RQ

Mounting bolt C D Mounting bolt Mounting bolt Model C D 50 55 60 65 75 85 55 60 65 70 80 90 60 65 70 80 90 115 140 Model C D 65 70 75 85 95 120 145 85 95 105 130 155 90 100 110 135 160 105 115 140 165 120 130 155 180 R(D)QB20-15 -20 -25 -30 -40 -50 R(D)QB25-15 -20 -25 -30 -40 -50 R(D)QB32-20 -25 -30 -40 -50 -75 -100 R(D)QB40-20 -25 -30 -40 -50 -75 -100 R(D)QB50-30 -40 -50 -75 -100 R(D)QB63

Mechanically Jointed Rodless Cylinder Series MY2H/HT ø16, ø25, ø40

(V), D-A93(V), D-A96(V) Auto Switch Specifications D-A96 D-A90 D-A90V D-A93 D-A93V In-line D-A96V Auto switch part no.

Environment

Size Lead Order no. 19 63 A/B/C LE-D-2-5 Piston rod GR-S-010 (10 g) GR-S-020 (20 g) L LE-D-2-6 * Apply grease on the piston rod periodically.

Fluoropolymer Fittings Hyper Fitting / Flare Type Series LQ3

for the inserted tubing from the end surface of the nut (E1,E2),L: Nut material PVDF dimensions 8 22.5 19.5 21 25 18 10 9 62 58 D 12 22.5 19.5 82.5 77 24 22 24 29 21 25 22 MS 24 22 95.5 91 24 21 32 24 29 25 37 29 19 26.5 24 32 37 30 22.5 19.5 91 85.5 M LQ 26.5 24 112.5 105.5 H 25 30 26 41 49 36 24 22 106.5 100 MQR Inch Size T B side A side Class 7 E1 E2 E2 L L E1 H1 M1 H2 M2 W Model Applicable

Water-cooledThermo-chiller

30 15 15 Return port pressure 0 0 0 2 4 6 8 10 12 14 16 18 20 0 5 10 15 20 25 30 35 40 45 50 55 60 Flow rate (L/min) Flow rate (L/min) If the circulating fluid flow drops below 2.1 gpm (8 L/min)., the shutdown alarm activates and operation stops.

PF-OMM0004_C

-D DC(+) DC(-) (OUT1) (OUT2) ( ) GND 30 ms GND 30ms ( 20 ) -63No.PF-OMM0004-D OUT1 (OUT1)80 mA OUT2 (OUT2)80 mA 140 ( ( 1 ) 110 10 -64No.PF-OMM0004-D () PF3W704 PF3W720 PF3W740 PF3W711 PF3W721 (3 mPas(3 cP)) 1 0.54 L/min 216 L/min 540 L/min 10100 L/min 50250 L/min 3.555.0 L/min ( 3.5 L/min 0.0) 1.722.0 L/min ( 1.7 L/min 0.0) 0.355.50 L/min ( 0.35 L/min 0.00) 20350 L/min (

Large Size Vacuum Module: Series ZR

(l /min (ANR)) Suction flow (l/min (ANR)) Air consumption (l /min (ANR)) Suction flow (l/min (ANR)) Air consumption 80 80 80 80 Vacuum pressure Vacuum pressure Vacuum pressure (kPa) Vacuum pressure (kPa) Vacuum pressure (kPa) Vacuum pressure (kPa) Air consumption 70 70 70 70 60 60 60 60 50 50 50 50 40 40 40 40 Suction flow 30 30 30 30 Suction flow 20 20 20 20 10 10 10 10 Supply pressure

Non-rotating Double Double Power Power Cylinder Cylinder (without Series MGZ Series MGZR non-rotating mechanism)

MGJ MGP Clevis Pin MGQ 2 x d Dd9 d Note) Cotter pin Bore size (mm) Model l Dd9 L m MGG (Drill through) 3 x 18 l 4 x 25 l 4 x 35 l 4 x 36 l 0.040 0.076 CD-M03 CD-M05 CD-M08 CDP-7A 10 14 22 25 20, 25 32, 40 50, 63 80 44 60 82 88 3 4 4 4 36 51 72 78 4 4.5 5 5 MGC 0.050 0.093 0.065 0.117 0.065 0.117 l m MGF L Note) Cotter pins and flat washers are included.

Slider Type Ball Screw Drive/11-LEFS Series

0 Driver type * Select D for the vacuum port for suction of 50 L/min (ANR) or more. o Cable length Note 3) !

VFS

DZ/Y/YZ VFS3320-D/DZ/Y/YZ VFS3420-D/DZ/Y/YZ VFS3520-D/DZ/Y/YZ Lead wire O.D.

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

(Default settings) Solenoid Specifications Grommet (G), (H), L plug connector (L) M plug connector (M), DIN terminal (D, Y) M8 connector (W) Electrical entry Base mounted G, H, L, M, W 24, 12, 6, 5, 3 D, Y 24, 12 Symbol DC AC 50/60 Hz Coil rated voltage (V) Body ported Base mounted (with sub-plate) 100, 110, 200, 220 10% of rated voltage 0.35 {With light: 0.4 (DIN terminal with light: 0.45

Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25

Knuckle pin (Common with double clevis pin) Rod end nut d d Dd9 C m L m l t t H B Metric Threads Metric Threads Bore size (mm) Bore size (mm) Snap ring d H B C t Dd9 l m Part No. Part No.

C95

Ht B Auto Switch mounting positions and dimensions [mm] Auto switch operating ranges [mm] D-Z7/Z8, D-Y5/Y7 (W) All models D-Y6, D-Y7 (W) V D-Y7BA Bore Size [mm] Bore Size [mm] D-Z7 D-Z8 D-Y5/Y7 (W) D-Y6/Y7 (W) V D-Y7BA A B Hs Ht Hs Ht Hs Ht 14 1.5 25.5 23 26.5 30 7.5 5.5 3.5 23 23 32 32 25 1.5 29.5 26 30 34 8.5 5.5 3.5 26 26 40 40 26.5 2 33.5 31 34.5 31 38 31 7.5 7 3.5 50 50 31.5 2 39 36

CG5-S

d Material: SUS440 (pin) SUS304 (snap ring) D C d Dd9 H1 B1 t m t l m L (mm) Part no.

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ Type ）

H T E (Note)L d W D T Max.

1.1

[mg/L] [mg/L] [mg/L] [mg/L] [mg/L] [mg/L] [mg/L] [mg/L] [mg/L] [mg/L] [mg/L] Selection Warning 50 or less 50 or less 50 or less 70 or less 50 or less 30 or less 0.3 or less 0.1 or less Should not be detected. 0.1 or less 0.3 or less 4.0 or less Standard item 1.

CKZ2N

E F G H I J K L M N O P Q R S T U 8F7 +0.013 +0.028 through 16 5.8 44 32 0.03 11 through M10 x 1.5 30 0.025 30 0.025 30 0.025 30 0.025 30 0.025 30 0.025 30 0.025 30 0.025 30 0.025 R37 10.5 20 0.03 24 0.03 16 26 30 R9 30 NAAMS code Weight kg (lbs) A B C D E F G H I J K L M N O P Q R S T U V W Part no.

Clamp Cylinder with Lock

(Same surface) 10.5 16.5 D-A93 50 50 50 D-M9B D-M9BW D-B54 50 50 75 8.5 Auto Switch Mounting Position and Its Height Unit: mm Auto switch set value and its height 50 7.5 30.5 40 11.5 34.5 40 2 25 43.5 Auto switch D-B54 Symbol 63 7.5 30.5 47 11.5 34.5 47 2 25 50.5 40 11 23.5 34.5 15 27.5 34.5 5.5 18 38 32 3 30.5 30 7 34.5 30 0 25 33.5 Hs A B Hs A B Hs A B Hs B A 33 D-A93 D-M9B D-M9BW 24.5

Modular Type Regulators Series AR

D U With Auto Drain S F W M 4 T BRACKET MOUNTING THREAD R C G J Q P K N 2 A H L E IN OUT Bracket (Optional) D NPT 1/4 5 Series AW20~40 Filter Regulator How To Order AW 30 N 03 D 8 Z X48 Filter Regulator With External Epoxy Coating, Stainless Fasteners Name Plate, Caution Plate On Bowl in psi, F Body Size Symbol 20 30 40 Size 1/8 3/8 1/2 Bowl Symbol 2 8 Applicable Body Size 20 30, 40 Description

Standard Combinations

for maintenance D Regulator Air filter Drain Min. clearance for maintenance D Air filter Regulator ACG20B Optional (-Y) Upward facing handle ACG30B/40B Optional (-Y) Upward facing handle A N P G E N A E G P L L B C H1 H1 H2 OUT IN OUT IN SMC SMC 2-L H2 J L M M 2-K K Port size Port size O o s S Drain Min. clearance for maintenance D Air filter Regulator Min. clearance for maintenance Drain