16 50 47 161 245 1/2 3/8 128 136 36 90 63 35 14 180 28 30 30 M14 x 1.5 15 31 30 to 1000 18.5 56 53 182 290 1/2 3/8 144 144 40 90 63 43 14 215 35 35 35 M16 x

HRX-OM-M005

applied Inverter-driven flow control function applied Main Tank capacity*7 L Approx.15 Approx.15 Sub Tank capacity*8 L Approx.16 Approx.16 Circulating fluid port (supply/return) Rc 3/4 Rc 3/4 Facility water C / MPa 10 to 35 / 0.3 to 0.7 Required flow of facility water*9 L/min 15 (Facility water at 25C) 15 (Facility water at 25C) Facility water port (inlet/outlet) Rc 1/2 (single system for

53

Standard item Acid consumption amount (at pH4.8) [mg/L] 100 or less v Total hardness [mg/L] 200 or less v Calcium hardness (CaCO3) [mg/L] 150 or less v Ionic state silica (SiO2) [mg/L] 50 or less v Iron (Fe) [mg/L] 1.0 or less v v Copper (Cu) [mg/L] 0.3 or less v Sulfide ion (S2) [mg/L] Should not be detected. v Ammonium ion (NH4+) [mg/L] 1.0 or less v Residual chlorine (Cl) [mg/L] 0.3 or

Lightweight and Compact

Water 15% Ethylene Glycol Aqueous Solution Physical property value Temperature Density [kg/L] Specific heat C [J/(kgK)] Current unit system Physical property value Temperature Density [kg/L] Specific heat C [J/(kgK)] Current unit system Weight volume ratio [kgf/L] Specific heat C [cal/(kgfC)] 5C 1.00 4.2 x 103 1.00 1 x 103 Weight volume ratio [kgf/L] Specific heat C [cal/(kgfC)] 5C 1.02

Rotary Actuator

Size: 30/50/63/80/100 Single shaft with four chamfers: ClRA1BX Double shaft with key: ClRA1BY Double shaft with four chamfers: ClRA1BZ L 0 0.2 L 0 0.2 0 0.1 0 0.1 G G N N H H H U U UU UU M N H L K 0 0.2 G D L 0 0.2 [mm] [mm] [mm] Size G H N U L 30 6 13 8 53 7.8 50 11 27 15 89 14 63 13 29 17 105 16 80 15 38 20 130 19 100 19 44 25 156 24 Size H K UU L 30 25 3 90 14 50 36 5 134 25 63 41 5 158

Pin Clamp Cylinders

10.5 25 4 4.5 9.8 6 6 13.3 542 C(L)KQG32/C(L)KU32 Series Options Dimensions Shim C(L)KQG32-X2081 C(L)KQG32-X2082 C(L)KU32-X2321 C(L)KU32-X2322 LOW type HIGH type LOW type HIGH type Guide pin fixing bolt () Guide pin fixing bolt () Shim mounting position (Up to 3 mm) Shim mounting position (Up to 3 mm) Guide pin fixing bolt () Guide pin fixing bolt () 100 + Shim thickness 100 + Shim thickness