Check Valve Series AK

Proof pressure 1.5 MPa ASP Maximum operating pressure 1 MPa ASN Minimum operating pressure 0.02 MPa Ambient and fluid temperature 5 to 60C (No freezing) AQ JIS Symbol Flow Characteristics ASV AK2000-01/-02 AK4000-02 AK How to Order Pressure drop (MPa) Pressure drop (MPa) Pressure drop (MPa) Pressure drop (MPa) ASS Inlet pressure: 0.1 MPa Inlet pressure: 0.1 MPa Inlet pressure: 0.1 MPa AK 2 000

Speed Controller with Residual Pressure Release Valve with One-touch Fitting Series AS



FE Elbow Type/Universal Type

Specifications Air 1.5 MPa 1.0 MPa 0.05 MPa 5 to 60C (No freezing) 8 turns 0.8 mm2 Fluid Proof pressure Max. operating pressure Min. operating pressure Ambient and fluid temperature Number of needle rotations Effective area of residual exhaust valve How to Order JIS Symbol 01 AS 2 000 E Body size Port size 2 3 4 Port size Applicable series 01 02 03 04 1/8, 1/4 standard 3/8 standard 1/2 standard

Speed Controller: Standard Type Series AS In-line Type

Applicable model M-5N AS1000 Nipple Note) AS1000 with nipple: AS1000-M5-N How to Order M5 AS 1 000 Option Body size H (1) High temperature (5 to 80C) 1 2 3 4 5 M3, M5 standard L (2) Low temperature (30 to 60C) 1 8 1 4 , standard standard standard standard Note 1) AS5000 is available as special. AS1000 is not applicable.

Slit Valve XGT Series

Applicable wafer size 200 mm 300 mm XM XY Non-cassette type DXSA Auto switch and connector XVD Symbol Auto switch Connector Nil A None Lead wire: 0.5 m (without connector) XGT XGT For 200 mm wafer For 300 mm wafer CYV With multiple connector Note 1) C Cassette type D-A93 (With 2 pcs. for opening and closing) (T3106 000: Made by AMP) With D-sub connector Note 2) F (CDE-9PF05: Made by HIROSE

Body ported manifolds are available with bar or separate ty, SUBPLATE NVFS6*000 3/4 NPT, VALVE, VFS6000 SOL VALVE 4/5 PORT, 22, VFS6000, 3.7686 lb

Body ported manifolds are available with bar or separate ty, SUBPLATE NVFS6*000 1 NPT, VALVE, VFS6000 SOL VALVE 4/5 PORT, 22, VFS6000, 3.52 lb

AC Servo Motor Driver

Note that the number of write times to the EEPROM is limited to approximately 100, 000. Write the parameter setting into EEP-ROM of the driver. Specify the parameter group in advance (refer to (1) in this section). Write the value within the setting enabled range. For the setting enabled range, refer to chapter 5 or read the setting range by performing operation in (3) in this section.

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ/H Type ）

Part name Life guideline Smoothing capacitor 10 years (Note 3) Number of power-on, forced stop and controller forced stop Relay times: 100 000 times Number of on and off for STO: 1,000,000 times Cooling fan 10,000 hours to 30,000 hours (2 years to 3 years) Battery backup time (Note 1) Approximately 20,000 hours (equipment power supply: off, ambient temperature: 20 C) Battery life (Note 2)

LEC-OM069xx

Pn408=n.000 (Does not use friction compensation, 1st notch filter, or 2nd notch filter.) 5.3.1 Advanced Autotuning Advanced autotuning automatically operates the servo system (in reciprocating movement in the forward and reverse directions) within set limits and adjust the DRIVER automatically according to the mechanical characteristics while the servo system is operating.

LEC-OM071xx

Pn408=n.000 (Does not use friction compensation, 1st notch filter, or 2nd notch filter.) 5.3.1 Advanced Autotuning Advanced autotuning automatically operates the servo system (in reciprocating movement in the forward and reverse directions) within set limits and adjust the DRIVER automatically according to the mechanical characteristics while the servo system is operating.

IDX-OM-W017

(Ex.) 10-2 1.6MPaADH4 000-04 IDFA4E 15E1-23-L N.O() 1.6MPa 0.051.6MPa (Rc1/2IDFA3E to 11E) 25mm (Rc3/4IDFA15E1) 32mm (R1/2IDFA3E11E) (R3/4 X R1/2IDFA15E1) (R1/2) (L) IDFA Series 10-1 10 1 IDX-OM-W017 10 L 10-3 1. Rc1/2 1) R3/4: 28 30Nm R1/2 ,R3/4 2. 3. (27mm)(22mm) () () () 10-4 1. 2. 3.

DeviceNet-E

S. a EX. ) To set pressure at 0. 3M Pa by I TV2030( f or 0. 5M Pa t ype) Pressure ( 0. 3M Pa/0. 5M Pa) 40952457D EC999( H EX) 0. 3M Pa of pressure i s set by sendi ng i nput dat a of 999 t o t he el ect rom agnet i c regul at or t hrough t he m ast er PLC. 100% 75% 50% 25% 0% 0 1023 2047 3071 4095 ( D EC) 000 3FF 7FF BFF FFF ( H EX) I nput dat a Com m uni cat i on dat a I /O dat a( Pol

PSxx-OMU0002CN

P_2(n_2)1/10 P1HP1L(n1Hn1L)P2HP2L(n2Hn2L)1/4 -1/7 -1/4 -1/7 -1/4 -46No.PS-OMU0002CN-D () [F82] OFF -47No.PS-OMU0002CN-D [F11] <> [F11] 1000 100 [F11] , [MPa]/[kPa(ZSE20A(F))]/[kgf/cm 2]/[bar]/[psi]/[inHg] ([kgf/cm 2]/[bar]/[psi]/[inHg]:) 30[F 0] -48No.PS-OMU0002CN-D [F80] 30 <> [F80] [F80] 30 () [ECo] (ON) ON OFF -49No.PS-OMU0002CN-D [F81] <> [F81] [on]() [oFF]() () (000

Digital Pressure Switch

(The default setting is [000].) For instructions on how to enter the security code, refer to "How to input and change the security code" on page 63. If the security code entered is incorrect, [FAL] will be displayed, and the security code must be entered again. If the wrong security code is entered 3 times, [nG] is displayed and the device returns to function selection mode.

PSxx-OMU0005CN

1(n_1)P_2(n_2)1/10 P1HP1L(n1Hn1L)P2HP2L(n2Hn2L) 1/4 -1/7 -1/4 OFF -1/7 -1/4 -47No.PS-OMU0005CN-C OFF () [F82] OFF -48No.PS-OMU0005CN-C [F11] <> [F11] [F11] , [MPa]/[kPa(ZSE20B(F)]/[kgf/cm 2]/[bar]/[psi]/[inHg] ([kgf/cm 2]/[bar]/[psi]/[inHg] 31[F 0] -49No.PS-OMU0005CN-C [F80] 30 <> [F80] [F80] 30 () [ECo] (ON) ON OFF -50No.PS-OMU0005CN-C [F81] <> [F81] [on] [oFF]() () (000

PSxx-OMU0008CN

)P_2(n_2)1/10 P1HP1L(n1Hn1L)P2HP2L(n2Hn2L)1/4 -1/7 -1/4 -1/7 -1/4 -48No.PS-OMU0008CN-D () [F82] OFF -49No.PS-OMU0008CN-D [F11] <> [F11] 1000 100 [F11] [MPa]/[kPa(ZSE20C(F))]/[kgf/cm 2]/[bar]/[psi]/[inHg] ([kgf/cm 2]/[bar]/[psi]/[inHg]) 32[F 0] -50No.PS-OMU0008CN-D [F80] 30 <> [F80] [F80] 30 ( ) [ECo] (ON) ON OFF -51No.PS-OMU0008CN-D [F81] <> [F81] [on]() [oFF]() () (000

Digital Pressure Switch ( compatible)

(The default setting is [000].) For instructions on how to enter the security code, refer to "How to input and change the security code" on page 63. [oFF] (not use) is selected Press the button to return to function selection mode. If the security code entered is incorrect, [FAL] will be displayed, and the security code must be entered again.

PSxx-OMS0006CN

OFF ) / OFF ("o") P_1(n_1)1/10 P1HP1L(n1Hn1L)1/4 -1/7 -1/4 OFF -1/7 -1/4 -39No.PS-OMS0006CN-G OFF () [F82] OFF -40No.PS-OMS0006CN-G [F11] <> [F11] 1000 100 [F11] , 2]/[bar]/[psi]/[inHg] [MPa]/[kPa(ZSE20(F)]/[kgf/cm 2]/[bar]/[psi]/[inHg] ([kgf/cm 28[F 0] -41No.PS-OMS0006CN-G [F80] 30 <> [F80] [F80] 30 () [ECo] (ON) ON OFF -42No.PS-OMS0006CN-G [F81] <> [F81] [oFF]() () (000

PSxx-OMV0003CN

Zero-cut Zero-cut 1%F.S.cut 2%F.S.cut 10%F.S.cut ISE70(1 MPa )[MPa] 1 MPa P_1=0.015[MPa]H_1=0.01[MPa]Zero-cut1.0 [MPa] 0.0(Zero-cut) 1.0(1%F.S.cut) Zero-cut (1.0%) Zero-cut SW SET [F14] Zero-cut -45No.PS-OMV0003CN-G [F80] 30 <> UPDOWN[F80] SET UP DOWN SET [F80] 30 () [ECo] (ON) ON OFF -46No.PS-OMV0003CN-G [F81] <> UPDOWN[F81] SET UP DOWN SET UP DOWN () [oFF]() SET (000

PSxx-OMV0008CN

Zero-cut Zero-cut 1%F.S.cut 2%F.S.cut 10%F.S.cut ISE70G(1 MPa )[MPa] 1 MPa P_1=0.015[MPa]H_1=0.01[MPa]Zero-cut1.0 [MPa] 0.0(Zero-cut) 1.0(1%F.S.cut) Zero-cut (1.0%) Zero-cut SW SET [F14] Zero-cut -48No.PS-OMV0008CN-E [F80] 30 <> UPDOWN[F80] SET UP DOWN SET [F80] 30 () [ECo] (ON) ON OFF -49No.PS-OMV0008CN-E [F81] <> UPDOWN[F81] SET UP DOWN SET UP DOWN () [oFF]() SET (000