Display Pressure: 0.4MPa, Connection Thread: R 1/8, Attachment: Clear Cover Removable, Wrench Tighten

Display Pressure: 1.0MPa, Connection Thread: R 1/8, Attachment: Clear Cover Removable, Wrench Tighten

Display Pressure: 1.0MPa, Connection Thread: R 1/4, Attachment: Clear Cover Removable, Wrench Tighten

Display Pressure: 1.0MPa, Connection Thread: R 1/4, Attachment: Clear Cover w/Protrusion, is Removable

Display Pressure: 0.2MPa, Connection Thread: R 1/8, M5 Female, Attachment: Clear Cover w/Protrusion, is Removable

Display Pressure: 0.4MPa, Connection Thread: R 1/8, Attachment: Clear Cover w/Protrusion, is Removable

Display Pressure: 1.0MPa, Connection Thread: R 1/8, M5 Female, Attachment: Clear Cover w/Protrusion, is Removable

Display Pressure: 1.0MPa, Connection Thread: R 1/8, Attachment: Clear Cover w/Protrusion, is Removable

SX

ADDRESS 4632 4632 4632 1 1 1 9 9 9 PW LRUN ON POWER ALARM COMM Name of terminal block, LED Note Cable wiring 2 2 2 1 ON 8 8 8 O N 3 3 3 7 7 7 4632 4 4 4 6 6 6 SD RD LERR. 5 5 5 POWER SEND x 10 x 1 1 2 3 4 5 6 7 8 OFF DG 24 V 0 V D G D G 0 V 24 V 24 V 0 V A B SG FG 0 V 24 V 24 V 0 V +24V 24G DA DB FG Description LED ON for SI unit power supply input Description LED Description LED POWER COMM

CA2

7 !8 !

MY1

4 C-9 MYM50-15AK0502 GMY50 MC-16 P44 C-4 C-11.2 MYM63-15AK0503 GMY63 MC-20 P53 C-4 C-14 MYM16-15AK0500 GMY16 MYB16-15-A7163 P12 4 x 1.8 x 1.1 7 x 4 x 1.5 MYM25-15AA5903 GMY25 RCS-8 TMY-25 7.15 x 3.75 x 1.7 C-6 MYM32-15AA5904 GMY32 RCS-10 TMY-32 8.3 x 4.5 x 1.9 C-7 MYM20-15AK0501 GMY20 MYB20-15-A7164 P16 5.1 x 3 x 1.05 7 x 4 x 1.5 Note) Two types of dust seal band are available.

Modular F.R.L. Units

Pressure unit Nil Name plate and caution plate for bowl in SI units: MPa Z*6 Name plate and caution plate for bowl in imperial units: psi, F *7 *7 *7 *7 c Pressure unit Z*6 Name plate and caution plate for bowl in imperial units: psi, F *7 *7 *7 *7 *7 *1 Drain guide is NPT1/4. *2 Drain guide is G1/4. *3 A bracket is not assembled and supplied loose at the time of shipment.

Table of Contents

(C) Outlet air press. dew point (C) Ambient temp.

AC

AL Model Port size A B C D M N P R B B E F G H J K L M5 X 0.8 38.5 50 70.5 70.5 88 88 108 108 108 16 23 26 26 33 36 40 40 40 105 147.5 4.5 5.5 7 7 9 9 12 12 12 50 80 80 80 105 105 105 105 105 91 140 181 181 238 253 300 310 315 5 5 7 7 7 7 10 10 10 7.5 8.5 11 11 13 13 16 16 16 25.5 38 38 38 41 40.5 48 48 48 84.5 124.5 153 153 188 189.5 268 282 282 26 56.8 60.8 60.8 65.5 69.5 75.5 75.5 78 25

Electric Actuators

(5.1) 10 5.8 4 5.5 36 1 0.2 6.5 6.5 1 3 39 28 10.5 3.3 T-slot A +0.030 0 depth 4 +0.030 0 depth 4 C 4H9 L-M6 Refer to Cross section C-C.

CQS

Foot or Flange style: Body mounting bolt Double clevis style: Clevis pin, type C snap ring for axis, Body mounting bolt CQS-L025 7-4-37 38 Weight/Without Auto Switch (g) Made to Order Specifications (For details, refer to page 7-10-1.)

Electric Actuator with Integrated Guide

CN2 11 15 14 2 12 PF SG CR PP PG NP NG SD V24 SON LSN LSP ALM SG 3 12 13 9 10 7 8 20 17 11 LG 19 P5 4 OP 1 V+ 20 12 7 6 P5 LG MR MRR MD MDR SD 7 8 1 2 4 5 9 P5 LG MR MRR MD MDR SHD SG 7 8 1 2 4 9 P5 LG MR MRR MD MDR SHD Note 3) Detector 17 16 Plate 5 Note 2) Note 6) Be sure to connect the shielding wires to the ground plate inside the connector. 12 SG Note 1) Do not orient diodes incorrectly

Aluminum High Vacuum Angle Valve

Quantity Without auto switch Valve open/closed Valve open Valve closed Mounting position Internal 1.3 x 10-9 (FKM) 1.3 x 10-7 External XLA Nil 1.3 x 10-9 (FKM) 1.3 x 10-7 None A B C A B C r 2-1 7-1 i 7-2 XL XL 1.3 x 10-7 1.3 x 10-9 (FKM) 1.3 x 10-7 2-1 7-1 1.3 x 10-9 (FKM) r i 7-2 XLQ Note) Values at normal temperature, excluding gas permeation.

MY1

7 MYM16-15AK0500 GMY16 MYB16-15-A7163 P12 4 x 1.8 x 1.1 7 x 4 x 1.5 MYM20-15AK0501 GMY20 MYB20-15-A7164 P16 5.1 x 3 x 1.05 7 x 4 x 1.5 MYM25-15AA5903 GMY25 RCS-8 TMY-25 5.1 x 3 x 1.05 C-6 MYM32-15AA5904 GMY32 RCS-10 TMY-32 MYM40-15AA5905 GMY40 RCS-12 TMY-40 8.3 x 4.5 x 1.9 C-9 MYM50-15AK0502 GMY50 MC-16 P44 C-4 C-11.2 MYM63-15AK0503 GMY63 MC-20 P53 C-4 C-14 2 2 2 2 2 4 Scraper Piston seal

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

Body Material Aluminum Body Material Brass A A 2 x J 4 x J A A 2 x J 4 x J B C F B B C F B 1/8, 1/4, 3/8 1/8, 1/4, 3/8 1/8, 1/4, 3/8 1/8, 1/4, 3/8 C F C D E D E F D E D E Body Material: Aluminum [mm] Body Material: Brass [mm] Size Port size A B C D E F J 20 1/8, 1/4 11 36 6 34 46 1.5 5.3 30 1/4, 3/8 13 46 7 40 56 1.5 Size Port size A B C D E F J 20 1/8 52 24 9 36 64 1.5 6 20, 30 1/4, 3/8