Speed Controller with One-touch Fitting for Clean Room Series AS-FPQ/AS-FPG

Metric sizes Type 4 6 8 10 12 04 06 08 10 12 2 Elbow Control type 0 1 Meter-out Meter-in Port size M5 x 0.8 1/8 1/4 3/8 1/2 M5 01 02 03 04 With One-touch fitting Clean specification Metal part material Q G Brass (electoless nickel plated) Stainless steel (SUS304) Needle Valve/Flow Characteristics AS121FP-M5 AS221FP-01 AS221FP-02 08,10 06,08 06 04 04 AS321FP-03 AS421FP-04 12 10 10,12 08 06

E-P HYREG ® Series VY1

03 04 04 06 10 02 03 04 VY1A0 0 1-M5 VY1B0 0 1M 0 5 1 VY110 0 10 0 1 2 VY120 0 10 0 1 2 VY130 0 1VY140 0 1VY150 0 1VY170 0 11 1 0 2 VY190 0 11 2 4 0 Model VY1D00-M5 10 M5 01 M5 Port M5 01 02 01 02 02 03 20 04 02 03 04 04 06 10 12 14 P Port size Rc 11 2 1 1 8 1 8 1 4 1 8 1 4 1 4 3 8 1 2 1 4 3 8 1 2 1 2 3 4 1 1 1 4 A M5 M5 M5 2 1 4 R 2 1 0.11 0.16 Weight (kg) (1) 0.19 0.25 0.35 0.55 0.75 1.5

Style: Pressure Switch with Piping Adapter, Body Size: 30 (AC30), Thread Type: Rc, Port Size: 03 (3/8), Set Pressure Range: 6 (0.1 to 0.6 MPa), Lead Wire Length: Z (5m), Pressure Unit of the Scale Plate: MPa, Mounting: Right

Style: Pressure Switch with Piping Adapter, Body Size: 30 (AC30), Thread Type: N (NPT), Port Size: 03 (3/8), Set Pressure Range: 6 (0.1 to 0.6 MPa), Lead Wire Length: Z (5m), Pressure Unit of the Scale Plate: MPa, Mounting: Right

Style: Pressure Switch with Piping Adapter, Body Size: 30 (AC30), Thread Type: Rc, Port Size: 02 (1/4), Set Pressure Range: 6 (0.1 to 0.6 MPa), Lead Wire Length: Z (5m), Pressure Unit of the Scale Plate: MPa, Mounting: Right

Style: Pressure Switch with Piping Adapter, Body Size: 60 (AC50, AC60), Thread Type: N (NPT), Port Size: 10 (1), Set Pressure Range: 6 (0.1 to 0.6 MPa), Lead Wire Length: Z (5m), Pressure Unit of the Scale Plate: MPa, Mounting: Right

Style: Pressure Switch with Piping Adapter, Body Size: 30 (AC30), Thread Type: N (NPT), Port Size: 02 (1/4), Set Pressure Range: 6 (0.1 to 0.6 MPa), Lead Wire Length: Z (5m), Pressure Unit of the Scale Plate: MPa, Mounting: Right

Style: Pressure Switch with Piping Adapter, Body Size: 20 (AC20), Thread Type: Rc, Port Size: 02 (1/4), Set Pressure Range: 6 (0.1 to 0.6 MPa), Lead Wire Length: Z (5m), Pressure Unit of the Scale Plate: MPa, Mounting: Right

Style: Pressure Switch with Piping Adapter, Body Size: 60 (AC50, AC60), Thread Type: N (NPT), Port Size: 06 (3/4), Set Pressure Range: 6 (0.1 to 0.6 MPa), Lead Wire Length: Z (5m), Pressure Unit of the Scale Plate: MPa, Mounting: Right

Body Size: AC30, Thread Type: Rc, Port Size: 3/8, Set Pressure Range: 0.1 to 0.6 MPa, Lead Wire Length: 5m, Pressure Unit of the Scale Plate: MPa, Mounting: Right

Body Size: AC30, Thread Type: NPT, Port Size: 3/8, Set Pressure Range: 0.1 to 0.6 MPa, Lead Wire Length: 5m, Pressure Unit of the Scale Plate: MPa, Mounting: Right

Body Size: AC30, Thread Type: Rc, Port Size: 1/4, Set Pressure Range: 0.1 to 0.6 MPa, Lead Wire Length: 5m, Pressure Unit of the Scale Plate: MPa, Mounting: Right

45

D D side Applicable makers Valve stations MB1 For Mitsubishi Electric Corporation TA1 For OMRON Corporation FU1 For Fuji Electric Co., Ltd.

PF2A/PF2W

Connector pin numbers PF2W504T--1 PF2W520T--1 PF2W540T--1 PF2W504T--2 PF2W520T--2 PF2W540T--2 4 0.5 4 0.5 4 3 16 2 16 2 40 5 40 5 2 1 Pin no.

Valve Single Unit

SX5000-38-16 A SX7000-39-16 A SX7000-38-16 A Dimensions Applicable fittings size d 4 Model A L D KQ2P-04 16 32 6 6 KQ2P-06 18 35 8 8 KQ2P-08 20.5 39 10 10 5/32" 1/4" 5/16" 3/8" Thread type Nil Rc G F KQ2P-10 KQ2P-03 KQ2P-07 KQ2P-09 KQ2P-11 12 6 8.5 10 11.5 43 32 35 39 43 22 16 18 20.5 22 N NPT NPTF T Bolt and gasket part no.

Compact Manifold Regulator Series ARM5

A 1.18 (30) 1.61 (41) B 1.34 (34) 1.57 (40) C D E F G 136314 2.76 (70) 2.97 (75.5) .21 (5.4) .26 (6.5) .61 (15.4) .31 (8) 2.17 (55) 2.09 (53) .09 (2.3) .09 (2.3) NARM2500 43.5 136414 NARM3000 30 15 Precautions 0 35.3 70.6 106 Be sure to read before handling.

VS7-6

ISO Interface Solenoid Valve/SIZEq Metal Seal SeriesVS7-6 Single solenoid (FG-S) Double solenoid (FG-D) Reverse pressure (YZ-S) Reverse pressure (YZ-D) 2 position 3 position SV SY VS7-6-FPG-D Closed centre (FHG-D) Exhaust centre (FJG-D) Double pilot check (FPG-D) Pressure centre (FLG-D) SYJ SX VS7-6-FHG-D Option VK Standard Specifications 5 to 60 oC 0.1 to 1.0MPa Air/lnert gas Fluid Operating

Table of Contents - Tubing

chart Air: 4 to 176F (20 to 80C), Water: 32 to 176F (0 to 80C) Polyolefin resin Shore D 54 Note 1) Contact SMC regarding other fluids.

Digital Flow Switches, Series PF2A, Series PF2W

Connector pin numbers PF2W504T--1 PF2W520T--1 PF2W540T--1 PF2W504T--2 PF2W520T--2 PF2W540T--2 4 0.5 4 0.5 4 3 16 2 16 2 40 5 40 5 2 1 Pin no.

Applicable Auto Switch Model

(RedGreenRed) CXS 6, 10, 15, 20, 25, 32 MGQ, MVGQ 12, 16, 20, 25, 32, 40, 50, 63, 80, 100 MGP 12, 16, 20, 25, 32, 40, 50, 63, 80, 100 MY1B 25, 32, 40, 50, 63, 80, 100 MY1C 25, 32, 40, 50, 63 MY1H 25, 32, 40 MY1M 25, 32, 40, 50, 63 RSH 20, 32, 50, 63, 80 Specifications D-Y7lW/D-Y7lWV (With indicator light) PLC: Programmable Logic Controller D-Y7NW D-Y7NWV D-Y7PW D-Y7PWV D-Y7BW D-Y7BWV Auto