Configuration One thermo-chiller for one controller. 2 2 R D R D 3 3 S D S D 5 5 S G S G Controller Master This product Do not connect any wire to other PIN numbers. Fig. 3-13 Connection of RS-232C 3.3.10 Ethernet Modbus/TCP Communication wiring This product can operate the following by Ethernet Modbus/TCP communication.
Series Variations Applicable auto switch models Standard variations Lock system Standard stroke (mm) Bore size (mm) Solid state switch Reed switch Type Model Action Series Built-in auto switch magnet With rod boot Spring lock Grommet Grommet Mounting 3 wire 3 wire 2 wire D-F59 D-F59W D-J59W D-F5P D-F5PW D-F5BAL (2 color indicator) (2 color indicator) 2 wire 4 wire 3 wire D-J59 D-F59F D-F5NTL
(Or None in the Case of No Switch), Lock Unit Built-in Magnet: D (Built-in), Lock Unit Switch Type: A93L--Reed, DC Volt, AC Volt, LED, Horizontal, 3M
(Or None in the Case of No Switch), Lock Unit Built-in Magnet: D (Built-in), Lock Unit Switch Type: M9P--Solid State , Gen. Purpose, 3 Wire PNP, Horizontal, 0.5M
(Or None in the Case of No Switch), Lock Unit Built-in Magnet: D (Built-in), Lock Unit Switch Type: M9B--Solid State , Gen. Purpose, 2 Wire, Horizontal, 0.5M
Cylinder (Tube) Inner Diameter(φ): 160, Stroke(mm): 600, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: With fall prevention function / With Intermediate Stop Function, Environment, Applications: Standard, Operating Temperature(°C): 0~70, End Locking: [Included] Presence, Valves: No, Operating Pressure
Magnet: Built-in, Mounting: Double Clevis, Tube: 125~160 Aluminum (with or w/o magnet);180~200 Steel (w/o magnet),Aluminum (w/magnet);250 Steel, Bore Size: 160mm, Thread: NPT, Stroke: 600mm, Option: Cushion at Both Ends, Cylinder Switch Type: A96--Reed, DC Volt, LED, Horizontal, 0.5M, Lead Wire or Pre-wired Connector: 3m Lead Wire, Number: 2 pcs. (Or None in the Case of No Switch), Lock Unit
Magnet: Built-in, Mounting: Double Clevis, Tube: 125~160 Aluminum (with or w/o magnet);180~200 Steel (w/o magnet),Aluminum (w/magnet);250 Steel, Bore Size: 160mm, Thread: NPT, Stroke: 600mm, Option: Cushion at Both Ends, Cylinder Switch Type: M9PA--Solid State, Water Resist., 3 Wire PNP, Horizontal, Lead Wire or Pre-wired Connector: 0.5m Lead Wire (Or None in the Case of No Switch), Number
Magnet: Built-in, Mounting: Double Clevis, Tube: 125~160 Aluminum (with or w/o magnet);180~200 Steel (w/o magnet),Aluminum (w/magnet);250 Steel, Bore Size: 160mm, Thread: NPT, Stroke: 200mm, Option: Cushion at Both Ends, Cylinder Switch Type: M9P--Solid State , Gen. Purpose, 3 Wire PNP, Horizontal, 0.5M, Lead Wire or Pre-wired Connector: 5m Lead Wire, Number: 2 pcs. (Or None in the Case of
Magnet: Built-in, Mounting: Double Clevis, Tube: 125~160 Aluminum (with or w/o magnet);180~200 Steel (w/o magnet),Aluminum (w/magnet);250 Steel, Bore Size: 160mm, Thread: NPT, Stroke: 100mm, Option: Cushion at Both Ends, Cylinder Switch Type: A34--Reed, DC Volt >5 <24, AC Volt <200, LED, Terminal, None, Lead Wire or Pre-wired Connector: 0.5m Lead Wire (Or None in the Case of No Switch), Number
Magnet: Built-in, Mounting: Double Clevis, Tube: 125~160 Aluminum (with or w/o magnet);180~200 Steel (w/o magnet),Aluminum (w/magnet);250 Steel, Bore Size: 160mm, Thread: NPT, Stroke: 600mm, Option: Cushion at Both Ends, Cylinder Switch Type: A64--Reed, DC Volt >5<24, AC Volt <200, 0.5M, Lead Wire or Pre-wired Connector: 5m Lead Wire, Number: 2 pcs. (Or None in the Case of No Switch), Lock
Magnet: Built-in, Mounting: Double Clevis, Tube: 125~160 Aluminum (with or w/o magnet);180~200 Steel (w/o magnet),Aluminum (w/magnet);250 Steel, Bore Size: 160mm, Thread: NPT, Stroke: 600mm, Option: Cushion at Both Ends, Cylinder Switch Type: A64--Reed, DC Volt >5<24, AC Volt <200, 0.5M, Lead Wire or Pre-wired Connector: 0.5m Lead Wire (Or None in the Case of No Switch), Number: 2 pcs. (Or
Cylinder (Tube) Inner Diameter(φ): 160, Stroke(mm): 600, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: With fall prevention function / With Intermediate Stop Function, Environment, Applications: Standard, Operating Temperature(°C): 0~70, End Locking: [Included] Presence, Valves: No, Operating Pressure
Applicable wafer size 200 mm 300 mm XM XY Non-cassette type DXSA Auto switch and connector XVD Symbol Auto switch Connector Nil A None Lead wire: 0.5 m (without connector) XGT XGT For 200 mm wafer For 300 mm wafer CYV With multiple connector Note 1) C Cassette type D-A93 (With 2 pcs. for opening and closing) (T3106 000: Made by AMP) With D-sub connector Note 2) F (CDE-9PF05: Made by HIROSE
(Length 300 mm) Without lead wires Without connector Misc.
D) In the state of C), adjust shim w so that the arm side block contacts the workpiece.
Output 1 Output 2 A B C Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Dimensions D3 D2 L5 M2 IN L3 L2 L4 OUT IN D1 M1 M1 Applicable tube dia. d L1 Metric Size Weight (g) Model d D1 D2 L3 L2 D3 L1 L4 L5 M1 M2 VR1211F-23 3.2 11.4 8.4 52 6.2 25.7 36.1 17.5 12.7 12.9
Grommet: G Conduit: C Approx. 300 Approx. 280 D D Q F Q F C C G (PF) 1/2 R R E E A H 2-P Port size 2-M B B A H 2-P Port size 2-M L L K K DIN connector: D Conduit terminal: T Cable 6.8 to 10 27.5 F F Q (Q) S 34 25 U R C R C (44) G (PF) 1/2 E B A H D 2-P Port size (S) E G (PF) 1/2 B A H D 2-M 2-P Port size 2-M L L K K N.C.