ZQ-OM01401

-40 10 -20 -20 5 0 0 0 0.2 0.3 0.4 0.5 0 1 2 3 4 5 6 [MPa] [L/min (AMR) ] ZQ07A 0.43MPa -100 40 -100 35 -80 [L/min (AMR) ] -80 [L/min (AMR) ] 30 [kPa] [kPa] -60 25 -60 20 -40 -40 15 10 -20 -20 5 0 0 0 0 2 4 6 8 10 12 0.2 0.3 0.4 0.5 [MPa] [L/min (AMR) ] ZQ10A 0.43MPa -100 70 -100 60 -80 [L/min (AMR) ] -80 [L/min (AMR) ] [kPa] [kPa] 50 -60 -60 40 -40 30 -40 20 -20 -20 10 0 0 0

HRX-OM-X037

HRL300-A-40 CH1 . 9-13 9.4.4 HRL100/200/300-A-40 CH2 . 9-13 9.4.5 HRL100-A-40-T2 CH1 . 9-14 9.4.6 HRL200-A-40-T2 CH2 . 9-14 9.4.7 HRL300-A-40-T2 CH1 . 9-15 9.4.8 HRL100/200/300-A-40-T2 CH2 . 9-15 9.4.9 HRL300-A-40-T3 CH1 . 9-16 9.4.10 HRL300-A-40-T3 CH2 . 9-16 9.4.11 HRL100-W-40 CH1 . 9-17 9.4.12 HRL200-W-40 CH1 . 9-17 9.4.13 HRL100/200-W-40 CH2 . 9-18 9.4.14 HRL100-W-40-T2 CH1 . 9-18 HRL

CEx-OMQ0010

CE1-R20m CE1-H0374 CE1-R 20m CE1-H0374 CE1-H0374-1 CE1-H0374-2 CE1-H0374 CE1-H0374 CE1-H0374-1 CE1-H0374-2 20.5m 20.5m U 25mm *400 1 100 / 5-4 (1)CEU1CEU2CEU5 CE1-R**, 17 (2) (3)SFC-10 (4) (5)TDK ZGB2203-01U (6)CEU1CEU2CEU5 (7)CEU1(P)-D EMC (2004/108/EC) 6-1 18 40 VFS240R VFS210 AR425 8/6 AN200-02 AS4000-02 50 VFS240R VFS210 AR425 10/7.5 AN200-02 AS4000-02 63 VFS340R VFS210

CC

40 28 100 27 1 115 62 180.5 124.9 CCVL02-lG-S 3/4 66 107 116 135 50 24 40 40 28 100 27 2 135 80 180.5 132.8 CCVLl1-lG-S M6 X 1 10.5 to 12.5 3/4 66 107 116 135 50 24 40 40 28 100 27 1 135 80 115 180.5 124.9 CCVLl2-lG-S 3/4 66 107 116 135 50 24 40 40 28 CCVLl3-lG-S 100 27 1 135 80 115 180.5 124.9 3/4 66 107 CCVLl0-S 116 50 40 28 100 27 135 80 115 *Pitch of mounting on the wall

Pressure Relief 3 Port Valve with Locking Holes

VH*-OMX0068-A PRODUCT NAME Pressure Relief 3 Port Valve with Locking Holes MODEL / Series / Product Number VHS20-(F,N)01~(F,N)02(-R,Z)-D VHS30-(F,N)02~(F,N)03(-R,Z)-D VHS40-(F,N)02~(F,N)04(-R,Z)-D Contents Page 1. Safety Instructions 1~5 2. Application 6 3. Specifications 6 4. How to Order 7~8 5. Construction / Parts List 9 6.

Related Products

Large effective area Low power consumption 1/4 67 111 31 55 40 64 (Max. 73) AVL2000-*02 Manual/Manual solenoid lock out Modular design 1/4 67 20.5 111 31 55 34 40 64 (Max. 73) AVL2000-*02-*DZM 3/8 76 118 36 57 48 64 (Max. 73) AVL3000-*03 How to Order 3/8 76 12.5 118 36 57 34 48 64 (Max. 73) AVL3000-*03-*DZM 1/2 98 133 47 61 52 64 (Max. 73) AVL4000-*04 G 20 00 F DZM R 5 02 AVL 1/2 98

VEX1

Condition: Pressure 0.5MPa, Load 50%, Piping length 5m Effective area mm 2(Cv ) Cylinder speed (mm/s) 50 63 80 100 125 140 Bore size (mm) 160 180 200 250 300 Port size Rc(PT) 40 250 25(1.4) VEX312 -01, 02 500 750 02 ( 1 4) 60(3.3) 250 500 750 250 500 750 500 750 1000 500 750 1000 250 500 750 250 500 750 VEX332 -02, 03, 04 Body ported Base mounted 03 (3 8) 160(8.9) VEX350 -04, 06, 10 06 (3

Lightweight and Compact

Applicable model HRS-WL003 HRS090-mm-20/40 Parts List q No.

PSxx-OMM0002CN

N 3 ISE80 -0.11MPa ZSE80 0-101KPa ZSE80F -100100KPa ISE80H -0.12MPa Y K + T + 2 02 R1/4 N02 NPT1/4 F02* G1/4 G01 Rc1/8 A2 URJ1/4 B2 TSJ1/4 A (ZS-24-A/ZS-35-A) B *(ZS-24-D) C D + F02 ISO228-1 1 *1 L M SI*2 P (psi)*1 1 2 ISE80H: MPa MPa kpa N NPN1 P PNP1 A NPN2 B PNP2 R NPN2+/ T PNP2+/ S NPN2+/ V PNP2+/ / ZS-24-A ZS-24-D ZS-35-A ZS-35-C ZS-35-B ZS-35-F ZS-35-E + -9No.PS-OMM0002CN-F

Table of Contents

, D-Y7PWV, D-Y7BWV MY1CW25/32/40/50/63 B A Reed Switch Solid State Switch D-Z73, D-Z76, D-Z80 (mm) D-Y7BAL (mm) D-Y7NW(V), D-Y7PW(V), D-Y7BW(V) D-Y59 , D-Y69 , D-Y7P(V) A B A B 63 50 40 32 25 Mounting position 63 50 40 32 25 Mounting position 40 32 25 Mounting position A A A 323.5 278.5 157.5 127.5 97.5 278.5 157.5 127.5 97.5 323.5 157.5 127.5 97.5 B B B 136.5 121.5 182.5 152.5 122.5 121.5

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

D-A80 D-A7H D-F7W D-A80H D-J79W D-F7 D-F79F D-J79 D-F7NTL D-F7BAL D-A79W D-F7WV D-F7V D-F7BAVL D-A73C D-A80C D-J79C 12 to 25 CUJ CU CQS 32 to 100 CQM CQ2 RQ 40 to 100 D-P5DWL MU D-X 20Data B A U Proper Auto Switch Mounting Position Auto Switch Mounting Height (mm) D-A7H/A80H D-A73C/A80C D-F7/J79 D-F7V/J79C D-F7BAL/F7W D-J79W/F7WV D-F7BAVL/F79F D-A7H, D-A80H D-F7/J79/F7W D-J79W, D-F7BAL D-F79F

Applicable Auto Switch Model

(RedGreenRed) CXS 6, 10, 15, 20, 25, 32 MGQ, MVGQ 12, 16, 20, 25, 32, 40, 50, 63, 80, 100 MGP 12, 16, 20, 25, 32, 40, 50, 63, 80, 100 MY1B 25, 32, 40, 50, 63, 80, 100 MY1C 25, 32, 40, 50, 63 MY1H 25, 32, 40 MY1M 25, 32, 40, 50, 63 RSH 20, 32, 50, 63, 80 Specifications D-Y7lW/D-Y7lWV (With indicator light) PLC: Programmable Logic Controller D-Y7NW D-Y7NWV D-Y7PW D-Y7PWV D-Y7BW D-Y7BWV Auto

Air Cylinder

120 32 29.5 45.5 70.5 95.5 120.5 40 34.5 47.5 72.5 97.5 122.5 D-C7l D-C80 D-C73C D-C80C CM2 20 29.5 45.5 70.5 95.5 25 29 46 71 96 121 32 30.5 46.5 71.5 96.5 121.5 40 35.5 48.5 73.5 98.5 123.5 CM3 CG1 CG1 20 25 41 66 91 25 24.5 41.5 66.5 91.5 116.5 32 26 42 67 92 117 40 31 44 69 94 119 D-G5NT D-G59F CG3 JMB 20 23.5 39.5 64.5 89.5 25 23 40 65 90 115 32 24.5 40.5 65.5 90.5 115.5 40 29.5

Series ARP20 to ARP40 10- 10- 21- 21- Direct Operated Precision Regulator Series ARP20K to ARP40K 10- 10- Direct Operated Precision 21- 21- Regulator with Backflow Function

Example) 10-ARP30K-03BG-1RY Clean room compliant, copperfree, fluorine-free, silicone-free Clean room compliant Symbol Description 20 30 40 Body size 20 30 40 Body size Nil K Without backflow function With backflow function With backflow function + Nil N F Thread type Rc NPT G + 01 02 03 04 1/8 1/4 3/8 1/2 Port size + Nil B Note 2) H a Without mounting option With bracket With set nut (For

Series 10-, 21- ARP20 to 10-, 21- ARP40 Direct Operated Precision

Example) 10-ARP30K-03BG-1RY Clean room compliant, copperfree, fluorine-free, silicone-free Clean room compliant Symbol Description 20 30 40 Body size 20 30 40 Body size Nil K Without backflow function With backflow function With backflow function + Nil N F Thread type Rc NPT G + 01 02 03 04 1/8 1/4 3/8 1/2 Port size + Nil B Note 2) H a Without mounting option With bracket With set nut (For

MGG

D-H7BAL D-H7 D-H7W D-H7F D-H7BAL D-B59W D-H7 D-H7C Applicable bore size A Hs Hs Hs Hs A A A A A A B B B B B B B 20 30.5 27.5 27.5 27 24.5 41.5 25.5 45 27 43.5 28.5 42 27 40 24 44.5 45.5 29.5 25 30.5 30 30 29.5 27 41.5 25.5 45 27 43.5 28.5 42 27 40 24 44.5 29.5 45.5 32 31.5 33.5 33.5 33 30.5 41.5 26.5 46 28 44.5 29.5 43 28 40 25 45.5 30.5 46.5 40 36.5 38 38 37.5 35 50.5 31.5 55.5 33 53.5

CL

MGP Auto switch model 20 25 32 40 1000 Holding force (N) D-B5, B6 D-G5, K5 D-C7, C8 D-H7 MGQ BA-01 BA-02 BA-32 BA-04 40 BMA2-020 BMA2-025 BMA2-032 BMA2-040 MGG 500 32 25 Stainless steel mounting bolt set The set of stainless steel mounting screws described below is available and can be used depending on the operating environment.

Auto Switch Guide

10-20-34 D-J79C Connector 10-20-35 D-F59/F5P/J59/J51 Grommet Tie-rod Terminal conduit 10-20-36 D-G39C/K39C D-M9N/M9P/M9B 10-20-37 D-M9NV/M9PV/M9BV D-F8N/F8P/F8B D-F9G/F9H 10-20-40 Direct Grommet D-Y59A/Y59B/Y7P 10-20-38 D-Y69A/Y69B /Y7PV 10-20-41 D-Y7G/7H 10-20-39 D-M5N/M5P/M5B D-H7NW/H7PW/H7BW 10-20-42 Band Grommet D-G59W/G5PW/K59W 10-20-43 2-color indication D-F79W/F7PW/J79W 10-20-44

CL

MLU 40 50 63 80 100 125 140 160 Bore size (mm) Bore size (mm) Auto switch model CA-L06 CA-L05 CA-L10 CA-L04 CA-L08 Foot style Rod side 40 50 63 80 100 125 140 160 ML1C CS1-L12 CS1-L14 CS1-L16 D-A5/A6/A59W D-F5/J5/F5NTL D-F5W/J59W D-F5BAL/F59F D-A3/A44 D-G39/K39 D-B5/B6/B59W D-G5/K59/G5BAL D-G5W/K59W D-G59F/G5NTL D-A3C/A44C D-G39C/K39C D-Z7/Z80 D-Y59/Y69 D-Y7P/Y7PV D-Y7W D-Y7WV D-Y7BAL CA1

Auto Switch Guide

J51 Grommet Tie-rod Terminal conduit 9-15-36 D-G39C/K39C D-M9N/M9P/M9B 9-15-37 D-M9NV/M9PV/M9BV D-F8N/F8P/F8B D-F9G/F9H 9-15-39 Direct Grommet D-Y59A/Y59B/Y7P 9-15-38 D-Y69A/Y69B /Y7PV D-Y7G/7H 9-15-40 D-M5N/M5P/M5B 9-15-41 D-H7NW/H7PW/H7BW 9-15-42 Band Grommet D-G59W/G5PW/K59W 9-15-43 2-color indication D-F79W/F7PW/J79W 9-15-44 Solid State Switch Rail Grommet D-F7NWV/F7BWV 9-15-45 D-F59W