0.4

B A C B A C B A C B A C B A C B A C B A C kit 98.6 (Double, Dual 3 port valve) 107.6 (3 position) 9 P 34.3 47.1 67.9 94.1 (Single) kit 35 5.5 28.1 12.7 J kit T 2 x M4 DIN rail clamp screw 49.4 kit Release for switching connector direction EXH outlet Applicable connector: D-sub connector (25P) (Conforming to MIL-C-24308) L U side D side Stations n 8 7 6 5 4 3 2 1 kit For top ported One-touch

Thermo-chiller

HRLE050-W-20 HRLE050-W-20 [50 Hz] [60 Hz] 7 7 Facility water temperature 25C Facility water temperature 32C 6 6 Cooling capacity [kW] Cooling capacity [kW] Facility water temperature 25C 5 5 4 4 Facility water temperature 32C 3 3 Facility water temperature 40C Facility water temperature 40C 2 2 1 1 0 0 15 20 25 Circulating fluid temperature [C] 15 20 25 Circulating fluid temperature [C] *

ZP

G Hexagon width across flats 7 Elliptic e c a d b Flat Elliptic Thin Flat/Thin Flat with Ribs C Y A B A a e Y b c d Model B C Y Model Model ZPR02U-0-A8 ZPR10UT ZPR2004U 10 11 1 2 2 2.6 1.2 1.2 0.3 4 2.6 4.6 ZPR04U-0-A8 ZPR13UT ZPR3507U 13 14 4 3.5 4.8 1.8 1.6 0.8 0.5 7 4.3 7.8 1.5 ZPR06U-0-A8 ZPR16UT ZPR4010U 16 17 6 4 7 2 0.8 10 5 11 2.5 2.5 ZPR10CT 10 11 0.8 ZPR08U-0-A8 8 9 1 ZPR13CT 13

Electric Actuators

connector Model LC5-1-C1-02-X252 Cable length 0.2m LC6C LC6C Cable length: 1 to 5m 2 1 4 3 6 5 8 7 10 9 12 11 14 13 16 15 18 17 20 19 1 Communication connector 2 c Cable length: 0.2m 20 View c 315 Switches Solid State Switches Applicable Actuators Series LXF, LXP, LXS D-F9 Series LJ1 (non-standard motor) D-Y7GL Cannot be mounted on Series LXF with ball screw specification.

ITV

/C or less Operating temperature range 0 to 50C (No condensation) Equivalent to IP65 VEX Enclosure Connection type Built-in One-touch fittings SRH z, x, c: 4 Metric size For single unit z, x, c: 5/32" Inch size Connection size SRP z, c: 6, x: 4 Metric size Manifold z, c: 1/4", x: 5/32" Inch size Weight Note 1) SRF 100 g or less (without option) Note 1) Indicates the weight of a single unit

KR

(mm) (1) Weight (g) D1 D2 L1 L2 A M Nylon Urethane KGL04-M5 KGL04-01 KGL04-02 KGL06-M5 KGL06-01 KGL06-02 KGL06-03 KGL08-01 KGL08-02 KGL08-03 KGL10-01 KGL10-02 KGL10-03 KGL10-04 KGL12-02 KGL12-03 M5 x 0.8 7 9.5 16 13.5 15 13 3.5 3.5 2.7 10 19 4 1 8 1 4 22 26 23 25 10 14 7 11.5 10.4 10 18 16 4.2 4.2 M5 x 0.8 3.1 12 10 33 13 21 35 25 26 14 10 14 17 12 14 17 3.5 3.5 16 14.5 17 23 25.5

125

to +10% 12 VDC: 4% to +10% Flow Rate Characteristics/Weight Caution Flow rate characteristics Weight [kg] 1(P) 2(A) 2(A) 1(P) 3(R) 2(A) 2(A) 3(R) Air operated Model Port size (External/ Internal) Pilot solenoid C [dm 3/(sbar)] b C [dm 3/(sbar)] b C [dm 3/(sbar)] b C [dm 3/(sbar)] b VEX312-01 1/8 2.4 0.19 2.4 0.31 2.3 0.36 2.5 0.22 0.1 0.2 VEX312-02 1/4 3.5 0.35 3.3 0.49 3.1 0.46 3.5

3 Port Solenoid Valve Metal Seal Series VZ200 1

Applicable cable O.D.: 3.5 to 7 (Reference) 0.5 mm2 2 core and 3 core wires equivalent to JIS C 3306. DIN Terminal Part No. Without indicator light DXT170-176-1 With Indicator Light Rated voltage Voltage symbol Part no.

Series VQ4000 Base Mounted Plug-in/Plug Lead Single Unit For details about certified products conforming to international standards, visit us at www.smcworld.com.

Maximum stations are 18. 16 4 17 5 18 6 19 7 20 8 21 1.

5 Port Air Operated Valve

How to Order Manifold Assembly Example (VV5FA3-30) Closed center VFA3330-02 (1 set) Double solenoid VFA3230-02 (1 set) Single solenoid VFA3130-02 (3 sets) Manifold base (5 stations) D side U side VV5FA3-30-051 Stations 1 3 2 VV5FA3-30-0511 set (Type 30, 5-station manifold base part no.) VFA3130-023 sets (Single part no.) VFA3230-021 set (Double part no.)

AZ1000

Material Code Body Poppet 316L SS Diaphragm 316L SS Nozzle Seat material S Material PCTFE (Standard) PTFE 3) Code 316L SS 316L SS Hastelloy C-22 Hastelloy C-22 No code TF SHP 3) PTFE recommended for applications such as within a process tool.

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

Application Example qBlow off valve (SYJ llR) 3 5 7 wValve for vacuum control eOperation of a single acting cylinder rDivider valve (SYJ llR) tSelector valve (SYJ llR) yPressure release Valve (SYJ llR) 3 5 7 3 5 7 3 5 7 (SYJ llR) 3 5 7 3 5 7 3 5 7 (SYJ ll/SYJ ll R) X port X port X port X port X port Tank Tank 0.2MPa (R)3 2(A) (R)3 2(A) 2(A) (R)3 2(A) 2(A) 2(A) (R)3 (P)1 (R)3 (R)3 (P)1 Plug

LEC-OM071xx

13 7 8 9 10 11 ON OFF H P-OT 0 1 2 3 4 5 6 Forward Run Prohibited Pn50A.3 7 8 L /P-OT 9 A B C D E F H N-OT 0 1 2 3 4 5 6 Reverse Run Prohibited Pn50B.0 7 8 L /N-OT 0 A B C D E F L /P-CL 0 1 2 3 4 5 6 Forward External Torque Limit Pn50B.2 8 7 H P-CL 9 A B C D E F L /N-CL 0 1 2 3 4 5 6 Reserve External Torque Limit Pn50B.3 8 7 H N-CL 9 A B C D E F L /DEC 0 1 2 3 4 5 6 Homing Deceleration LS

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

Pg.7 Indicator light 3.5 to 7 : AC 61.5 54 M plug connector (M): VQZ2l2(R)-lMl-C4, C6, M5 36 (Lead wire) Cover dia 1.5 Cross section 0.23mm2 300 89 Indicator light 77 78 37.5 42.5 : AC 2.10-9 VQZ100/200/300 Body Ported Dimensions: VQZ300 Valve single unit C6, C8, C10, 02 Grommet (G): VQZ3l2(R)-lGl-C6, C8, C10, 02 C6: One-touch fittings for 6 C8: One-touch fittings for 8 300 (Lead wire) 75.5

Series VQ4000 Base Mounted Plug-in/Plug Lead Single Unit For details about certified products conforming to international standards, visit us at www.smcworld.com.

Electrical entry Port size F kit Double wiring F kit Single wiring T kit Double wiring T kit Single wiring S kit Double wiring S kit Single wiring L0 kit : Stations (1 to 16) L1 kit : Stations (1 to 16) L2 kit : Stations (1 to 16) C kit (Plug lead type) 02 03 B C8 C10 C12 N7 N9 N11 F1 F2 T1 T2 S1 S2 L0 L1 L2 C Rc 1/4 Rc 3/8 Bottom ported Rc 1/4 With One-touch fitting for 8 With One-touch

Fieldbus System

N.O. 2 2-position double (Rubber) 4-position dual 3-port valve (C) (A) 4 (B) 2 (A) 4 (B) 2 C: Locking type (Manual) Note) C 5 (R1) 3 (R2) 1 (P) 1 (P) 5 (R1) 3 (R2) N.C.

Table of Contents

A C MTS D-F9W, D-M9 D-A93 D-A90, D-A96 D-M9V, D-F9WV Bore size (mm) CXSJ15 to 32 B D A 15.5 25.5 31.5 39 40 49 D 9.5 7 0 3 5 5.5 C 9.5 19.5 25.5 33 34 43 B 6 9 11 11.5 B 0.5 3 10 13 15 15.5 A 15.5 25.5 31.5 39 40 49 A 19.5 29.5 35.5 43 44 53 C 11.5 21.5 27.5 35 36 45 D 5.5 3 4 7 9 9.5 D 8 5.5 1.5 4.5 6.5 7 B 6 9 11 11.5 B 0.5 3 10 13 15 15.5 C 13.5 23.5 29.5 37 38 47 C 11 21 27 34.5 35.5

VQ20/30

Woolim e-BIZ Center (Room 1008), 170-5, Guro-Dong, Guro-Gu, Seoul, 152-050, South Korea TEL: 02-3219-0700 FAX: 02-3219-0702 ROMANIA SMC Romania S.r.l. Str. Frunzei, Nr. 29, Sector 2, Bucharest, Romania TEL: 01-3205111 FAX: 01-3261489 SLOVAKIA SMC Priemyseln automatizci, s.r.o Nova 3, SK-83103 Bratislava TEL: 02-4445-6725 FAX: 02-4445-6028 CHINA SMC (China) Co., Ltd. 7 Wan Yuan St.

KP/KPQ/KPG

-02 KPQH08-01 KPQH08-02 KPQH10-02 KPQH10-03 KPQH12-03 KPQH12-04 25.4 25.9 25.4 22.9 26.3 26.8 25.6 26.1 32.6 30.6 37.6 33 34.1 34.1 8 M5 22.5 10 4 4 4 4 18 10 14 1/8 1/4 19.5 17 7 12 M A L H Connection threads 8 M5 23 12 5 6 10 10 19.5 (R) 12 14 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 19.5 20 26.5 24.5 31.5 26.5 27.5 26 7 14 14 13 24 23 23 46 (R) Applicable tubing 8 14 18 26 21.5 10 17 29 41 24

Hydraulic Filters

N.C. and N.O. common 2 x Rc (d) Removal dimension G INLET INLET B C E (F) B N COM. N.O. N.C.