SMC Pneumatic Clean Series

x 1.5 M10 x 1.25 M8 x 1.25 26-0.033 0 16 13 13 1/4 1/8 1/8 26-0.033 0 M10 x 1.25 32-0.039 0 8 10 M32 x 2 M14 x 1.5 10112122Axial foot style (L) / CBM2L, CBM2L H Relief port M5 x 0.8 24 2-P (Rc, NPT, G) A K F AL H2 F DL 2-NN Width across flats NA Standard port H1 Width across flats B1 HC LH D I B B 4-LD 2-LC MM Width across flats B2 G Relief port G Relief port M5 x 0.8 LT 20, 25 (This drawing

CL

x 1.5 l m t Applicable snap ring Part no.

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

Stroke + G mm) T Z LEF V EV J H thread depth C LEJ LEL U M M LEM D 4 x O1 thread depth R Y L B + Stroke A + Stroke LEY K Note 2) M EH M S 4 x O1 thread depth R LES XA H9 depth XA 6 x MO thread depth MR LEPY LEPS Note 1) Range within which the rod can move.

VFS

1 Hexagon socket head screw Steel M5 x 50 M5 x 50 M5 x 50 !2 Detent assembly AXT510-9 Refer to How to Order Pilot Valve Assembly on page 3-8-86. Pilot valve assembly !

Speed Controller with Indicator

13.6 15.1 5.5 9.6 7 AS12l1FSGl-U10/32-23 AS12l1FSGl-M5-04 4 8.2 AS12l1FSGl-U10/32-04 AS12l1FSGl-M5-06 6 10.4 18.6 23.1 16.5 8 AS12l1FSGl-U10/32-06 M5 x 0.8 10/32UNF 8 9.4 Note 1) Reference dimensions Note 2) Reference dimensions of threads after installation Inch Size [mm] Model d T H D1 D3 L1 L2 L3 L4 Note 1) A Note 2) M W1 W2 X Y Weight [g] Unlocked Locked Unlocked Locked AS12l1FSGl-M5

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x 1.5 l m t Applicable snap ring Part no.

VS 8-2/VS 8-4

1(P) port 2n x Rc, G (According to ISO1179-1), NPTF 1/8" 4(A), 2(B) port (n-1) x 19 52 3 U side D side n Station number 4 5 2 1 Indicator light L2 45 L1 45 (n-1) x 19 45 88 15 19 2 2 Manual override 152 (Double dual 3-port) 133 118 (Single) 165(3-position) 6.5 112 99 Circular connector cable assembly AXT100-MC26-015 :1.5 m AXT100-MC26-030 :3.0 m AXT100-MC26-050 :5.0 m 4 x M5 mounting holes

3 Port Solenoid Valve Metal Seal Series VZ200 1

5-L(Z)-01 300 (Lead wire length) With light/surge voltage suppressor Applicable cable O.D. 3.5 to 7 Max.10 84 With light/surge voltage suppressor M5 x 0.8 (Pilot EXH) Pg7 76 68.2 1 2 M: VZ2 5-M(Z)-01 43 19.5 PE PA 11 8.5 7 With light/surge voltage suppressor 300 2.5 3-Rc 1/8 (Lead wire length) (Pilot EXH) M5 x 0.8 M5 x 0.8 (Pilot EXH) 4-15-6 7 Series VZ200 Manifold Specifications Manifold

Stopper Cylinder

B + stroke R R O1 thread [mm] Bore size A B D E F G H J K L M N O P Q S T V X Y Z W Rc NPT G Rc NPT G 16 68 41.5 10 29 6 3 26.5 18 1.5 28 3.5 6.5 depth 4 M5 x 0.8 M5 x 0.8 M5 x 0.8 17 8 20 18 3.5 37 0 0 0 20 78 45 12 36 8 4 33 22 2 36 5.5 9 depth 7 1/8 1/8 M5 x 0.8 20 10 24 22 4 47 1.5 1.5 0 32 87 48 20 45 7.5 8 39 4.5 32 3 34 5.5 9 depth 7 1/8 1/8 1/8 20 18 36 20 8 14 40 105.5 52.5

C85

(mm) 4 4 6 6 8 10 Piston rod thread M4 x 0.7 M4 x 0.7 M6 x 1 M6 x 1 M8 x 1.25 M10 x 1.25 Space-saving Port size M 5 x 0.8 M 5 x 0.8 M 5 x 0.8 M 5 x 0.8 G 1/8 G 1/8 Mounting accuracy and rigidity made possible by means of faucet joint and direct mounting.

SQ1000/2000

Exhaust outlet 96 Series SQ1000/2000 Optional Manifold Parts for SQ1000 External pilot specification [-R] External pilot port (M5 x 0.8) This can be used when the air pressure is 0.1 to 0.2 MPa lower than the minimum operating pressure of the solenoid valves or used for vacuum specifications.

1

3.5 M10 x 1.25 27 25 8 6.5 M5 x 0.8 32 17.5 15 17 20 10 18 0 0.1 2 24 6 M5 x 0.8 depth 8 M5 x 0.8 depth 6 Width across flats 8 length 3.5 M10 x 1.25 34.5 32 12 6.5 M5 x 0.8 40 23.5 20.5 22 24 14 24 0 0.1 2 30 8 M6 x 1 depth 10 M6 x 1 depth 7 Width across flats 12 length 3.5 M14 x 1.5 42.5 40 13 6.5 M8 x 1.25 [mm] [mm] Port Thread: Rc1/8, NPT1/8 Female Rod End [mm] [mm] Port Thread: M5 Female

CJ2

7 8 2.4 3.2 4 M3 X 0.5 NTJ-006A 6 10 16 M4 X 0.7 NTJ-010A M5 X 0.8 NTJ-015A Refer to p.1.3-12 for details of the mounting nut.

Auto Switch Guide

CP95 Auto switch mounting screw M5 x 0.8 x 16 l 1.

Compact

B 2 x 4 x Square nut M5 x 0.8 LER 8.5 5.5 (105) 105 Stroke LEH [Origin]Note 1) Origin Note 2) Origin Note 2) When LECP1, LECP6 or LECPMJ is used. 3 5.3 When LECP2 is used. When LECP2 is used.

SMC Electronic Switch Series Variations

M5 X 0.8 0XY: M6 X 1 58 ISA ZSE1 ISE1 6.5 10.2 ZSE2 ISE2 8 10 17.6 10 5.5 ZSP 2-3.3 Mounting hole ISl ZSM PFl Connector style/ZSE2-0Xl-15C IFl Pressure setting Indicator light trimmer L H Vacuum Vacuum pad connection port 20 supply port 7 35.6 Circuit Lead wire length 600 (3000) 50 9.5 Vacuum pad connection port 0X: M5 X 0.8 0XY: M6 X 1 58 Vacuum supply port 0X: M5 X 0.8 0XY: M6 X 1 6.5

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

x M5 x 0.8 B LH Width across flats B1 (This drawing shows the cases of 20 and 25.)

MK

Operating range RB Model C 8 8 8 8 D 50 60 50 60 75 85 75 85 85 95 75 85 95 130 100 130 Mounting bolt M3 x 50l M3 x 60l M3 x 50l M3 x 60l M5 x 75l M5 x 85l M5 x 75l M5 x 85l M5 x 85l M5 x 95l M5 x 75l M5 x 85l M6 x 95l M6 x 130l M8 x 100l M8 x 130l MKB12-10 MKB12-20 MKB16-10 MKB16-20 MKB20-10 MKB20-20 MKB25-10 MKB25-20 MKB32-10 MKB32-20 MKB40-10 MKB40-20 MKB50-20 MKB50-50 MKB63-20 MKB63-50

Series VQ Base Mounted Metal Seal/Rubber Seal

Note 3) M5 fittings for M5 thread are attached without being incorporated.

Modular Design with Uniform Body Style

N F S 2 x P1 (Port size) 2 x P1 (Port size) J M R R V2 V1 Q1 Q1 B C C B V2 V1 Q2 Q1 Q1 K K OUT OUT IN IN U U P2 G Clearance for maintenance (Pressure gauge port size) Drain P2 E G Clearance for maintenance (Pressure gauge port size) Drain AC40-D to AC40-06-D A N F S M J R V1 V2 Q2 Q1 Q1 B C OUT IN 2 x P1 (Port size) U P2 E G Clearance for maintenance (Pressure gauge port size) Drain AC50-