Compact Electric Actuator Series LG1

C plane to A plane D plane to B plane 0.1 or less 0.1 or less Bottom mounting Top mounting Maximum work load (N) Repeatable positioning accuracy (mm) Horizontal Mounting position Stroke (mm) Motor output (W) Typical model Maximum speed (mm/s) Individual models Applicable controller model Feed screw 100 200 300 400 500 600 700 800 9001 0001 200 Ground ball screw lead 10mm Rolled ball screw

Rodless Cylinder for Vacuum Series CYV ø15, ø32 1

] L2 = 50 [mm] D-X L2 L1 20Data Item Load factor n Note 1.

Power Valve: Economy Valve Series VEX5

Cylinder Speed Chart Bore size Series CS1/CS2 Pressure 0.5 MPa, Load factor 50% Cylinder stroke 300 mm Average velocity (mm/s) System 125 140 160 180 200 250 300 1000 Vertically upward movement Horizontal movement 900 800 700 600 500 400 300 200 100 0 A 800 900 1000 700 600 500 400 300 200 100 0 B 900 1000 800 700 600 500 400 300 200 100 0 C 800 900 1000 700 600 500 400 300 200 100 0 D 800

1

Non-rotating rod type C76 Pin cylinder Series C(D)JP 20-CJP Double acting C85 20-CJP Single acting C95 Large bore size cylinder Series C(D)S1 CP95 20-CS1N Standard type NCM Cylinder with lock Series C(D)NA NCA 20-CNA Standard type DCylinder with end lock Series C(D)B 20-CBM2 Standard type -X 20-CBA1 Standard type 20Plate cylinder Series M(D)U 20-MU Standard type Data 20-MUW Double rod type

Cylinder with Lock Series CNS

Hs Proper auto switch mounting positions Auto switch mounting height (mm) (mm) Auto switch models D-A3 D-G39 D-K39 D-A44 D-A5 D-A6 D-A59W Auto switch models D-F5 D-J5 D-F5W D-J59W D-F5BAL D-F5F D-F5NTL D-F5W D-J59W D-F5BAL D-F5 D-J5 D-A5/A6 D-A3 D-A44 D-G39 D-K39 D-A59W D-F5NTL D-F5F Bore size (mm) Bore size (mm) A B A B A B B A B Hs Hs Ht Hs Ht A Hs 125 125 0 0 2 2 4.5 4.5 8.5 8.5 9.5 9.5

Model Selection 1

Main sealing Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Main sealing D side sealing A side sealing A seal is formed when the tubing is inserted, with its insert bushing, and its compression against the internal nut.

Proposals for Energy Saving

25.4 23.7 33.6 31.8 40.1 38 52.4 KN-R01-100 KN-R01-150 KN-R02-100 KN-R02-150 KN-R02-200 KN-R02-250 KN-R02-600 KN-R03-400 KN-R03-600 KN-R04-400 KN-R04-600 KN-R06-600 KN-R06-800 KN-R10-800 D H1 A L1 Copper extension nozzle/KNL (mm) Model Nozzle size D Outside diameter L1 1.5 2 2 2.5 2.5 3 1.5 2 2 2.5 2.5 3 6 6 8 8 10 10 6 6 8 8 10 10 300 300 300 300 300 300 600 600

AC Servo Motor Driver

W Model D T D Max.

5 Port Solenoid Valve Series VQZ1000/2000/3000

The dashed lines indicate the DIN rail mounting [-D].

High Vacuum Angle Valve, XL Series

Example) D-F9NL Main switch circuit Main switch circuit Output Black [White] () Blue [Black] D-F9P (+) Brown [Red] Auto Switch Dimensions (mm) 1in=25.4mm Output Black [White] D-F9N, D-F9P, D-F9B () Blue [Black] D-F9B (+) Brown [Red] L dimension (mm) Part No.

CG5-S

Applicable bore size (mm) D B1 C d H1 (mm) Part no.

Modular F.R.L. Units

D*7 N.O. (Normally open) Drain port is open when pressure is not applied.

Thermo-dryer

A D A D Data symbol Correction factor Data symbol Correction factor Condition Condition A A Inlet air temperature Inlet air temperature 68F (20C) 1.36 86F (30C) 1.11 Ambient temperature Ambient temperature 77F (25C) 1.07 86F (30C) 1.00 B B C C Outlet air pressure dew point Outlet air pressure dew point 37.4F (3C) 0.50 41F (5C) 0.67 Inlet air pressure Inlet air pressure D F D F 145psi (1 MPa

0.55

mm Average speed Series (mm/s) 6 10 16 20 25 32 40 40 50 63 80 100 125 140 160 180 200 1000 Perpendicular, upward actuation Horizontal actuation 800 600 400 200 VF3140-03 0 1000 800 600 400 200 VF5144-04 0 With : when using steel piping Front matter 1 Cylinder Speed Chart @ Use as a guide for selection.

AMD

Nil Rc Thread type F G N NPT Accessory/Option Combinations Available Not available Depends on model Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Accessory Optional specification C C D J R D J T AMD150 R AMD250 AMD350 AMD450 Applicable model Accessory (Option)

Modular F.R.L. Units

D-G

VQ7-6/7-8

0 t t r i u w y e q r i w e q VQ7-8-FG-DVQ7-8-FG-D-R !0 !0 t t r i w y e q r i w e q VQ7-8-D-R FHG FJG FIG VQ7-8-DFHG FJG FIG !0 !0 t t r i w y e q r i w e q VQ7-8-FPG-D!0 t r i w y e q o Replacement Parts (For valve) Description VQ7-8-FG-SVQ7-8-FG-DVQ7-8-FPG-DVQ7-8-FG-S-R VQ7-8-FG-D-R VQ7-8--D-R VQ7-8--DNumber q w e r t y u i o !

Programless Controller Series LECP1

P1 Control Circuit Power Supply Connector: CNP2 Accessory P2 Terminal name Function Function details P P C D L11 L21 Connect between P and D. (Connected at time of shipping.) If regeneration option is required for Model Selection, connect to this terminal.

ZCUK

D-A9V D-M9V D-F9WV Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com ( ): Denotes the values of D-M9V, D-F9WV.

C95Series

I' SU tl}El absorber : Sign : Red Green: Red: D-A56 .,,'""pan" \ . position D-F59 D-F5PW D-F59F Solid State Type Internal Circuit D-J59W D-F5P D-F5LF ~~ e Black D-F58A D-J59 D-F5NT AIIID SWitches Series C95 Suppon b racketexceptcenter tll.llYioo Center trunnion , Minimum Allowable Stroke When Mounting Auto Switches .. .