JIS Standard Hydraulic Cylinder Series CH2E/CH2F/CH2G/CH2H

209 0.2 0.13 0.18 0.025 0.064 40 40 40 36 M20 x 1.5 30 27 22.4 9 19 73 214 M16 x 1.5 25 22 18 7 14 68 209 0.025 0.064 50 50 46 40 M24 x 1.5 35 32 28 11 24 83 236 M20 x 1.5 30 27 22.4 9 19 78 231 0.15 63 63 55 46 M30 x 1.5 45 42 35.5 13 30 100 262 M24 x 1.5 35 32 28 11 24 90 252 0.030 0.076 0.18 0.3 0.2 80 80 65 55 M39 x 1.5 60 57 45 15 41 119 301 45 42 35.5 13 30 104 286 M30 x 1.5 0.030

Round Type Low Pressure Hydraulic Cylinder Series CH
M

across flats B1 N GA GB Rc P N Rc P 4-FD H1 H2 2-NN I IA D FY B MM Effective thread K F NB Width across flats NA NC FT A FX H S + Stroke ZZ + Stroke 3 FZ (mm) IA (tolerance) Effective thread length (mm) Bore size (mm) Stroke range (mm) A B B1 B2 D F FD FT FX FY FZ GA GB H H1 H2 I K MM N NA -0.020 -0.053 -0.020 -0.053 -0.025 -0.064 -0.025 -0.064 20 23 f8 to 800 18 38 13 26 10 16 7 6 51 21 68

Solenoid Valve (with M Connector) Conforming to ISO 15407-1 Series EVS1-01, 1-02

21.5 (14 port) 21.5 (12 port) 8.5 (2 port) 8.5 (4 port) 14 4 2 12 12 34 25 18 14 5 1 3 Indicator light 29.5 32.5 34 2-4.6 mounting holes 37 Manual override M8 connector 15.5 (12-, 14 port) 9 (2-, 4 port) 74.5 66.5 8.5 PE port 23 13.5 SMC 16 16 M5-2 ports 12, 14 port 1/8-2 ports 2, 4 port 1/8 1 port 1/8-2 ports 3, 5 port EVS1-02-FG-D-M0 EVS1-02-F G-D-M0 H J I 136 149 68 21.5 (14 port) 68

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16

5mm each Metal stopper Reed switches (2 wire, 3 wire) Solid state switches (2 wire, 3 wire) 2 color indication solid state switches (2 wire, 3 wire) Auto switches +1 0 mm Stroke length tolerance Theoretical Output MXP16 (N) Operating pressure (MPa) Cylinder bore size (mm) 6 10 12 16 Piston area (mm) 0.2 6 16 23 40 0.5 14 40 57 101 0.7 20 55 79 141 0.4 11 32 45 80 0.3 8 24 34 60 0.6 17 47 68

MXH Series Compact Slide

M5 x 0.8 through Bottom hole dia. 4.3 6-7.5 counter bore depth 4.4 Plug for port (hexagon socket head set screw) 4-M5 x 0.8 x 4l Guide rail width 9 4-M4 x 0.7 Depth 10 4-M4 x 0.7 Depth 6 2-M5 x 0.8 9 5.5 17 21.5 52.5 53.5 25 25 27 5.5 26 27 6.5 6.5 16 17 5 NS 10 12.5 25 14 42 + Stroke 56 + Stroke 4-M4 x 0.7 Depth 6 12 10 + Stroke Stroke (mm) LT NS LB J LA 5 58 20 4 10 10 58 20 10 4 15 68

Air Cylinder NCA1 Series

rods; therefore, the use of oversized 3200 16 41 67 103 130 194 261 329 4000 13 38 63 94 119 175 240 310 rods should not be considered a remedy against excessive side loads. 5000 9 34 60 87 110 163 225 289 6000 5 30 56 82 102 152 208 274 8000 4 26 50 76 93 137 188 245 10 3 21 45 70 89 125 172 222 12000 17 41 65 84 118 155 210 16000 9 34 57 75 110 142 188 HOW TO USE THIS TABLE 20 8 28 52 68

Process Pump Series PA3000/5000/PAX1000 Series PB1000

Circuit example (1) Circuit example (2) 3 port solenoid valve Air filter Ball valve Process pump Process pump Regulator AIR SUP FLUID OUT AIR EXH FLUID IN Air supply By-pass Strainer Silencer Throttle Transfer fluid 4 Series PA3000/5000 Process Pump Automatically Operated Type Dimensions/Automatically Operated Type (mm) 1in = 25.4mm PA3000 68 85 105 4-7 7.5 (185) Reset button FLUID OUT 3

Series KG Stainless Steel One-touch Fittings

4.0 1 4 KGW04-02 43.5 42.5 38 11 26 KGW06-M5 KGW06-01 33.5 42.5 30.5 40 8 3.0 3.0 8 1 8 10 6 17 20 12.8 10 1 4 KGW06-02 46 46.5 17 14 10.9 10.9 41 3 8 KGW06-03 48 48 67 1 8 1 4 KGW08-01 KGW08-02 47 51 43.5 49.5 12 30 47 8 14 18.5 20.5 14.2 15.2 12 23 3 8 KGW08-03 17 51.5 52.5 74 R(PT) 1 4 3 8 KGW10-02 KGW10-03 59.5 61 56.5 58.5 66 17 10 76 21 33.5 23.8 18.5 26.5 17 1 2 KGW10-04 65 66 145 68

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Body (Material: SCS13) Refer to the page 22 for the maintenance parts. 2 Series XMA, XYA Stainless steel High Vacuum Angle/In-line Valve Dimensions XMA/Angle type C D L2 (KF flange) Fn Fd Fc C (Fc) L1 (K flange) (CF flange) H B G A A (mm) Model A 103 113 158 170 196 235 B 38 48 66 79 100 117 C 1 1 2 2 3 3 D 30 40 55 75 87 114 Fn 95 110 Fd 34 70 114 Fc 17 26 41 52 70 83 G 40 39 63 68

Compact Rotary Actuator Series CRQ2

D: Shaft dimension S L TG effective depth TL TF effective depth TL TD TB TC (mm) D (g6) DD (h9) AU A B BA BB BC BD BE BU CA CB F H J JA JB Size Rotating angle 20 30 40 90, 180, 360 63 (11) 14 34 14.5 30.4 7 4.7 10 2.5 30 M 8 x 1.25 11 6.5 50 25 90, 180, 360 69 (11) 14 39 16.5 49 16 34.7 8.1 4.9 12 3 32 M10 x 1.5 14 8.5 68 30 90, 180, 360 78 (13) 16 47 18.5 55 16 40.4 8.3 5.2 15 3 36 M10

Precautions 1

Y-020B Y-032B Y-040B Bore size 20 25, 32 40 +0.2 +0.1 9 20 25 36 46 M8 x 1.25 16 18 41 25 9 9 10 14 11 66 M8 x 1.25 +0.2 +0.1 25, 32 9 20 25 38 48 18 9 9 10 14 14 69 22 45 25 M10 x 1.25 M10 x 1.25 +0.3 +0.1 40 M14 x 1.5 12 24 55 68 22 12 13 25 13 92 16 24 50 49.7 49.7 M14 x 1.5 Applicable pin par no. Retaining ring Cotter pin size U1 R1 NX NZ Part no.

Digital Pressure Switch ( compatible)

. 0x0024 (37) 0 R Device detailed state parameter Refer to "Device detail status parameters" on page 68. 0x0025 (40) 0 R Process data input The latest value of process data can be read. 0x0028 1: R: Read, W: Wright System command (index 2) In the ISDU index 0x002 SystemCommand (system command), the command shown in the table below will be issued.

5

Applicable bore size A A1 E1 LA LB MM ND NX NZ R1 U1 Included pin part number Retaining ring Split pin size Y-020B 20 46 16 20 25 36 M8 x 1.25 9 9 +0.2 +0.1 18 5 14 CDP-1 Type C 9 for axis Y-032B 25, 32 48 18 20 25 38 M10 x 1.25 9 9 +0.2 +0.1 18 5 14 CDP-1 Type C 9 for axis Y-040B 40 68 22 24 49.7 55 M14 x 1.5 12 16 +0.3 +0.1 38 13 25 CDP-3 3 x 18 L * A knuckle pin and retaining rings (split

212

0 q 4 Series LVR Dimensions Integral ttings/LQ3 4 x 7 Mounting hole 1/8 (Rc, NPT) Pilot port A H D B G Model A B C D E LVR20-Z07(06) 40 40 49.3 68 20.1 LVR40-Z11(10) 82.5 82.5 89 115 33 LVR40-Z13(12) 82.5 82.5 89 115 33 LVR50-Z19 100 100 117.5 135 45 Breathing port M5 x 0.8 IN Model F G H J LVR20-Z07(06) 8 27 56 88 LVR40-Z11(10) 14 64.5 100 150.5 LVR40-Z13(12) 14 64.5 100 159.5 LVR50-Z19

Refrigerated Air Dryers

. * The IDF370D standard type is equipped with a motor type auto drain. (131) Air Discharge IDF190D, 240D (68) Operating air pressure Air discharge without drainage 0.3 MPa 0.006 m3 per cycle (ANR) 0.5 MPa 0.010 m3 per cycle (ANR) 0.7 MPa 0.014 m3 per cycle (ANR) The motor type auto drain actuates for 2 seconds per cycle. The operating cycle is as follows.

JA/JAH/JB/JS

MPa JA20-8-100 JA25-10-150 JA32-10-100 JA40-12-125 JA40-12-150 JA40-12-175 JA50-16-150 JA63-16-200 JA80-20-250 JA100-24-300 JA100-27-150 JA125-27-200 JA160-33-200 20 25 32 30, 40 40 30, 40 50 50, 63 80 100 100 125 160 8 10 10 12 12 12 16 16 20 24 27 27 33 44 49.5 49.5 60 60 60 71.5 71.5 90.5 110 110 123 165 17.5 19.5 19.5 20 20 20 22 22 27 32 35 34 38 30.5 34 34 38 38 38 44.5 44.5 57.5 68

44

71 68 122 d KS KX 21 17 21 44.8 39.4 7.6 18 M M L2 KM 21 17 21 48.1 41.7 8.5 19 L1 27 22 27 52.3 45.9 9.3 25 KF M Union Elbow: KFG2L H/DL L/LL Applicable tubing size (mm) O.D.

Series KV2 Fittings

25.40 30.00 30.00 30.00 21.7 21.7 19.2 22.2 22.7 21.7 26.0 30.7 33.2 28.7 26.2 34.2 32.7 29.7 38.6 37.9 47.5 50.5 52.5 17.6 17.6 13.4 18.1 16.9 15.6 17.8 26.6 27.4 22.6 18.1 28.4 26.6 21.6 32.5 29.8 41.4 42.4 43.9 16 16 16 17 17 17 17 21 21 21 21 22 22 22 25 25 33 33 33 1.6 1.6 1.6 3.5 3.5 3.5 3.5 5.4 5.4 5.4 5.4 8.5 8.5 8.5 9.8 9.8 12.8 12.8 12.8 8 9 14 8 14 24 54 23 27 25 42 40 40 41 68

Lightweight and Compact

Compact tank 18 L [mm] Temperature followability control reduced the tank capacity required as a buffer. 970 68 Circulating Fluid Temperature Controller Thermo-chiller Standard Type HRS090 Series With heating function Temperature increase with heating capacity (Ambient temperature 32C/50 Hz) 40 Circulating fluid temperature [C] Heating method using discharged heat makes a heater unnecessary

energy saving effect

No need to replace the seal Maintenance hours reduced Compact, Space-saving Outdoor installation, Splashproof type (IPX4) Low-noise design 68 dB Operating noise Max.