ML1C

4 $7 $6 y %0 %1 CLS CLQ #3 #2 !8 @0 @2 @1 @7 RLQ @3 r MLU o #5 !6 $3 $4 MLGP Component Parts Component Parts Material No.

BP1000

mm FV4 MV4 FV6 MV6 1.85 01 47.0 2.35 01 59.7 Hastelloy is a registered trademark of Haynes International.

Lubrication Equipment

ALF600 ALF800 ALF900 / / 1 4 3 8 3 4 1 2 ITV / 1 3 4 1 VBA 2 1 1 2 /1 1 4 VE Dimensions: Auto Feed Tank VY G AL L K 428 428 J 414 414 472 472 I 382 382 422 422 H 24 24 40 40 G 197 197 258 258 F 106 106 137 137 E 91 91 121 121 D 7 7 7 7 C 16 16 30 30 B 70 70 108 108 Model A 174 174 234 234 ALT-5 ALT-5-IS ALT-9 ALT-9-IS 449 482 1.17-14 Oil Distributor VA, VB/Nylon Tubing Related Products Oil

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

Refer to "How to Order" on page 7 for auto switch model numbers.

44

KQ2 KFG2H0425-01 KFG2H0425-02 KFG2H0403-01 KFG2H0403-02 KFG2H0604-01 KFG2H0604-02 KFG2H0806-01 KFG2H0806-02 KFG2H0806-03 KFG2H1075-02 KFG2H1075-03 KFG2H1075-04 KFG2H1008-02 KFG2H1008-03 KFG2H1008-04 KFG2H1209-02 KFG2H1209-03 KFG2H1209-04 KFG2H1210-02 KFG2H1210-03 KFG2H1210-04 KFG2H1613-03 KFG2H1613-04 1/8 1/4 1/8 1/4 1/8 1/4 1/8 1/4 3/8 1/4 3/8 1/2 1/4 3/8 1/2 1/4 3/8 1/2 1/4 3/8 1/2 3/8

Ozone Resistant

220-01-F 220-02 220-02-F 320-03 (02) 320-03-F (02) 420-04 420-04-F 121F-M3 131F-M3 121F-M5 (U10, 32) 131F-M5 (U10, 32) 221F-01 231F-01 2211F-01-06 221F-02 231F-02 321F-03 (02) 331F-03 (02) 421F-04 431F-04 1000F 2000F 2050F 3000F 4000F 1001F 2001F 2051F 3001F 4001F 230F 330F 430F 530F 630F 330F 430F 530F 630F Manifold regulator 4-, 5-port solenoid valve VQ Directional control valves 0 1000

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

4 Nickel plated Set of nos. above @4, @6, @7, @8 Aluminum alloy Attachment ring !5 Hard anodized CY1R10-PS 10: Stainless steel 6, 50, 63: Hard steel wire Rolled steel plate Set of nos. above @4, @5, @6, @7, @8, @9, #0 Type C snap ring for axis !6 CY1R50-PS CY1R63-PS Magnetic shielding plate !7 Chromated Seal kit includes @4, @5, @6, @7, @8 for 6. @4 to #0 are for 50 and 63.

ISA2

Leakage voltage Take special precautions if a resistor is used in parallel with the switching element or a C-R element (for surge voltage protection) is used for protection of the switching element. The valve may fail to turn off due to leakage current flowing through the resistor or C-R element. PF2 IF Data Switching element OFF Caution R C Leakage voltage Power supply 1.

ZSE30/ISE30

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com L ISE30 01 25 M For positive pressure ZSE30 01 25 M For vacuum/low pressure Option 2 Piping specifications Nil None Bracket R 1/8 (With M5 female thread) 01 NPT 1/8 (With M5 female thread) A T1 Straight type 4 One-touch fitting 5/32" One-touch fiting

HRX-OM-W038

9.3.1 HRS040-A-20-(BJMTWZ) . 9-5 9.3.2 HRS040-W-20-(BJMTW) . 9-6 9.4 Cooling capacity . 9-7 9.4.1 HRS040--20-(BJMTWZ). 9-7 9.5 Heating capacity . 9-7 9.5.1 HRS040-A-20-(BJMTWZ) . 9-7 9.5.2 HRS040-W-20-(BJMTW) . 9-7 9.6 Pump capacity. 9-8 9.6.1 HRS040--20-(BJMWZ) . 9-8 9.6.2 HRS040--20-T,-MT . 9-8 HRS Series HRX-OM-W038 Contents 9.7 Required facility water flow (For water-cooled type) . 9-

Compact Manifold Regulator

PVQ VY1 7.

ZSE3/ISE3

Outside Local Area: (800) 258-9200-www.stevenengineering.com ZSP ISA2 IS ZSM PF2 01: R 1/8 T1: NPTF 1/8 IF 2-3.5 Mounting hole 13 Data M5 x 0.8 Connector type 30 SE3C I Z 01 T1 20.5 RESET button DOWN button SET button UP button Lead wire length 600 39 8.5 3.5 (3000) 10 01: R 1/8 T1: NPTF 1/8 2-3.5 Mounting hole 13 M5 x 0.8 16-4-7 8 Series ZSE3/ISE3 Dimensions/Switch Only Grommet type ZSE3

Shuttle Valve/AND Valve with One-Touch Fittings

Output 3 goes ON if "C" is turned ON, only when output 1 and output 2 are in an ON state. If either "A" or "B" is OFF, output 3 does not go ON even if "C" is turned ON.

MGG

Nickel plated Nickel plated C type snap ring for hole 15 Guide Cylinder Series MGG 63 to 100/MGGF #3 !5 #9 #6 q t #8 !4 !7 @2 @3 @4 r y e #7 u o !1 i w !8 #4 !6 A @1 @0 !9 !0 #2 $0 A' For ball bushing #5 @5 #0 @8 @6 !7 !0 @1 !3 #8 !2 @9 For slide bearing y For long stroke For 100 @7 For 80, 100 View A-A' Parts list Parts list No. Description No.

5 Port Air Operated Valve Series VFA3000 1

Port size (A, B port) Body type 01 02 1 8 1 4 For 60, 61 type manifold 6 R port of VFA370 is 1/4. For 70, 71 type manifold 7 How to Order Manifold Base Use the same manifold bases as the VF3000. VV5FA3 Specify the same manifold part number as VV5F3.

Magnetically Coupled Rodless Cylinder

51 62 HS 8.5 7.5 6.5 7 8 HT 28 33.5 41 50 L 53 62 70 76 90 C 4.2 5.2 5.2 6.5 6.5 K 14 11 15 13 15 CB 2 3 3 3 5 CR 0.5 1 1 1.5 2 HC 31 38 43 54 66 D 16.6 21.6 26.4 33.6 41.6 F 8 9 8.5 10.5 13 G 5 6 6 7 7 GP 33 39 44 55 65 GW 31.5 37.5 42.5 53.5 63.5 H 32 39 44 55 67 HA 30 36 41 52 62 HB 17 21 23.5 29 36 Model CY3RG15 CY3RG20 CY3RG25 CY3RG32 CY3RG40 LD 4.3 5.6 5.6 7 7 T 19 20.5 21.5 24 26

Compressed Air Preparation Filter

A B C D E EE F G H J K Applicable model Y200T-D 3.2 67 29 51 24 33 11.5 5.5 15.5 3.5 30 AFF/AM/AMD/AMK20 Y300T-D 4.2 85 42.5 67.5 35 14 7 20 6 41 AFF/AM/AMD/AMK30 Y400T-D 5.2 115 50 85.5 40 55 18 9 26 7 50 AFF/AM/AMD/AMK40 Part no.

Magnetically Coupled Rodless Cylinder Series CY3B/CY3R

51 62 HS 8.5 7.5 6.5 7 8 HT 28 33.5 41 50 L 53 62 70 76 90 C 4.2 5.2 5.2 6.5 6.5 K 14 11 15 13 15 CB 2 3 3 3 5 CR 0.5 1 1 1.5 2 HC 31 38 43 54 66 D 16.6 21.6 26.4 33.6 41.6 F 8 9 8.5 10.5 13 G 5 6 6 7 7 GP 33 39 44 55 65 GW 31.5 37.5 42.5 53.5 63.5 H 32 39 44 55 67 HA 30 36 41 52 62 HB 17 21 23.5 29 36 Model CY3RG15 CY3RG20 CY3RG25 CY3RG32 CY3RG40 LD 4.3 5.6 5.6 7 7 T 19 20.5 21.5 24 26

One-touch Fittings Series KQ2

1 S 2 0 3 1 T 2 Q K 7 1 7 . 1 2 7 1 8 2 5 . 1 3 5 . 6 3 2 2 9 4 3 2 / 1 8 / 3 S 3 0 3 1 T 2 Q K 5 . 3 3 5 . 8 3 6 . 9 3 4 2 / 1 S 4 0 3 1 T 2 Q K 2 2 5 . 7 3 0 4 9 6 32 Series KQ2 One-touch Fittings Union tee: KQ2T Inch e l b a c i l p p A .

Compact

o"o+ oeep 3 o Cross section C-C 3 l "!l Cross section C-C #i .. :: fl ffi -i+-sLJ rr Model D f G, I K L !,!