70pvpump

(1) 5 to 55 Ambient temperature (C) 5 to 50 5 to 55 5 to 50 VC Outlet air atmospheric pressure dew point (C) 20 VDW Inlet air flow rate l/min (ANR) (2) 625 62 125 250 375 VQ Outlet air flow rate l/min (ANR) 50 100 200 300 500 VX2 Purge air flow rate l/min (ANR) (3) 12 25 50 75 125 VX Inlet air pressure (MPa) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080

CLK1

D-G5NTL 75 + 50 (n-2) 15 75 30.5 38 43 50 A B 0 (1) 0.5 2 2 D-A3 D-G3, D-K3 100 + 100 (n-2) 35 + 30 (n-2) 35 100 D-B5, D-B6 33.5 23.5 25 25 Approx. Hs 25.5 (28.5) 38 43.5 50.5 D-A4 35 + 30 (n-2) 50 + 50 (n-2) 35 55 A B 0 2 3.5 3.5 D-G5NTL 27 25 26.5 26.5 Approx. Hs 33.5 38 43.5 50.5 A B 0 1.5 1.5 D-A3 D-G3, D-K3 23 24.5 24.5 Approx.

EX510-GDN1.eng

COM C COM C is receiving data: Lights up COM C is having no data to receive: Goes off COM D COM D is receiving data: Lights up COM D is having no data to receive: Goes off : It is lit when input unit is connected and communicating normally. 19 18 Display/ Switch Setting (continued) Switch setting Make sure that switch setting is performed with power supply turned off.

EX510-GPR1.eng

COM C COM C is receiving data: Lights up 2 COM C is having no data to receive: Goes off A. For separate power supply use B. For single power supply use COM D COM D is receiving data: Lights up 2 COM D is having no data to receive: Goes off 1: Refer to "Operation Manual" for the extension diagnosis information. 2: It is lit when input unit is connected and communicating normally.

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

VT VP How to Order Manifold Assembly (Example) VG VP D side U side 1 3 4 5 Stations VQ VQZ215-5L 4set VQZ 2 VV3QZ25-05C6C 1 set (C kit 5 stations manifold base) VVQZ200-10A-5 1 set (Blank plate assembly) VQZ215-5L 4 sets (Single solenoid) VZ VS Prefix "" mark to valves etc.to be assembled on the manifold. Write sequentially from the 1st station on the D side.

This is a legacy product, and replaced byCY1SG15-210BZ-M9NL, CYL, RODLESS, SLIDER, SW CAP, ACTUATOR, CY1S GUIDED CYLINDER, GM, 15MM CY1S SLIDE BEARING, 3.41844 lb

Motor: 2-Phase Stepping Motor, Thread Lead: 5mm, Stroke: 150mm, Origin Switch: Yes (Cable Length 0.3m), Brake: No, Auto Switch: M9NL--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, 3M, Number: 1 pc.

Motor: 2-Phase Stepping Motor, Thread Lead: 5mm, Stroke: 150mm, Origin Switch: No, Brake: No, Auto Switch: M9NL--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, 3M, Number: 2 pcs.

Motor: 2-Phase Stepping Motor, Thread Lead: 2mm, Stroke: 175mm, Origin Switch: Yes (Cable Length 0.3m), Brake: w/Motor Brake, Auto Switch: M9NL--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, 3M, Number: 1 pc.

Motor: 2-Phase Stepping Motor, Thread Lead: 2mm, Stroke: 200mm, Origin Switch: Yes (Cable Length 0.3m), Brake: w/Motor Brake, Auto Switch: M9NL--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, 3M, Number: 1 pc.

Motor: 2-Phase Stepping Motor, Ball Screw Lead: 12mm, Stroke: 200mm, Home Position Switch: Yes (Cable Length 0.3m), Brake: w/Motor Brake, Auto Switch: M9NL--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, 3M, Number: 3 pcs.

Motor: 2-Phase Stepping Motor, Ball Screw Lead: 6mm, Stroke: 200mm, Home Position Switch: Yes (Cable Length 0.3m), Brake: None, Auto Switch: M9NL--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, 3M, Number: 2 pcs.

Motor: 2-Phase Stepping Motor, Ball Screw Lead: 6mm, Stroke: 50mm, Home Position Switch: Yes (Cable Length 0.3m), Brake: None, Auto Switch: M9NL--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, 3M, Number: 1 pc.

Motor: 5-Phase Stepping Motor, Ball Screw Lead: 6mm, Stroke: 150mm, Home Position Switch: Yes (Cable Length 0.3m), Brake: w/Motor Brake, Auto Switch: M9NL--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, 3M, Number: 2 pcs.

Motor: 5-Phase Stepping Motor, Ball Screw Lead: 6mm, Stroke: 50mm, Home Position Switch: Yes (Cable Length 0.3m), Brake: w/Motor Brake, Auto Switch: M9NL--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, 3M, Number: 2 pcs.

Motor: 2-Phase Stepping Motor, Ball Screw Lead: 6mm, Stroke: 175mm, Home Position Switch: Yes (Cable Length 0.3m), Brake: w/Motor Brake, Auto Switch: M9NL--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, 3M, Number: 2 pcs.

Motor: 2-Phase Stepping Motor, Ball Screw Lead: 6mm, Stroke: 50mm, Home Position Switch: None, Brake: None, Auto Switch: M9NL--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, 3M, Number: 2 pcs.

Motor: 2-Phase Stepping Motor, Ball Screw Lead: 12mm, Stroke: 100mm, Home Position Switch: Yes (Cable Length 0.3m), Brake: None, Auto Switch: M9NL--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, 3M, Number: 2 pcs.

Motor: 2-Phase Stepping Motor, Ball Screw Lead: 12mm, Stroke: 50mm, Home Position Switch: Yes (Cable Length 0.3m), Brake: w/Motor Brake, Auto Switch: M9NL--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, 3M, Number: 1 pc.

Motor: 2-Phase Stepping Motor, Ball Screw Lead: 12mm, Stroke: 50mm, Home Position Switch: Yes (Cable Length 0.3m), Brake: w/Motor Brake, Auto Switch: M9NL--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, 3M, Number: 2 pcs.