ISO Cylinder

Auto switch mounting Auto switch model C85 Series C75 Series Bore size [mm] 8 10 12 16 20 25 32 40 D-M9l(V) D-M9lW(V) D-A9l(V)*7 BJ6-008 (A set of a, b, c, d) BJ6-010 (A set of a, b, c, d) BJ6-012 (A set of a, b, c, d) BJ6-016 (A set of a, b, c, d) BM5-020 (A set of a, b, c, d) BM5-025 (A set of a, b, c, d) BM5-032 (A set of a, b, c, d) BM5-040 (A set of a, b, c, d) D-M9lA(V) BJ6-008S (A

Vacuum Pad

( ( Thin flat with rib CT C C Note) Note) ( C C C ( C B Note) Note) J ( ( ( ( ( Bellows Note) Note) Note) Note) Note) MB ( ( ( ( ( ZJ ( ( ( ( Deep D C Nozzle pad AN ( ( Note) Note) Flat pad MT ( ( 4 x 10 4 x 20 4 x 30 ( 5 x 10 5 x 20 5 x 30 ( 6 x 10 6 x 20 6 x 30 ( 8 x 20 8 x 30 ( 3.5 x 7 ( W Oval 2 x4 C 3.5 x 7 C 4 x 10 C U H Flat HT Heavy-duty pad HB Bellows HW Oval U ( ( ( ( Mark-free

SQ1000/2000

Also, indicate the option symbol "-K" for mixed wiring. w How to order applicable valves A B C A B C A B C A B C A B C SQ 1 1 4 1 C6 5 L A B C D E F G H I Series SQ1000 Switching type Electrical entry A E 1 2 3 4 5 A B C L type plug connector with lead wire L 2 position single 2 position double (latching/double solenoid) 3 position closed center 3 position exhaust center 3 position pressure

NCA1

) 1 3/4-16 1 1/8 3.9 1/2 3 13/16 1 15/16 1 1/4 3/4 11/64 1.5 1/2 7/8 3/8-24 3.75 0 1/2 5/8 1.57 1.18 6 1/4 1 3/8 2.34 2.72 4.25 7 3/8 6 7/8 7 5/8 400 (4) 1 3/4-16 1 1/8 4.7 1/2 4 1/2 2 1/4 1 1/4 3/4 15/64 1.5 1/2 7/8 3/8-24 4.5 0 1/2 5/8 1.57 1.18 6 1/4 1 3/8 2.34 2.72 4.25 7 3/8 6 7/8 7 5/8 Front Flange Type NC A1F (MF1 Mounting Style)-X130US (in) Bore (in) MM KK A AA B BA C D DD E EA EE

ZP

G Hexagon width across flats 7 Elliptic e c a d b Flat Elliptic Thin Flat/Thin Flat with Ribs C Y A B A a e Y b c d Model B C Y Model Model ZPR02U-0-A8 ZPR10UT ZPR2004U 10 11 1 2 2 2.6 1.2 1.2 0.3 4 2.6 4.6 ZPR04U-0-A8 ZPR13UT ZPR3507U 13 14 4 3.5 4.8 1.8 1.6 0.8 0.5 7 4.3 7.8 1.5 ZPR06U-0-A8 ZPR16UT ZPR4010U 16 17 6 4 7 2 0.8 10 5 11 2.5 2.5 ZPR10CT 10 11 0.8 ZPR08U-0-A8 8 9 1 ZPR13CT 13

ZP

Model A B C Y D P Q R Model A B C D E F G F G Flat Flat with ribs P Q R U C U C U C ZPY20 20 25 32 2.6 4.8 7 9 1.2 1.6 23 14 28 25 15 35 4.5 2.3 1.8 1.7 ZPY25 N4 (Nylon tube 4/2.5) N4 (Nylon tube 4/2.5) 13.5 5 1.8 24 42 68 58 4 14.5 5 1.8 20 44 25 49.5 ZPY04U ZPY06U ZPY08U 0.8 ZPY32 14.5 24.5 42.5 68.5 58.5 N6 (Nylon tube 6/4) N6 (Nylon tube 6/4) 15.5 7 2.5 2.5 16.5 7 2.5 1 Deep U4 (Soft

Table of Contents

3 x 7.2 (= 21.6) 8-M3 OUT2 NC Sensor 36 +0.5 0 8 Load 6.4 4 OUT1 Black 7 3 Load 1 2 3 4 Brown + 6 2 +0.5 0 Blue 19.4 5 1 12 to 24 VDC Series PF2D5 5 6 7 8 PF2D301-A(-M) Do not connect the white wire of the sensor to c of the display unit.

LEC-OM02904

P1 1 (1) P2 PE CNP2 P() 2 (2) C D 3 CN2 (3) L11 L21 CN3 CN3 DC24V (7) (5) DOCOM EM1 5 7 DOCOM DICOM (5) 4 5 (4) RA1 ALM 1.

5 Port Solenoid Valve

Voltage C Specifications 24 VDC 12 VDC Symbol 5 6 Note) For symbol, refer to page 7.

NCA1

") 6 5 5/8 6 1/16 200 (2") 6 5 5/8 6 3/16 250 (2.5") 6 1/8 5 3/4 6 5/16 325 (3.25") 7 3/8 6 7/8 7 5/8 400 (4") 7 3/8 6 7/8 7 5/8 6-15-8 8 Series NCA1 NFPA Interchangeable Air Cylinder Medium Duty Series Rod Side Flange Style: NCA1F (MF1 mounting style) Y P + Stroke AA D across flats 2-EE (NPTF) C 4-FB (Hole) KK EA MM BA CJ1 B R E CJP CJ2 F W J G TF CM2 WF LF + Stroke UF A ZB + Stroke CG1

NCA1

4-DD 2-EE (NPTF) AA WF falts C EA KK MM BA B AE AH AT S J F G 6-AB (Hole) AL AL LF + Stroke R AO AO SA + Stroke E Bore size (in) R MM KK A AA AB AE AH AL AO AT B BA C D DD E EA EE F G J S WF Y P LF 150 (1.5") 5/8 7/16-20 3/4 2.02 3/8 2 3/16 1 3/16 1 7/16 1 1/8 1 1/8 3/8 9/16 2 0.3 3/8 3/8 1.26 1.1 1.43 1/4-28 1/8 3 1 1/4 1 2.36 5/8 1.71 200 (2") 5/8 7/16-20 3/4 2.6 3/8 2 11/16 1 7/16 1 9

5 Port Solenoid Valve Series SV1000/2000/3000/4000

B C Base mounted plug-in Note) Refer to the S0700 series catalog (CAT.NAS11-88) for symbol.

HRX-OM-X010

7 System Maintenance . 7-1 7.1 Water Quality Management . 7-1 7.2 Inspection and Cleaning . 7-2 7.2.1 Daily inspection . 7-2 7.2.2 Quarterly inspection . 7-3 7.3 Storage . 7-3 7.3.1 Draining of circulating fluid out of tank . 7-4 HRZ Series TOC-3 HRX-OM-X010 Table of Contents 7.3.2 Draining of facility water. 7-5 7.4 Periodic Replacement Parts . 7-6 Chapter 8 Appendix . 8-1 8.1 Specification

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

(Values at the initial period) Note 4) Based on JIS C 0920. Note 5) Based on JIS C 4003.

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

5 ENC c Encoder connector (16 pins) Axis 3: Connect the actuator cable. !6 MOT c Motor power connector (6 pins) !7 ENC v Encoder connector (16 pins) Axis 4: Connect the actuator cable. !8 MOT v Motor power connector (6 pins) !

Magnetically Coupled Rodless Cylinder

3 4.5 6 3 4 6 3.5 4.5 11 4.5 7 8 2.5 4 8 3 4 A B 9 10 9 9 11 6 6 5 5 6 C D Switches cannot be mounted in some cases.

Electric Actuator

6 @4 @7 o @0 $4$5 !0 !0 !3 u @3 !2 i e !7 r t w q y @6 When selecting the grease holding function LEYG Mll -llF: 50st or less 25 32 A B C LEYG M: 50st or less 16 25 32 LEYGlM #3 #4 #5 #6 #1 #8 #7 #2 LEYG Mll -llF: Over 50st 25 32 A B C LEYG M: Over 50st 16 25 32 Note) Felt material is inserted to hold grease at the sliding part of the slide bearing.

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Width across flats 8 Wid th across flats 8 "1 WiJ :~coss f'ats 12 J~lross flats 1 0 If\ Ifl Wid w "' 'r ~ Miniature tube fitting(Series M5) \ Miniature tube fitting(Series M5) ", .,; ", w ~( Width across flats 7 C\J ~ Width across flats 7 ul>-I ;C 'J. f~ I~ ~ ~ c&.

0.4

%(#"& #7-#! 7-#! 7-#! 7-#! 7-#! 7-#! 7-#! : ( ! &"'6 &"'6 3!$ 3!$ 3!$ &"'6 &"'6 : ( ! 7-#! 7-#! &"'6 : ( ! : ( ! 3!$ 3!$ : ( ! 7-#! ++%A $ , . * ! !" #" ! -##!' -% !%(#"& #!"& &!#* (#$('" (-# 9-&"%( 2 !%(#"& #!"$ )(%! '-&-% "%6(#* $ -&$!$ '-1!% 4 5 &"'6 7-#! 4 5 8!&&-) &"'6 " (-# %& -##!' -% @7 "#.,"' .%!$ 02 B"+"# 1(" (-# C&!' %-#(' D#$. %2/ $ 4 5 %-)# 7-#!

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

Cable length (L) [m] 3 3 5 5 A 10 C 20 LE-CYM-llA-l: Motor cable L 50 7 U V W G M4 Crimped terminal LE-CYB-llA-l: Motor cable for lock option L 50 7 3-M4 Crimped terminal LE-CYE-llA: Encoder cable L (60) (100) 12 (7) (32) D 19 5 3 1 6 4 2 25 Battery case Depth dimension: 25 mm Product no.