HRX-OM-M090

Fig 9.4-7 Cooling capacity (HRS018-A-20-G) 3) HRS024-A-20-G 3500 3500 Ambient Ambient temperature temperature 3000 3000 Cooling capacity[W] Cooling capacity[W] 25 25 2500 2500 32 32 2000 2000 40 40 45 45 1500 1500 1000 1000 500 500 0 0 0 10 20 30 40 50 0 10 20 30 40 50 Circulating fluid temperature [] Circulating fluid temperature [] 50Hz 60Hz Cooling capacity is reduced by 300W if option

Programless controller Step motor (servo 24 VDC)

800 45 800 45 800 45 800 9 50 900 50 900 50 900 50 900 10 55 1000 55 1000 55 1000 55 1000 11 60 1200 60 1200 60 1200 60 1200 12 65 1400 70 1400 70 1400 70 1400 13 70 1600 80 1600 80 1600 80 1600 14 75 1800 90 1800 90 1800 90 1800 15 80 2000 100 2000 100 2000 100 2000 Refer to the table below for the speed / acceleration of LEHS series.

Air Fittings & Tubing

Hexagon socket head male connector 1 4 KQS 3 8 1 2 1 8 45 Male elbow 1 4 KQK 3 8 1 2 1 8 Universal male elbow 1 4 KQV 3 8 1 2 2.5-6

A

90 70 66 35 11 13 90 3.2 90 NAL6000 95 268 45 95 70 66 35 11 13 90 3.2 95 Courtesy of Steven Engineering, Inc. !

MGP

Bore size (mm) 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1.0 Notes 113 102 90 79 68 57 45 34 23 113 OUT 6 12 Switch mounting bracket Hexagon socket head cap screw (M2.5 x 0.45 x 8l ) 2 pcs. Hexagon socket head cap screw (M3 x 0.5 x 16l ) 2 pcs.

PF2A/PF2W

Connector pin numbers 2 1 (43.5) 4 3 A B Output specifications Pin no. 1 2 3 4 Pin description DC (+) NC/Analog output DC () OUT A 42 Pulse output only 62 52 Pulse output + Analog output 72 Flow direction 16-11-23 20 Series PF2W Dimensions: Remote Type Sensor Unit for Water PF2W511-(N)B 148 80 32 70 58 46 45 2-Port size 2 45 4-5.5 36 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South

Air Cylinder

(n 4) 20 + 45 (n 2) (n 4) 105 + 45 (n 4) 110 + 45 (n 4) 2 95 + 45 2 2 2 2 (n = 4, 8, 12, 16) (n = 2, 4, 6, 8) (n = 4, 8, 12, 16) (n = 4, 8, 12, 16) (n = 4, 8, 12, 16) 2 (Different surfaces and same surface) 1 15 85 D-P3DW 15 + 50 (n 2) (n 4) 2 85 + 50 n 2 (n = 2, 4, 6, 8) (n = 4, 8, 12, 16) 2 (Different surfaces and same surface) 1 120 15 130 140 D-P4DW 15 + 65 (n 2) (n 4) 130 +

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ/H Type ）

PF_ _ ]) . 5-45 5.2.7 Extension setting 4 parameters ([Pr. PL_ _ ]) . 5-46 6.

CV/MVGQ

CV Standard Stroke MVGQ Bore size (mm) Standard stroke CC 10 15, 30, 45, 60 16 15, 30, 45, 60 RB Made to Order Specifications (For details, refer to page 10-21-1.)

Compact Cylinder with Solenoid Valve/

D (mm) (mm) Cylinder model C D Mounting bolt size Cylinder model C D Mounting bolt size CVQM5010 CVQM325 45 M5 x 45L M6 x 60L 60 15 10 45 x 45L x 60L 60 20 15 50 x 50L x 65L 65 25 20 55 x 55L x 70L 70 30 25 60 x 60L x 75L 75 35 30 65 x 65L 12.5 x 80L 80 9 40 35 70 x 70L x 85L 85 45 40 75 x 75L x 90L 90 50 45 80 x 80L x 95L 95 75 50 85 x 85L x 120L 120 -100 75 110 x 110L x 145L 145 CVQM6310

High Vacuum Angle Valve

Vibration resistance allows for normal operation up to 30 m/s2 (45 to 250 Hz), but continuous vibration may cause a decline in durability. Arrange piping to avoid excessive vibrations or shocks. High temperature type (Model/XLA, XLC, XLD, XLF, XLG; Temperature specifications/H0, H2, H3) 1.

REA/REB

(variations on the order of 30%) 10 39.5 40.5 35 35.5 44.5 40.5 39.5 45 15 39 40 34.5 35 62 58 57 62.5 20 68.5 69.5 64 64.5 49.5 45.5 44.5 50 25 48.5 49.5 44 44.5 70.5 66.5 65.5 71 32 59.5 59.5 55 55.5 82.5 78.5 77.5 83 40 65.5 65.5 61 61.5 93.5 89.5 88.5 94 Note1 ) Model D-F7LF cannot be mounted on bore size 10.

RSQ

QA F Q QB QU QW QW QU Bore size (mm) 29 32 40 50 13 13 16 38 42 50 20 24.5 26 7.5 8 9.5 6 6 8 60.5 68 82 32 to 50 20 O counterbore 6.5 depth 4 9 depth 7 9 depth 7 9 depth 7 11 depth 8 A 59.5 67 68 80.5 82 B 41.5 45 48 52.5 54 D 10 12 20 25 25 E 29 36 45 52 64 F 6 8 7.5 8 8 G 3 4 8 10 10 H 18 22 20 28 28 I 60 69 86 J 4.5 5 7 M 28 36 34 40 50 N 3.5 5.5 5.5 5.5 6.6 P M5 x 0.8 Rc 1/8 Rc

JXCx-OMU0004

800 45 800 45 800 45 800 9 50 900 50 900 50 900 50 900 10 55 1000 55 1000 55 1000 55 1000 11 60 1200 60 1200 60 1200 60 1200 12 65 1400 65 1400 70 1400 70 1400 13 70 1600 70 1600 80 1600 80 1600 14 75 1800 75 1800 90 1800 90 1800 15 80 2000 80 2000 100 2000 100 2000 LEHZ32 LEHZ40 2] 2] [mm/s] [mm/s [mm/s] [mm/s 0 5 100 5 100 1 10 150 10 150 2 15 200 15 200 3 20 300 20 300 4 25 400 25 400

Air Combination

Body size 20 30 40 40-06 50 60 Max. moment (M) [N m] 14.5 16 19.5 35 45 45 Max. moment (M) = Length (L) x Load (F) Length (L) Air filter, filter regulator and mist separator Load (F) (1) Drain guide is not equipped with valve function. Be sure to connect piping for drain. No piping for drain allows the drain and compressed air to exhaust freely.

5 Port Air Operated Valve Series SYA3000/5000/7000 1

(Value in the initial stage) Vibration resistance: No malfunction from test with 45 to 2000 Hz one sweep, to axis and right angle direction of main valve, each one time when pilot signal ON and OFF.

VFS

Aluminum die-casted Stainless steel w e Spool/Sleeve Adapter plate r Aluminum die-casted t Aluminum die-casted End plate y Resin Piston u Resin Junction cover i Resin Light cover Part no. for mounting bolt and gasket BG-VFS4000 Replacement Parts VFS41 VFS42 VFS43/44/45 Part no. No.

VQ4000

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 0 5 VQ43 0 Metal seal 0.23 45 or less 47 or less 5.9 1.5 47 or less 6.3 0.18 1.6 0.28 (0.34) Closed center 0 5 VQ43 1 Rubber seal 0.34 50 or less 52 or less 7.0 1.9 52 or less 6.4 0.42 1.9 VQ4000 Rc 3/8 0 5 VQ44 0 Metal seal 0.18 45 or less 47 or less

MGP

(mm) Bore size (mm) MGPS MGPM 25 50 75 100 125 150 175 200 50 30 25 50 80 U U U U U U U U U U U U U U U U MGPS Slide bearing 80 45 30 Water resistant (20 to 100) KVariations Long stroke Copper free Standard Cushion Bearing style Page Bore size (mm) KApplicable Auto Switch 12, 16, 20, 25, 32, 40, 50, 63, 80, 100 Slide U U U U Reed switch Solid state switch Rubber bumper 3.17-4 D-Z7/Z8 Ball

REA/REB

45 Series REAL Dimensions: 15 to 40 ta EA FA tb 4-counter bore dia.