High Purity Chemical Valve

2 8 A Stacking type 10 3/8" 10 3/8" Manifold stations 10 3/8" 10 3/8" 02 2 stations 3 3 12 1/2" 12 1/2" 05 5 stations 12 1/2" LQ2 integral fitting 12 1/2" 4 4 19, 3/4" 19, 3/4" How to Order Valve LVH 2 0 07 A S Body class Symbol 2 3 4 Body class 2 3 4 Orifice dia.

PEEK

3 !3 o !3 r r r e e w w e w q !4 !4 q q !4 LVM105R Description No. Material Component Parts: LVM10R3, 10R4, 10R6, 105R !2 !0 Plate 1 PEEK/PFA !1 Diaphragm assembly 2 EPDM/FKM/Kalrez Body 3 PBT Slide bushing assembly 4 POM/Stainless steel y Armature assembly 5 Stainless steel/PBT Coil assembly 6 t Sleeve 7 SUY u Spacer 8 i !

Fieldbus System

N.O. 3-position closed center Note) Only rubber seal type (A) 4 (B) 2 3 Seal type D: Slide locking type (Manual) 5 (R1) 1 (P) 3 (R2) 0 1 Metal seal Rubber seal 3-position exhaust center (A) 4 (B) 2 4 Function Nil Standard (0.4 W) Quick response type (0.95 W) High pressure type (145 psi) Negative common External pilot 1 (P) 5 (R1) 3 (R2) B K Note 2) N Note 3) R Note 4) 3-position pressure

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

VKF (A) 2 (A) 2 VQZ 1 (P) 3 (R) 1 (P) 3 (R) VZ VS VFN r e w q r e w q N.O. N.O. (A) 2 (A) 2 1 (P) 3 (R) 1 (P) 3 (R) Component Parts Description Material Note No.

VQ5000

1 W DC (42 mA), 0.5 W DC (21 mA) (3) 24 VDC 1 W DC (83 mA), 0.5 W DC (42 mA) Note (3) 12 VDC 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) Inrush 1.2 VA (12 mA), Holding 1.2 VA (12 mA) 100 VAC Power consumption (Current) 3 position pressure center 2 position double (Metal) Inrush 1.3 VA (11.7 mA), Holding 1.3 VA (11.7 mA) 110 VAC (A) 4 (B) 2 (A) 4 (B) 2 Inrush 2.4 VA (12 mA), Holding 2.4 VA (12

MXQ

3 !5 MX MTS t !6 r u y w !

Dual Rod Cylinder Series CXSJ/CXS

6 CXSWL (Ball bushing bearing) r u iy w !3 @2 @0 @3 @1 !7 !4 !5 !2 CXSWL6 r !5 !6 q !8 !0 !

modular-press-e

AL30/AL40 w Semi-standard/Bowl Assembly Part No. t e Model Semi-standard specifications With switch Bowl material With drain guide With barb fitting With bowl guard IN OUT AL20 AL10 AL60 AL50 AL40-06 AL40 AL30 Lowest limit ON Lowest limit OFF y r u C3SL-3 C4SL-3 C4SL-3 C1SL-3 C2SL-3 C3SL-3 C1SL-3 C2SL-3 C2SL-C C2SL-C Polycarbonate C2SL-3C C2SL-3C C3SL-3W C4SL-3W C4SL-3W C4SL-6 C4SL-36

Modular F.R.L. Pressure Control Equipment

AL30/AL40 w Semi-standard/Bowl Assembly Part No. t e Model Semi-standard specifications With switch Bowl material With drain guide With barb fitting With bowl guard IN OUT AL20 AL10 AL60 AL50 AL40-06 AL40 AL30 Lowest limit ON Lowest limit OFF y r u C3SL-3 C4SL-3 C4SL-3 C1SL-3 C2SL-3 C3SL-3 C1SL-3 C2SL-3 C2SL-C C2SL-C Polycarbonate C2SL-3C C2SL-3C C3SL-3W C4SL-3W C4SL-3W C4SL-6 C4SL-36

7ND9071en

T6...T4 Gc II 3 D Ex tc IIIC T90 C Dc II 3 D Ex ic IIIC T90 C...T120 C Dc Ui 24 V II 3 G Ex ic IIC T6...T4 Gc II 3 D Ex tc IIIC T90 C Dc II 3 D Ex ic IIIC T90 C...T120 C Dc Ui 32 V, Ii 380 mA, Pi 5.32 W, Ci 5 nF, Li 10 H.

AZ1000

Porting Configuration Ports Seat material Ports 2 ports 3 ports 4 ports Code r Code Material PCTFE (Standard) Vespel 2PW 3PW 4PW No code VS w q w q Pressure gauge unit 3) 2PW 3PW 2) Refer to gauge guide (P.94) for gauge specifications.

PSxx-OMV0008CN

0 R/W Line 3 U8 0 Y 1823 0x071F 0 R/W Line 4 U8 0 Y 1824 0x0720 0 R/W Line bot U8 0 Y 1825 0x0721 0 R/W Line bot U8 0 Y 0OFF(dot ) 1ON(dot ) 1826 0x0722 0 R/W Line bot U8 0 Y () U8 0 Y 0 1(1/10) 1110 0x0456 0 R/W drE (Zero-cut) U8 0 Y 010 0 0 1.0% 1140 0x0474 0 R/W Cut () U8 0 Y 0oFF 1on 1800 0x0708 0 R/W Eco Pin () U8 0 Y 0 1 1810 0x0712 0 R/W 1811 0x0713 0 R/W NPin () U16 0

CQS

NPN) 5V A96V A96 IC 3 wire (NPN) F9NV F9N 3 wire (PNP) F9PV F9P Mounting Bracket Part No.

VM

-02/03 3 (Exhaust center) Rc 1/4: 17 VH302-02/03 VH312-02/03 2 (Position) 1 (P) 3 (R) 2 1 VH3 0.71 1/4, 3/8 VH320-02/03 VH330-02/03 3 (Closed center) Rc 3/8: 20 Exhaust center VH321-02/03 VH331-02/03 3 (Exhaust center) (A) 2 (B) 4 VH322-02/03 VH332-02/03 2 (Position) 12 3 4 VH400-02 to 06 VH410-02 to 06 3 (Closed center) 1 (P) 3 (R) Rc 1/4: 45 4 3 VH401-02 to 06 VH411-02 to 06 3 (Exhaust

Electric Actuators

6 Nickel plated 10 Bearing stopper Motor plate Guide ring Bearing Bushing Soft wiper 11 12 13 14 15 Anodized Size 10 only r w !5 !4 !3 e u !

HRX-OM-M091

HRX-OM-M091-P Operation Manual Communication function Thermo chiller Air-Cooled Water-Cooled refrigerated type refrigerated type HRS012-A-10HRS012-W-10HRS018-A-10HRS018-W-10HRS012-A-20HRS012-W-20HRS018-A-20HRS018-W-20HRS024-A-20HRS024-W-20HRS030-A-20HRS030-W-20HRS040-A-20 HRS040-W-20HRS050-A-20HRS050-W-20HRS060-A-20HRS060-W-20Keep this manual available whenever necessary 2022 SMC CORPORATION

HRX-OM-Q033

Name Alarm flag 1 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 2 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 3 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 4 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Bit Name Explanation 0 Low level in tank 1 High circulating fluid discharge temp. 2 Circulating fluid discharge temp. rise 3 Circulating fluid discharge

MNB

9i @2 q r @8#9 $0 $2 w $3 #8 @9 A C B !3 !4 #4 $1 e$8 o $7 !1@1 !6 @5 u !0 $6#6#5 $4 y#8 @6 #3 Section B Section C Section A !2 !2 #1 #0 !2 32 100 80 63 50 40 80, 100 80, 100 Parts list Parts list No. No.

PSxx-OMV0003CN

) 4LinE() 5oFF() 1100 0x044C 0 R/W U8 0 Y std 1101 0x044D 0 R/W Std U8 0 Y 2 1102 0x044E 0 R/W U8 0 Y 2 2 1103 0x044F 0 R/W U8 1 Y Line 1820 0x071C 0 R/W Line 1 U8 0 Y 1 (11seg) 1821 0x071D 0 R/W Line 2 U8 0 Y Line 24 (7seg) 1822 0x071E 0 R/W Line 3 U8 0 Y 1823 0x071F 0 R/W Line 4 U8 0 Y 1824 0x0720 0 R/W Line bot U8 0 Y 1825 0x0721 0 R/W Line bot U8 0 Y 0OFF(dot ) 1ON

HRX-OM-S010

-W.