CHKD/CHKG

D-M9/M9V D-M9W/M9WV D-M9A/M9AV Bore size (mm) D-A9/A9V D-Z7/Z80 A 12 13 15 17 18 21.5 23.5 31.5 B 19 20 21.5 23.5 27.5 31 40 49.5 B 16.5 18.5 22.5 26 35 44.5 B 15 16 17.5 19.5 27 36 45.5 B 16.5 18.5 22.5 26 35 44.5 A 10 12 13 16.5 18.5 26.5 A 8 9 11 13 17.5 19.5 27.5 A 10 12 13 16.5 18.5 26.5 20 25 32 40 50 63 80 100 Note 1) D-A9/A9V models cannot be mounted on 50.

High-Precision Digital Pressure Switch

With bracket ZSE20(F) ISE20 ZSE20C(F)/ISE20C(H) ZSE20B(F)/ISE20B ZSE20A(F)/ISE20A ZSE20(F)/ISE20 Function Details Option 2 30 A1 25 20 Bracket A (Part no.: ZS-46-A1) 20 20 45 30 2 5.2 30 34.6 19 5.2 14.7 47 9.6 The bracket configuration allows for mounting in four orientations.

Title not found

Y . u , E 37 | 1/2" NPT M6 0 t 02 03 04 M 6 x 1 . 0 PT1/8 Pr1/4 PT3V8 PT1/2 a a a a a o a a a a a a a a a a a o a a a a a a a a a a a o a a a a a a a a a a a r a a a a a a a r a a a a a a a a o a r a o a a a The use of compact spacer with bracket reduces the total assembled space.

10

M6 x 0.75 0.05 to 1 0.05 to 2 0.05 to 1 0.05 to 2 0.05 to 1 0.05 to 2 0.05 to 1 0.05 to 2 0.05 to 1 0.05 to 1.5 0.05 to 1 4 0.5 RJ series Soft type M8 x 1.0 6 1 RJ0806L(U) RJ1007H(U) M10 x 1.0 7 3 RJ1007L(U) Basic type RJ1412H(U) M14 x 1.5 12 10 RJ1412L(U) P.886 to RJ2015H(U) Nut M20 x 1.5 15 30 RJ2015L(U) RJ2725H(U) M27 x 1.5 25 70 RJ2725L(U) RJ0805(U) M8 x 1.0 M10 x 1.0 M14 x 1.5 M6 x

Fluoropolymer Piping Equipment

Body Needle V seal Lock nut Adjustment handle Insert bushing Nut Collar A 1 2 3 4 5 6 7 8 PFA PCTFE PTFE PVDF PVDF PFA PFA PFA Body class 2 y u y u B Dimensions A (B) (max.S) D H Port A 2 x G SMC (J) SMC C E F K Port B E A B C D E F G H J K S Model 48 60 72 LVN20 LVN30 LVN40 24 30 36 12 18 22 88 110 124 34.5 43 52 6 9 11 4 5 6 14 25 25 20 26 33 18 24 30 2.4 7.5 8.0 940 Fluoropolymer Bore

New

The optimum size for a pressure differential of P 0.4 MPa and a flow of 50 L/min will be the VXZ2 3 A (10 orifice, port size 1/4). 500 400 VXZ2 25 Cv = 12 6 D 300 VXZ2 20 Cv = 9.2 5 C 200 VXZ2 15 Cv = 5.3 4 B Flow rate Q [L/min] 100 VXZ2 Port size 3/8 10 Cv = 2.4 VXZ2 Port size 1/4 10 Cv = 1.9 50 3 A 40 3 A 30 25 20 10 0.01 0.02 0.03 0.04 0.05 0.1 0.2 0.3 0.4 0.5 Pressure differential P

Electric Actuator

is required. 7.5 40 Work load [kg] Work load [kg] 30 5 LEJS40;A LEJS40;A 20 AC Servo Motor Specific Product 2.5 10 0 0 0 200 400 600 800 1000 1200 0 200 400 600 800 1000 1200 Speed [mm/s] Speed [mm/s] LEJS63/Ball Screw Drive Horizontal Vertical 90 20 LEJS63;B LEJS63;B 80 70 Precautions LECS; 15 60 Work load [kg] Work load [kg] 50 10 40 LEJS63;A LEJS63;A 30 5 20 10 0 0 0 1200 200 400 600

Stroke Reading Cylinder and Counter

-X 663 CE1 Series Auto Switch Mounting Auto Switch Proper Mounting Position (Detection at Stroke End) and Its Mounting Height D-A9V D-M9V D-M9WV D-M9AV D-A9 D-M9 D-M9W D-M9A 12 to 20 25 U B A 32 to 63 D-A9 D-M9 D-M9W D-M9A D-A9V D-M9V D-M9WV D-M9AV U D-A7 D-A80 D-A7H D-A80H D-F7 D-J79 D-F7W D-J79W D-F79F D-F7NT D-F7BA D-A73C D-A80C D-J79C D-A79W D-F7WV D-J7V D-F7BAV 12 to 20 U B A 32 to 63

Manifold Specifications

A/B) 4/2 5/3 (A/B R) Port size Manifold C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv 1(P), 5/3(R) port 2(B), 4(A) port VV5Z5-20-01 VV5Z5-20-C6 VV5Z5-20-C8 VV5Z5-21-01 VV5Z5-21-C6 VV5Z5-21-C8 1/8 C6 C8 1/8 C6 C8 0.55 0.49 0.51 0.54 0.50 0.50 0.26 0.25 0.25 0.26 0.24 0.20 2.3 2.0 2.1 2.3 2.1 2.1 0.57 0.37 0.45 0.55 0.36 0.50 0.35 0.32 0.38 0.36 0.32 0.37 2.2 1.4 1.7 2.1 1.4 1.8 1/8 1/8 1/8 1

CM2

CJ1 CJP CJ2 CM2 U1 A H MM NDH10 U1 NX1 Z R2 Y Bore size (mm) 20 25, 32 40 Applicable bore size (mm) 20 25, 32 40 NDH10 R1 A A1 NX E1 L1 MM Part no.

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External pilot solenoid 1 Y A G 1 T Z B1 10 1 70 2 SGH SGHA Air operated 1 A G B1 10 1 2 70 q w e r t y u i o !0 !1 !2 q Series w Valve type e Seal material 70 r Pressure range t Thread type y Port size 1 2 3 4 1 2 A B 10 15 20 25 Nil G N T SGH100 SGH200 SGH300 SGH400 SGH100 SGH200 SGH300 SGH400 N.C. N.O.

Manifold Specifications

2 to 20 stations D side: 2 to 10 stations U side: 2 to 10 stations M Mixed Nil Standard length (Specify a longer rail than the standard length.)

2/3 Port Valve

VXZ2230 VXZ2232 VXZ2240 VXZ2242 VXZ2350 VXZ2352 VXZ2360 VXZ2362 A J Q B T K R C U S D V E W F X H Y N.O.

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

Positioning pin hole Counterclockwise 5 Adjustment bolt A 5 (For counterclockwise rotation end adjustment) 9 22 CRB2 e B port .5 g Adjustment bolt B n ra (For clockwise rotation end adjustment) nt CRBU2 e m e st is w u dj k CRB1 c a e o is d cl w C A port B port n k er c lo o e l Clockwise C a nt c n dj k u o w 0 MSU o u ti is C st ta e 19 m ro ro ta e ti o d n n e nt e ra ng n 5 g e 9 ra

Plug-in/Plug Lead: Single Unit

pilot port) With connector on D side (FD) 2-6-12 Base Mounted Series VQ5000 Plug-in Unit Bottom ported drawing With connector on U side (FU) 106 46.8 59.2 VQC 83.5 9 9 55.5 M5 ground screw 2n-Rc 1/2 4(A), 2(B) port SQ 34.5 VQ0 n U side X 12 VQ4 B 2 A 4 6 B A VQ5 B 2 A 4 VQZ 5 SMC SMC SMC SMC SMC B A VQD B 2 A 4 4 B A P = 41 L1 L2 B 2 A 4 3 B A B 2 A 4 2 B A 34.5 46 68.5 P = 41 A 4 B 2 1

0.55

Refer to back cover for Safety Instructions, Handling Precautions for SMC Products (M-E03-3) for Common Precautions. 30 Series VPA300/500/700 Construction Standard u y t r e w q JIS symbol N.C. N.O. (A) 2 (A) 2 12 12 Standard 1 (P) 3 (R) 1 (P) 3 (R) i (A) 2 (A) 2 2(A) 3(R) o For vacuum 12 12 3 (R) 1 (P) 1 (P) 3 (R) X 1(P) For vacuum u y t r e w q i 2(A) 3(R) o X Component Parts No.

Electric Actuators

Connector A terminal no. B-1 A-1 B-2 A-2 B-3 A-3 Signal Cable color S Brown Red Orange Y ellow Green Blue A A B B COM-A/COM COM-B/ 2 1 6 5 3 4 Cable color Connector D terminal no.

Plug-in Unit

override Indicator light 65.5 P=25 A A A B A B A B A B A B 21 21 63 9 A A A A A A A 143 163 66 41.5 9 B B B B B SI unit Input block 10 n 1 2 3 4 5 6 7 Stations D-side 8 U-side Formulas L1 = 25n + 106 (Maximum 16 single wiring stations) L2: For one input block.

VQ5000

D U D U D 179 106 46.8 59.2 83.5 U side Station number 55.5 M5 ground screw 9 9 Electrical entry on U side (LU) 19 34.5 n 12 X 2n-Rc 3/8, 1/2 4(A), 2(B) port B 2 A 4 Indicator light 6 B 2 A 4 A B 5 SMC SMC SMC SMC SMC Cable length A B B B B B Manual override B 2 A 4 A B 4 A B 2 A 4 L2 L1 58.5 P = 41 A B 3 A B 2 A 4 A B 2 A 34.5 48 68.5 P = 41 B 2 A 4 A 1 A X 12 Stations R4.5 15.5 Electrical

A_HEC-OM-K001

During Auto tuning Auto tuning failure A T 1 E R R 1 9 P V < 2 3 . 0 C # 1 A T F a i l u r e A u t o T u n i n g M O D E S h u t O f f C a n c e l : A T k e y <4> External sensor sampling cycle setting: Mode indication External Sensor Sampling Cycle. Default value: 180 sec. Setting range 10 to 999 sec.