Table of Contents

2 Aluminum Diffuser ZYY3000-NPA Non plug assembly t !3 Stainless steel Needle y Aluminum Spool u Resin Piston i 13-8-10 11 Ejector Valve Unit Series ZYY/ZYX Construction ZYX3000 EXH. ZX B B' A B ZR A B P1 A A' ZM !

Air Cylinder

CS2 D-X Technical Data 207 CM2 Series Construction Spring return t y !1 q !3 o e i !0 r !5 @0 !6 !4 @ A !7 !9 !8 @ B @ C Boss-cut Integrated clevis Spring extend t !2 u @1 y q !3 r !5 @0 !6 !0 i e o !4 !1 @ A !9 !8 @ B @ C !7 Boss-cut Integrated clevis Component Parts No.

Air Pilot Operated

@nl6l t dory. DITENSIONS A B c D E F o H J t( T N o P B s r u 3.43 (87) 2.

Process Valve Series VNA

Valve size 1: VN1-A16 (with thread) Valve sizes 2 to 4: VN-16 Nil F N T A B C NBR seals FKM seals EPR seals Nil B Note) None With bracket Refer to Table (1) for availability.

Series VQ Base Mounted Metal Seal/Rubber Seal

A B A B A Void A Void A B A B A B A A A B Double Double Double Double Double SY Sl unit Sl unit Single Single Single Single Single SYJ Stations Stations 1 2 3 4 5 1 2 3 4 5 Single/Double mixed wiring (Option) Double wiring (Standard) SX SC applicable to SYSBUS Wire System (OMRON) SD applicable to Satellite I/O Link System (Sharp) VK VZ ADDRESS NO. STATION NO.

Aluminum High Vacuum Angle Valve

0 Body Valve side exhaust Refer to the back of page 465 for Maintenance Parts. 457 XLS Series Dimensions XLS/Without control power supply D E D F L J K 2 J K L 270 10 290 10 M J K J 33 25 C B 39 G G1/2 G1/2 C B B C A B C 6 to 9 G1/2 A DIN terminal (D) Terminal (T) Conduit (C) Grommet (G) XLS/With control power supply 41 26 J K 530 10 72 OPERATION V INPUT C B L (mm) Grommet (G) A B C

Rotary Actuator/Vane Style Series CRB1

Key Position and Rotation Range Single vane type Double vane type 90 180 270 90 n o r ti n a r o a a ti n n a g n o t r g a ti o t n e a e o g t r o r e 2 1 r y y 7 9 8 y e e 0 0 e Key 0 K K K + 4 0 + 4 0 + 4 0 + 4 0 Key Key (45) 0 9 Standard Option Key e g n a r n o ti a t o r (90) y e K (45) (45) A port B port A port A port A port B port B port B port 100 190 280 100 n r a o n r a o

LEC-OM02704CN

a T b 0 [ r/min] T s S PC13) T a T b Ts 0~1000ms T a Ts T b 6.3.4 MR Configurator 6PC18( ) PC18()0 PC18 0 0 0 0 1 6.3.5 PC11()(RXn2) 065535[10STMm] PC11 ( 10 STM m) ON O FF ( RXn2 ) ON O FF RXnC 6 28 6 6.3.6 (PC31PC34) ON (A37) 6 29 6 6.4 (PD) 6.4.1 PD01 *DIA1 ON1 0h PD02 0h PD03 *DIA3 ON3 0h PD04 *DIA4 ON4 0h PD05 0h PD06 *DI2 2(CN6-2) 002Bh PD07 *DI3 3(CN6-3) 000Ah

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

Adjusting direction B: When angle adjusting screw on B side is screwed into the right direction.

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P A Q R Conduit T DIN terminal Conduit terminal E D B C F H N.C.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

CQP2 B J79W S 50 10 T CDQP2 B With auto switch Number of auto switches Built-in magnet Auto switch 2 pcs. 1 pc. n pcs.

MG

Stroke C + Stroke B + Stroke A + Stroke WA Z JB 6H7 depth 10 FB FA S K E G With head end lock 7 6H7 HN 10 5 6H7 DM 23 b a Detailed figure of section XX T-slot dimensions e c d End lock mechanism (Manual release lock type) 30 Bore size (mm) e d c a b With rod end lock 80 22.5 8 12 13.3 20.3 100 30 10 13.5 15.3 23.3 Standard stroke (mm) Bore size (mm) B C DA FA FB G GA GB GC H HA J JA JB K

Title not found

.O (r) aol O Gl ,9 .rO ";p:* Stroke Variations Long strokes up to 400mm standardized. a.l)compact guide cytinder QlBore size @pon typ. l t t t l t t t l l 7 5 _ _ t t t t t t t t t l l t t t l t t t l l t t r t t t t t t l r t t t t t t t t l 1't5 l t t t t r r r r l r t t t r r t t l l z a n * For bore s zes 12 & 16 onyM5x0SisavailaHe Befer to lable al eft for delats Ocylinder stroke (mm

Smooth Cylinder/Low Speed Cylinder

Applicable bore size (mm) 32, 40 50, 63 80 100 Dd9 B C H d m t d L1 Part no.

SYJ3000/5000/7000

SUP spacer assembly ARBYJ5000-00-P Thread type A, B port size A, B port 1/8, C6 Nil F N T Rc G NPT NPTF P port 1/4 01 1/8 One-touch fitting for 6 C6 N7 One-touch fitting for 1/4" Type 43 (5 Port/Base mounted) How to Order SS5YJ5 43 05 C4 Stations -+ -+ A B 02 2 stations P, R port thread type R port 1/8 : : R P 20 A, B port C4 20 stations Nil F N T Rc G NPT NPTF P port 1/8 A, B port size

Single Axis Electric Actuator Series LJ1H

Nil W Axial Right Left Top Bottom F R L T B Cable length Motor specification 2m 3m 4m 5m 2 3 4 5 Motor output Standard motor Matsushita Electric Industrial Co., Ltd.

1.1

Q = m x C x (Tt T0) t Q = m x C x (Tt T0) t x 860 = x V x C x T t = x V x 60 x C x T t x 860 = 1 x 60 x 4.2 x 12 900 = 3.36 [kJ/s] 3.4 [kW] = 1 x 60 x 60 x 1.0 x 12 15 x 860 Cooling capacity = Considering a safety factor of 20%, 3.4 [kW] x 1.2 = 4.08 [kW] = 3.4 [kW] 2880 [kcal/h] 860 Thermo-cooler Q x t: Heat volume [kJ] Cooling capacity = Considering a safety factor of 20%, 3.4 [kW

ALF400 to 900, ALT-5/-9

u b i r t s i D l i O l e d o M s t e l t u o l i o f o r e b m u N k r a m e R 4 A V 4 s d n e h t o B 6 A V 6 s d n e h t o B Dimensions/Auto feed tank 0 1 A V 0 1 s d n e h t o B 6 1 A V 6 1 s d n e h t o B 4 B V 4 e d i s e n O 6 B V 6 e d i s e n O 8 B V 8 e d i s e n O s n o i t a c i f i c e p S h c t i w S t a o l F n o i t p i r c s e D 2 ~ 1 0 1 4 S I y t i c a p a C W 5 1 : C D

Free Mount Cylinder Series CU

(g) Stroke (mm) Model 15 10 5 C(D)U6-S,T C(D)U10-S,T C(D)U16-S,T C(D)U20-S,T C(D)U25-S,T C(D)U32-S,T 28 (38) 25 (35) 22 (27) 48 (58) 40 (50) 36 (41) 71 (101) 56 (86) 50 (75) 133 (170) 106 (143) 95 (128) 235 (294) 193 (252) 176 (230) 347 (425) 286 (364) 262 (335) For the mass of auto switch, refer to page 1263.

Air Cylinder Series CM2

D C H B Clevis Pin (For CLM2E) (mm) Applicable bore size 20 25, 32 40 D d H B C Part no. SN-020B SN-032B SN-040B Material: Carbon steel 8 26 M20 x 1.5 30 25.5 d D 8 32 M26 x 1.5 37 31.5 10 41 M32 x 2.0 47.3 40.5 l m m t t L Trunnion Nut (mm) Part no. Applicable retaining ring part no.