Air Slide Table Series MXS MTS Retraction End Body mounting section Table mounting section D E E1 H H Q L G K M B C J A MXS-BT8 P F MXS-BT20 MXS-BT25 MXS-BT8 MXS-BT12 MXS-BT16 N Body mounting section A Table mounting section Applicable size Model B C D E E1 F G H P K L M N Q J MXS8 (L) MXS12 (L) MXS16 (L) MXS20 (L) MXS25 (L) MXS-BT8 (L) 38 23 12.5 14 40.8 5 8 12 1.4 M3 x 12 16.6 7 15.5 14.6 M3 x 16 M8 x 1 MXS-BT12
ISE60 A2 22 L For positive pressure ZSE60 A2 M F L 22 For compound pressure Piping specifications Option A2 B2 URJ 1/4, Piping in the backward direction None Nil TSJ 1/4, Piping in the backward direction Bracket A URJ 1/4 and TSJ 1/4 are special fittings for semiconductor manufacturing equipment.
ISE60 A2 22 L For positive pressure ZSE60 A2 M F L 22 For compound pressure Piping specifications Option A2 B2 URJ 1/4, Piping in the backward direction Nil None TSJ 1/4, Piping in the backward direction Bracket A URJ 1/4 and TSJ 1/4 are special fittings for semiconductor manufacturing equipment.
L1 D1 D2 Min. bore size M Body size Mass g L2 Model Urethane tubing Nylon tubing KK2P-23H 3.2 3.7 3.3 2.5 4.4 7.0 23.7 12.7 K M5 -04H 12.3 4 3.4 Applicable tubing 10.0 8.0 8.1 3.4 8.1 -06H 26.7 6 13.5 4.0 10.0 M M KK3P-04H 4 16.0 3.9 7.9 3.2 5.6 12.0 10.0 35.4 -06H 6 17.0 10.1 9.1 4.7 12.8 14.0 12.0 D1 D2 18.4 1/8 H 38.6 -08H 8 18.5 15.7 13.2 16.0 14.0 6.0 22.6 39.7 -10H 10 21.0 22.6 17.6
The spacing (L) of the intermediate supports must be no more than the values shown in the following graph. 25 LEMH32 20 Load mass m [kg] LEF m 15 LEJ LEMH25 L 10 LEL 5 LEM LEM m 0 0 200 400 600 800 1000 1200 1400 L LEY Support spacing L [mm] m LES 25 LEPY LEPS L L LEMHT32 20 Load mass m [kg] LER 15 LEH LEMHT25 m m 10 LEY -X5 L 5 11LEFS 0 0 200 400 600 800 1000 1200 1400 11LEJS Square nuts
Options 15.1 I/O cable 1) How to Order the I/O cable (2) Parallel I/O cable connector terminals L A T H LATH2LATH5Terminal Insulator Insulator number color Dot Dot color color A1 Red Light Red * Cable length [L] brown A2 Grey Black A3 Grey Yellow Red 1 1 m A4 Grey Black 3 3 m A5 Green Light Red green A6 Grey Black 5 5 m A7 Grey Grey Red A8 Grey Black A9 Grey White Red A10 Green Black I/O
) [mg/L] 50 or less p Standard item Acid consumption amount (at pH4.8) [mg/L] 50 or less p Total hardness [mg/L] 70 or less p Calcium hardness (CaCO3) [mg/L] 50 or less p Ionic state silica (SiO2) [mg/L] 30 or less p Iron (Fe) [mg/L] 0.3 or less p p Copper (Cu) [mg/L] 0.1 or less p Sulfide ion (S2) [mg/L] Should not be detected. p Ammonium ion (NH4+) [mg/L] 0.1 or less p Residual chlorine
IC circuit 2-wire Yes None 100 V Relay, PLC 24 V 5 V, 12 V 100 V or less IC circuit Lead wire length symbols: 0.5 m Nil (Example) M9N 1 m M M9NWM 3 m L M9NWL 5 m Z M9NWZ Solid state auto switches marked are produced upon receipt of order. For details of auto switches with pre-wired connector, refer to pages 389 and 390.
to the plate (also the same in case of a thicker plate) = m 2 r2 = m 5 2r2 = m 4 r2 = m 12 a2 + b2 !
(Circuit example) * The figure below shows the stopped state. 0V 24VDC Reset switch for stop Ry stop switch Ry Surge suppressor Power supply plug (the 1st controller) 24V 0V 0V M 24V C 24V EMG BK RLS RG+ RGRy Controller power supply Power supply plug (the 2nd controller) 0V M 24V C 24V EMG BK RLS RG+ RGRy Controller power supply 24V 0V Power supply plug (the 3rd controller) RGRG+ 0V M 24V
Bracket A (Vertical mounting) L Power supply/output connection lead wire (Lead wire length: 2 m) Power supply/output connection lead wire ZS-46-A2 Options/Part Nos.
5 2r2 = m 4 r2 CRQ2 = m 12 a2 + b2 MSQ MRQ 10.
L R L R L R L R L R L R Glass q w e Stainless steel Stainless steel Cross recessed round head screw Brass Stainless steel r t Stub 3.8-2 ISA Specifications Fluid Dry air (Filtered through a 5m filter) Operating pressure range 0.05 to 0.2MPa Recommended pressure range 0.1 to 0.2MPa Detection zone 10 to 300 m Repeatability including temperature characteristics 10m (for 0 to 60C on the basis
L Speed: V [mm/s] a1 a2 T1 = V/a1 = 300/3000 = 0.1 [s], T3 = V/a2 = 300/3000 = 0.1 [s] Time T = T1 + T2 + T3 + T4 [s] [s] L 0.5 V (T1 + T3) V T1: Acceleration time and T3: Deceleration time can be found by the following equation.
m P 0.1 x mcos + msin P 0.1 x m + m P D 1.6 x D 5.0 x D 5.0 x m m mv P Pv m mv P Pv Determination of allowable load mass & pressure Inclined operation (Refer to page 29) 1 Review of operating conditions Determination of load factor () = Load mass (m) Maximum allowable load (m max) + Static moment (M) Allowable static moment (Mmax)+ Dynamic moment (ME) Allowable dynamic moment
0.1 x mcos + msin P m P 0.1 x m + m P D 1.6 x D 5.0 x D 5.0 x m m mv P Pv m > mv P > Pv Determination of allowable load mass & pressure Inclined operation (Refer to page 8-16-8
x mcos + msin P m P 0.1 x m + m P D 1.6 x D 5.0 x D 5.0 x m m mv P Pv m > mv P > Pv Determination of allowable load mass & pressure Inclined operation (Refer to page 8-16-8
Lock B-1 Red 4 Lock A-1 Black 5 Sensor B-3 Brown 1 Sensor A-3 Blue 2 Electric Actuator side Controller side 10 - (5) I/O Cable -Pin No. # of wire Color of Dot Dot Pin No. # of wire Color of Dot Dot insulation mark color insulation mark color B1 7 Yellow Red A1 1 Light brown Black Cable length (L) B2 8 Light green Black A2 Light brown Red B3 Light green Red A3 2 Yellow Black B4 9
Options 15.1 I/O cable 1) How to Order the I/O cable (2) Parallel I/O cable connector terminals L A T H LATH2LATH5Terminal Insulator Insulator number color Dot Dot color color A1 Red Light Red *LE CP1 Cable length [L] brown A2 Grey Black A3 Grey Yellow Red 1 1 m A4 Grey Black 3 3 m A5 Green Light Red green A6 Grey Black 5 5 m A7 Grey Grey Red A8 Grey Black A9 Grey White Red A10 Green Black
CO2 0.2 to 5 L/min 0.5 to 12.5 L/min 1 to 25 L/min 2 to 50 L/min Dry air, N2, Ar 0.2 to 10.5 L/min 1 0.5 to 26.3 L/min 1 to 52.5 L/min 2 to 105 L/min 2 Display flow range Instantaneous CO2 0.2 to 5.2 L/min 0.5 to 13.1 L/min 1 to 26.2 L/min 2 to 52 L/min flow Dry air, N2, Ar 0 to 10.5 L/min 1 0 to 26.3 L/min 0 to 52.5 L/min 0 to 105 L/min 2 Set flow range CO2 0 to 5.2 L/min 0 to 13.1 L/min