Output Specification: PNP Open Collector 1 Output, Unit Specification: w/Unit Selection Function, Piping Specification: NPT 1/8, Option 1: Lead Wire w/Connector, 2m, Option 2: Bracket A, Vertical Mounting, Option 3: w/o Operation Manual, w/o Calibration Certificate

Output Specification: PNP Open Collector 1 Output, Unit Specification: w/Unit Selection Function, Piping Specification: NPT 1/8, Option 1: Lead Wire w/Connector, 2m, Option 2: Panel Mount Adapter, Option 3: w/o Operation Manual, w/o Calibration Certificate

Output Specification: PNP Open Collector 1 Output, Unit Specification: w/Unit Selection Function, Piping Specification: NPT 1/8, Option 1: w/o Lead Wire, Option 2: None, Option 3: w/o Operation Manual, Calibration Certificate

Table of Contents

Series MHSH3 MHSH3-32D to 80D 6-TA, thread depth TB 3-UA thread depth 6 UB P .C.D.R P (Finger operating port) 3-SA, counterbore dia.

SMC Electronic Switch Series Variations

Operating humidity range P.3.14-3 Vacuum breaking pressure Full scale Operating indicator light P.3.14-5 P.3.14-4 Voltage resistance Full span Operating pressure range Operating temperature range Operating voltage G W Orifice Gas contact part Wind comparator mode P.3.14-5 P.3.14-3 P Grommet Panel mounting H Z Peak indication part P.3.14-4 PNP output Hysteresis Zero out (Zero

2-Color Display Digital Pressure Switch Series ZSE80(F)/ISE80(H)

A Rectified value P-1 Rectified value P-1 (Differential) Pressure H-1 (P-3) H-1 (H-2) n-1 Min. B Switch output 1(2) Released ON Work 1 Work 2 Work n Atmosphere OFF ZSE ISE Formula for Obtaining the Set-Value A B Switch output response time when autoshift is input.

LECP6_C

LED() /P.18 5.CN1: PLC /P.24 6.3 / / CN1 CN5 / DC24V /P.16 4. /P.27 6.4 I/O /P.48 12. ONOFF /P.11 3. /P.48 12. / CN1 CN5 / DC24V /P.16 4. /P.27 6.4 I/O /P.14 3.4 63 - /P.28 7. (CN1: /P.11 3. EMG ) SV1.00 INP ON INP OFF (INP PLC ) /P.24 6.3 / /P.11 3.

LECA6_C

SVRE OFF [BK RLS]DC24V [BK RLS] [BK RLS]DC24V [BK RLS] EMG /LEC 58 - 15. 15.1. / 15.2 ON 59 - 5 () 60 - 15.3 50mm 15.4 ( ) 61 - 15.5 15.6 D 100 15.7 62 - 16. , , (), 16.1 /P.16 4. LED() /P.18 5.CN1: PLC /P.24 6.3 CN1 CN5 DC24V /P.16 4. /P.27 6.4 I/O /P.48 12. ONOFF /P.11 3. /P.48 12. CN1 CN5 DC24V /P.16 4. /P.27 6.4 I/O /P.14 3.4 63 - /P.28 7. (CN1:EMG ) /P.11 3.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

Q1 = M L2 = L2 + (3 x P) 3. L1 + (3 x P) L2 + (3 x P) 4. L2 = Q2 = M L1 = 5. Q2 = M 6.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

Shaft Pattern Sequencing I Applicable shaft type: S, W, Y How to Order F59 B C P D C S 50 90 X RA1 A2 A24 C10 -X6 Built-in magnet Auto switch Nil D None Built-in magnet Refer to page 11-7-13 for the part no. of auto switches.

Vacuum System Peripherals:

PSE200 PSE201 Model NPN open collector PNP open collector Output specifications 12 to 24 VDC 10%, Ripple (p-p) 10% or less (With power supply polariry protection) Power supply voltage 55 mA or less (Current consumption for sensor is not included.) Current consumption [Power supply voltage] 1.5 V 40 mA maximum (100 mA maximum for the total power supply current when 4 sensors are input.)

Environment

How to Order S 2 B P H S4 200 LEY 63 A2 w y !0 i o e r t q u !1 !2 !3 !

Digital Flow Switch

9 Specifications p. 10 Flow Range p. 11 Analog Output p. 11 Pressure Loss p. 11 IN Side Straight Section and Accuracy p. 12 Internal Circuits and Wiring Examples p. 12 Construction: Parts in Contact with Fluid p. 13 Dimensions p. 13 3-Screen Display Digital Flow Monitor PFG300 Series How to Order p. 14 Specifications p. 15 Internal Circuits and Wiring Examples p. 16

e

P Cable length is selectable from 1 m, 3 m and 5 m. P Improvement in the maximum operating temperature from 40C to 50C (Actuator unit only) P Mounting method can be selected among 3 types.

MXS Series Air Slide Table

L A93L Note) Refer to P. 177 to 179 for further information of auto switch. PLC: Programmable Logic Controller Specifications Specifications are same as the standard type.

F/ISE

Normal operation Value clear Initial setting P.14 Adjust the zero point of atmospheric pressure. Detects and displays pressure and operates switch. Set "Output mode", "Response time" and "Auto/ Manual mode." Auto preset P.14 P.16 The pressure set point is calibrated automatically at the time of adsorption or primary pressure confirmation.

High Precision Digital Pressure Switch, Series ZSE50F/ZSE60F, ISE50/ISE60

Normal operation Value clear Initial setting P.14 Adjust the zero point of atmospheric pressure. Detects and displays pressure and operates switch. Set "Output mode", "Response time" and "Auto/ Manual mode." Auto preset P.14 P.16 The pressure set point is calibrated automatically at the time of adsorption or primary pressure confirmation.

CHKD/CHKG

A32 A33 A34 Note 1) Dimensions indicated with an asterisk () in the patterns A1, A2, A18, A20, A22, A31, A32, A33, and A34 are provided in the table below.

Pressure Sensor

PSE540(A) PSE541(A) PSE543(A) Rated pressure range 0 to 1 MPa 0 to -101 kPa -100 to 100 kPa Extension analog output range -0.1 to 0 MPa 10.1 to 0 kPa Withstand pressure 1.5 MPa 500 kPa Applicable Air, inert gases and incombustible gases Power supply voltage 12 to 24 VDC10%, ripple (p-p) 10% or less (Protected against inverse connection) Current consumption 15 mA or less Analog output: 1 to

lPSMt

Steel) Pressure Gauge For OUT 1, OUT 2 pressure range 0-150 psi, 1/8 NPT G43-P10-N01 or KSlOB-AD11 (St.