LEC-OM069xx

Forward Run Prohibited Pn50A.3 7 8 L /P-OT 9 A B C D E F H N-OT 0 1 2 3 4 5 6 Reverse Run Prohibited Pn50B.0 7 8 L /N-OT 0 A B C D E F L /P-CL 0 1 2 3 4 5 6 Forward External Torque Limit Pn50B.2 8 7 H P-CL 9 A B C D E F L /N-CL 0 1 2 3 4 5 6 Reserve External Torque Limit Pn50B.3 8 7 H N-CL 9 A B C D E F L /DEC 0 1 2 3 4 5 6 Homing Deceleration LS Pn511.0 8 7 H DEC 9 A B C D E F L EXT1 * *

5 Port Solenoid Valve

The total number of solenoids (points) must not exceed 24. 19 20 19 20 17 18 17 18 15 16 15 16 13 14 13 14 11 12 11 12 9 10 9 10 7 8 7 8 5 6 5 6 3 4 3 4 1 2 1 2 (For 26P) (For 20P) 628 Base Mounted Plug-in Unit VQC4000 Series P VQC4000 Kit (Flat ribbon cable kit) IP40 compliant VV5QC41 L2 L1 6.5 27 Indicator light 65.5 P = 25 Manual override SV SYJ A A A B A B A B A B A B 9 9 SZ A A A A A

SMC

3H9 depth 2.5 +0.025 0 HA GA 3H9 depth 2.5 +0.025 0 B A NN-M4 x 0.7 thread depth 8 4 6.5 1 7 7 12 3.2 B A 11 5.5 5.5 11 H (NN1) x H G Section AA Section BB (mm) Model F 20 30 20 28 38 ZZ 64 74 84 106 122 M 42 52 62 84 100 Z 41.5 51.5 61.5 83.5 99.5 K 22.5 32.5 42.5 52.5 62.5 J 17 27 40 50 60 I 10 10 7 19 25 NN 2 2 3 3 4 H 25 35 20 30 24 G 6 6 11 13 17 N 4 4 6 6 6 HA 20 20 20 30 48 GA 11 21

24

*1 D-A9 D-A9V *3, *4 D-P3DWA *2 D-P4DW For D-P3DWA (*: Cannot be mounted on bore size 20.) 25 to 63 80, 100 Bore size A B A B A B A B A B 20 40 7 36 3 35 2 25 40.5 7 36.5 3 35.5 2 36 2.5 32 37.5 10 33.5 6 32.5 5 33 5.5 32 4.5 40 43.5 10.5 39.5 6.5 38.5 5.5 39 6 38 5 50 44.5 9.5 40.5 5.5 39.5 4.5 40 5 39 4 63 47 12 43 8 42 7 42.5 7.5 41.5 6.5 80 68 23.5 64 19.5 63 18.5 63.5 19 62.5 18 100

MNB

n = 2, 3, 4 60 + 30 (n 2) n = 2, 4, 6, 8 100 + 100 (n 2) n = 2, 3, 4 90 + 100 (n 2) n = 2, 4, 6, 8 65 + 30 (n 2) n = 2, 4, 6, 8 75 + 30 (n 2) n = 2, 4, 6, 8 80 + 30 (n 2) n = 2, 4, 6, 8 85 + 30 (n 2) n = 2, 4, 6, 8 95 + 100 (n 2) n = 2, 4, 6, 8 100 + 100 (n 2) n = 2, 4, 6, 8 105 + 100 (n 2) n = 2, 4, 6, 8 110 + 100 (n 2) n = 2, 4, 6, 8 D-A3 D-G39 D-K39 n (Different sides) n (Same

MNB

D-Y7P/Y7PV D-Y7W, D-Y7WV D-Y7BAL D-A3 D-A44 D-G39 D-K39 D-A5 D-A6 D-A59W D-F5NTL D-P5DWL Bore size (mm) A B A B A B A B A B A B A B 32 1 3.5 1.5 4 0 0.5 9.5 12 4.5 7 2 4.5 0 0.5 CL 40 1 3.5 1.5 4 0 0.5 9.5 12 4.5 7 2 4.5 0 0.5 50 1.5 4 2 4.5 0 1 10 12.5 5 7.5 2.5 5 0 1 CL1 63 1.5 4 2 4.5 0 1 10 12.5 5 7.5 2.5 5 0 1 80 5.5 7 6 7.5 2.5 4 14 15.5 9 10.5 6.5 8 2.5 4 MLGC 100 5.5 7 6 7.5 2.5

CNA

6 !0 u @5 i !5 !1 o q $8 y $1 r #5 $6 #2 #7 #3 #4 B A CL MLGC CNA CB #1 @8 #6 $0 w #0 $5 $7 $3 $9 %1 $4 @1 @4 !8 @0 !7 !9 @2 @6 $2 @3 !4 %0 !3 #9 CV/MVG A section (Release piston bushing) B section (Piston guide bushing) CXW 100 80 63 50 40 50, 63, 80, 100 CXS @9 CXT !2 !2 MX Description Material Note Component Parts Description Material Note Component Parts MXU No. No.

VQ4000

pilot port) 44 62 9 9 91 44 62 Station number 50.5 59 2-Rc 1/8 (External pilot port) R4.5 R4.5 50.5 9 9 U side entry (LU) U side D side D side U side n 15 X X n X 12 12 12 12 8 B 2 A 4 B 2 A 4 8 Manual override 7 B 2 A 4 SMC SMC SMC SMC SMC SMC SMC B 2 A 4 7 A B A B A B A B A B A A A B A B A B A B A B A A SMC SMC SMC SMC SMC SMC SMC B B B A A A A A A A B A B 2 A 4 6 B 2 A 4 6 B B A A A A

MXQ

watchmakers screwdriver with a handle about 5 to 6 mm in diameter.

Precautions 1

Mounting Position (mm) D-C7 D-C80 D-C73C D-C80C A D-H7 D-H7C D-H7W D-H7NF Auto switch model D-A9 D-M9 D-M9W D-B59W D-B5 D-B64 D-G5NTL Bore size (mm) A A B B A B A B A B B A B 20 25 32 40 10.5 9.5 6 4 3 6 5 2.5 1.5 1 0 6.5 5.5 7 10.5 9.5 6 4 3 6 5 2.5 1.5 1 0 6.5 5.5 7 11.5 10.5 7 5 4 7 6 3.5 2.5 2 1 7.5 6.5 8 17.5 15.5 12 10 9 12 11 8.5 7.5 7 6 13.5 11.5 13 Note) Adjust the auto switch after

ZP

Model A B C D Y Y A B C D Flat Model ZPT10D-6-A10 10 12 15 24 6 Flat with ribs U C ZPT13 -6-A10 U C ZPT16 -6-A10 U C ZPT16D-6-A10 ZPT10 -6-A10 16 18 16 25 7 10 12 15 12 21 1.7 1.8 3 13 Dimensions by Stroke 16 18 12.5 21.5 1.2 3.5 10 16 G Model Dimensions by Stroke E F E F 10, 13 16 ZPTD10-6-A10 35.5 73.5 23 36.5 74.5 G Model E F E F ZPTD20-6-A10 45.5 111.5 46.5 112.5 51 U C ZPT 20-6-A10 U

Mechanically Jointed Rodless Cylinder Series MY2 ø16, ø25, ø40 1

1 #6 !0 yoiu@2%0%1q%3e !6!7!8#8!9@0 !3 CX MY2C16 @9 D%6 -X !4 #1@3@9 !5@8 @7 %5!2%4$2$4$5 @4 #0 Section A-A' 20A Data A' $0 $1 #4 #5 #2 @1 $6 $3 Component Parts No. Description Cam follower cap Magnet Magnet Seal magnet Rail End spacer Square nut Square nut Spring pin Parallel pin No.

Rotary Actuator/Vane Type

(Rotation range of single flat (key) when mounting 2 stopper blocks on the other sides groove is the opposite side from a> and the setting range is within either right 50 or 60 against port A and B.) Four chamfers for wrench Long groove Stopper block Section A-A (Double vane) Section A-A (Single vane) 60 50 Note) For size 40, each stopper block comes with 2 holding screws.

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

6 8 10 12 14 Number of needle rotations Number of needle rotations Number of needle rotations PF2M711(-L) PF2M721(-L) 100 L/min 200 L/min PF2M750(-L) 50 L/min 120 100 80 60 40 20 0 0 2 4 6 8 10 12 14 240 200 160 120 80 40 0 0 2 4 6 8 10 12 14 60 50 40 30 20 10 0 0 2 4 6 8 10 12 14 750 kPa 350 kPa 150 kPa 350 kPa 150 kPa 350 kPa Flow [L/min] Flow [L/min] Flow [L/min] 150 kPa 750 kPa 750 kPa

Stopper Cylinder

6 7 RS2H D-A9/A9V D-A7/A80 D-A7H/A80H D-A73C/A80C 6 9.5 9 9.5 9.5 9.5 RSH 12 12 12 11 10 MIW MIS D-A79W 13 13 13 14 14 D-F7/J79 D-F7V/J79C D-F7W/J7WV D-F7BA/F7BAV D-F79F/F7NT 6 5.5 6 6 6 5.5 5 D-P3DWA 6 Since this is a guideline including hysteresis, not meant to be guaranteed.

100

VAC 4 DC Nil 300 mm 6 600 mm 10 1000 mm 15 1500 mm 20 2000 mm 25 2500 mm 30 3000 mm 50 5000 mm Supply valve/ Release valve w Rated voltage DC CE-compliant AC (50/60 Hz) CE-compliant 5 24 VDC V 1 100 VAC 6 12 VDC V 2 200 VAC V 6 VDC V 3 110 VAC [115 VAC] S 5 VDC V 4 220 VAC [230 VAC] R 3 VDC V x How to Order Vacuum Pressure Switch * CE-compliant: For DC only A M L ZL ZSE30A 00 e Electrical

C85

D-H7C D-H7W D-H7BAL D-H7NF NCM D-A79W 13.3 13.3 10 A B 26 NCA D-J79C Bore 17 Hs D-X B 8 (5) 2 4 (2) 5.5 (3.5) A B 2 2 (2.5) 3 (4) 9 (6) 3 5 (3) 6.5 (4.5) B 3.5 3.5 (4) 4.5 (5.5) A 2 2 (2.5) 3 (4) A 3.5 3.5 (4) 4.5 (5.5) B 4 4 (4.5) 5 (6) 11 (8) 5 7 (5) 8.5 (6.5) B 3 3 (3.5) 4 (4.5) 10 (7) 4 6 (4) 7.5 (5.5) A 4 4 (4.5) 5 (6) A 3 3 (3.5) 4 (4.5) 1 D-F7V D-F7WV D-F7BAVL 8 10 12 7 23 A B 2015

C85

) A 2 2 (2.5) 3 (4) A 3.5 3.5 (4) 4.5 (5.5) B 4 4 (4.5) 5 (6) 11 (8) 5 7 (5) 8.5 (6.5) B 3 3 (3.5) 4 (4.5) 10 (7) 4 6 (4) 7.5 (5.5) A 4 4 (4.5) 5 (6) A 3 3 (3.5) 4 (4.5) 1 D-F7V D-F7WV D-F7BAVL 8 10 12 7 23 A B 2015 Hs 10.5 (7.5) 4.5 6.5 (4.5) 8 (6) 2 (3) 3 (4) 4.5 (5.5) 5 (6) 4 (5) 16 Data 20 25 5 (3) 6.5 (4.5) 6 (4) 7.5 (5.5) 7.5 (5.5) 9 (7) 8 (6) 9.5 (7.5) 7 (5) 8.5 (6.5) ( ) for air

ITV

Nil U 6 (Light gray) 1/4" (Orange) D side 1 2 3 Note) A DIN rail with the length specified by the number of stations is attached to the manifold.

VZ5000

, 2(B) port size 100 VAC, 50/60 Hz 200 VAC, 50/60 Hz 110 VAC, 50/60 Hz 220 VAC, 50/60 Hz 1 2 3 Rc 1 8 01 C6 C8 One-touch fitting for 6 One-touch fitting for 8 3 position pressure center 4 Note) P , R1, R2 port: Rc 1/8 5 24 VDC 12 VDC 5 6 9 Manual override Other Option Electrical entry Nil: Non-locking push type B: Locking type B (Slotted) C: Locking type C (Manual) Grommet L plug connector