Unit Manifold Valve

Bracket mount Panel mount Barb fitting 4/2.5 One-touch fitting 2 Bracket Panel mount example Lead wire length In case of 8 stations 1(P) 3(R) 2(A) 2(A) Connector cable Length: 300 mm 600 mm 1000 mm No.7 No.8 2(A) 2(A) No.5 No.6 2(A) 2(A) No.3 No.4 2(A) 2(A) No.1 No.2 Reduced environmental impact substance RoHS compliant Features 1 Unit Manifold Valve Compact Direct Operated 3 Port Solenoid

Compact Type Dual-Rod Cylinder Series CXSJ

Please consult P/A if using coolant liquid other than water based solution.

Clean Air Module

Real-time switch output Hysteresis mode ON Flow rate conversion YES OFF P-1 P-2 Normal condition {0C, 101.3 kPa, Dry air} or standard condition (ANR) {20C, 101.3 kPa, 65% RH} can be selected.

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

Basic style: CA2YB 4-J 2-P (Rc, NPT, G) MM Width across flats KA G G RE A B REC CX D E CY H1 MQQ M AL B1 K A N F N B C M S + Stroke H RHC ZZ + Stroke MK(2) RS Q G (mm) Bore size (mm) 40 50 63 80 100 Stroke range Up to 500 Up to 600 Up to 600 Up to 700 Up to 700 RS H A B C A AL B1 D E F G H H1 J K KA M MM N P S ZZ 30 35 35 40 40 27 32 32 37 37 60 70 85 102 116 22 27 27 32 41 44 52 64 78 92

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

500 Up to 600 Up to 600 Up to 700 Up to 700 RS H A B C A AL B1 D E F G H H1 J K KA M MM N P S ZZ 30 35 35 40 40 27 32 32 37 37 60 70 85 102 116 22 27 27 32 41 44 52 64 78 92 16 20 20 25 30 32 40 40 52 52 10 10 10 14 14 15 17 17 21 21 51 58 58 71 72 8 11 11 13 16 M8 x 1.25 M8 x 1.25 M10 x 1.25 M12 x 1.75 M12 x 1.75 6 7 7 10 10 14 18 18 22 26 11 11 14 17 17 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22

PFxx-OMX0007

Common setting Output mode Hysteresis mode Switch operation Normal output Set value (P) 25 Hysteresis (H) 10 Initial setting Zero cut-off setting CUt: 1.0 (displays 0 for a value below 10 L/min) Switch ON point 25 L/min or more Switch OFF point Below 15 L/min Change the zero cut-off setting The set value (P) and hysteresis (H) cannot be changed.

Digital Flow Monitor

Common setting Output mode Hysteresis mode Switch operation Normal output Set value (P) 80 Hysteresis (H) 30 Initial setting Zero cut-off setting CUt: 1.0 (displays 0 for a value below 30 L/min) Switch ON point 80 L/min or more Switch OFF point Below 50 L/min Change the zero cut-off setting. The set value (P) and hysteresis (H) cannot be changed.

Low torque Metal seal type Rotary joint

Fixed (Body) 0.003 to 0.20 N.m or less 0.003 to 0.20 Low rotational torque 0.003 to 0.20 N.m or less Low rotational torque Rotary Joint Turntable Allowable RPM 600 to 3000 min-1(r.p.m) Allowable RPM 600 to 3000 min-1(r.p.m) 600 to 3000 Drive (Adapter plate) Drive motor Application of adapter plate drive Not suitable for transmission of drive Series MQR Low torque Metal seal type Rotary joint

3

Pin name 1 2 3 4 DC (+) OUT2 DC () OUT1 1 3 2 x Piping port Z U T S 4 x WX G 2 4 (35.5) 42 H For PF3W721 OUT IN AA G 4 x P K L 2 x Piping port G N DD PF3W504/520/540/511/521 Remote sensor unit Y A E J F 30 W B V 2 x Piping port Z S T U 4 x WX G H 42 (35.5) For PF3W521 IN OUT AA G 4 x P K L 2 x Piping port G N (mm) Bracket dimensions Model Port size A AA B D DD E F G H J K L N P (Rc, NPT,

IDX-OM-W020

mm) 2feet (600 mm) 2feet (600 mm) 2feet (600 mm) 2feet (600 mm) IDFB Series 2-2 2 2 IDX-OM-W020 2. 2-2-2 6 6-2 2-2-3 122F50 oC 122F 50 oC 2-2-4 IDFB Series 2-2 2 3 IDX-OM-W020 2. 2-2-5 6-1 IEC 2 3 () 812 16AWG1.251.5mm 0.1m 98feet (30m) M3 118138mil (33.5mm) PE IDFB Series 2-2 2 4 IDX-OM-W020 2. 2-3 ()2 (2 ) IDFB Series 2-3 2 5 IDX-OM-W020 3 / 3 / 3-1 INOUT 3-2 ON

V100

Grommet (G), (H) (Pitch) P=10.5 11.5 5 5 10 11.6 V100 3 1 3 1 27 [30.9] 21.5 25 + + + + + SY SYJ (Mounting hole) 2-3.5 VK L2 3 (1, 3 port) M5 x 0.8 1 G: Approx. 300 H: Approx. 600 32.5 [34.7] VZ L1 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (Lead wire length)

VQ5000

Set pressure with a flat head screw driver. 42 Base Mounted Type Series VQ5000 Plug-in Unit Metal seal type Rubber seal type (A) 4 (B) 2 VQ5101 (A) 4 (B) 2 VQ5100 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQ5201 (A) 4 (B) 2 (A) 4 (B) 2 VQ5200 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQ5301 VQ5300 (A) 4 (B) 2 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQ5401 VQ5400 (A) 4 (B) 2 (A) 4

Series KV2 Fittings

p p p m m m m m m m p p p p p p p p m m m m m M m M m R p m p p p m m m M m R m p R M p m p p m p m p M m m m m M m p p M m M p p m m m m p m M M m R m m m p m m p m m p p m p m p m p m m R p m m p m p m m M M m m m m p m m p M m p m p m m m m p m M p p m m R p p p p p p p p R p p p m m p m m R p m p m p m m p M p m m m m p p m p p m p m m p R m p p p R m p p p R p p m m p m m p p p p p p

Booster Regulator/Air Tank

Pressure gauge Pressure gauge Port size Applicable series Symbol Port size VBA10A-02 02 03 04 VBA1lA VBA2lA VBA4lA 1/4 3/8 1/2 VBA11A-02 Elbow silencer Silencer Combination of Thread Type and Options VBA20A-03 Body size Option Semi-standard Thread type Nil G N P P P P P P P P P P P P S P P P P P P P P P P GN P P P P P P P P P P P P GS P P P P P P P P P P LN P P P P LS P P GLN P P P

Plug-in/Plug Lead: Single Unit

5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) q w e q w VQ5201 VQ5200 (A) 4 (B) 2 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) e e r q w r q w VQ5301 VQ5401 VQ5300 VQ5400 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQ5500 (A) 4 (B) 2 VQ5501 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) Component Parts Component

AC

(Refer to "Best Pneumatics 1" on p.1.17-21 for further information.)

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

center 3 position closed center 3 position exhaust center 3 position exhaust center 3 position pressure center 3 position pressure center (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) Note 1) Except for VQZ1000 and metal seal Component Parts No

Card Motor

Table 1 An From Table 1, A1 = 22.5 M = W/1000 9.8 (Ln + An)/1000 Pitch moment Mp = 50/1000 x 9.8 (30 + 22.5)/1000 = 0.026 From Table 3, Mpmax = 0.2 Table 3 Mmax = M/Mmax p = 0.026/0.2 = 0.13 n = 0.13 1, thus, the selected model can be used. p +y +r 1 Check the positioning time. 4 Fig.3 Find the shortest positioning time Tmin [ms] from the graph.

Plug-in/Plug Lead: Single Unit

5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQD q w e q w VQ5251 (A) 4 (B) 2 VQ5250 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) e r q w r q w e VQ5350 VQ5450 VQ5351 VQ5451 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQ5550 VQ5551 (A) 4 (B) 2 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) Component Parts

Compressed Air Cleaning Filter Series

P Q S R Drain cock Gray: N.C.