Stainless Steel 316

Note 1) P Model Weight (g) W L1 L2 P M1 M2 (mm) 4 6 8 10 12 KQGU04-00 KQGU06-00 KQGU08-00 KQGU10-00 KQGU12-00 4.2 10.6 21.2 41 16.8 10.6 18 17 35 L2 M1 10.6 13 26 42.9 17 13 18.8 17.8 54 L1 25.6 15 30 47.7 18.7 15 20.9 19.9 75 18 40 36 52.8 20.5 18 23 22 114 M2 N 57.4 20.8 41.6 57.8 21.9 21 24.8 23.8 175 Note 1) D is maximum diameter.

VCL

W (44) (Y) Z (X) (V) T R T 25 IN port 2 x 3/8 l=280 l=300 : Thread type Plug provided on U side at shipping. 2.5 (N) E A (U) S Q D G C C B L1 L2 L3 16 D side U side Stations 1 2 3 4 5 n 21 5.5 16 OUT port n x 1/4 H H P = J (Pitch) 2 n x 1/8 : Thread type L Dimension (mm) n (stations) Model Dimensions 2 3 4 5 6 7 8 9 10 L1 70 105 140 175 210 245 280 315 350 VV2CL2 L2 82 117 152 187 222 257

One-touch Fittings

Nipple/Plug etc. 175 B Metric Size One-touch Fittings KQ2 Series Applicable Tubing: Metric Size, Connection Thread: R, Rc Dimensions Round Type Male Connector: KQ2H (Face seal) Connection thread R Model H (Width across flats) D L A M Effective area [mm2] Min. port size Applicable tubing O.D.

90

10.5 15 33 (n1) x 15 (mm) Number of stations Port type Hexagon width across flats B A D C 1 2 3 4 5 6 7 8 9 10 06 08 07 09 9.7 12.3 8.3 11.4 10.8 11.4 8.7 11.3 4 6 4.76 6 Metric size L1 L2 L3 L4 L5 L6 30 45 56.8 73.5 75 85.5 45 60 71.8 88.5 100 110.5 60 75 86.8 103.5 112.5 123 75 90 101.8 118.5 125 135.5 90 105 116.8 133.5 137.5 148 105 120 131.8 148.5 150 160.5 120 135 146.8 163.5 175

ISG

110 56 175 93 8.5 30 2.3 2.3 30 3-6.3 3-6.3 23 20 26 23 20 33 29 9 33 29 9 26 99 79 79 99 126 R 3/8 R 3/8 126 JIS F 8801 A type 20a Cable gland JIS F 8801 A type 20a Cable gland 16-9-7 Safety Instructions These safety instructions are intended to prevent a hazardous situation and/or equipment damage.

How to Order MGQ M Cylinder stroke (mm) Refer to “ Standard Stroke ” on page 339. Slide bearing Ball bushing bearing Bearing type M L 12 mm 16 mm 20 mm 25 mm 32 mm Bore size 12 16 20 25 32 40 mm 50 mm 63 mm 80 mm 100 mm 40 50 63 80 100 M9BW 2 pcs. 1 pc. n

MGQ 12, 16 M L 10, 20, 30, 40, 50, 75, 100 20, 30, 40, 50, 75, 100 125, 150, 175, 200 M L MGQ 20, 25 MGJ MGQ 32, 40 50, 63 80, 100 25, 50, 75, 100, 125 150, 175, 200 M L MGP MGQ OUT(N) IN(N) Theoretical Output (N) Bore size (mm) MGG Operating pressure (MPa) Rod size (mm) Piston area (mm2) Operating direction 1.0 0.9 0.8 0.7 0.6 0.5 0.4 0.3 0.2 MGC Made to Order Specifications (For details

Non-rotating Double Power Cylinder ø20, ø25, ø32, ø40, ø50, ø63, ø80 Series MGZ

-X1247 75, 100, 125, 150, 175 200, 250, 300 350, 400, 450, 500 600, 700, 800 20, 25 32, 40, 50 63, 80 75, 100, 125, 150, 175 200, 250, 300 350, 400, 450, 500, 600 700, 800, 900,1000 Intermediate strokes and strokes shorter than 75 mm are also available.

Slide Unit/Double Rod Type Series CX2 Slide Bearing: ø10, ø15, ø25

Bore size/Stroke (mm) 10 25, 50, 75, 100 Cushion (Option) 15 25, 50, 75, 100, 125, 150, 175, 200 With adjusting bolt (2 pcs.) Nil 25 25, 50, 75, 100, 125, 150, 175, 200 B With shock absorber (2 pcs.) For 15 and 25, strokes up to 300 are available as made-to-order. (-XB11) BS With shock absorber (1 pc.)

Series CJ2 10-/11- 21-/22- Air cylinder / ø6, ø10, ø16

, 200 Standard Non-lube Double acting Single rod 15, 30, 45, 60 15, 30, 45, 60, 75, 100, 125, 150 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 Air cushion is not available for 21-/22-.

CJ2-Z 10-/11- Series 21-/22- ø10, ø16 Air Cylinder

CJ216 16 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 Air cushion is not available for 21-/22-.

CJ2-Z 10-/11- Series 21-/22- Air Cylinder/ø10, ø16

CJ216 16 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 Air cushion is not available for 21-/22-.

ø 20, ø 25, ø 32, ø 40, ø 50, ø 63, ø 80, ø 100 Series HYB Hygienic Design Cylinder Round Type

Mass Without auto switch Unit: kg Stroke (mm) Bore size (mm) 25 Theoretical Output 300 250 200 175 150 125 100 75 50 20 0.27 0.26 0.24 0.22 0.20 0.18 0.17 0.15 Unit: N 25 0.45 0.40 0.36 0.34 0.31 0.29 0.27 0.24 0.22 0.20 Operating pressure (MPa) Bore size (mm) Operating direction 32 0.59 0.53 0.47 0.44 0.41 0.38 0.35 0.32 0.29 0.26 0.5 0.3 0.7 40 1.01 0.91 0.82 0.78 0.73 0.68 0.64 0.59

CJ2X

Low Speed Cylinder Double Acting, Single Rod Series CJ2X 10, 16 How to Order Bore size 10 16 10 mm 16 mm Standard stroke (mm) 10 16 15, 30, 45, 60, 75, 100, 125, 150 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 Intermediate stroke other than above is manufactured upon receipt of order.

Electric Slide Tables

Motor cable 20 20 24 20 24 Lock cable 20 15 15 Dimensions (mm) Model L C D E F G H 108.5 J 40 LES16R-304 38 102.3 78 2 40 LES16R-50136.5 6 34 130.3 106 2 78 78 LES16R-75180.5 8 36 174.3 150 4 36 72 LES16R-100205.5 10 36 199.3 175 5 36 108 16 Series LES Dimensions: Basic Type/R Type LES25R 5H9 (+0.030 0 ) depth 2 A-A 66.5 0.3 Motor cable (2 x 5) 18 7.3 (Max. screw-in depth) 5.5 45.8 24 3.3

Refrigerated Thermo-chiller

Mass Note 10) (kg) Safety standards 170 175 275 145 170 UL, CE marking, SEMI (S2-0703, S8-0701, F47-0200), SEMATECH (S2-93, S8-95) Note 1) It should have no condensation. Note 2) FluorinertTM is a trademark of 3M and GALDEN is a registered trademark of Solvay Solexis, Inc. Regarding the fluid other than the above, please contact SMC.

2-Color Display Digital Flow Switch Series PFM

NPT 1/4 Rc 1/8 Port size G1/8 G1/4 Straight Without orifice: 95 g Bottom Without orifice: 105 g Straight With orifice: 135 g Bottom With orifice: 145 g LCP, PBT, Brass (Electroless nickel plated), HNBR (+ Fluoro coated), FKM (+ Fluoro coated), Silicon, Au, Stainless steel 304 Straight Without orifice: 125 g Bottom Without orifice: 135 g Straight With orifice: 165 g Bottom With orifice: 175

Modular/F.R.L. Units Series AC

98 110 43.5 28 27.8 1 44.5 61.5 42.5 84 1/4 3.2 42.5 196 84 409 175 98 110 43.5 Optional specifications Semi-standard specifications Bracket mount With auto drain With barb fitting With drain guide Metal bowl Metal bowl with level gauge Model M Q1 Q2 R1 R2 S U V B B B B B AC10A AC20A AC30A AC40A AC40A-06 AC50A AC60A 4.5 25 125 107 7 20 2.8 27 24.5 4.5 5.5 164 30 177 160 12 24 3.2 33 29

Compact Cylinder

M8 x 85 l x 90 l x 95 l x 100 l x 105 l x 110 l x 115 l x 120 l x 125 l x 135 l x 155 l x 175 l 85 90 95 100 105 110 115 120 125 135 155 175 C(D)55B100-10 -15 -20 -25 -30 -35 -40 -45 -50 -60 -80 -100 M4 x 50 l x 55 l x 60 l x 65 l x 70 l x 75 l x 80 l x 85 l x 90 l x 95 l M6 x 55 l x 60 l x 65 l x 70 l x 75 l x 80 l x 85 l x 90 l x 95 l x 100 l x 110 l x 130 l x 150 l 50 55 60 65 70 75 80

CG5-S

One-touch Fittings/Stainless Steel Series AS-FG P. 20 One-touch Fittings/Stainless Steel Series KG P. 21 Miniature Fittings MS P. 25 Tubing T, TU P. 26 Floating Joint/Stainless Steel Type JS P. 27 Features 2 Stainless Steel Cylinder Se ries CJ5-S 10, 16 How to Order Bore size Standard stroke (mm) 10 16 10 16 10mm 16mm 15, 30, 45, 60, 75, 100, 125, 150 15, 30, 45, 60, 75, 100, 125, 150, 175

Electric Actuator

Note 5) Grease Ball screw /Linear guide portion Low particle generation grease 100 W/;40 200 W/;60 400 W/;60 Motor output/Size AC servo motor (100/200 VAC) Motor type Motor type S2, S3, S4: Incremental 17-bit encoder (Resolution: 131072 p/rev) Motor type S6, S7, S8: Absolute 18-bit encoder (Resolution: 262144 p/rev) Encoder Horizontal 45 65 210 Power consumption [W] Note 6) Vertical 145 175