5 Port Solenoid Valve

4(A), 2(B) port Bottom ported <P/R port side> 34.5 47.7 P 1 R 3 3 R X 12 P = 25 65.5 U side n PE B 2 A 4 3 SMC A B B 2 A 4 2 SMC A B A 4 B 2 1 SMC A B Stations PE P 1 D side 12 X 2n x 1/4" 4(A), 2(B) port Other dimensions are the same as the side ported type.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

VKF (A) 2 (A) 2 VQZ 1 (P) 3 (R) 1 (P) 3 (R) VZ VS VFN r e w q r e w q N.O. N.O. (A) 2 (A) 2 1 (P) 3 (R) 1 (P) 3 (R) Component Parts Description Material Note No.

Flow Control Equipment

Applicable tube O.D. (1) "Eibow": M3, M5 only (UL standard V-0) 4 6 8 10 12 04 06 08 10 12 Built-in One-touch fittings Applicable model: ASV310F, ASV410F, Port size ASV510F M3 X 0.5 M5 X 0.8 R(PT)1/8 R(PT)1/4 R(PT)3/8 R(PT)1/2 M3 M5 01 02 03 04 P Brass parts are all electroless nickel plated. AS ASN AQ Model ASV 4 6 8 10 12 Applicable tube O.D. (mm) Effective area (mm2) IN OUT OUT EXH.

Air Cylinder Series CM2

Grease pack part no.: GR-S-010 (10 g) Basic Style (B) 20 P 20 25 Bore size Stroke P P (Head side pressure port) (Head side pressure port) P P (Rod side pressure port) (Rod side pressure port) Effective thread length FL Width across flats B2 H1 Width across flats B1 32 to 40 H2 Width across flats KA P E (Head side pressure port) I G G NA D Q MM NN AL N ZZ + Stroke S + Stroke N F K H A P QY

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

E d R f j Table of UL-compliant Products JSXD Series JSXZ Series JSXM Series Option Replacement Parts J 2 x M depth 5 A G H B1 B b 2 x P Port size i DS: DIN terminal DZ: DIN terminal with light 70 CS: Conduit 58.3 51.9 500 R R DN: DIN terminal without connector WN: WN: M12 connector without cable 44.1 34.3 R R [mm] Size Port size P A B B1 C E G H J M 30 1/4, 3/8 21 <22> 57 28.5 89.8 10.5

4 Port Solenoid Valve Common Specifications Series SJ2000/3000

0 (B) (A) 2 4 (B) (A) 2 4 4(A) 3 5 1 3 5 1 (EB) (P) (EA) (EB) (P) (EA) 2(B) i 5(EA)/3(EB) 1(P) 2 position double with back pressure check valve 2 position double 2 position double o t r e w y q !1 u !

Remote Type Pressure Sensors/Pressure Sensor Controllers Series PSE

C2 PSE56 0 01 Option Port size 01 02 C01 N01 N02 A2 B2 R 1/8 (with M5 female thread) R 1/4 (with M5 female thread) Rc 1/8 NPT 1/8 (with M5 female thread) NPT 1/4 (with M5 female thread) URJ 1/4 TSJ 1/4 Note Description Part no. Connector for pressure sensor controller ZS-28-C 1 pc. Output specifications Adapter with throttle Rc 1/4 ZS-31-X175 1 pc.

Vacuum Pad

Applicable pad Applicable pad Applicable pad 015U/02U/035U 04UM/06UM/08UM/04B/06B/08B 10UM/13UM/16UM/10B/13B/16B R R R R R R R 1.4 3.5 1.8 4 R R R R R 1.5 0.8 R 5 3 1.8 6 4 1.8 0.4 1.5 2 Note) R part has to be smooth with no corners.

Vacuum Pad

Applicable pad Applicable pad Applicable pad 015U/02U/035U 04UM/06UM/08UM/04B/06B/08B 10UM/13UM/16UM/10B/13B/16B R R R R R R R 1.4 3.5 1.8 4 R R R R R 1.5 0.8 R 5 3 1.8 6 4 1.8 0.4 1.5 2 Note) R part has to be smooth with no corners.

Vacuum Pad

Applicable pad Applicable pad Applicable pad 015U/02U/035U 04UM/06UM/08UM/04B/06B/08B 10UM/13UM/16UM/10B/13B/16B R R R R R R R 1.4 3.5 1.8 4 R R R R R 1.5 0.8 R 5 3 1.8 6 4 1.8 0.4 1.5 2 Note) R part has to be smooth with no corners.

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

D E R NVFS2000 NVFS 2 F 00 P O R T S I Z E P O S I T I O N Without Subplate 01T 1/8 NPTF 02T 1/4 NPTF * Bottom Ported 1/8 NPTF Only 1 2 Position Single 2 2 Position Double 3 3 Position Closed Center 4 3 Position Exhaust Center 5 3 Position Pressure Center 6 3 Position Perfect P O R T I N G Side *B Bottom Note) *1/8 NPTF Only B O D Y T Y P E 0 Plug-In Type M A N U A L O V E R R I D E P I L

125

t t 12(P1), 23(P2) Port Port 3(R) y y (Pilot air port) r i Port 2(A) u r Port 1(P) t q Port 1(P) Port 2(A) Port 3(R) Component Parts No.

LJ1H

Nil Standard motor SMC controller Series LC1 compatible L R Left Right Lead screw lead G R Y Matsushita Electric Industrial Co., Ltd.

Stopper Cylinder Series RSQ Series RSG (Fixed mounting (Adjustable height) mounting height)

0 r #7 @5 !1 !

CXWM/CXWL

x 0.8 thread depth 10 2 x 2-M5 x 0.8 (Hexagon socket head cap plug) 2-M5 x 0.8 Cylinder port 4-4.3 through 4-8 counterbore depth 4.5 2 x 2-M5 x 0.8 Thread depth 10 2-M8 x 1.0 RB0805 Shock absorber 2 x 2-5H7 depth 6 +0.012 0 8-26-18 17 Series CXWM Slide Unit: Build-in Shock Absorber Slide Bearing Type 16 With End Lock: CXWM16Stroke/50 to 200 R 2 x 2-M5 x 0.8 thread depth 10 2 x 2-5H7 depth

Applicable Tubing: ø 2 Connection Thread: M3, M5 Made to Order (Refer to page 193 for details.) Miniature Fittings M Series

4/2.5 x R 4/2.5 x M5 For soft nylon and polyurethane tubing M-01AU-4 M-5HL-4 For nylon, soft nylon and polyurethane tubing Body rotates at 360 around the stud axis For reducing R 1/8 female to M5. 1 8 KKA 1 8 R R x M5 female M-5B 1 8 6/4 x R 6/4 x M5 M-01AU-6 P.196 M-5HL-6 P.198 KP 1 8 P.199 Plug Hose nipple Use to plug unused M5 port.

3 Port Solenoid Valve Rubber Seal Series SY100 1

Type S41 How to Order Applicable solenoid valve Note) SY114SY114ASY124SY124AApplicable blanking plate assembly SY100-77-1A SS3Y1 S41 05 M3 Stations A port side 02 M3 M5 M3 x 0.5 M5 x 0.8 2 stations 20 20 stations P R R port M5 x 0.8 P port M5 x 0.8 A port M3 x 0.5 M5 x 0.8 Note) SY114(A) and SY124(A) cannot be mounted on the same manifold.

3 Port Solenoid Valve Rubber Seal Series SY100

Type S41 How to Order Applicable solenoid valve Note) SY114SY114ASY124SY124AApplicable blanking plate assembly SY100-77-1A VP SS3Y1 S41 05 M3 S070 Stations A port side VQ 02 M3 M5 M3 x 0.5 M5 x 0.8 2 stations VKF 20 20 stations P R VQZ R port M5 x 0.8 P port M5 x 0.8 A port M3 x 0.5 M5 x 0.8 VZ Note) SY114(A) and SY124(A) cannot be mounted on the same manifold.

4 Port Solenoid Valve Series VQD1000

M5 x 0.8 C4 4 cassette Note) 1(P), 3(R) ports: Rc1/8.

Fieldbus System

EXH port] DIN rail clamping screw 8 R R 11.5 63.5 62.5 56.6 3 3 X X 40.5 B B B B B B B B 12 12 P P 25 1 1 A A A A A A A A 18.5 9.5 7.5 (12) (7.5) C3, C4, C6, M5 [4(A), 2(B) port] C8: 8 One-touch fitting C8 [1(P) SUP port] C3: 3.2 One-touch fitting C4: 4 One-touch fitting C6: 6 One-touch fitting M5: M5 thread 20.5 P = 10.5 34 L2 = L1 10.5 L3 = 10.5 x n1 + 65.5 L4 = L3 + 97.5 + 47 x n2 L5