End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL Locking of door Prevention of dropping at the rising end MLG With front lock With rear lock CNA CNG MNB CNS Maintains the cylinder’s CLS original position even if t

MG Bore size (mm) 40 Bore size (mm) 40 Model Model 50 63 80 100 50 63 80 100 MGP D-A5/A6 D-A59W D-F5/J5 D-F5W/J59W D-F5NTL D-F5BAL/F59F D-A3/A44 D-G39/K39 D-B5/B6 D-B59W D-G5/K59 D-G5W/J59W D-G5BAL D-G59F/G5NTL D-A3C/A44C D-G39C/K39C MGQ BT-04 BT-04 BT-06 BT-08 BT-08 BA-04 BA-05 BA-06 BA-08 BA-10 MGG MGC BD1-04M BD1-05M BD1-06M BD1-08M BD1-10M BA3-040 BA3-050 BA3-063 BA3-080 BA3-100 To order

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

MGC Bore size (mm) 40 Bore size (mm) 40 Model Model 50 63 80 100 50 63 80 100 MGF D-A5/A6 D-A59W D-F5/J5 D-F5W/J59W D-F5NTL D-F5BAL/F59F D-A3/A44 D-G39/K39 D-B5/B6 D-B59W D-G5/K59 D-G5W/J59W D-G5BAL D-G59F/G5NTL D-A3C/A44C D-G39C/K39C CY1 BT-04 BT-04 BT-06 BT-08 BT-08 BA-04 BA-05 BA-06 BA-08 BA-10 MY1 BD1-04M BD1-05M BD1-06M BD1-08M BD1-10M BA3-040 BA3-050 BA3-063 BA3-080 BA3-100 To order

CV/MVGQ

(Not mountable after the time of shipment) Auto Switch Mounting Height D-B5/B64 D-B59W D-G5 D-K59 D-G5NTL D-G5W D-K59W D-G59F D-F5 D-J5 D-F5W D-J59W D-F59F D-F5NTL Auto switch model D-Z7/Z80 D-Y59 D-Y7P D-Y7W D-A3C D-G39C D-K39C D-A44 D-A44C D-A3 D-G39 D-K39 D-Y69 D-Y7PV D-Y7WV D-A5 D-A6 D-A59W Bore size (mm) Hs Hs Ht Hs Ht Hs Ht Hs Hs Ht Hs Hw Hs Hw Hs 40 38 40 31 38.5 31 30.5 30 72.5 73

CV/MVGQ

Bore size (mm) Auto switch model 40 50 63 80 100 D-A5/A6/A59W/F5/J5 D-F5W/J59W/F5NTL/F59F D-A3/A44/G39/K39 D-B5/B64/B59W/G5/K59 D-G5W/K59W/G59F/G5NTL BT-04 BT-04 BT-06 BT-08 BT-08 BD1-04M BD1-05M BD1-06M BD1-08M BD1-10M BA-04 BA-05 BA-06 BA-08 BA-10 D-A3C/A44C/G39C/K39C BA3-040 BA3-050 BA3-063 BA3-080 BA3-100 D-Z7/Z80/Y59/Y69/Y7P D-Y7PV/Y7W/Y7WV BA4-040 BA4-040 BA4-063 BA4-080 BA4-080 Mounting

VQZ1000/2000/3000

L dimension 310.5 23 298 22 335.5 25 323 24 360.5 27 348 26 385.5 29 373 28 410.5 31 398 30 435.5 33 423 32 460.5 35 448 34 485.5 37 473 36 39 498 38 40 510.5 Blanking plug KQP-23-X19 KQP-04-X19 KQP-06-X19 KQP-08-X19 KQP-10-X19 L A Dimensions Applicable fittings size d Model A L D D KQP-23-X19 KQP-04-X19 KQP-06-X19 KQP-08-X19 KQP-10-X19 3.2 6 8 10 12 31.5 32 35 39 43 3.2 4 6 8 10 16 16 18

Digital Flow Switches

Nil C 0.4 to 4 l/min 1.8 to 20 l/min 4 to 40 l/min 04 20 40 The cable and connector are shipped unassembled.

125

valve Speed controller Silencer Tubing diameter x Length A VEX31 22-02 AS4000-02 AN20-02 10 x 1 m B 12 x 1 m C VEX33 42-03 04 AS420-03 AN30-03 12 x 1 m D AS420-04 AN40-04 SGP15A x 1 m 1723 3 Port 3 Position Valve Body Ported VEX3 Series How to Order Air operated Pilot solenoid VEX3 B 12 0 01 1 Air operated VEX3 D B 5 1 12 2 01 Pilot solenoid Operation type Option 1 External pilot solenoid

CLA

Auto Switch Mounting Bore size Auto switch D-S5/S6/SS9W BA-04 SA-OS D-G5D IK59/G5 DWIK59W SA-OS SA-OB BA-lO 50 40 63 80 100 D-A5/A6IA59W D-FS D/JS D/FS DW/JS9W BT-04 BT-04 ST-06 ST-OB BT-OB D-FSNTL, FSSAL, FS9F O-A3/A44/G39/K39 BD1-04M BD1 -0SM SD1-0SM SOl-0BM SD1 -l0M D-GSSAUG59F/GSNTL D-A3 DC/A44C/G39CIK39C BA3-0S0 SA3-040 BA3-063 SA3-0BO BA3-100 D-A3 DCfA.44CfG39C/K39C: come With mounting

Air Suction Filter Series ZF Prevent from occurring vacuum equipment trouble due to ZA dust from vacuum pad ZX Port size ZR Air flow Filtration Series Features Page (μm) Applicable tubing O.D. (l/min(ANR)) ZM Screw-in for one-touch fittings ZMA ZQ ZFA 

D-G

High Purity Fluoropolymer

Printed in Japan. 1st printing June, 1999 D-SMC.L.A. P-100 (YG) 4th printing April, 2002 D-DN P-80 (DN)

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Series AS


1F-D Elbow Type/Universal Type 1

Applicable cylinder bore size (mm) Elbow type Universal type Port size Metric size Inch size Flat head screwdriver 3.2 4 6 8 10 12 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" AS121F-M5 AS131F-M5 6, 10, 16, 20 M5 x 0.8 AS221F-01 AS231F-01 20, 25, 32 R 1/8 AS221F-02 AS231F-02 20, 25, 32, 40 R 1/4 AS321F-02 AS331F-02 40, 50, 63 R 1/4 AS321F-03 AS331F-03 40, 50, 63 R 3/8 AS421F-04 AS431F-04 63, 80,

AC Servo Motor Driver (CC-Link Type ）

H T E (Note)L d W D T Max.

AC Servo Motor Driver (CC-Link Type ）

H T E (Note)L d W D T Max.

HRX-OM-W032

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Fig. 3-13 Connection of RS-232C HRS Series 3.3 Installation 3-25 HRX-OM-W032 Chapter 3 Transport and Setting Up 3.4 Piping Piping port size Connect piping firmly. Incorrect piping might cause leakage of supplied or drained fluid and wet surrounding area and facility.

IDG

0 40 80 120 160 20 40 60 80 0 Outlet air flow rate (l/min (ANR)) Outlet air flow rate (l/min (ANR)) IDG20 (Type A products group) IDG30 (Type B products group) P1 = 0.3 MPa P1 = 0.3 MPa 0 0 Outlet air atmospheric pressure dew point (C) Outlet air atmospheric pressure dew point (C) P1 = 0.5 MPa 10 P1 = 0.5 MPa 10 P1 = 0.7 MPa 20 HA 20 P1 = 0.7 MPa 30 AT 30 40 ID 50 0 40 100 200 300 0 100

Prevents Micro-Bubbles

LVQ Metric sizes 4 04 06 4 6 N.C.

Series IDG

40 P1= 0.7MPa P1 = 0.7MPa 50 50 60 60 70 70 0 0 20 40 60 80 100 160 40 80 120 Outlet air flow rate l/min (ANR) Outlet air flow rate l/min (ANR) IDG75L IDG60L 0 0 P1 = 0.3MPa Outlet air atmospheric pressure dew point C Outlet air atmospheric pressure dew point C P1 = 0.3MPa 10 10 20 20 P1 = 0.5MPa P1 = 0.5MPa 30 30 40 40 P1 = 0.7MPa P1 = 0.7MPa 50 50 60 60 70 70 0 0 40 80 120 160 200 100

Tamper Proof Speed Controller with One-touch Fitting Series AS


1F-T Elbow Type/Universal Type 1

Applicable cylinder bore size (mm) Elbow type Universal type Port size Metric size Inch size 3.2 4 6 8 10 12 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" AS121F-M5 AS131F-M5 6, 10, 16, 20 M5 x 0.8 AS221F-01 AS231F-01 20, 25, 32 R 1/8 AS221F-02 AS231F-02 20, 25, 32, 40 R 1/4 AS321F-02 AS331F-02 40, 50, 63 R 1/4 AS321F-03 AS331F-03 40, 50, 63 R 3/8 AS421F-04 AS431F-04 63, 80, 100 R 1/2 AS121F-U10/

90

ZK2 CH A 2 04 L A KQ2P 06 Applicable stations 02 04 06 08 10 For 2 stations manifold For 4 stations manifold For 6 stations manifold For 8 stations manifold For 10 stations manifold d Model and dimensions D Applicable size d 6 8 1/4" 5/16" Weight (g) Note A L D Symbol 06 08 07 09 White White Orange Orange 18 20.5 18 20.5 35 39 35 39 8 10 8.5 10 1 2 1 2 Connector type 1 2 D sub-connector (

Table of Contents

A L D Model Applicable fittings size d KQ2P-23 KQ2P-04 KQ2P-06 16 16 18 3.2 4 6 31.5 32 35 5 6 8 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com When ordering assemblies incorporated with a manifold, add suffix -D to the manifold no.