SMC Pneumatic Clean Series

Location where vacuum pressure is measured Piping length (m) Vacuum source Adjust the measured vacuum pressure using a regulator to be the value in the graphs below. 0 -0.001 -0.002 -0.003 -0.004 -0.005 -0.006 -0.007 -0.008 -0.009 -0.010 -0.011 -0.012 11-CJ2 11-CM2 11-CQ -0.027 13-MXS16 Vacuum pressure (MPa) Vacuum pressure (MPa) -0.028 13-MJP 13-MXS20 -0.029 11-CU -0.030 13-MXS25 -0.031

Compact Cylinder with Lock Series CLQ

2270 2510 3570 3930 0.3 71 94 113 147 181 241 317 377 495 589 841 935 1360 1510 2140 2360 IN OUT IN OUT IN OUT IN OUT IN OUT IN OUT IN OUT IN OUT 20 25 32 40 50 63 80 100 CLQ-L020 CLQ-F020 CLQ-D020 20 CLQ-L025 CLQ-F025 CLQ-D025 25 CLQ-L032 CLQ-F032 CLQ-D032 CLQ-L040 CLQ-F040 CLQ-D040 32 CLQ-L050 CLQ-F050 CLQ-D050 CLQ-L063 CLQ-F063 CLQ-D063 40 CLQ-L080 CLQ-F080 CLQ-D080 50 CLQ-L100 CLQ-F100

SMC Pneumatic Clean Series

Location where vacuum pressure is measured Piping length (m) Vacuum source Adjust the measured vacuum pressure using a regulator to be the value in the graphs below. 0 -0.001 -0.002 -0.003 -0.004 -0.005 -0.006 -0.007 -0.008 -0.009 -0.010 -0.011 -0.012 11-CJ2 11-CM2 11-CQ -0.027 13-MXS16 Vacuum pressure (MPa) Vacuum pressure (MPa) -0.028 13-MJP 13-MXS20 -0.029 11-CU -0.030 13-MXS25 -0.031

2–4

CAT.ES20-179 A Compact Cylinder/Guide Rod Type Lateral Load Resisting 24 times Compared to compact cylinder series CQ Non-rotating accuracy 0.2 or less Refer to page 3 for details. Guide Rod Load can be directly mounted. Load can be directly mounted. External Dimensions Slide bearing Compatible mounting dimensions with the series CQS, CQ2.

MXS Series Air Slide Table

10,20,30,40,50,75,100 10,20,30,40,50,75,100,125 10,20,30,40,50,75,100,125,150 10,20,30,40,50,75,100,125,150 Stroke adjuster/shock absorber option BS BT With shock absorber at extension end* With shock absorber at retraction end* *Shock absorber option is not available for MXS6 52 Air Slide Table MXS Series Construction/Parts list, Seal list 3 6 8 9 br bs bt bp 7 2 1 bl bk bq 4 bm bn bo 5 ck cp cm cn co cq

LEYx-OMZ0015

Pulley for Screw Shaft Alloy steel 14 Wear ring Synthetic resins 30 Pulley for motor Alloy steel 15 Lock-nut Alloy steel 31 Belt 16 Motor block Aluminum alloy Anodized 32 Motor adapter Aluminum alloy Anodized Mounting bracket part number Replacement parts/grease pack Motor Painted area Part number mountain Foot Flange Double crevis Piston rod GR-S-01010g GR-S-02020g In-line LEY-L100 LEY-F100

CLQ

CLQ-D025 CLQ-F025 CLQ-L025 A96V A96 A76H IC circuit 5V CLQ-D032 CLQ-F032 CLQ-L032 A72H A72 200V Yes Reed switch CLQ-D040 CLQ-F040 CLQ-L040 Grommet A73H A73 12V 100V CLQ-D050 CLQ-F050 CLQ-L050 A93V A93 Relay, PLC CLQ-D063 CLQ-F063 CLQ-L063 100V or less IC circuit 5V, 12V No A80 A90V A90 A80H 2 wire 24V CLQ-D080 CLQ-F080 CLQ-L080 12V Yes A73C Connector CLQ-D100 CLQ-F100 CLQ-L100 5V,

NCG/CG1

NCG-C063 NCG-C050 NCG-C040 NCG-C032 NCG-C025 NCG-C020 Single clevis No. of auto switches mounted Model Bore size (mm) 2 1 20 30 mm 50 mm CG1 Mounting Bracket Part No. 25 Mounting bracket Bore size (mm) 20 55 mm 32 25 32 40 50 63 80 100 40 Axial foot (1) CG-L020 CG-L025 CG-L032 CG-L040 CG-L050 CG-L063 CG-L080 CG-L100 35 mm D-G5NBL 50 CG-F020 CG-F025 CG-F032 CG-F040 CG-F050 CG-F063 CG-F080 CG-F100

SMC Pneumatic Clean Series

Location where vacuum pressure is measured Piping length (m) Vacuum source Adjust the measured vacuum pressure using a regulator to be the value in the graphs below. 0 -0.001 -0.002 -0.003 -0.004 -0.005 -0.006 -0.007 -0.008 -0.009 -0.010 -0.011 -0.012 11-CJ2 11-CM2 11-CQ -0.027 13-MXS16 Vacuum pressure (MPa) Vacuum pressure (MPa) -0.028 13-MJP 13-MXS20 -0.029 11-CU -0.030 13-MXS25 -0.031

SMC Pneumatic Clean Series

Location where vacuum pressure is measured Piping length (m) Vacuum source Adjust the measured vacuum pressure using a regulator to be the value in the graphs below. 0 -0.001 -0.002 -0.003 -0.004 -0.005 -0.006 -0.007 -0.008 -0.009 -0.010 -0.011 -0.012 11-CJ2 11-CM2 11-CQ -0.027 13-MXS16 Vacuum pressure (MPa) Vacuum pressure (MPa) -0.028 13-MJP 13-MXS20 -0.029 11-CU -0.030 13-MXS25 -0.031

SMC

Location where vacuum pressure is measured Piping length (m) Vacuum source Adjust the measured vacuum pressure using a regulator to be the value in the graphs below. 0 -0.001 -0.002 -0.003 -0.004 -0.005 -0.006 -0.007 -0.008 -0.009 -0.010 -0.011 -0.012 11-CJ2 11-CM2 11-CQ -0.027 13-MXS16 Vacuum pressure (MPa) Vacuum pressure (MPa) -0.028 13-MJP 13-MXS20 -0.029 11-CU -0.030 13-MXS25 -0.031

Air Cylinder

Mounting bracket Order qty Bore size (mm) Contents 20 25 32 40 50 63 80 100 Axial foot 2 Note) CG-L020 CG-L025 CG-L032 CG-L040 CG-L050 CG-L063 CG-L080 CG-L100 2 foots, 8 mounting bolts Flange 1 CG-F020 CG-F025 CG-F032 CG-F040 CG-F050 CG-F063 CG-F080 CG-F100 1 flange, 4 mounting bolts Trunnion pin 1 CG-T020 CG-T025 CG-T032 CG-T040 CG-T050 CG-T063 2 trunnion pins, 2 trunnion bolts, 2 flat

SMC Pneumatic Clean Series

Location where vacuum pressure is measured Piping length (m) Vacuum source Adjust the measured vacuum pressure using a regulator to be the value in the graphs below. 0 -0.001 -0.002 -0.003 -0.004 -0.005 -0.006 -0.007 -0.008 -0.009 -0.010 -0.011 -0.012 11-CJ2 11-CM2 11-CQ -0.027 13-MXS16 Vacuum pressure (MPa) Vacuum pressure (MPa) -0.028 13-MJP 13-MXS20 -0.029 11-CU -0.030 13-MXS25 -0.031

Vacuum

cq 2,/7X1-s,2 (For gide mountirE) il[ilil Grovidd as standard) (PV po.t) Air supply pressure port Exterml v*uun pressure port Not6) l&Oirnensions:For mountjng &ackt B !

Vacuum

cq 2,/7X1-s,2 (For gide mountirE) ) il[ilil Grovidd as standard) ) (PV po.t) Air supply pressure port Exterml v*uun pressure port Not6) l&Oirnensions:For mountjng &ackt B !

PFxx-OMA1007

or P24 short circuit 0: No short circuit 1: Short circuited 1 Air Management Hub internal error 1 Port communication status 0: Device not connected 1: Operate or Pre-operate 2 VP short circuit VP short circuit detection 0: No short circuit 1: Short circuited 3 4 5 Reserved 6 7 Byte 27 and 28 Details Bit 7 Bit 6 Bit 5 Bit 4 Bit 3 Bit 2 Bit 1 Bit 0 Description PQ Dev-Err Dev-Com DSStatus CQ-Short

Free Mount Cylinder Series CU

Location where vacuum pressure is measured Piping length (m) Vacuum source Adjust the measured vacuum pressure using a regulator to be the value in the graphs below. 0 -0.001 -0.002 -0.003 -0.004 -0.005 -0.006 -0.007 -0.008 -0.009 -0.010 -0.011 -0.012 11-CJ2 11-CM2 11-CQ -0.027 13-MXS16 Vacuum pressure (MPa) Vacuum pressure (MPa) -0.028 13-MJP 13-MXS20 -0.029 11-CU -0.030 13-MXS25 -0.031

1

Note 2) In the case of CQ cylinder, its snap ring and piston rod are made of stainless steel. Rod end nut is also made of stainless steel for rod end male thread type. Piston rod and rod end nut made of stainless steel 6-17-46 6-17-47 39 Made to Order Common Specifications: -XC7: Tie-rod, Cushion Valve, Tie-rod Nut, etc.

Air Cylinder Series CM2

Location where vacuum pressure is measured Piping length (m) Vacuum source Adjust the measured vacuum pressure using a regulator to be the value in the graphs below. 0 -0.001 -0.002 -0.003 -0.004 -0.005 -0.006 -0.007 -0.008 -0.009 -0.010 -0.011 -0.012 11-CJ2 11-CM2 11-CQ -0.027 13-MXS16 Vacuum pressure (MPa) Vacuum pressure (MPa) -0.028 13-MJP 13-MXS20 -0.029 11-CU -0.030 13-MXS25 -0.031