C76

(N) Foot: L Rod side flange: F Head side flange: G 0.3 58 54 10.0 L C7640 44 0.5 40 W W W F 36 0.7 33 C7632 24 0.3 23 G 17 0.5 16 1.0 13 0.7 13 Clevis: C, D Rod side trunnion: U 0.3 C 0.5 W W D 0.7 0.1 (100) (100) 0.3 600 500 400 300 1000 1100 900 800 700 200 100 0 Cylinder stroke (mm) U 92 85 0.5 Center trunnion: O Head side trunnion: U 77 71 0.7 Series CS1 only W W 57 53 0.3 T 43

Modular Type Filter Regulator Series AW

Construction AW10 AW30, 40 AW20 w w w t t t q q q e IN OUT IN OUT IN OUT y y y e e r r r u u u Drain Drain Drain Parts list Material No.

HRX-OM-M090

Fig 9.4-4 Cooling capacity(HRS018--20) 9.4.5 HRS024--20-(BJMT) 3500 3500 Ambient Ambient 3000 3000 temperature temperature or or Cooling capacity[W] Cooling capacity[W] 2500 2500 facility water facility water temperature temperature 2000 2000 25 32 40 25 32 40 1500 1500 1000 1000 500 500 0 0 0 10 20 30 40 50 0 10 20 30 40 50 Circulating fluid temperature[] Circulating fluid temperature[]

High Vacuum Angle Valve

Model XL-25-2 XL-40-2 XL-50-2 XL-63-2 XL-80-2 Rated voltage for heater 90 to 240 VAC Heater assembly quantity 1 1 1 1 H4 100C 100 V 200/40 200/50 400/100 600/150 Heater assembly quantity used Heater power W (Nominal value) Inrush/Power consumption (Option symbol, Operating voltage) 200 V 800/40 800/50 1600/100 2400/150 Heater assembly quantity 1 1 1 1 2 H5 120C 100 V 200/40 400/70 400/

C95

50 63 80 100 32 mm 40 mm 50 mm 63 mm 80 mm 100 mm Rod Single rod Double rod Nil W Stroke (mm) Refer to Standard Stroke on page 6-12-14.

1.1

Facility water required flow rate (l/min) Circulating fluid flow (l/min) 30 HRG010-A, HRG010-W HRG005-W 0.5 50 Outlet port [60 Hz] 0.4 40 Outlet port [50 Hz] 0.3 20 30 0.2 20 HRG002-W Return port HRG001-W 0.1 10 10 0 0.0 0 20 40 80 60 10 30 50 70 Pressure [MPa] Lifting height [m] Circulating fluid flow (l/min) HRG015-A, HRG015-W 0 0.5 50 0 10 20 30 40 Outlet port [60 Hz] 0.4 40 Facility water

Slider Type/Ball Bushing Bearing

Load Mass W CY1HT32 W Maximum Load Mass (kg) 50 40 30 CY1H25,CY1HT25 25 CY1H20 20 16 Load mass kg CY1H15 Wmax Model 10 9 CY1H10 4.0 CY1H10 5 4 3 CY1H15 9.0 2 CY1H20 16.0 1 CY1H25 W 25.0 CY1HT25 0.5 CY1HT32 40.0 70 100 300 500 1000 W Piston speed mm/s Graph (1) Moment M1,M3 M2 Allowable Moment (Static moment/Dynamic moment) 100 100 85 96 CY1HT32 CY1HT25 CY1H25 CY1H20 CY1H15 CY1HT32 CY1HT25

HRS100/150

[C] HRS100-W-20/40(60 Hz) HRS100-W-20/40(50 Hz) 14 14 Facility water temperature 32C 12 12 Cooling capacity [kW] Cooling capacity [kW] Facility water temperature 32C 10 10 8 8 6 6 4 4 Facility water temperature 40C Facility water temperature 40C 2 2 0 0 5 10 15 20 25 30 35 5 10 15 20 25 30 35 Circulating fluid temperature [C] Circulating fluid temperature [C] HRS150-A-20/40(50 Hz) HRS150-

Electric Actuator

(Table clearance is included.) 8 Electric Actuator/High Rigidity Slider Type Ball Screw Drive AC Servo Motor (100/200 W) Series LEJS RoHS How to Order LEJS 40 500 A S2 Motor type 1 Size Lead [mm] 40 63 A B LEJS40 LEJS63 Symbol Output Compatible Symbol Type Actuator drivers 2 [W] size 16 20 10 AC servo motor 8 S2 LECSA;-S1 100 40 (Incremental encoder) Stroke [mm] 3 AC servo motor S3 LECSA

SYJ300/500/700

in the case of D, DO, W type.

CG1

25 32 40 50 63 80 100 Up to 350 Up to 400 Up to 450 Up to 800 Up to 1200 Up to 1200 Up to 1400 Up to 1500 W/ rod boot on both sides W/o rod boot W/ rod boot on one side Bore (mm) TC Air hydro TA ZZ 187 201 203 227 258 258 282 282 JW (11.5) (11.5) (11.5) (13) (13) (13) l ZZ 167 179 181 207 238 238 273 273 H 35 40 40 50 58 58 71 71 ZZ 147 157 159 187 218 218 264 264 e 30 30 35 35 40 40 52

Series SY 5 Port Rubber Seal Solenoid Valve High Capacity & Simple Choices

(g) n: Number of stations W = 30n + 50 W = 37n + 63 W = 61n + 101 W = 79n + 127 W = 100n + 151 Note 1) For 10 stations or more (5 stations or more in case of SS5Y7), supply pressure to P port on both sides and exhaust from EA and EB ports on both sides.

Dual Rod Cylinder Series CXSJ/CXS

0 y i t o w !

LJ1H

(Incremental encoder) 100 W PNP, A contact 1pc.,B contact 2pcs.

CQS

X 45 l X 50 l X 55 l M5 X 30l X 35 l X 40 l X 45 l Model C Model C D 50 55 60 65 70 75 35 40 45 50 55 60 65 70 75 80 D 30 35 40 45 50 55 30 35 40 45 50 55 30 35 40 45 Special long bolt for through hole mounting is available as an option.

MNB

100 100 50 50 40 40 80 80 200 200 63 63 100 100 32 32 50 50 40 40 Load weight: m (kg) Load weight: m (kg) 50 40 30 50 40 30 32 32 20 20 10 10 5 4 3 5 4 3 2 2 1 100 200 300 400 500 1000 1 100 200 300 400 500 1000 Maximum speed: V (mm/s) Maximum speed: V (mm/s) 9-6-7 8 Cylinder with Lock Double Acting, Single Rod Series MNB 32, 40, 50, 63, 80, 100 How to Order Without auto switch MNBL 50 100

MNB

89 1/4 Up to 1000 55 19 26 26 17 25 96 40 41 30 20 177 170 20 37 Bore size (mm) LD LH T V VA W ZZ S J K MM N P Q H LS LT LX LY LZ Y X 32 154 9 1/8 30 198 3.2 32 47 22 232 M6 x 1.0 57 6.5 13 37 34 27 50 M10 x 1.25 7 6 6.5 40 161 11 1/4 33 209 3.2 38 51 24 247 M6 x 1.0 64.5 9 41.5 16.5 39.5 27 M14 x 1.5 55 9 6 8 50 183 11 1/4 40 237 3.2 46 58 27 279 M8 x 1.25 77.5 10.5 20 47.5 47 31.5 70 M18

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

For type "W", DC voltage is only available.

Modular Type Air Filters Series AF

55 80 J 26 29.5 37.5 K 5 3.5 1.5 M 30 41 50 N 51 64 81 Q 24 35 40 U 5 7 7 V 33 45 50 W 34.5 41 AC21 AC31 AC41 * Without relief valve option ** With relief valve option mm AC-A A* 90 117 154 AA** 140 181 238 B 160 220 239 C 73 86 92 E 30 38 F 45.5 58.5 75.5 G 40 55 80 J 26 29.5 37.5 K 5 3.5 1.5 M 30 41 50 N 51 64 81 Q 24 35 40 U 5 7 7 V 33 45 50 W 34.5 41 AC21A AC31A AC41A * Without relief

Digital Flow Switch (Manifold type)

40) (reference value) Nil S P W -55No.PF-OMW0004-B Total flow characteristics for several return units Flow range: 0.5 to 4 L/min (symbol 04) (reference value) Nil S P W -56No.PF-OMW0004-B Flow range: 2 to 16 L/min (symbol 20) (reference value) Nil S P W -57No.PF-OMW0004-B Flow range: 5 to 40 L/min (symbol 40) (reference value) Nil S P W -58No.PF-OMW0004-B Operating pressure and proof pressure