HRX-OM-R016

Fig. 9-4 Cooling capacity(HRS030--20-(BJMT)) 9.5 Heating capacity 9.5.1 HRS030-A-20-(BJMT) 1000 1000 Ambient Ambient temperatur temperatur 800 e e Heating capacityW 800 Heating capacityW 40 32 25 20 5 40 32 25 20 5 600 600 400 400 200 200 0 0 5 10 15 20 25 30 35 40 5 10 15 20 25 30 35 40 Circulating fluid temperature Circulating fluid temperature 50Hz 60Hz Fig. 9-5 Heating capacity(HRS030

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40 1

Description Material ML1C25G ML1C32G C-7 SO-015-24 SO-016-9 C-4 SO-010-16 C-6 AS568-048 TMY-32 RCS-10 GMY32 ML1C40G C-7 SO-020-31 SO-015-20 C-4 SO-010-16 C-8 C-150 TMY-40 RCS-12 GMY40 O-ring O-ring O-ring Needle gasket O-ring O-ring O-ring Tube gasket Cushion seal Piston seal Scraper Bypass gasket O-ring $6 $7 $8 $9 %0 %1 %2 %3 %4 %5 %6 %7 %8 NBR NBR NBR NBR NBR NBR NBR NBR NBR NBR NBR NBR

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40 1

Description Material ML1C25G ML1C32G C-7 SO-015-24 SO-016-9 C-4 SO-010-16 C-6 AS568-048 TMY-32 RCS-10 GMY32 ML1C40G C-7 SO-020-31 SO-015-20 C-4 SO-010-16 C-8 C-150 TMY-40 RCS-12 GMY40 O-ring O-ring O-ring Needle gasket O-ring O-ring O-ring Tube gasket Cushion seal Piston seal Scraper Bypass gasket O-ring $6 $7 $8 $9 %0 %1 %2 %3 %4 %5 %6 %7 %8 NBR NBR NBR NBR NBR NBR NBR NBR NBR NBR NBR NBR

MK

Note 3) When the rod is extended, the clamp stroke and rotary stroke are added to the appropriate dimensions. 4.1-18 Rotary Clamp Cylinder/Heavy Duty Series MK2 32, 40, 50, 63 MK/MK2 RSQ/RSG RSH CE1 CE2 ML2B Rear flange With arm Model E D C B G A C F A B F G D E Model ML1C 39 46 58 57.5 45 45 65 65 20 20 22 22 67 67 88 88 18 18 22 22 48 54 67 80 5.5 5.5 6.6 9 8 8 9 9 65 72 89 108 25 25 40

HRX-OM-W032

Heat exchanger Ventilation Circulating fluid Expansion E circuit valve A Expansion Inverter pump valve B Pump E Temp. sensor (Ref. discharge Ball tap Fluid level gauge TS Press. sensor Over flow port (Ref. low press.)

Large blow and

ZH--X185 Series Dimensions ZH10 20--X185 Fluid passage dia.: P Without bracket Air pressure supply (P) port Thread size: Q R J K Note 1) 4 x Sa Thread depth Sb 2 x L O H I N G A M Vacuum flow Dust bag When dust bag is mounted T F E D Suction air Discharge air Suction air U C C B Hose band V (mm) A 73 B 34 C 19 D 10 E 13.2 F 16.2 G 69.8 H 31 I J 35 K 27 L 4.5 M 35 N 18 O P 13 Q Rc1/8 R 28

Compact Guide Cylinder End Lock Type SeriesMGP

B + Stroke A + Stroke FA FB S HR E b a With front lock XAH7 c d e MO XB T-slot dimensions (mm) DM HN XAH7 XC XL Bore size (m) a b c d e End lock mechanism (locking type manual release ) 6.5 10.5 5.5 3.5 9.5 32 Section XX detailed diagram 6.5 10.5 5.5 4 11 40 8.5 13.5 7.5 4.5 13.5 50 11 17.8 10 7 18.5 63 LL With rear lock (mm) Standard strokes (mm) Bore size (mm) ML NN OA B C DA FA FB G GA

Compact Low Friction Cylinder Series MQQ ø10, ø16, ø20, ø25, ø30, ø40

C B H E F A B H Applicable bore size (mm) Applicable bore size (mm) Part no.

3 Port Solenoid Valve Metal Seal Series VZ200 1

Note 2) Based on JIS C 4003 Option Foot bracket (With screw) (1) Part no.

MXS Series Air Slide Table

Applicable model H G A B C J K E D F 16.5 MXS-AT6 5 MXS 6 7 10.5 2.5 21 19 8 5 M2.5 X 8 M5 X 0.8 MXS6, MXS8 26.5 MXS-AT6-X11 15 D 16.5 MXS-AT8 5 E E H MXS 8 M3 X 10 M6 X 1 8 12.5 3 25 9 6 22.5 26.5 MXS-AT8-X11 15 36.5 MXS-AT8-X12 25 5 G 20 MXS-AT12 MXS12 12 18.5 4 32 13 8 31 M4 X 8 M8 X 1 30 MXS-AT12-X11 15 B C 40 MXS-AT12-X12 25 24.5 MXS-AT16 5 F K K F A J MXS16 M5 X 10 M10 X 1 14 23 5 40

•

Unit 'k,gf Bore(mm) 40 50 53 IBasic weight 0.74 0.96 1.23 Cylinder ~ II / E E I Add itional weight per 25 stroke 0.10 0. 11 0.13 <100 // Single knuckle jOint 0.2 J> "V Double knuckle joint(With pin) 0.28 ~ ~ ~ 300 Limit switch mount 0.22 /~/ c E m Cam 0.12 Ii: 200 Special bracket 0.2 ~V Calculation method _ BaSIC weight . . ... . . 0.74 (40) 100 W :/ Example : CKI ()40-IOOY _ Additional

MLGC

Part No. 25 350, 400, 450, 500 75, 100, 125, 150, (Band and screw are included.) 32 350, 400, 450, 500, 600 Ball bushing bearing MLGCL 200, 250, 300 Bore size (mm) Auto switch model D-C7/C8 D-H7 D-B5/B6 D-G5/K5 D-B7/B8 D-G7/K7 40 350, 400, 450, 500, 600, 700, 800 20 25 32 40 BMA2 -020 BA -01 BA -02 BA -32 BA -04 BM1 -01 BM1 -02 BM1 -32 BM1 -04 Intermediate strokes and short strokes other

MLGC

Part No. 25 350, 400, 450, 500 75, 100, 125, 150, (Band and screw are included.) 32 350, 400, 450, 500, 600 Ball bushing bearing MLGCL 200, 250, 300 Bore size (mm) Auto switch model D-C7/C8 D-H7 D-B5/B6 D-G5/K5 D-B7/B8 D-G7/K7 40 350, 400, 450, 500, 600, 700, 800 20 25 32 40 BMA2 -020 BA -01 BA -02 BA -32 BA -04 BM1 -01 BM1 -02 BM1 -32 BM1 -04 Intermediate strokes and short strokes other

CG5-S

11 4 22 40 38.4 29 4 70.5 56 40 C type 10 for shaft 10 14 50, 63 IY-G04SUS 40 CG-E050SUS 9.6 41.6 36.2 1.55 1.15 40 12 15 5 25 50 59.6 35 6 106.5 84 50 C type 10 for shaft 14 22 80, 100 IY-G05SUS 50, 63 CG-E080SUS 13.4 50.6 44.2 2.05 1.15 60 14 23 6 40 80 87.2 57 9 144.5 120 80 C type 14 for shaft 18 IY-G08SUS 80 17 64 56.2 2.55 1.35 C type 18 for shaft 22 IY-G10SUS 100 21 72 64.2 2.55 1.35

VZS

Applicable cable O.D.: 3.5 to 7 (Reference) 0.5 mm2 2 core and 3 core wires equivalent to JIS C 3306.

Rodless Cylinder for Vacuum Series CYV ø15, ø32

Note 3) A particulate generation test has been conducted in a vacuum environment of 10-Pa. a t e l u g c 2 Stainless steel linear guide & low particulate generation vacuum grease e i t n r a e p r a 0.0 10 0 20 10 w t i o o n L Operation cycles a t e l u g c e 1 i t n r a e Particulate generation from the linear guide unit has been reduced with the use of a stainless steel linear guide and

With Factory Installed

S. l AR2001 2501 3001 : Max.3.5t :-t-tt ., AR4001 : Max.5.0t ~ I II; a -tp ort cenler (fJ ~ ~c=Pr r-IN j~ OUT f= 0 .bj=J ~ A * N P Q Bracket mounting dimensions Model Port size A B C 0 E F G H J K L M AR2001 1/8 1/4 40 95 17 40 35 30 34 44 5.4 15.4 55 2.3 33.5 25 8 33 AR2501 1/4 3/8 53 102.5 25 48 32 30 34 44 5.4 15.4 55 2.3 33.5 25 843 42.5 32.5

Rotary Cylinder Series MRQ Size: 32, 40 1

F: Angle adjustment range 5 E: Angle adjustment range 5 E: Angle adjustment range 5 B port Angle adjustment screw A port Clockwise rotation 0 8 0 e Allowable Lateral Load to the Piston Rod End gl 10 n a e nt gl e an m st t en u dj m a m st u ju m i in ad M Using friction fittings makes it easier to mount the load to the piston rod end.

MHL2

MHW2 19 MRHQ 8 25 43 Auto switch 9 Closed E 9 13 13 Open F A B C D E F G H 40 70 90 J 98 152 192 Model MHL2-16D MHL2-16D1 MHL2-16D2 45 75 95 60 90 110 28 58 78 68 110 130 98 170 210 128 200 240 26 50 70 Notes) J dimension is at fully closed position.

Modular Type Regulator Series AR

OUT IN OUT IN e q r r w w AR50, 60 AR30, 40 t q t q e e IN OUT IN OUT r w w r Parts list Material Note No.